Adjustable cavity temperature measuring device for vacuum processing equipment
By designing an adjustable cavity temperature measuring device in a vacuum processing equipment and utilizing the cross-rotation structure of the support and temperature sensor, the problem of fixing the detection area of the temperature measuring device is solved, enabling a wider range of temperature monitoring and cost reduction.
Patent Information
- Application Number
- CN202520096286.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2035-01-16
AI Technical Summary
The temperature measurement devices in existing vacuum processing equipment have fixed detection areas, which means that when multiple areas need to be monitored, the number of devices needs to be increased, resulting in large space occupation and high cost.
Design an adjustable cavity temperature measuring device. By installing a bracket on the base and a temperature sensor on the bracket, the bracket and the temperature sensor can rotate around different rotation axes to achieve cross-degree of freedom adjustment and reduce the number of temperature sensors.
The temperature measurement area has been expanded, the number of temperature sensors has been reduced, and equipment costs and space requirements have been lowered.
Smart Images
Figure CN223678648U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor vacuum coating technology field, specifically, relate to a kind of adjustable cavity temperature measuring device for vacuum processing equipment. BACKGROUND
[0002] High temperature chemical vapor deposition (HTCVD) coating system, it uses unique thermal catalytic coating technology, can realize epitaxial film high-efficiency deposition under ultra-high temperature. The temperature in its cavity internal reaction needs to be as high as 1650 ℃, needs to monitor the temperature outside reaction cavity, avoids cavity temperature without monitoring, so as to process in time to cause cavity damage.
[0003] Temperature measuring device in existing equipment is immobile, temperature monitoring area is fixed, when needing to monitor multiple areas, only rely on increasing the number of temperature measuring device to correspond monitoring point, but multiple temperature measuring devices not only occupy too much space, and cost is high. UTILITY MODEL CONTENT
[0004] Therefore, the utility model provides a kind of adjustable cavity temperature measuring device for vacuum processing equipment to solve the problem of fixed detection area of existing temperature measuring device.
[0005] A kind of adjustable cavity temperature measuring device for vacuum processing equipment, including base;Support, installation in the base, the support with the base between there is first rotation axis, the support rotates on the base around the first rotation axis;Temperature measuring sensor, obtain the temperature data of the region to be measured, installation in the support, the temperature measuring sensor with the support between there is second rotation axis, the temperature measuring sensor rotates on the support around the second rotation axis;The first rotation axis and the second rotation axis are set at the angle.
[0006] Specifically, the first rotation axis is provided with first rotation structure, and the support is rotated on the base by the first rotation structure.
[0007] Specifically, the first rotation structure includes first bolt and first nut, and the first bolt passes through support and base and is connected with the first nut.
[0008] Specifically, the first adjusting structure is arranged between the base and the support, the first adjusting structure includes first arc waist groove arranged on the base and first adjusting hole arranged on the support, and the first arc waist groove is arranged around the first rotation axis;The first adjusting structure further includes first butterfly knob and first adjusting nut, and the threaded end of the first butterfly knob is adapted to pass through the first adjusting hole and the first arc waist groove and is connected with the first adjusting nut.
[0009] Specifically, the second rotating structure is arranged at the second rotating axis, and the temperature measuring sensor rotates on the support through the second rotating structure.
[0010] Specifically, the second rotating structure comprises a second bolt and a connecting threaded hole arranged on the temperature measuring sensor, and the second bolt passes through the support and is connected with the connecting threaded hole.
[0011] Specifically, a second adjusting structure is arranged between the temperature measuring sensor and the support, the second adjusting structure comprises a second arc waist groove arranged on the support and a second adjusting hole arranged on the temperature measuring sensor, and the second arc waist groove is arranged around the second rotating axis; the second adjusting structure further comprises a second butterfly knob, and a threaded end of the second butterfly knob is adapted to pass through the second arc waist groove and be connected and fixed with the second adjusting hole.
[0012] Specifically, the middle part of the base is upwardly protruding and forms a protruding platform, and the first arc waist groove is located on the protruding platform.
