Platform adjusting assembly of vibration isolation platform frame and vibration isolation platform frame thereof

Abstract

The utility model discloses a platform adjusting assembly of a vibration isolation platform frame and the vibration isolation platform frame. A vibration isolation platform (30) of the vibration isolation platform frame is assembled to a support (20) through an air spring (40). The platform adjustment assembly comprises a sensor device (12) and a trigger (13). The sensor device is assembled on the support and comprises a first sensor arranged at a first height position and a second sensor arranged at a second height position in sequence from low to high in the height direction. The triggering piece is assembled on the vibration isolation platform and can move along with the vibration isolation platform, when the triggering piece reaches a first height position, the triggering piece can trigger the first sensor in a non-contact mode to output a first triggering signal for controlling air inflation of the air spring, and when the triggering piece reaches a second height position, the triggering piece outputs a second triggering signal. The triggering piece can trigger the second sensor in a non-contact mode to output a second triggering signal for controlling the air spring to stop inflating. The working condition of the air spring is fed back in a non-contact mode, it can be guaranteed that the air spring works stably, and the service life is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to a platform height adjusting device, in particular to a platform adjusting assembly of a vibration isolation platform frame. BACKGROUND

[0002] The vibration isolation platform frame is a device that can isolate vibration and is widely used in various fields, especially in some technical fields that require precise measurement, such as the field of electron microscopes, where subtle vibrations caused by any reason should be avoided as much as possible to avoid affecting the observed data or images.

[0003] In the prior art, the vibration isolation platform frame includes a support, a vibration isolation platform, and an air spring. The vibration isolation platform is assembled to the support through the air spring, and the air spring after being inflated is used to achieve the vibration isolation effect of the vibration isolation platform. However, in order to accurately and quickly control the air intake amount of the air spring, some mechanical structures are usually designed in the prior art to obtain the working condition of the air spring, which inevitably causes rigid contact between the vibration isolation platform and the support, thereby causing undesirable vibration effects on the equipment on the vibration isolation platform.

[0004] In addition, in some special cases, such as when the air spring leaks, if emergency measures cannot be quickly implemented, rigid contact between the vibration isolation platform and the support after the air spring leaks will also occur, which cannot ensure the vibration isolation effect of the vibration isolation platform, especially in the case of continuous observation using an electron microscope, which will inevitably cause undesirable vibration effects on the observed data and images. SUMMARY

[0005] To solve the above problems, the present application discloses a platform adjusting assembly of a vibration isolation platform frame, which uses a non-contact method to feedback the working condition of the air spring, can avoid vibration caused by direct rigid contact, and can ensure stable operation of the air spring and improve the service life of the air spring.

[0006] The present application also discloses a vibration isolation platform frame having the above platform adjusting assembly.

[0007] In order to achieve the above purpose, the present application adopts the following technical solutions:

[0008] The application provides a platform adjusting assembly of a vibration isolation platform frame. The vibration isolation platform frame comprises a support, a vibration isolation platform and an air spring. The vibration isolation platform is assembled to the support through the air spring, and the relative height between the vibration isolation platform and the support is changed based on the air spring. The platform adjusting assembly comprises a sensor device and a trigger. The sensor device is assembled to the support. The sensor device comprises a first sensor arranged at a first height position and a second sensor arranged at a second height position in sequence from low to high in the height direction. The trigger is assembled to the vibration isolation platform and can move with the vibration isolation platform. When reaching the first height position, the trigger can non-contact trigger the first sensor to output a first trigger signal for controlling the air spring to inflate. When reaching the second height position, the trigger can non-contact trigger the second sensor to output a second trigger signal for controlling the air spring to stop inflating.

[0009] After the above structure is adopted, the air pressure in the air spring can be monitored at all times, so that the support force generated by the air pressure in the air spring and the gravity can be kept in a balanced state at all times, and the vibration isolation effect of the air spring is ensured. In the whole process, since the trigger of the trigger to the sensor device is non-contact, direct rigid contact between the vibration isolation platform and the support can be completely avoided, and vibration caused by the direct rigid contact can be completely avoided. After two trigger positions are arranged, the lower height trigger position can ensure that the air spring always has a basic inflation amount, even if the air spring has a leakage condition, the air spring can still have a certain inflation amount. The higher height trigger position can be used to control the air spring to be in a better working position, so as to avoid problems such as unstable work of the air spring, reduced service life and the like caused by the air spring rising to a too high position.

