Horizontal epitaxial furnace flange leak detection tool

Abstract

The utility model discloses a horizontal epitaxial furnace flange leak detection tool, which comprises a quartz furnace body and a transfer cavity, a furnace body connecting flange is arranged at the end part of the quartz furnace body, a gate valve is arranged at the end part of the transfer cavity, and an external flange is arranged at one end, far away from the transfer cavity, of the gate valve; the leak detection tool comprises a main body, an exhaust pipeline is arranged on the main body, a first connecting panel and a second connecting panel are arranged on the two sides of the main body, the diameter of the first connecting panel and the diameter of the second connecting panel are both larger than the diameter of the main body, and a counterbore used for being connected with a furnace body connecting flange is formed in the edge of the first connecting panel. The edge of the second connecting panel is provided with a through hole used for being connected with an external flange, and the second connecting panel is provided with a leak detection opening. According to the utility model, supplied materials of manufacturers are detected again, parts are prevented from being unqualified, the repair time after installation is reduced, leakage detection can be completed by only one leakage detection tool, other tools are not required to be matched, the use is convenient, one object has multiple purposes, and the leakage detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a leak detection technical field especially relates to a horizontal type epitaxial furnace flange leak detection tool. BACKGROUND

[0002] Silicon carbide is the third generation semiconductor, and is much better than silicon in terms of voltage resistance, heat dissipation efficiency, etc. More and more chips in high-power devices are silicon carbide chips, which can bring lower energy consumption, higher power and smaller size.

[0003] The silicon carbide industry has substrates, epitaxial, wafers, chips, devices, etc. Among them, substrates and epitaxial account for 70% of the market. The epitaxial equipment has horizontal furnace and vertical furnace two forms, and the horizontal furnace is the most on the market. The horizontal furnace is a quartz furnace body, and the sealing of the two ends is achieved by extruding the sealing ring through the flange, and the sealing effect is achieved by extruding the quartz furnace. There are two parts in the flange leak detection process: 1. After receiving the goods, the flange is leak detected separately. If this step is not performed, the quartz furnace body is assembled and leak detected as a whole. If the leak rate does not meet the requirements, it needs to be disassembled and repaired, which affects the construction period. 2. After the quartz furnace body is assembled, it still needs to be leak detected as a whole to ensure that the chamber can produce normally. The external flange, door valve and conveying cavity are fixed together. The external flange is locked and sealed with the furnace body by the cylinder clamping jaw on the furnace body connecting flange. If leak detection is performed after all components are installed, it will greatly affect the production progress. CONTENT OF THE UTILITY MODEL

[0004] In view of the above technical problems, the utility model aims at providing a horizontal type epitaxial furnace flange leak detection tool, so that the leak detection tool can be universal and the production efficiency is improved.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A horizontal type epitaxial furnace flange leak detection tool, the horizontal type epitaxial furnace includes a quartz furnace body and a conveying cavity, the end of the quartz furnace body is provided with a furnace body connecting flange, the end of the conveying cavity is provided with a door valve, and the end of the door valve away from the conveying cavity is provided with an external flange; the leak detection tool includes a main body, the main body is provided with an exhaust pipe, the two sides of the main body are provided with a first connecting panel and a second connecting panel, the diameters of the first connecting panel and the second connecting panel are greater than the diameter of the main body, the edge of the first connecting panel is provided with a countersunk hole for connecting with the furnace body connecting flange, the edge of the second connecting panel is provided with a through hole for connecting with the external flange, and the second connecting panel is provided with a leak detection port.

[0007] Preferably, the side of the first connecting panel facing the main body is provided with a sealing groove, the first sealing ring is arranged in the sealing groove, and the side of the second connecting panel facing the main body is provided with a second sealing ring.

[0008] Preferably, the sealing groove has an outer diameter of 300mm, an inner diameter of 282mm, and a depth of 11.4mm.

[0009] Preferably, the edge of the second connecting panel is provided with a groove, a plurality of air cylinders are arranged around the main body, the output ends of the air cylinders are provided with clamping jaws, and the clamping jaws are used to press the second connecting panel at the groove.

[0010] Preferably, the counterbores are M8 counterbores, and there are 12 counterbores arranged around the first connecting panel; the through holes are M6 threaded through holes, and there are 12 through holes arranged around the second connecting panel.

[0011] Preferably, the first connecting panel is provided with a KF blind plate, and the end of the exhaust pipeline is provided with a CF blind plate.