[0013] Specifically, the base further comprises a fixed folding edge on both sides of the protruding platform, and the fixed folding edge is adapted to be installed on one side of the temperature measuring area through a bolt.
[0014] Specifically, the first rotating axis is vertically arranged, and the second rotating axis is horizontally arranged.
[0015] The technical scheme of the present disclosure has the following advantages:
[0016] 1. According to the present disclosure, the support is arranged on the base, and the temperature measuring sensor is installed on the support, the support and the base rotate in opposite directions, the temperature measuring sensor can rotate in the opposite direction of the support, the two directions intersect, the temperature measuring sensor has two intersecting degrees of freedom, the detection range of the temperature measuring sensor is greatly increased compared with the fixed temperature measuring sensor, and the number of temperature measuring sensors is reduced during actual detection.
[0017] 2. According to the present disclosure, the first arc waist groove and the second arc waist groove are adopted, so that the support and the temperature measuring sensor are guided in the adjusting angle, thereby facilitating the adjustment. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the specific embodiments of the present disclosure or the technical scheme in the prior art, the drawings needed in the following specific embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present disclosure, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.
[0019] Figure 1Application scenario diagram of the adjustable cavity temperature measuring device for the vacuum processing equipment of the embodiment of the present application;
[0020] Figure 2 Explosive schematic diagram of the adjustable cavity temperature measuring device for the vacuum processing equipment of the embodiment of the present application.
[0021] Label explanation: 1, base; 2, support; 3, temperature measuring sensor; 4, first rotating structure; 5, first adjusting structure; 6, second rotating structure; 7, second adjusting structure; 11, convex platform; 111, first through hole; 112, first arc waist groove; 12, fixed folding edge; 21, first connecting hole; 22, first adjusting hole; 23, second through hole; 24, second arc waist groove; 31, connecting threaded hole; 32, second adjusting hole; 41, first rotating axis; 42, first bolt; 43, first nut; 51, first butterfly knob; 52, first adjusting nut; 61, second rotating axis; 62, second bolt; 71, second butterfly knob. DETAILED DESCRIPTION
[0022] Embodiments of the present disclosure will be described in more detail by referring to the attached drawings. Although certain embodiments of the present disclosure are shown in the drawings, it is understood that the present disclosure can be implemented in various forms and should not be interpreted as being limited to the embodiments set forth herein, but rather these embodiments are provided so as to more completely and thoroughly understand the present disclosure. It is understood that the drawings and embodiments of the present disclosure are for exemplary purposes only and are not intended to limit the scope of protection of the present disclosure.
[0023] It should be understood that each of the steps recited in the method embodiments of the present disclosure can be executed in different orders and / or in parallel. In addition, the method embodiments can include additional steps and / or omit the execution of the steps shown. The scope of the present disclosure is not limited in this respect.
[0024] The term "comprising" and variations thereof as used herein are used inclusively, i.e., "comprising, but not limited to". The term "based on" is "based, at least in part, on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Related definitions of other terms will be given in the description below. It is noted that the concepts of "first", "second", etc. mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.
[0025] It is noted that the modification of "one" or "multiple" mentioned in the present disclosure is illustrative and not limiting, and those skilled in the art should understand that, unless otherwise explicitly indicated in the context, it should be understood as "one or more".
[0026] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present disclosure.
[0027] The utility model discloses an adjustable cavity temperature measuring device for vacuum processing equipment, which refers to Figure 1 And Figure 2 , comprising base 1, support 2 installed on base 1 and temperature measuring sensor 3 arranged on support 2, base 1 is installed on one side of the temperature measuring area, specifically, base 1 can be installed on the rack beside the vacuum processing equipment. Support 2 is rotatably installed on base 1 and can be adjusted to a specific angle on base 1, temperature measuring sensor 3 is rotatably installed on support 2, temperature measuring sensor 3 can be an infrared sensor, which obtains temperature data of the temperature measuring area, and temperature measuring sensor 3 can be adjusted to a specific angle on support 2. Compared with the fixed temperature measuring device in the prior art, the temperature measuring sensor 3 of the present scheme can obtain the rotation angle in two directions during temperature measurement, therefore, the temperature measuring area is enlarged, and the number of temperature measuring sensors 3 is reduced.
