Magnetic suspension vibration isolation device

Abstract

The utility model provides a magnetic suspension vibration isolation device, which belongs to the technical field of magnetic suspension and comprises a first case, a second case is arranged at the bottom of the first case, the first case is provided with a base stator, a load floater and a magnetic suspension actuator, and the inner side of the base stator serves as a support of a stator of the magnetic suspension actuator. A first case is arranged, the first case and internal assemblies form a magnetic suspension vibration isolation platform, an electromagnetic actuator of a Halbach array is adopted as a vibration isolation device, an electrified coil assembly of the electromagnetic actuator is stressed in a non-contact mode in a magnetic field, control force for restraining disturbance is provided for a load floating platform, and the magnetic suspension vibration isolation system after space multi-degree-of-freedom decoupling can effectively improve the stability of the magnetic suspension vibration isolation platform. The system is simplified into a single-degree-of-freedom second-order vibration system in the X direction, the Y direction and the Z direction, and for direct or indirect low-frequency disturbance, disturbance isolation and suppression are achieved in each direction through a double-loop control strategy of absolute acceleration and relative position.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetic suspension technical field, concretely is a kind of magnetic suspension vibration isolation device. BACKGROUND

[0002] Magnetic suspension vibration isolation system is based on electromagnetic force principle. By setting electromagnet and magnetic material in vibration isolator, when system is powered, the magnetic field generated by electromagnet and magnetic material produce interaction force, these forces are accurately designed and controlled, so that the object of vibration isolation can be suspended in a certain spatial position.

[0003] In specific use process, the single-degree-of-freedom coupling model vibration isolation effect is single, and the direction of control force also meets the actual high-precision operation to some extent, and multiple direction control force can bring coupling interference. UTILITY MODEL CONTENTS

[0004] In order to make up for the above shortcomings, the utility model provides a kind of magnetic suspension vibration isolation device to overcome the above technical problems or at least partially solve the above problems.

[0005] The utility model is realized as follows:

[0006] The utility model provides a kind of magnetic suspension vibration isolation device, including first machine case, the bottom of first machine case is equipped with second machine case, first machine case is equipped with base station stator, load float and magnetic suspension actuator, the inside of base station stator is as the support of magnetic suspension actuator stator, the outside of base station stator is the loading area of disturbance excitation, load float is connected with the coil assembly of magnetic suspension actuator.

[0007] In an embodiment of the utility model, the lower part of first machine case is equipped with frame, the top of frame is equipped with fine adjustment mechanism;

[0008] The fine adjustment mechanism includes:

[0009] First stand, the top of first stand is equipped with first threaded shaft, the shaft body of first threaded shaft is equipped with first nut;

[0010] Three bifurcated plates, one pointed end of three bifurcated plates is inserted with second threaded shaft, the shaft body of second threaded shaft is threadedly connected with second nut;

[0011] First bearing sleeve, first bearing sleeve is arranged at the top of second threaded shaft, second threaded shaft is provided with connecting rod through bearing sleeve;

[0012] Deformation pad, the bottom of deformation pad is equipped with slotted block compatible with the top end of connecting rod, deformation pad is movably connected with connecting rod through slotted block.

[0013] In one embodiment of this utility model, the three-pronged plate is inserted into the shaft of the first threaded shaft, and the first nut is pressed and connected to the top of the three-pronged plate.

[0014] In one embodiment of this utility model, the first nut is located at the top center of the three-pronged plate, and a knob is provided at the bottom end of the second threaded shaft.

[0015] In one embodiment of this utility model, the slotted block has a spherical cavity inside that matches the top of the connecting rod, and movable through slots are provided on both sides of the slotted block. The frame has a coarse adjustment mechanism around its perimeter. The coarse adjustment mechanism includes a second column, which is fixedly connected to the perimeter of the frame. A third threaded shaft is threadedly connected to the top of the second column, and a third nut is fixedly connected to the top of the third threaded shaft.

[0016] In one embodiment of this utility model, the top of the third nut is provided with a second bearing assembly, and the top of the third nut is connected to the bottom end of the first column through the third bearing assembly.

[0017] In one embodiment of this utility model, the first bearing assembly and the second bearing assembly have the same structure. Both the first bearing assembly and the second bearing assembly include an inner ring disc, an inner rod is provided on the top of the inner ring disc, and an outer ring disc is provided on the top of the inner ring disc.

[0018] In one embodiment of this utility model, the inner rod of the inner ring disk is provided with a bearing and is connected to the inner ring of the bearing, and the bottom of the outer ring disk is provided with a mechanism ring, which is connected to the outer ring of the bearing.