[0010] In a schematic embodiment of the platform adjusting assembly of the vibration isolation platform frame, the platform adjusting assembly further comprises an initial height adjusting member, which can be assembled to the vibration isolation platform. The trigger is assembled to the vibration isolation platform through the initial height adjusting member, and the trigger is movably arranged in the initial height adjusting member to adjust the initial height distance of the trigger relative to the second height position.

[0011] The design can be used to limit the floating height of the air spring, so as to control the air spring to be in a better working range. In the case that there are multiple platform adjusting assemblies and multiple air springs, the design can be used to make the floating heights of the air springs consistent, so as to ensure that the working plane of the vibration isolation platform is kept in a horizontal state.

[0012] In a schematic embodiment of the platform adjusting assembly of the vibration isolation platform frame, the initial height adjusting member comprises a fixing seat, which can be assembled to the vibration isolation platform. One of the fixing seat or the trigger is provided with a track, and the other of the fixing seat or the trigger can be connected to the track and move relative to the track. The above structure is simple and reliable, and convenient to operate.

[0013] In an illustrative embodiment of the platform adjusting assembly of the vibration isolation platform, the fixed base is provided with a track, which is a long hole arranged in the height direction. The trigger member is provided with a sliding part capable of being connected to the long hole.

[0014] In an illustrative embodiment of the platform adjusting assembly of the vibration isolation platform, the initial height adjusting member further comprises a positioning member and an adjusting bolt. The positioning member is arranged on the fixed base. The adjusting bolt is arranged in the positioning member and is capable of being threadedly connected to the trigger member. The trigger member can be moved along the track by rotating the adjusting bolt. The above design makes the overall structure simple and stable. The trigger member can be raised or lowered to any position along the track by rotating the adjusting bolt.

[0015] In an illustrative embodiment of the platform adjusting assembly of the vibration isolation platform, the first sensor and the second sensor are photoelectric sensors.

[0016] In an illustrative embodiment of the platform adjusting assembly of the vibration isolation platform, the first sensor comprises a first signal transmitter and a first signal receiver arranged at the same height. The second sensor comprises a second signal transmitter and a second signal receiver arranged at the same height. The trigger member is a shielding piece. The shielding piece triggers the first sensor to output a first trigger signal when it blocks the first signal transmitter and the first signal receiver. The shielding piece triggers the second sensor to output a second trigger signal when it blocks the second signal transmitter and the second signal receiver.

[0017] The present application also provides a vibration isolation platform, which comprises a support, a plurality of air springs, a vibration isolation platform and a platform adjusting assembly. The plurality of air springs are arranged on the support. The vibration isolation platform is assembled to the air springs. In the platform adjusting assembly, a sensor device is assembled to the support, and a trigger member is assembled to the vibration isolation platform and can move with the vibration isolation platform. The working condition of the air springs is fed back in a non-contact manner, which can avoid vibration caused by direct rigid contact and ensure stable working of the air springs and improve the service life of the air springs.

[0018] In an illustrative embodiment of the vibration isolation platform, the vibration isolation platform comprises four air springs and three platform adjusting assemblies. The installation positions of the four air springs constitute four vertices of a rectangle. One platform adjusting assembly is arranged at the middle position between two adjacent air springs and can control inflation or stop of inflation of the two air springs. The other two platform adjusting assemblies are arranged corresponding to the other two air springs and control inflation or stop of inflation of the corresponding air springs. The above structure can ensure that the floating heights of the four air springs are consistent, so that the vibration isolation platform works more stably.

[0019] In one exemplary embodiment of the vibration isolation platform, the mounting positions of the three platform adjustment assemblies form three vertices of an isosceles triangle. This configuration further ensures that the four air springs maintain a consistent float height. BRIEF DESCRIPTION OF DRAWINGS

[0020] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are included to provide a better understanding of the preferred embodiments, and are not intended to be limiting of the application. Moreover, in the drawings, like reference numerals denote similar parts throughout the several views. In the drawings:

[0021] Figure 1 An exploded view of one exemplary embodiment of the vibration isolation platform, and a schematic view of the mounting positions of the platform adjustment assemblies of the vibration isolation platform.

