Mechanical vision detection device for integrated circuit chip detection

Abstract

The utility model discloses a mechanical vision detection device for integrated circuit chip detection, which relates to the technical field of vision detection devices and comprises a chip conveying mechanism, a support frame is mounted on the outer wall of the chip conveying mechanism, a side shooting mechanism is mounted on the top surface of the support frame, a top shooting mechanism is arranged on one side of the side shooting mechanism, and a top shooting mechanism is arranged on the other side of the top shooting mechanism. According to the utility model, an integrated circuit chip to be detected is transferred to the infrared sensor through the chip conveying mechanism, signals are obtained through the infrared sensor, and the camera II is controlled to shoot the chip below in a linkage manner; meanwhile, the first camera on the side is used for conducting lateral shooting on the chip, information of the side face of the chip is complemented and obtained, the appearance state of the chip can be comprehensively mastered, the defect of omission caused by single-angle shooting is avoided, and detection comprehensiveness and accuracy are greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to visual inspection device technical field especially relates to a mechanical visual inspection device for integrated circuit chip detection. BACKGROUND

[0002] With the reliability and performance requirement of electronic product higher and higher, this makes the quality control standard of integrated circuit chip increasingly strict, and the mechanical visual inspection device can accurately detect various quality indexes of the chip, including appearance quality, geometric size etc., through strict quality control, it is ensured that only the chip meeting the standard can enter the market.

[0003] In the prior art, such as the chip visual inspection device disclosed in CN219758053U, the chip visual inspection device comprises a main plate and an AOI base, the main plate is fixedly connected below the AOI base, symmetrically arranged ball screws are arranged on the outer side of the main plate, screw nut boxes are slidably connected to the ball screws, and rotating assemblies are rotatably connected to the ball screws corresponding to the upper and lower ends of the main plate.

[0004] At present, the existing visual inspection device usually adopts single station detection, and the single station detection device can only focus on image shooting of a local area of the chip, and it is difficult to complete image collection of the whole chip at one time, so that defects or abnormal conditions in other parts of the chip are easily missed, which seriously affects the comprehensiveness and accuracy of detection. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the problems that the existing visual inspection device usually adopts single station detection, the single station detection device can only focus on image shooting of a local area of the chip, and it is difficult to complete image collection of the whole chip at one time, so that defects or abnormal conditions in other parts of the chip are easily missed, which seriously affects the comprehensiveness and accuracy of detection, and provides a mechanical visual inspection device for integrated circuit chip detection.

[0006] In order to achieve the above object, the utility model discloses the following technical scheme: a kind of integrated circuit chip detection's mechanical vision detection device, including chip conveying mechanism, the outer wall of the chip conveying mechanism is equipped with support frame, the top surface of the support frame is equipped with side camera mechanism, the side camera mechanism is provided with top camera mechanism on one side, and the infrared sensor is fixedly installed on the top surface of support frame, and the top camera mechanism includes camera two, support connecting plate, side plate and fill light, the bottom end of the side plate is fixedly connected on the outer wall of support frame, one end of the support connecting plate is fixedly connected with the outer wall of side plate, and the camera two is installed in the other end of support connecting plate, and the side plate is installed on the bottom surface of support connecting plate, and the side camera mechanism includes fixed block, camera one, mounting bracket, servo motor, support plate one, guide rail, support plate two and screw rod, the support plate one is fixedly connected on the top surface of fixed block, the servo motor is installed on the side of support plate one, one end of the screw rod is fixedly connected with the output shaft end of servo motor, the camera one is fixedly installed on the inner wall of mounting bracket, the mounting bracket bottom end is screwed on the outer wall of screw rod, the other end of the screw rod is rotatably connected on the outer wall of support plate two, the bottom end of the support plate two is fixedly connected on the top surface of fixed block, and the guide rail is fixedly connected on the top surface of fixed block, and the bottom surface of mounting bracket is movably connected on the outer wall of guide rail.

[0007] Preferably, the chip conveying mechanism includes a fixed frame, a conveyor belt, a speed reducer, a limiting guide plate, a driving pulley and a driven pulley, the speed reducer is installed on the middle outer wall of the fixed frame, and the limiting guide plate is fixedly connected to the top surface of the fixed frame.