[0012] Thanks to the use of the above technical scheme, the present application has the following advantages compared with the prior art:

[0013] The horizontal epitaxial furnace flange leak detection tool of the present application comprises a horizontal epitaxial furnace, a quartz furnace body, and a conveying cavity, the end of the quartz furnace body is provided with a furnace body connecting flange, the end of the conveying cavity is provided with a gate valve, the end of the gate valve away from the conveying cavity is provided with an external flange; the leak detection tool comprises a main body, the main body is provided with an exhaust pipeline, the two sides of the main body are provided with a first connecting panel and a second connecting panel, the diameters of the first connecting panel and the second connecting panel are both greater than the diameter of the main body, the edge of the first connecting panel is provided with counterbores for connecting the furnace body connecting flange, the edge of the second connecting panel is provided with through holes for connecting the external flange, and the second connecting panel is provided with a leak detection opening; the horizontal epitaxial furnace flange leak detection tool of the present application is used for re-detecting the incoming materials from the process supplier, preventing unqualified parts, reducing the time for repairing after installation, and completing the leak detection only by using one leak detection tool without the cooperation of other tools, which is convenient to use, one tool has multiple uses, and the leak detection efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] The technical scheme of the present application will be further described below with reference to the drawings:

[0015] ATTACHED Figure 1 is a perspective view of the horizontal epitaxial furnace flange leak detection tool of the present application after installation;

[0016] ATTACHED Figure 2 is a front view of the horizontal epitaxial furnace flange leak detection tool of the present application after installation;

[0017] ATTACHED Figure 3 is a perspective view of the horizontal epitaxial furnace flange leak detection tool of the present application;

[0018] ATTACHED Figure 4The utility model discloses horizontal formula epitaxial furnace flange leak detection tooling's sectional view;

[0019] Attached Figure 5 The utility model discloses horizontal formula epitaxial furnace flange leak detection tooling's sectional view;

[0020] Attached Figure 6 The utility model discloses horizontal formula epitaxial furnace flange leak detection tooling's installation partial structure's perspective view;

[0021] Attached Figure 7 The utility model discloses horizontal formula epitaxial furnace flange leak detection tooling's installation partial structure's perspective view.

[0022] 1, quartz furnace body, 2, conveying cavity, 3, furnace body connecting flange, 4, gate valve, 5, external flange, 6, main body, 7, exhaust pipeline, 8, first connecting panel, 81, counterbore, 82, sealing groove, 9, second connecting panel, 91, through -hole, 92, leak detection mouth, 93, recess, 10, first sealing ring, 11, second sealing ring, 12, air cylinder, 13, clamping jaw, 14, KF blind plate, 15, CF blind plate. DETAILED DESCRIPTION

[0023] The preferred embodiments of the utility model will be described below in conjunction with the drawings, so that the advantages and features of the utility model can be more easily understood by the person skilled in the art, and the protection scope of the utility model can be more clearly and explicitly defined.

[0024] It should be noted that when a component is referred to as "fixed" to another component, it can be directly on the other component or there can be a middle component. When a component is referred to as "connected" to another component, it can be directly connected to the other component or there can be a middle component. When a component is referred to as "provided" on another component, it can be directly provided on the other component or there can be a middle component. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] As shown in the drawings Figure 1 The utility model discloses horizontal formula epitaxial furnace flange leak detection tooling, horizontal formula epitaxial furnace includes quartz furnace body 1 and conveying cavity 2, and the end of quartz furnace body 1 is installed with furnace body connecting flange 3, and the end of conveying cavity 2 is installed with gate valve 4, and the end of gate valve 4 is connected with external flange 5 away from conveying cavity 2, and one side of gate valve is external flange 5, and the other side is conveying cavity 2. As shown in the drawings Figure 3 , attached Figure 4As shown, the leak detection tool includes a main body 6, an exhaust pipe 7 connected to the main body 6, a first connecting panel 8 and a second connecting panel 9 installed on both sides of the main body 6, the diameters of the first connecting panel 8 and the second connecting panel 9 are larger than the diameter of the main body 6, the edge of the first connecting panel 8 is provided with counterbore holes 81 for connecting with the furnace body connecting flange 3, the edge of the second connecting panel 9 is provided with through holes 91 for connecting with the external flange 5, and the second connecting panel 9 is provided with a leak detection opening 92. The counterbore holes 81 are M8 counterbore holes 81, a total of 12, distributed around the first connecting panel 8; the through holes 91 are M6 threaded through holes 91, a total of 12, distributed around the second connecting panel 9.

[0026] As shown in the accompanying drawings Figure 5 The side of the first connecting panel 8 facing the main body 6 is processed with a sealing groove 82, and the first sealing ring 10 is installed in the sealing groove 82; the side of the second connecting panel 9 facing the main body 6 is installed with the second sealing ring 11, which improves the air tightness. The outer diameter of the sealing groove 82 is 300mm, the inner diameter is 282mm, and the depth is 11.4mm.