[0022] Figure 2 A schematic view of Figure 1 An assembled top view of the vibration isolation platform, and a schematic view of the mounting positions of the platform adjustment assemblies of the vibration isolation platform from a top perspective.

[0023] Figure 3 A schematic view of one exemplary embodiment of the platform adjustment assembly of the vibration isolation platform.

[0024] Figure 4 An exploded view of the initial height adjustment member and the trigger member of the platform adjustment assembly. Figure 3

[0025] 10 platform adjustment assembly

[0026] 12 sensor device

[0027] 122 first sensor

[0028] 123 second signal transmitter

[0029] 124 second sensor

[0030] 125 second signal receiver

[0031] 13 trigger member

[0032] 136 sliding portion

[0033] 16 initial height adjustment member

[0034] 162 fixed seat

[0035] 163 track

[0036] 164 positioning member

[0037] ​165 adjustment bolt

[0038] 20 bracket

[0039] 30 vibration isolation platform

[0040] 40 air spring DETAILED DESCRIPTION

[0041] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described clearly and completely below with reference to the embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0042] In the present document, "illustrative" means "serving as an instance, example, or illustration" and should not be construed as preferred or advantageous over other technology.

[0043] In order to make the drawings simple, only the parts related to the present application are schematically shown in the drawings, which do not represent the actual structure of the product. In addition, in order to make the drawings simple and easy to understand, in some drawings, only one of the parts with the same structure or function is schematically shown, or only one of them is marked.

[0044] The technical solutions provided by the embodiments of the present application will be described in detail below with reference to the drawings.

[0045] Figure 1 An exploded structural schematic diagram of an illustrative embodiment of a vibration isolation platform frame, and an assembled state schematic diagram of a platform adjustment assembly of the vibration isolation platform frame. Figure 2 An exploded structural schematic diagram of an illustrative embodiment of a vibration isolation platform frame, and an assembled state schematic diagram of a platform adjustment assembly of the vibration isolation platform frame. Figure 1 An assembled top view of the vibration isolation platform frame, and an assembled position schematic diagram of the platform adjustment assembly of the vibration isolation platform frame in a top view.

[0046] As shown in Figure 1 and Figure 2 The vibration isolation platform frame includes a bracket 20, a vibration isolation platform 30, and an air spring 40. The vibration isolation platform 30 can be assembled to the bracket 20 through the air spring 40, and the relative height between the vibration isolation platform 30 and the bracket 20 can be changed based on the air spring 40, and the vibration isolation effect of the vibration isolation platform can be realized through the air spring 40.

[0047] In Figure 1 and Figure 2The vibration isolation platform frame shown also includes a platform adjustment assembly 10, which comprises a sensor device 12 and a trigger 13. The sensor device 12 is assembled on the support 20 and is normally in a fixed state; while the trigger 13 is assembled on the vibration isolation platform 30. When the vibration isolation platform 30 moves relative to the support 20 based on the air spring 40, the trigger 13 moves along with the vibration isolation platform.

[0048] To better understand the specific structure of the sensor device 12 and the trigger element 13, please also refer to... Figure 3 , Figure 3 A schematic diagram illustrating one possible implementation of the platform adjustment component. For example... Figure 3 As shown, the sensor device 12 includes a first sensor 122 and a second sensor 124, which are arranged sequentially from low to high. The first sensor 122 is positioned at a relatively low first height position, and the second sensor 124 is positioned at a relatively high second height position. When the trigger 13 moves with the vibration isolation platform 30 (see [link to vibration isolation platform structure]...), Figure 1 and Figure 2 )along Figure 3 When the trigger 13 moves downwards or upwards in the direction indicated by the middle arrow, it may reach a lower first height position. At this time, the trigger 13 will non-contactly trigger the first sensor 122, causing the first sensor 122 to output a first trigger signal. This first trigger signal can be output to the air spring 40 (see...). Figure 1 and Figure 2 The air intake valve (not shown in the figure) controls the inflation of the air spring 40. After the air spring 40 is inflated, it will drive the vibration isolation platform 30 to rise until it reaches a higher second height position. At this time, the trigger 13 will non-contactly trigger the second sensor 124 to make the second sensor 124 output a second trigger signal. This second trigger signal can also be output to the air spring 40 (see Figure 120). Figure 1 and Figure 2 The air intake valve (not shown in the figure) controls the air spring 40 to stop inflating.