[0008] Preferably, the driven pulley is provided with two, and the two driven pulleys are rotatably connected to the inner walls of the two ends of the fixed frame.

[0009] Preferably, the driving pulley is rotatably connected to the inner wall of the fixed frame, and the conveyor belt is transmissionally connected between the two driven pulleys and the driving pulley.

[0010] Preferably, the output shaft end of the speed reducer is fixedly connected with the driving pulley by penetrating the inner wall of the fixed frame.

[0011] Preferably, the outer wall of the lower part of the support connecting plate is fixedly connected with a limiting plate, the outer wall of the limiting plate is movably connected with a sliding block, and the outer wall of the sliding block is fixedly connected with a traction rod.

[0012] Preferably, the top surface of the support connecting plate is threadedly connected with an adjusting bolt, the bottom end of the adjusting bolt is rotatably connected with the top surface of the traction rod, and the bottom end of the traction rod is fixedly connected with the top surface of the fill light.

[0013] Compared with the prior art, the utility model has the advantages and positive effects that:

[0014] 1. The utility model discloses a chip conveying mechanism is removed to the integrated circuit chip of waiting for detecting at infrared sensor, obtains the signal linkage control camera two to the chip below and carries out the shooting through infrared sensor, utilizes the camera one of side simultaneously and carries out the chip lateral shooting, supplements the information of chip side, can fully grasp the appearance state of chip, avoids the defect of single angle shooting and omits, greatly improves the overall nature and accuracy of detection.

[0015] 2. The utility model discloses a servo motor drive screw rod control mounting frame movement to control camera one to the chip of movement state and carry out the following shooting, guarantee the chip removal process also can continuously obtain clear stable image, so that the chip does not need to pause, in whole removal process can be effectively shot, improves the detection speed, adapts the rhythm of high -speed production. DRAWINGS

[0016] Figure 1 A kind of mechanical vision detection device for integrated circuit chip detection is provided for the utility model;

[0017] Figure 2 A kind of mechanical vision detection device for integrated circuit chip detection is provided for the utility model Figure 1 The structure of A in the utility model is enlarged;

[0018] Figure 3 A kind of mechanical vision detection device for integrated circuit chip detection is provided for the utility model;

[0019] Figure 4 A kind of mechanical vision detection device for integrated circuit chip detection is provided for the utility model.

[0020] Legend: 1, chip conveying mechanism;11, fixed frame;12, conveying belt;13, speed reducer motor;14, limit guide plate;15, driving pulley;16, driven pulley;2, support frame;3, side shooting mechanism;31, fixed block;32, camera one;33, mounting frame;34, servo motor;35, support plate one;36, guide rail;37, support plate two;38, screw rod;4, top shooting mechanism;41, camera two;42, support connecting plate;43, side plate;44, light supplementing lamp;45, sliding block;46, traction rod;47, adjusting bolt;48, limit plate;5, infrared sensor. DETAILED DESCRIPTION

[0021] In order to more clearly understand the above purpose, features and advantages of the utility model, the utility model is further explained below in conjunction with the drawings and examples. It should be explained that the embodiment of the application and the features in the embodiment can be combined with each other without conflict.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0023] Example 1: As Figure 1 - Figure 4 As shown, this utility model provides a machine vision inspection device for integrated circuit chip inspection, including a chip conveying mechanism 1, a support frame 2 installed on the outer wall of the chip conveying mechanism 1, a side camera mechanism 3 installed on the top surface of the support frame 2, a top camera mechanism 4 provided on one side of the side camera mechanism 3, and an infrared sensor 5 provided below the top camera mechanism 4. The infrared sensor 5 is fixedly installed on the top surface of the support frame 2. The top camera mechanism 4 includes a second camera 41, a supporting connecting plate 42, a side plate 43, and a supplementary light 44. The bottom end of the side plate 43 is fixedly connected to the outer wall of the support frame 2, one end of the supporting connecting plate 42 is fixedly connected to the outer wall of the side plate 43, the second camera 41 is installed through the other end of the supporting connecting plate 42, and the side plate 43 is installed on the bottom surface of the supporting connecting plate 42. The side-viewing mechanism 3 includes a fixed block 31, a camera 32, a mounting bracket 33, a servo motor 34, a support plate 35, a guide rail 36, a support plate 37, and a lead screw 38. The support plate 35 is fixedly connected to the top surface of the fixed block 31. The servo motor 34 is mounted on one side of the support plate 35. One end of the lead screw 38 is fixedly connected to the output shaft end of the servo motor 34. The camera 32 is fixedly mounted on the inner wall of the mounting bracket 33. The bottom end of the mounting bracket 33 is threaded onto the outer wall of the lead screw 38. The other end of the lead screw 38 is rotatably connected to the outer wall of the support plate 37. The bottom end of the support plate 37 is fixedly connected to the top surface of the fixed block 31. The guide rail 36 is fixedly connected to the top surface of the fixed block 31. The bottom surface of the mounting bracket 33 is movably connected to the outer wall of the guide rail 36.