[0028] Base 1 is a metal sheet with a middle part bent upwards, the middle part is a convex platform 11 protruding upwards, and the two sides are fixed flanges 12. The fixed flanges 12 are installed on one side of the temperature measuring area, and the fixed flanges 12 have holes. By passing through the holes in the fixed flanges 12 and connecting with the rack, the position of base 1 can be fixed.
[0029] Base 1 and support 2 have a first rotating structure 4, support 2 rotates on base 1 through the first rotating structure 4, that is, support 2 and base 1 have a first rotating axis 41, and the first rotating structure 4 is located on the first rotating axis 41. The first rotating structure 4 includes a first bolt 42 and a first nut 43, and further includes a first through hole 111 arranged on the convex platform 11 and a first connecting hole 21 arranged on the support 2. When connected, the first connecting hole 21 on the support 2 corresponds in position to the first through hole 111, the threaded end of the first bolt 42 passes through the first connecting hole 21 and the first through hole 111 in sequence, and is connected with the first nut 43. The first nut 43 and the first bolt 42 can be slightly tightened, so that the support 2 can rotate on the base 1. That is, the threaded end of the first bolt 42 acts as a hinge shaft. Of course, in other embodiments, a short shaft or a hinge shaft can be used instead of the first bolt 42.
[0030] In order to make the support 2 obtain a certain rotation angle on the base 1, the first adjusting structure 5 is further arranged between the support 2 and the base 1, and the first adjusting structure 5 comprises a first arc waist groove 112 arranged on the base 1 and a first adjusting hole 22 arranged on the support 2. The first arc waist groove 112 is arranged on the convex platform 11 of the base 1 and is in a semicircular arc shape, and the center of the semicircular arc is the first through hole 111. When the support 2 is attached to the base 1, the position of the first adjusting hole 22 corresponds to the position of the first arc waist groove 112 below. The first adjusting structure 5 further comprises a first butterfly-shaped knob 51 and a first adjusting nut 52. When the support 2 is rotated to the desired angle, the threaded end of the first butterfly-shaped knob 51 passes through the first adjusting hole 22 and the first arc waist groove 112 and is screwed with the first adjusting nut 52 to be fixed. When the angle of the support 2 needs to be changed, the first butterfly-shaped knob 51 and the first adjusting nut 52 are loosened, the angle of the support 2 relative to the base 1 is adjusted, and then the first butterfly-shaped knob 51 and the first adjusting nut 52 are screwed again.
[0031] The rotation axis between the temperature measuring sensor 3 and the support 2 is the second rotation axis 61, and the temperature measuring sensor 3 rotates on the support 2 through the second rotation axis 61. The second rotation structure 6 is arranged at the second rotation axis 61, and the second rotation structure 6 comprises a second bolt 62, a second through hole 23 arranged on the support 2, and a connecting threaded hole 31 arranged on the temperature measuring sensor 3. When fixed, the threaded end of the second bolt 62 passes through the second through hole 23 and is threadedly connected with the connecting threaded hole 31 of the temperature measuring sensor 3. When connected, it is not necessary to be screwed too tightly, so that the temperature measuring sensor 3 can rotate around the second bolt 62. After rotating to the desired angle, it is screwed tightly.
[0032] In order to make the temperature measuring sensor 3 obtain a specific stroke trajectory on the support 2, the second adjusting structure 7 is further arranged between the temperature measuring sensor 3 and the support 2, and the second adjusting structure 7 comprises a second arc waist groove 24 arranged on the support 2, a second adjusting hole 32 arranged on the temperature measuring sensor 3, and a second butterfly-shaped knob 71. The second adjusting hole 32 is a threaded hole, and the second arc waist groove 24 is also semicircular, and the center of the semicircle is at the second through hole 23. When adjusted, the temperature measuring sensor 3 rotates on the support 2. When rotated to the desired angle, the second butterfly-shaped knob 71 passes through the second arc waist groove 24 and is screwed with the second adjusting hole 32 to be fixed.