[0049] With the above structure, the air pressure in the air spring can be monitored at all times, ensuring that the supporting force generated by the air pressure in the air spring and the weight it bears can always be kept in balance, thus guaranteeing the vibration isolation effect of the air spring. Throughout the process, since the trigger 13 triggers the tactile sensor 12 in a non-contact manner, direct rigid contact between the vibration isolation platform 30 and the support 20 can be completely avoided, thus completely preventing vibration caused by direct rigid contact.

[0050] In addition, the application controls the inflation or stop of the air spring 40 by two trigger positions, so that the air spring 40 can work more stably. The trigger position of the lower height (the first height position) can ensure that the air spring always has a basic inflation amount, even if the air spring 40 has a leakage condition. When the trigger piece 13 reaches the first height position, the air spring 40 is triggered to inflate, so that the air spring still has a certain inflation amount, and the isolation platform is kept in a stable working state. The trigger position of the higher height (the second height position) can be used to control the air spring to be in a better working position, so as to avoid the problems of unstable work and reduced service life of the air spring due to the air spring rising to a too high position.

[0051] In the embodiment shown in Figure 3 , the first sensor 122 and the second sensor 124 can be photoelectric sensors, for example, the first sensor 11 is composed of a first signal emitter and a first signal receiver (blocked in the figure), and the second sensor 124 is composed of a second signal emitter 123 and a second signal receiver 125. In the working state, the photoelectric signal emitted by the first signal emitter is directly received by the first signal receiver, and the photoelectric signal emitted by the second signal emitter 123 is directly received by the second signal receiver. The corresponding trigger piece can be a shielding piece. When the shielding piece moves to the first height position to block the first signal receiver from receiving the photoelectric signal emitted by the first signal emitter, the first sensor 122 is triggered to output a first trigger signal. When the shielding piece moves to the second height position to block the second signal receiver from receiving the photoelectric signal emitted by the second signal emitter, the second sensor 124 is triggered to output a second trigger signal. Of course, according to different design needs, the first sensor 122 and the second sensor 124 can also use other types of non-contact sensors.

[0052] In the embodiment shown in Figures 1 to 3 , the platform adjusting assembly 10 further comprises an initial height adjusting piece 16, which can be assembled to the isolation platform 30. The trigger piece 13 is assembled to the isolation platform 30 through the initial height adjusting piece 16, and the trigger piece 13 is movably arranged on the initial height adjusting piece 16, that is, the position of the trigger piece 13 relative to the isolation platform 30 can be changed. The platform adjusting assembly 10 with this function can, after the entire isolation platform frame is assembled and before the air spring 40 is inflated, adjust the position of the trigger piece 13 to limit the positional relationship between the trigger piece 13 and the first sensor 122 and the second sensor 124, especially to adjust the initial height distance between the trigger piece 13 and the second height position where the second sensor 124 is located. The height distance (the distance between the trigger piece 13 and the second height position) can be used to limit the floating height of the air spring, and control the air spring 40 to be in a better working range.

[0053] In addition, as shown in Figure 2 different platform adjusting assemblies 10 can be used to control different air springs 40. After assembly, the initial height of each corresponding trigger 13 can be adjusted by the initial height adjusting member 16, so that the floating height of each air spring 40 is consistent, and the working plane of the vibration isolation platform is kept in a horizontal state.