[0024] The specific settings and functions of this embodiment are described below. The integrated circuit chip to be tested is transferred to the infrared sensor 5 by the chip conveying mechanism 1. The infrared sensor 5 obtains a signal to control the second camera 41 to take pictures of the chip below. At the same time, the first camera 32 on the side takes pictures of the chip from the side to supplement the information of the chip side. The servo motor 34 drives the lead screw 38 to control the movement of the mounting bracket 33, thereby controlling the first camera 32 to follow and take pictures of the moving chip. This ensures that clear and stable images can be continuously obtained during the chip transfer process, so that the chip can be effectively photographed throughout the transfer process without stopping, which improves the detection speed and adapts to the pace of high-speed production.

[0025] Example 2: Figure 1 - Figure 4As shown, the chip conveying mechanism 1 comprises a fixed frame 11, a conveyor belt 12, a speed reducer motor 13, a limiting guide plate 14, a driving pulley 15 and a driven pulley 16, the speed reducer motor 13 is installed on the middle outer wall of the fixed frame 11, the limiting guide plate 14 is fixedly connected to the top surface of the fixed frame 11, the driven pulley 16 is provided with two, the two driven pulleys 16 are rotatably connected to the inner walls of the two ends of the fixed frame 11 respectively, the driving pulley 15 is rotatably connected to the inner wall of the fixed frame 11, the conveyor belt 12 is transmissionally connected between the two driven pulleys 16 and the driving pulley 15, the output shaft end of the speed reducer motor 13 penetrates through the inner wall of the fixed frame 11 and is fixedly connected with the driving pulley 15, the lower outer wall of the supporting connecting plate 42 is fixedly connected with a limiting plate 48, the outer wall of the limiting plate 48 is movably connected with a sliding block 45, the outer wall of the sliding block 45 is fixedly connected with a traction rod 46, the top surface of the supporting connecting plate 42 is threadedly connected with an adjusting bolt 47, the bottom end of the adjusting bolt 47 is rotatably connected with the top surface of the traction rod 46, and the bottom end of the traction rod 46 is fixedly connected with the top surface of the light supplementing lamp 44.

[0026] The effect achieved by the whole embodiment is that the driving pulley 15 is driven to rotate by the speed reducer motor 13, the conveyor belt 12 is driven to rotate by cooperation with the limiting guide plate 14, the integrated circuit chip to be detected is moved to the infrared sensor 5, the area of the conveyor belt 12 below the camera two 41 is lighted by the light supplementing lamp 44, the image shooting quality is improved, the traction rod 46 is controlled to move up and down by rotating the adjusting bolt 47, the height of the light supplementing lamp 44 is adjusted, and the illumination light intensity is controlled.