[0027] The edge of the second connecting panel 9 is processed with a groove 93, the groove 93 is 8mm deep, a plurality of air cylinders 12 are installed around the main body 6, the output end of the air cylinder 12 is connected with a clamping jaw 13, and the clamping jaw 13 is used to press the second connecting panel 9 at the groove 93.

[0028] According to the needs, KF blind plates 14 can be installed on the first connecting panel 8, and CF blind plates 15 are installed at the end of the exhaust pipe 7.

[0029] When it is necessary to leak detect the furnace body connecting flange 3 alone, after the sealing rings are installed on the leak detection tool and the furnace body connecting flange 3, 12 M8 screws are used to pass through the counterbore holes 81 on the first connecting panel 8 to fixedly connect the leak detection tool and the furnace body connecting flange 3, 12 M6 screws are used to fix the leak detection flange, a KF16 flange is installed at the leak detection opening 92 to connect the leak detector, a KF16 blind plate is used on the opposite side to block, a CF63 blind plate is used to block the end of the exhaust pipe 7, and then the leak detector is used for leak detection work.

[0030] When the furnace body connecting flange 3 is connected with the quartz furnace body 1 and then leak detected, 12 M6 screws are used to fix the leak detection flange, a KF16 flange is installed at the leak detection opening 92 to connect the leak detector, a CF63 blind plate is used to block the end of the exhaust pipe 7, and then the leak detector is used for leak detection work.

[0031] When the air cylinder is installed and the clamping jaw can work, 12 M6 screws can not be used to fix the leak detection flange, and the air cylinder 12 can be used to press the clamping jaw 13 to the groove 93.

[0032] The horizontal type epitaxial furnace flange leak detection tool is used for re-detecting the incoming material from the process supplier, prevents unqualified parts, and reduces the time of re-repairing after installation; after the quartz furnace body 1 is installed, the detection can be carried out without the air cylinder 12 or with the air cylinder 12, so that the process is subdivided, and the installation quality and efficiency are ensured; the leak detection opening 92 uses a KF joint, which is matched with the leak detector interface, and no adapter is needed; the fixing hole positions and the fixing screw sizes are matched, and the flange does not need to be additionally processed; only one leak detection tool can complete the leak detection, no other tool is needed, the use is convenient, one object has multiple uses, and the leak detection efficiency is improved.

[0033] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and equivalent structures or equivalent process transformations using the utility model specification content, or direct or indirect application in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A horizontal epitaxial furnace flange leak detection tooling, characterized in that: The horizontal epitaxial furnace comprises a quartz furnace body and a conveying cavity, an end of the quartz furnace body is provided with a furnace body connecting flange, an end of the conveying cavity is provided with a gate valve, and an end of the gate valve away from the conveying cavity is provided with an external flange; the leak detection tool comprises a main body, an exhaust pipeline is arranged on the main body, first and second connecting face plates are arranged on two sides of the main body, the diameters of the first and second connecting face plates are greater than the diameter of the main body, a countersunk hole for connecting the furnace body connecting flange is arranged on the edge of the first connecting face plate, a through hole for connecting the external flange is arranged on the edge of the second connecting face plate, and a leak detection opening is arranged on the second connecting face plate.

2. The horizontal epitaxial furnace flange leak detection tooling of claim 1, wherein: A sealing groove is arranged on the side of the first connecting face plate facing the main body, and a first sealing ring is arranged in the sealing groove; a second sealing ring is arranged on the side of the second connecting face plate facing the main body.

3. The horizontal epitaxial furnace flange leak detection tooling of claim 2, wherein: The outer diameter of the sealing groove is 300 mm, the inner diameter is 282 mm, and the depth is 11.4 mm.

4. The horizontal epitaxial furnace flange leak detection tooling of claim 1, wherein: A groove is arranged on the edge of the second connecting face plate, a plurality of air cylinders are arranged around the main body, and clamping jaws are arranged on the output ends of the air cylinders, and the clamping jaws are used for pressing the second connecting face plate at the groove.

5. The horizontal epitaxial furnace flange leak detection tooling of claim 1, wherein: The countersunk holes are M8 countersunk holes, and there are 12 of them, which are distributed around the first connecting face plate; the through holes are M6 threaded through holes, and there are 12 of them, which are distributed around the second connecting face plate.

6. The horizontal epitaxial furnace flange leak detection tooling of claim 1, wherein: A KF blind plate is arranged on the first connecting face plate, and a CF blind plate is arranged on the end of the exhaust pipeline.

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