[0054] In Figure 3 the embodiment shown, the initial height adjusting member 16 includes a fixing seat 162, which can be assembled to the vibration isolation platform 30. Please also refer to Figure 4 , Figure 4 is an exploded structural schematic view of the initial height adjusting member 16 and the trigger 13 in Figure 3 . As shown in Figure 4 , the fixing seat 162 is provided with a track 163, and the trigger 13 can be connected to the track 163 and can move relative to the track. Specifically, Figure 4 the track 163 in is a long hole provided on the fixing seat 162 in the height direction, and the trigger 13 is correspondingly provided with a sliding part 136 which can be connected to the long hole. The above structure is simple and reliable, and easy to operate.

[0055] Of course, for those skilled in the art, the track 163 of the fixing seat 16 of the initial height adjusting member 16 can not be limited to the long hole structure according to different design needs. In addition, the connection structure of the initial height adjusting member 16 and the trigger can also be completely different. For example, a track structure can also be provided on the trigger 13, so that the fixing seat 162 can be connected to the track and move relative to the track.

[0056] In Figure 4 the embodiment shown, the initial height adjusting member 16 further includes a positioning member 164 and an adjusting bolt 165. The positioning member 164 is provided on the fixing seat 162 and can be integrally connected with the fixing seat 162 or detachably connected. The adjusting bolt 165 is threaded through the positioning member 164, and the adjusting bolt 165 can also be threaded to the trigger 13 along the dashed line in the drawing. By rotating the adjusting bolt 165, the trigger 13 can be moved along the track 163.

[0057] The above structure is designed in cooperation with the track 163, so that the overall structure is simple and stable. By rotating the adjusting bolt 165, the trigger 13 can be raised or lowered to any position along the track 163. Then, during actual use, additional fastening bolts can also be used to help the trigger 13 to be positioned at the adjusted position.

[0058] The application also provides a vibration isolation platform, please refer to Figure 1 and Figure 2As shown in the drawings, the vibration isolation platform frame comprises a support 20, a plurality of air springs 40, a vibration isolation platform 30 and the platform adjusting assembly 10. The plurality of air springs 40 are arranged on the support 20, and the vibration isolation platform 30 is assembled to each air spring 40. The sensor device 12 of the platform adjusting assembly 10 is assembled to the support 20, and the trigger 13 is assembled to the vibration isolation platform 30 and can move with the vibration isolation platform 30.

[0059] With the above structure, the air pressure in the air spring can be monitored at all times, so that the support force generated by the air pressure in the air spring and the gravity can be kept in a balanced state at all times, thereby ensuring the vibration isolation effect of the air spring. During the whole process, since the triggering of the trigger 13 to the sensor device 12 is non-contact, direct rigid contact between the vibration isolation platform 30 and the support 20 can be completely avoided, and vibration caused by direct rigid contact can be completely avoided. In addition, the inflation or stop of inflation of the air spring 40 can be controlled by the two trigger positions, so that the operation of the air spring 40 can be more stable.

[0060] In the embodiment shown in Figure 1 and Figure 2 , the vibration isolation platform frame comprises four air springs 40 and three platform adjusting assemblies 10. The installation positions of the four air springs 40 form four vertices of a rectangle, as shown in Figure 2 , Figure 2 The platform adjusting assembly 10 at the top of the drawings is arranged at the middle position of the two air springs 40 adjacent to the top of the drawings and can control the inflation or stop of inflation of the two air springs 40 at the top of the drawings. The platform adjusting assembly 10 at the lower left of the drawings is arranged corresponding to the air spring 40 at the lower left of the drawings and can control the inflation or stop of inflation of the air spring 40. The platform adjusting assembly 10 at the lower right of the drawings is arranged corresponding to the air spring 40 at the lower right of the drawings and can control the inflation or stop of inflation of the air spring 40. In the embodiment shown in Figure 2 Figure 2 , the installation positions of the three platform adjusting assemblies 10 form three vertices of an isosceles triangle.

[0061] The above structure can ensure that the floating heights of the four air springs 40 remain consistent, so that the vibration isolation platform frame can operate more stably.