[0033] The first rotation axis 41 of the embodiment is vertically arranged, and the second rotation axis 61 is horizontally arranged. Of course, the arrangement direction of the first rotation axis 41 and the second rotation axis 61 is not limited to this, and the embodiment only gives a better example.
[0034] Obviously, the above embodiments are merely example for clearly illustrating but not limitation to the embodiments. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments need not and can not be enumerated. The obvious changes or variations derived from the above description are still within the protection scope of the disclosure.
Claims
1. An adjustable cavity temperature measurement device for a vacuum processing apparatus, characterized by, The utility model relates to a temperature measuring sensor fixing device, including: Base (1); Support (2) is installed on the base (1), the support (2) has the first rotation axis (41) between the base (1), the support (2) rotates on the base (1) around the first rotation axis (41); Temperature sensor (3) obtains the temperature data of the region to be measured, is installed on the support (2), the temperature sensor (3) has the second rotation axis (61) between the support (2), the temperature sensor (3) rotates on the support (2) around the second rotation axis (61); The first rotation axis (41) and the second rotation axis (61) are arranged at an angle.
2. The adjustable cavity pyrometer for vacuum processing equipment according to claim 1, wherein The first rotation structure (4) is arranged at the first rotation axis (41), and the support (2) rotates on the base (1) through the first rotation structure (4).
3. The adjustable cavity pyrometer for vacuum processing equipment according to claim 2, wherein, The first rotation structure (4) includes a first bolt (42) and a first nut (43), and the first bolt (42) penetrates the support (2) and the base (1) and is connected with the first nut (43).
4. The adjustable cavity pyrometer for vacuum processing equipment according to claim 3, wherein The first adjusting structure (5) is arranged between the base (1) and the support (2), and the first adjusting structure (5) includes a first arc waist groove (112) arranged on the base (1) and a first adjusting hole (22) arranged on the support (2), and the first arc waist groove (112) is arranged around the first rotation axis (41). The first adjusting structure (5) further includes a first butterfly knob (51) and a first adjusting nut (52), and the threaded end of the first butterfly knob (51) is adapted to penetrate the first adjusting hole (22) and the first arc waist groove (112) and is connected and fixed with the first adjusting nut (52).
5. The adjustable cavity pyrometer for vacuum processing equipment according to claim 1, wherein The second rotation structure (6) is arranged at the second rotation axis (61), and the temperature sensor (3) rotates on the support (2) through the second rotation structure (6).
6. The adjustable cavity pyrometer for vacuum processing equipment according to claim 5, wherein The second rotation structure (6) includes a second bolt (62) and a connecting threaded hole (31) arranged on the temperature sensor (3), and the second bolt (62) penetrates the support (2) and is connected with the connecting threaded hole (31).
7. The adjustable cavity pyrometer for vacuum processing equipment according to claim 6, wherein The second adjusting structure (7) is arranged between the temperature sensor (3) and the support (2), and the second adjusting structure (7) includes a second arc waist groove (24) arranged on the support (2) and a second adjusting hole (32) arranged on the temperature sensor (3), and the second arc waist groove (24) is arranged around the second rotation axis (61). The second adjusting structure (7) further includes a second butterfly knob (71), and the threaded end of the second butterfly knob (71) is adapted to penetrate the second arc waist groove (24) and is connected and fixed with the second adjusting hole (32).
8. The adjustable cavity pyrometer for vacuum processing equipment according to claim 4, wherein The middle part of the base (1) is upwardly convex and forms a convex platform (11), and the first arc waist groove (112) is located on the convex platform (11).
9. The adjustable cavity pyrometer for vacuum processing equipment according to claim 8, wherein, The base (1) further comprises fixed flanges (12) on both sides of the raised platform (11), which are suitable for being mounted on one side of the area to be measured by bolts.
10. The adjustable cavity pyrometer for vacuum processing equipment according to claim 1, wherein The first rotation axis (41) is vertically arranged, and the second rotation axis (61) is horizontally arranged.