[0019] The magnetic levitation vibration isolation device provided by this utility model has the following beneficial effects:

[0020] 1. By setting up a first chassis, the first chassis together with the internal components form a magnetic levitation vibration isolation platform. It adopts an electromagnetic actuator with a Halbach array as a vibration isolation device. The energized coil assembly of the electromagnetic actuator is subjected to non-contact force in the magnetic field, providing control force to suppress disturbances for the load floating platform. The magnetic levitation vibration isolation system after spatial multi-degree-of-freedom decoupling is simplified into a single-degree-of-freedom second-order vibration system in the X, Y, and Z directions. For direct or indirect low-frequency disturbances, the isolation and suppression of disturbances are achieved in each direction through a dual-loop control strategy of absolute acceleration and relative position.

[0021] 2. By setting the fine adjustment mechanism, when one of the three connecting rods moves up and down, the other two will relatively descend, facilitating the adjustment of the angle of the deformation pad, combined with the deformation pad at the top that can accommodate a certain deformation, facilitating the lifting of the bottom of the first case at more angles, rather than simply lifting one fulcrum, improving the multi-directional effect of the adjustment of the bottom of the first case.

[0022] 3. By setting the coarse adjustment mechanism, combined with the fine adjustment mechanism, during the initial installation of the magnetic suspension vibration isolation platform, the coarse adjustment horizontal angle function can quickly adjust the platform to a nearly horizontal state, this process does not require high precision, and the preliminary positioning of the platform can be completed in a short time, the coarse adjustment function allows quick adjustment of the position and attitude of the platform during installation, and is not strictly limited by site conditions, even in an environment with poor ground flatness or limited installation space, the platform can be quickly placed in a relatively appropriate initial position. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0024] Figure 1 is a structural schematic diagram provided by the embodiments of the present application;

[0025] Figure 2 is a second case structure schematic diagram provided by the embodiments of the present application;

[0026] Figure 3 is a support part structure schematic diagram provided by the embodiments of the present application;

[0027] Figure 4 is a coarse adjustment mechanism structure schematic diagram provided by the embodiments of the present application;

[0028] Figure 5 is a fine adjustment mechanism structure schematic diagram provided by the embodiments of the present application.

[0029] In the figure: 1, first machine box; 101, base stator; 102, load float; 1021, magnetic suspension actuator; 103, second machine box; 104, motor driver; 2, fine adjustment mechanism; 2001, frame; 201, first column; 2011, first threaded shaft; 202, first nut; 203, three-way plate; 204, second threaded shaft; 2041, second nut; 2042, knob; 205, first bearing set; 2051, inner ring disc; 2052, outer ring disc; 206, bead connecting rod; 207, slotted block; 208, deformation pad; 3, coarse adjustment mechanism; 301, second column; 302, third threaded shaft; 303, third nut; 304, second bearing set. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0031] EMBODIMENT

[0032] WITH REFERENCE TO Figures 1-5 The technical scheme provides a magnetic suspension vibration isolation device, which comprises a first machine box 1, the bottom of the first machine box 1 is provided with a second machine box 103, the second machine box 103 is provided with a motor driver 104, the first machine box 1 is provided with a base stator 101, a load float 102 and a magnetic suspension actuator 1021, the inner side of the base stator 101 serves as the support of the stator of the magnetic suspension actuator 1021, the outer side of the base stator 101 is the loading area of disturbance excitation, the load float 102 is connected with the coil assembly of the magnetic suspension actuator 1021, the first machine box 1 is provided, the first machine box 1 together with the internal components forms a magnetic suspension vibration isolation platform, the electromagnetic actuator adopting a Halbach array is used as a vibration isolation device, the energized coil assembly of the electromagnetic actuator is subjected to force in a non-contact manner in a magnetic field, and the load float provides a control force for suppressing disturbance, the magnetic suspension vibration isolation system after spatial multi-degree-of-freedom decoupling is simplified into a single-degree-of-freedom two-order vibration system in X, Y and Z directions, and the isolation and suppression of disturbance are realized through the double-loop control strategy of absolute acceleration and relative position in each direction for direct or indirect low-frequency disturbance.