[0062] The above description is only a specific embodiment of the present application, and those skilled in the art can make other improvements or modifications on the basis of the above embodiments under the above teaching of the present application. Those skilled in the art should understand that the above specific description is only for better explanation of the purpose of the present application, and the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A platform adjustment assembly for a vibration isolation platform frame, the vibration isolation platform frame comprising: The system comprises a support frame (20), a vibration isolation platform (30), and an air spring (40). The vibration isolation platform (30) is assembled to the support frame (20) via the air spring (40), and the relative height between the vibration isolation platform (30) and the support frame (20) is changed based on the air spring (40). The platform adjustment component (10) is characterized in that it comprises: A sensor device (12), assembled on the bracket (20), the sensor device (12) comprising a first sensor (122) arranged sequentially from low to high in the height direction at a first height position and a second sensor (124) arranged at a second height position; and The trigger (13) is assembled on the vibration isolation platform (30) and can move together with the vibration isolation platform (30). When it reaches the first height position, the trigger (13) can non-contactly trigger the first sensor (122) to output a first trigger signal to control the air spring (40) to inflate. When it reaches the second height position, the trigger (13) can non-contactly trigger the second sensor (124) to output a second trigger signal to control the air spring to stop inflating.

2. The platform adjustment component as described in claim 1, characterized in that, The platform adjustment component (10) further includes: An initial height adjustment member (16) is assembled to the vibration isolation platform (30), and the trigger member (13) is assembled to the vibration isolation platform (30) via the initial height adjustment member (16). The trigger member (13) is movably disposed on the initial height adjustment member (16) so as to adjust the initial height distance of the trigger member (13) relative to the second height position.

3. The platform adjustment component as described in claim 2, characterized in that, The initial height adjustment component (16) includes a fixing base (162) that can be assembled to the vibration isolation platform (30). One of the fixed base (162) or the trigger (13) is provided with a track (163), and the other of the fixed base (162) or the trigger (13) can be connected to the track (163) and move relative to the track.

4. The platform adjustment component as described in claim 3, characterized in that, The fixing base (162) is provided with the track (163), and the track (163) is an elongated hole arranged along the height direction. The trigger (13) is provided with a sliding part (136) that can pass through and connect to the elongated hole.

5. The platform adjustment component as described in claim 3, characterized in that, The initial height adjustment component (16) also includes: The positioning element (164) disposed on the fixed base (162): and An adjusting bolt (165) is inserted through the positioning member (164). The adjusting bolt (165) can also be threaded to the trigger member (13). By rotating the adjusting bolt (165), the trigger member (13) can be driven to move along the track (163).

6. The platform adjustment component as described in claim 1, characterized in that, The first sensor (122) and the second sensor (124) are photoelectric sensors.

7. The platform adjustment component as described in claim 6, characterized in that, The first sensor (122) includes a first signal transmitter and a first signal receiver disposed at the same height; The second sensor (124) includes a second signal transmitter and a second signal receiver disposed at the same height; The trigger (13) is a blocking plate. When the blocking plate blocks the first signal transmitter and the first signal receiver, it triggers the first sensor (122) to output the first trigger signal. When the blocking plate blocks the second signal transmitter and the second signal receiver, it triggers the second sensor (124) to output the second trigger signal.

8. A vibration isolation platform frame, characterized in that, The vibration isolation platform frame includes: Scaffold (20); Multiple air springs (40) are respectively disposed on the bracket (20); Vibration isolation platform (30), said vibration isolation platform (30) is assembled to each of said air springs (40); and The platform adjustment assembly (10) as described in any one of claims 1 to 7, wherein the sensor device (12) is assembled on the bracket (20), and the trigger (13) is assembled on the vibration isolation platform (30) and is capable of moving with the vibration isolation platform (30).

9. The vibration isolation platform frame as described in claim 8, characterized in that, The vibration isolation platform frame includes four air springs (40), and the installation positions of the four air springs (40) form the four vertices of a rectangle; The vibration isolation platform frame includes three platform adjustment components (10), one of which is located in the middle of two adjacent air springs (40) and can control the inflation or de-inflation of the two air springs (40). The other two platform adjustment components (10) are respectively located for the other two air springs (40) and control the inflation or de-inflation of the corresponding air springs (40).

10. The vibration isolation platform frame as described in claim 9, characterized in that, The installation positions of the three platform adjustment components (10) form the three vertices of an isosceles triangle.

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