Split contact type thermocouple

Abstract

The utility model provides a split contact type thermocouple, which comprises a protective shell and a supporting seat which is arranged at the lower end of the protective shell and is fastened with the protective shell, and two temperature measuring assemblies are arranged in the protective shell and the supporting seat in a penetrating manner; the temperature measuring assembly comprises a protective sleeve, a ceramic tube which is located in the protective sleeve and is coaxial with the protective sleeve, and a temperature measuring line which is located in the ceramic tube and the protective sleeve. One end, close to the ceramic tube, of the temperature measuring line is a contact in contact with the surface of a measured object, and the other end of the temperature measuring line is a connecting end which extends out of the protective sleeve and is connected to a temperature sensor. The two split type temperature measuring assemblies are adopted, and the two contacts are allowed to independently move within a certain range, so that the temperature measuring device can adapt to the uneven surface of a measured object, and the optimal contact with the surface of the measured object is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to thermocouple temperature measuring device technical field, especially a kind of split contact thermocouple. BACKGROUND

[0002] In the precision manufacturing process of semiconductor packaging equipment, accurate temperature control is crucial. Traditional temperature measurement methods, such as welded thermocouples, while meeting basic temperature measurement needs to some extent, have many limitations in practical applications.

[0003] The traditional welded thermocouple design has two contacts usually welded together, forming a fixed loop. This design has a significant flaw when measuring temperature: even if the contacts are not in close contact with the measured object, the temperature sensor can still receive current signals and convert them into temperature displays due to the presence of the loop. This increases the likelihood of false measurements, as it is impossible to accurately determine whether the measured temperature truly reflects the actual temperature of the measured object. When the contacts are poorly or not at all in contact with the measured object, the temperature sensor may still give incorrect temperature readings, misleading production operations.

[0004] In addition, the traditional thermocouple design also has limitations when measuring uneven objects. Due to the fixed position of the contacts, it is difficult to adapt to the slight undulations on the surface of the measured object, which may lead to poor contact between the contacts and the measured object, affecting the accuracy of temperature measurement. SUMMARY

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present utility model is to provide a split contact thermocouple to solve the problem of inaccurate temperature measurement and difficulty in adapting to uneven object measurement in the prior art.

[0006] To achieve the above-mentioned purposes and other related purposes, the utility model provides the following technical solutions:

[0007] A split contact thermocouple includes a protective shell, a support seat arranged at the lower end of the protective shell and fastened to the protective shell, and two temperature measurement assemblies arranged in the protective shell and the support seat. The temperature measurement assembly includes a protective sleeve, a ceramic tube coaxially arranged in the protective sleeve, and a temperature measurement wire arranged in the ceramic tube and the protective sleeve. The end of the temperature measurement wire close to the ceramic tube is a contact point that contacts the surface of the measured object, and the other end is a connection end that extends out of the protective sleeve and is connected to a temperature sensor.

[0008] The thermocouple is stably installed at a position where temperature needs to be measured through the support seat, ensures that the contacts of the two temperature measuring wires can be in close contact with the surface of the measured object, and when the temperature of the measured object changes, the temperature change is quickly transmitted to the temperature measuring wire in the ceramic tube through the contacts, the protective sleeve and the ceramic tube are used for protecting the temperature measuring wire from the influence of the external environment, such as chemical corrosion or mechanical damage; the ceramic tube serves as a good insulator and a heat conducting medium, ensures effective heat transfer, and reduces the influence of the external temperature on the measurement result; the two split temperature measuring assemblies are adopted, the two contacts can independently move within a certain range, and therefore, the uneven surface of the measured object can be adapted, and the optimal contact with the surface of the measured object is ensured.

[0009] In an embodiment of the present application, the middle part of the protective sleeve is provided with a clamping ring for clamping on the support seat, and the outer part of the protective sleeve is sleeved with a spring located in the inner cavity of the protective shell and abutting against the clamping ring.