[0033] WITH REFERENCE TO Figures 1-5, based on the same idea as in the above embodiment 1, this embodiment also proposes that the lower part of the first cabinet 1 is provided with a frame 2001, the top of the frame 2001 is provided with a fine adjustment mechanism 2, the fine adjustment mechanism 2 comprises: a first column 201, a three-way plate 203, a first bearing sleeve 205, a deformation pad 208, the top of the first column 201 is provided with a first threaded shaft 2011, the shaft body of the first threaded shaft 2011 is provided with a first nut 202, the tip of the three-way plate 203 is inserted with a second threaded shaft 204, the shaft body of the second threaded shaft 204 is threadedly connected with a second nut 2041, the first bearing sleeve 205 is arranged at the top of the second threaded shaft 204, the second threaded shaft 204 is provided with a connecting rod 206 through the bearing sleeve, the bottom of the deformation pad 208 is provided with a slotted block 207 matched with the top end of the connecting rod 206, the deformation pad 208 is movably connected with the connecting rod 206 through the slotted block 207, in use, first perform horizontal coarse adjustment, i.e. rotate the third nut 303, under the action of threads, the second threaded shaft 204 rotates out of the second column 301, i.e. performs coarse adjustment of the whole device, then adjust one or two of the three second threaded shafts 204 around the three-way plate 203 according to needs, perform angle adjustment of the deformation pad 208, specifically, rotate the knob 2042 while fixing the second nut 2041, under the limiting action of the three-way plate 203, the second threaded shaft 204 will not fall downward, i.e. the angle adjustment of the deformation pad 208 is completed, at this time the ball at the top of the connecting rod 206 can move in multiple directions in the slotted block 207, finally the angle of the deformation pad 208 is adjusted, which is reflected on the first cabinet 1 as that the bottom thereof can be lifted upward in multiple directions, in the rotation process of the threaded shaft, the inner ring disc 2051 and the outer ring disc 2052 of the first bearing sleeve 205 and the second bearing sleeve 304 relatively rotate, providing reasonable movement space for the rotation of the non-threaded connection end of the first threaded shaft 2011 and the third threaded shaft 302, by arranging the fine adjustment mechanism 2, when one of the three connecting rods 206 moves up and down, the other two will relatively descend, facilitating the adjustment of the angle of the deformation pad 208, in combination with the deformation pad 208 which can accommodate a certain deformation at the top, it is convenient to lift the bottom of the first cabinet 1 in more angles, rather than simply lifting one fulcrum, which improves the multi-directional effect of the adjustment of the bottom of the first cabinet 1.

[0034] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the three-way plate 203 is inserted on the shaft body of the first threaded shaft 2011, the first nut 202 is tightly connected with the top of the three-way plate 203, under the limiting action of the three-way plate 203, the second threaded shaft 204 will not fall downward, i.e. the angle adjustment of the deformation pad 208 is completed, the first nut 202 is located at the top center of the three-way plate 203, the bottom end of the second threaded shaft 204 is provided with a knob 2042 for rotating the second threaded shaft 204.

[0035] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the block body of the slotted block 207 is internally provided with a spherical accommodating cavity matched with the top end of the connected bead rod 206, and the two sides of the slotted block 207 are provided with movable grooves for matching the ball.

[0036] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the frame 2001 is provided with a coarse adjustment mechanism 3 around the frame body, the coarse adjustment mechanism 3 includes a second column 301 fixedly connected to the frame 2001 around the frame body, and a third threaded shaft 302 threadedly connected to the top of the second column 301, and a third nut 303 fixedly connected to the top of the shaft body of the third threaded shaft 302. By setting the coarse adjustment mechanism 3 in combination with the fine adjustment mechanism 2, the coarse adjustment horizontal angle function can quickly adjust the platform to a nearly horizontal state at the initial stage of installation of the magnetic suspension vibration isolation platform. This process does not require high precision and can complete the preliminary positioning of the platform in a short time. The coarse adjustment function allows quick adjustment of the position and attitude of the platform during installation, which is not strictly limited by site conditions. Even in the environment where the ground flatness is poor or the installation space is limited, the platform can be quickly placed in a relatively appropriate initial position.

[0037] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the top of the third nut 303 is provided with a second bearing sleeve 304, and the top of the third nut 303 is connected to the bottom end of the first column 201 through the third bearing sleeve.

[0038] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the first bearing sleeve 205 and the second bearing sleeve 304 have the same structure, and the first bearing sleeve 205 and the second bearing sleeve 304 each include an inner ring disc 2051, the top of the inner ring disc 2051 is provided with an inner rod, and the top of the inner ring disc 2051 is provided with an outer ring disc 2052. During the rotation of the threaded shaft, the inner ring disc 2051 and the outer ring disc 2052 of the first bearing sleeve 205 and the second bearing sleeve 304 rotate relatively, providing a reasonable movement space for the rotation of the non-threaded connection end of the first threaded shaft 2011 and the third threaded shaft 302.

[0039] Referring to Figures 1-5 , based on the same idea as in the above embodiment 1, this embodiment also proposes that the inner rod of the inner ring disc 2051 is provided with a bearing connected to the inner ring of the bearing, and the bottom of the outer ring disc 2052 is provided with a mechanism ring connected to the outer ring of the bearing.