[0027] The use method and working principle of the device are as follows: in use, the integrated circuit chip to be detected is moved to the infrared sensor 5 by driving the conveyor belt 12 to rotate by the speed reducer motor 13, the signal is obtained by the infrared sensor 5, the camera two 41 is controlled to shoot the chip below in linkage, the camera one 32 on the side is used to shoot the chip from the side, the information of the side of the chip is supplemented, the mounting frame 33 is controlled to move by the servo motor 34 driving the lead screw 38, the camera one 32 is controlled to shoot the chip in the moving state, the clear and stable image is ensured to be continuously obtained during the movement of the chip, the chip is not stopped, the chip is effectively shot during the whole movement, the area of the conveyor belt 12 below the camera two 41 is lighted by the light supplementing lamp 44, the image shooting quality is improved, the height of the light supplementing lamp 44 is adjusted by rotating the adjusting bolt 47 to control the traction rod 46 to move up and down, the illumination light intensity is controlled.

[0028] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application in other forms, and any skilled person in the art can modify or change the above disclosed technical content to equivalent embodiments applied to other fields with equivalent changes, but any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application without departing from the technical scheme of the present application still falls within the protection scope of the present application.

Claims

1. A mechanical vision inspection apparatus for integrated circuit chip inspection, comprising a chip conveying mechanism (1), characterized in that: The outer wall of the chip conveying mechanism (1) is provided with a support frame (2), the top surface of the support frame (2) is provided with a side shooting mechanism (3), one side of the side shooting mechanism (3) is provided with a top shooting mechanism (4), the lower part of the top shooting mechanism (4) is provided with an infrared sensor (5), the infrared sensor (5) is fixedly installed on the top surface of the support frame (2), the top shooting mechanism (4) comprises a camera two (41), a support connecting plate (42), a side plate (43) and a light supplementing lamp (44), the bottom end of the side plate (43) is fixedly connected to the outer wall of the support frame (2), one end of the support connecting plate (42) is fixedly connected to the outer wall of the side plate (43), the camera two (41) is installed through the other end of the support connecting plate (42), the side plate (43) is installed on the bottom surface of the support connecting plate (42), the side shooting mechanism (3) comprises a fixed block (31), a camera one (32), a mounting frame (33), a servo motor (34), a support plate one (35), a guide rail (36), a support plate two (37) and a lead screw (38), the support plate one (35) is fixedly connected to the top surface of the fixed block (31), the servo motor (34) is installed on one side of the support plate one (35), one end of the lead screw (38) is fixedly connected to the output shaft end of the servo motor (34), the camera one (32) is fixedly installed on the inner wall of the mounting frame (33), the bottom end of the mounting frame (33) is threadedly sleeved on the outer wall of the lead screw (38), the other end of the lead screw (38) is rotatably connected to the outer wall of the support plate two (37), the bottom end of the support plate two (37) is fixedly connected to the top surface of the fixed block (31), the guide rail (36) is fixedly connected to the top surface of the fixed block (31), and the bottom surface of the mounting frame (33) is movably connected to the outer wall of the guide rail (36).

2. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 1, characterized by: The chip conveying mechanism (1) comprises a fixed frame (11), a conveying belt (12), a speed reducer (13), a limiting guide plate (14), a driving pulley (15) and a driven pulley (16), the speed reducer (13) is installed on the middle outer wall of the fixed frame (11), and the limiting guide plate (14) is fixedly connected to the top surface of the fixed frame (11).

3. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 2, wherein: The driven pulley (16) is provided with two, and the two driven pulleys (16) are rotatably connected to the inner walls of the two ends of the fixed frame (11).

4. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 3, wherein: The driving pulley (15) is rotatably connected to the inner wall of the fixed frame (11), and the two driven pulleys (16) are in transmission connection with the driving pulley (15).

5. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 4, wherein: The output shaft end of the speed reducer (13) penetrates the inner wall of the fixed frame (11) and is fixedly connected with the driving pulley (15).

6. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 1, wherein: The lower outer wall of the support connecting plate (42) is fixedly connected with a limiting plate (48), the outer wall of the limiting plate (48) is movably connected with a sliding block (45), and the outer wall of the sliding block (45) is fixedly connected with a traction rod (46).

7. The mechanical vision inspection apparatus for inspecting an integrated circuit chip according to claim 6, wherein: The top surface of the support web (42) is threaded with an adjusting bolt (47), the bottom end of the adjusting bolt (47) is rotationally connected with the top surface of a traction rod (46), the bottom end of the traction rod (46) is fixedly connected with the top surface of the light supplement lamp (44).

Images