[0010] The middle part of the protective sleeve is designed with a clamping ring, the clamping ring can be tightly clamped on the support seat, the outer part of the protective sleeve is sleeved with a spring, the spring is located in the inner cavity of the protective shell and abuts against the clamping ring, when the contacts are subjected to external force, the protective sleeve moves upward in the protective shell, thereby compressing the spring, the spring can absorb the force and allow the contacts to move within a certain range to adapt to the uneven surface of the measured object.

[0011] In an embodiment of the present application, the protective sleeve comprises a small-diameter inner cavity for penetrating the temperature measuring wire and a large-diameter inner cavity for embedding the ceramic tube.

[0012] The small-diameter inner cavity ensures that the temperature measuring wire can be stably positioned at the center of the protective sleeve, displacement caused by external vibration or impact is avoided, the large-diameter inner cavity is used for accommodating the ceramic tube, and sufficient space is provided to ensure that the ceramic tube can be closely attached to the inner wall of the protective sleeve; the layered inner cavity design enhances the mechanical strength of the protective sleeve, so that it can maintain the shape unchanged under a certain pressure.

[0013] In an embodiment of the present application, the ceramic tube has two through holes arranged in parallel.

[0014] The ceramic tube is precisely machined with two parallel and through holes, the temperature measuring wire is cleverly penetrated through the two through holes, and the contact part of the thermocouple is formed.

[0015] In an embodiment of the present application, the temperature measuring wire comprises a long section, a variable diameter section, a short section penetrating one of the through holes, a bent section extending out of the ceramic tube, and an extension section inserted into the other through hole.

[0016] The long section is located inside the protective sleeve, the variable-diameter section is a transition part of the temperature measuring wire from the long section to the short section, and the diameter of the variable-diameter section gradually decreases to better adapt to the position change of the through hole in the ceramic tube, the short section directly penetrates one through hole of the ceramic tube, the bending section extends out of the ceramic tube to form an outwardly curved shape to form a contact point abutting against the measured object, and the extension section is inserted into another through hole to form a loop structure.

[0017] In an embodiment of the present application, bolt holes are formed in the protective shell and the support seat, and bolts are screwed into the bolt holes.

[0018] When the thermocouple needs to be installed, the protective shell is placed on the support seat, and the bolt holes of the two are aligned. Then, the bolts are inserted through the bolt holes, and the protective shell and the support seat are fastened together by screwing.

[0019] In an embodiment of the present application, pin holes are formed in the protective shell and the support seat, and a positioning pin is pressed into the pin holes.

[0020] The accurate positioning function of the positioning pin ensures the accurate connection between the protective shell and the support seat, and avoids measurement errors caused by misalignment or looseness.

[0021] As described above, the split contact type thermocouple has the following advantages: the combination of the protective sleeve and the ceramic tube provides double protection for the temperature measuring wire, the protective sleeve can effectively prevent the temperature measuring wire from being mechanically damaged, the ceramic tube as a good insulator and heat conducting medium not only ensures effective heat transfer but also reduces the influence of external temperature on the measurement results, and prolongs the service life of the thermocouple; the ceramic tube has two parallel through holes, the temperature measuring wire cleverly passes through the two through holes to form a contact part, ensuring full contact of the temperature measuring wire with the surface of the measured object; the two split temperature measuring assemblies allow the two contact points to be independent within a certain range, so that they can closely fit the uneven surface of the measured object, ensuring the best contact with the surface of the measured object, and greatly improving the accuracy and stability of the measurement. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 The structure of the present application is shown.

[0023] Figure 2 The exploded view of the present application is shown.

[0024] Figure 3 The cross-sectional view of the protective sleeve is shown.

[0025] Figure 4 A connection structure diagram of the temperature measuring wire and the ceramic tube is shown.

[0026] Figure 5 Another connection structure diagram of the temperature measuring wire and the ceramic tube is shown.

[0027] Figure 6 A structure schematic diagram of the temperature measuring wire is shown.