[0040] Specifically, the working process or working principle of the magnetic suspension vibration isolation device is as follows: in use, the driving system of the magnetic suspension actuator 1021 is responsible for converting the control voltage signal transmitted by the Simulink Real-Time real-time control system into a current signal input to the magnetic suspension actuator 1021, under the action of electromagnetic principle, the load float 102 is suspended in space, realizing magnetic suspension, and then achieving a certain vibration isolation effect, the motor driver 104 selects a TA115 type linear motor driver, for the leveling of the vibration isolation platform in use, first, the horizontal coarse adjustment is performed, that is, the third nut 303 is rotated, under the action of the thread, the second threaded shaft 204 rotates out of the second stand column 301, that is, the coarse adjustment of the whole device is performed, then according to the needs, one or two of the three second threaded shafts 204 around the three-way plate 203 are adjusted, the angle of the deformation pad 208 is coarsely adjusted, specifically, the knob 2042 is rotated while the second nut 2041 is fixed, under the limiting action of the three-way plate 203, the second threaded shaft 204 will not fall downward, that is, the angle adjustment of the deformation pad 208 is completed, at this time, the ball on the top of the connecting rod 206 can move in the slotted block 207, finally, the angle of the deformation pad 208 is adjusted, which is reflected on the first case 1 that the bottom thereof can be upwardly lifted in multiple directions, in the rotation process of the threaded shaft, the inner ring disc 2051 and the outer ring disc 2052 of the first bearing set 205 and the second bearing set 304 relatively rotate, providing a reasonable movement space for the rotation of the non-threaded connection end of the first threaded shaft 2011 and the third threaded shaft 302.

Claims

1. A magnetic levitation vibration isolation device comprising a first casing (1), characterized in that: The bottom of the first cabinet (1) is provided with a second cabinet (103), the second cabinet (103) is provided with a motor driver (104), the first cabinet (1) is provided with a base station stator (101), a load float (102) and a magnetic suspension actuator (1021), the inner side of the base station stator (101) is used as the support of the magnetic suspension actuator (1021) stator, and the outer side of the base station stator (101) is a disturbance excitation loading area, and the load float (102) is connected with the coil assembly of the magnetic suspension actuator (1021).

2. A magnetic levitation vibration isolation device according to claim 1, characterized in that The lower part of the first cabinet (1) is provided with a frame (2001), and the top of the frame (2001) is provided with a fine adjustment mechanism (2). The fine adjustment mechanism (2) comprises: A first column (201), the top of the first column (201) is provided with a first threaded shaft (2011), and the shaft body of the first threaded shaft (2011) is provided with a first nut (202); A three-way plate (203), one end of the three-way plate (203) is inserted with a second threaded shaft (204), and the shaft body of the second threaded shaft (204) is threadedly connected with a second nut (2041); A first bearing sleeve (205) is arranged on the top of the second threaded shaft (204), and the second threaded shaft (204) is provided with a connecting rod (206) through the bearing sleeve; A deformation pad (208) is arranged on the bottom of the deformation pad (208), and the top end of the connecting rod (206) is matched with a slotted block (207); 3. A magnetic levitation vibration isolation device according to claim 2, wherein The three-way plate (203) is inserted into the shaft body of the first threaded shaft (2011), the first nut (202) is tightly connected with the top of the three-way plate (203), the first nut (202) is located at the top center of the three-way plate (203), and the bottom end of the second threaded shaft (204) is provided with a knob (2042).

4. A magnetic levitation vibration isolation device according to claim 3, wherein The block body of the slotted block (207) is provided with a spherical accommodating cavity matched with the top end of the connecting rod (206), and the two sides of the slotted block (207) are provided with movable grooves.

5. A magnetic levitation vibration isolation device according to claim 4, wherein The frame (2001) is provided with a coarse adjustment mechanism (3) around the frame body, the coarse adjustment mechanism (3) comprises a second column (301), the second column (301) is fixedly connected around the frame body of the frame (2001), the top of the second column (301) is threadedly connected with a third threaded shaft (302), and the top of the shaft body of the third threaded shaft (302) is fixedly connected with a third nut (303).

6. A magnetic levitation vibration isolation device according to claim 5, wherein The top of the third nut (303) is provided with a second bearing sleeve (304), and the top of the third nut (303) is connected with the bottom end of the first column (201) through the third bearing sleeve.

7. A magnetic levitation vibration isolation device according to claim 6, wherein The first bearing set (205) and the second bearing set (304) are the same in structure, and each of the first bearing set (205) and the second bearing set (304) comprises an inner ring disc (2051), the top of the inner ring disc (2051) is provided with an inner rod, and the top of the inner ring disc (2051) is provided with an outer ring disc (2052).

8. A magnetic levitation vibration isolation device according to claim 7, wherein The inner rod of the inner ring disc (2051) is provided with a bearing and connected with an inner ring of the bearing, and the bottom of the outer ring disc (2052) is provided with a mechanism ring connected with an outer ring of the bearing.

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