[0028] Element number explanation

[0029] 1, protective shell; 2, support seat; 3, protective sleeve; 4, ceramic tube; 5, temperature measuring wire; 31, snap ring; 6, spring; 32, small-diameter inner cavity; 33, large-diameter inner cavity; 41, through hole; 51, long section; 52, variable diameter part; 53, short section; 54, bending part; 55, extension part; 7, bolt hole; 8, bolt; 9, pin hole; 10, positioning pin. DETAILED DESCRIPTION

[0030] The implementation of the present application will be described by specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the specification. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0031] Please refer to Figures 1 to 6 The present application provides a split contact type thermocouple, comprising a protective shell 1, a support seat 2 arranged at the lower end of the protective shell 1 and fastened with the protective shell 1, two temperature measuring assemblies are arranged in the protective shell 1 and the support seat 2; the temperature measuring assembly comprises a protective sleeve 3, a ceramic tube 4 arranged coaxially in the protective sleeve 3, and a temperature measuring wire 5 arranged in the ceramic tube 4 and the protective sleeve 3; one end of the temperature measuring wire 5 close to the ceramic tube 4 is a contact point for contacting the surface of the measured object, and the other end is a connecting end extending out of the protective sleeve 3 and connected to a temperature sensor.

[0032] The thermocouple is stably installed at the position where the temperature needs to be measured through the support seat 2, ensuring that the contact points of the two temperature measuring wires 5 can tightly contact the surface of the measured object, when the temperature of the measured object changes, the temperature change will be quickly transmitted to the temperature measuring wire 5 in the ceramic tube 4 through the contact point; the protective sleeve 3 and the ceramic tube 4 are used to protect the temperature measuring wire 5 from the influence of the external environment, such as chemical corrosion or mechanical damage; the ceramic tube 4 serves as a good insulator and heat conducting medium, ensuring effective heat transfer and reducing the influence of external temperature on the measurement result; the present application adopts two split temperature measuring assemblies, allowing the two contact points to move independently within a certain range, so as to adapt to the uneven surface of the measured object and ensure the best contact with the surface of the measured object.

[0033] The middle part of the protective sleeve 3 is provided with a clamping ring 31 for clamping on the support seat 2, and the outer part of the protective sleeve 3 is sleeved with a spring 6 located in the inner cavity of the protective shell 1 and abutting against the clamping ring 31.

[0034] The middle part of the protective sleeve 3 is designed with a clamping ring 31 which can be tightly clamped on the support seat 2. On the outer part of the protective sleeve 3, a spring 6 is sleeved, which is located in the inner cavity of the protective shell 1 and abuts against the clamping ring 31. When the contact point is subjected to external force, the protective sleeve 3 will move upward in the protective shell 1, thereby compressing the spring 6. The spring 6 can absorb these forces and allow the contact to move within a certain range to adapt to the uneven surface of the measured object.

[0035] The protective sleeve 3 includes a small-diameter inner cavity 32 for passing the temperature measuring wire 5 and a large-diameter inner cavity 33 for embedding the ceramic tube 4. The small-diameter inner cavity 32 ensures that the temperature measuring wire 5 can be stably positioned at the center of the protective sleeve 3, avoiding displacement due to external vibration or impact. The large-diameter inner cavity 33 is used to accommodate the ceramic tube 4, providing sufficient space to ensure that the ceramic tube 4 can tightly fit the inner wall of the protective sleeve 3. The layered inner cavity design enhances the mechanical strength of the protective sleeve 3, enabling it to maintain its shape under certain pressure.

[0036] The ceramic tube 4 has two parallel through holes 41. The ceramic tube 4 is precisely machined with two parallel and through holes, and the temperature measuring wire 5 is cleverly passed through the two through holes 41, forming the contact part of the thermocouple.

[0037] The temperature measuring wire 5 includes a long section 51, a variable diameter section 52, a short section 53 passing through one of the through holes 41, a bent section 54 extending out of the ceramic tube 4, and an extension section 55 inserted into the other through hole 41. The long section 51 is located inside the protective sleeve 3. The variable diameter section 52 is the transition part of the temperature measuring wire 5 from the long section 51 to the short section 53, and its diameter gradually decreases to better adapt to the position change of the through hole 41 in the ceramic tube 4. The short section 53 directly passes through one of the through holes 41 of the ceramic tube 4. The bent section 54 extends out of the ceramic tube 4, forming an outwardly curved shape, forming a contact with the measured object. The extension section 55 is inserted into the other through hole 41, forming a loop structure.

[0038] Both the protective shell 1 and the support seat 2 are provided with bolt holes 7, and the bolt holes 7 are threadedly connected with bolts 8. When the thermocouple needs to be installed, place the protective shell 1 on the support seat 2 and align the bolt holes 7 of the two. Then, pass the bolts 8 through the bolt holes 7 and use the threaded connection to fasten the protective shell 1 and the support seat 2 together.

[0039] The protection shell 1 and the support base 2 are both provided with pin holes 9, and a positioning pin 10 is pressed into the pin holes 9. The accurate positioning function of the positioning pin 10 ensures the accurate connection between the protection shell 1 and the support base 2, and avoids the measurement error caused by mispositioning or looseness.

[0040] The combination of the protection sleeve 3 and the ceramic tube 4 provides double protection for the temperature measuring wire 5. The protection sleeve 3 can effectively prevent the temperature measuring wire 5 from being mechanically damaged, and the ceramic tube 4, as a good insulator and heat conducting medium, can ensure the effective heat transfer and reduce the influence of the external temperature on the measurement result, thereby prolonging the service life of the thermocouple. The ceramic tube 4 has two through holes 41 arranged in parallel, and the temperature measuring wire 5 is cleverly arranged to pass through the two through holes 41 to form a contact portion, thereby ensuring the sufficient contact between the temperature measuring wire 5 and the surface of the measured object. The two split temperature measuring assemblies can independently move within a certain range, thereby closely adhering to the uneven surface of the measured object and ensuring the optimal contact with the surface of the measured object, so that the measurement accuracy and stability are greatly improved.

[0041] The above embodiments only exemplarily illustrate the principle and effects of the present application, and are not used to limit the present application. All equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought of the present application should still be covered by the claims of the present application.

Claims

1. A split contact thermocouple comprising a protective housing, a support base disposed at a lower end of the protective housing and secured to the protective housing, characterized in that: Two temperature measuring assemblies are arranged in the protective shell and the support base; The temperature measuring assembly comprises a protective sleeve, a ceramic tube coaxially arranged in the protective sleeve, and a temperature measuring wire arranged in the ceramic tube and the protective sleeve; One end of the temperature measuring wire close to the ceramic tube is a contact point for contacting the surface of the measured object, and the other end is a connecting end extending out of the protective sleeve and connected to a temperature sensor.

2. A split contact thermocouple as claimed in claim 1, wherein: A clamping ring for clamping on the support base is arranged at the middle part of the protective sleeve, and an external sleeve of the protective sleeve is sleeved with a spring arranged in the inner cavity of the protective shell and abutting against the clamping ring.

3. A split-contact thermocouple as defined in claim 1, wherein: The protective sleeve comprises a small-diameter inner cavity for arranging the temperature measuring wire and a large-diameter inner cavity for embedding the ceramic tube.

4. A split-contact thermocouple as defined in claim 1, wherein: The ceramic tube has two through holes arranged in parallel.

5. A split contact thermocouple as claimed in claim 4, wherein: The temperature measuring wire comprises a long section, a variable-diameter section, a short section penetrating one of the through holes, a bent section extending out of the ceramic tube, and an extension section inserted into the other through hole.

6. A split-contact thermocouple as defined in claim 1, wherein: Corresponding bolt holes are arranged on the protective shell and the support base, and bolts are threadedly connected in the bolt holes.

7. A split-contact thermocouple as claimed in claim 1, wherein: Corresponding pin holes are arranged on the protective shell and the support base, and positioning pins are pressed into the pin holes.

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