Pressurizing device suitable for heavy grinding and polishing equipment

Abstract

The utility model provides a pressurizing device applicable to heavy grinding and polishing equipment, which belongs to the technical field of pressurizing devices of grinding and polishing machines and comprises a gas-liquid conversion cylinder, a gas-liquid linkage cylinder and a hydraulic oil storage cylinder. A first hydraulic oil inlet / outlet is formed in the bottom of the gas-liquid conversion cylinder; the gas-liquid linkage cylinder comprises a hydraulic cylinder and an air cylinder; the cylinder is arranged above the hydraulic cylinder, a cylinder pressurizing shaft is arranged in the cylinder, and a first cylinder gas inlet and outlet and a second cylinder gas inlet and outlet are formed in the top and the bottom respectively; the first end of the air cylinder pressurizing shaft can extend into the hydraulic cylinder; a second hydraulic oil inlet / outlet and a third hydraulic oil inlet / outlet are respectively formed in the top and the bottom of the hydraulic cylinder; and a fourth hydraulic oil inlet / outlet is formed in the bottom of the hydraulic oil storage cylinder. Different from pure air cylinder lifting pressurization, the hydraulic lifting device is better in stability, more stable in hydraulic lifting and larger in provided pressure.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of polishing machine pressurizing device, specifically relates to a pressurizing device suitable for heavy grinding and polishing equipment. BACKGROUND

[0002] With the rapid development of semiconductor industry, the stability and precision of the machine as a whole are required more and more. Due to the strict requirements of precision machining field on workpiece thickness control, surface quality and machining precision, in the process of plane grinding and polishing, the workpiece needs to be in constant and accurate pressure contact with the grinding disc to ensure stable material removal rate and ideal surface roughness. With the progress of science and technology and the upgrading of market demand, the lifting and pressurizing structure of the grinding and polishing machine is also constantly innovated and improved to meet the demand of modern industry for high-precision and high-efficiency grinding and polishing technology. At present, the main shaft bearing of the polishing machine mostly uses cylinder pressurizing, which is relatively stable in medium load, but there are still hidden dangers in large heavy-duty grinding and polishing machines, which may vibrate during work or make the pressurizing pressure of the upper disc unstable, so that the force on the workpiece is uneven, the machining precision of semiconductor products is reduced, and there are technical defects in production. Therefore, the utility model provides a pressurizing device suitable for heavy grinding and polishing equipment. SUMMARY

[0003] The utility model aims at providing a pressurizing device suitable for heavy grinding and polishing equipment.

[0004] To solve the above technical problems, the utility model aims at realizing as follows:

[0005] A pressurizing device suitable for heavy grinding and polishing equipment, comprising: a base; a gas-liquid conversion cylinder, a gas-liquid linkage cylinder and a hydraulic oil storage cylinder are arranged on the base;

[0006] The gas-liquid conversion cylinder is internally provided with a first isolation piston, a first gas inlet and outlet is arranged at the top, and a first hydraulic oil inlet and outlet is arranged at the bottom;

[0007] The gas-liquid linkage cylinder comprises a hydraulic cylinder and a gas cylinder; the gas cylinder is arranged above the hydraulic cylinder, is internally provided with a gas cylinder pressurizing shaft, and is provided with a gas cylinder first gas inlet and outlet and a gas cylinder second gas inlet and outlet at the top and the bottom respectively; a gas cylinder piston is arranged at the first end of the gas cylinder pressurizing shaft, and the second end can extend into the hydraulic cylinder;

[0008] A hydraulic cylinder output shaft is arranged in the hydraulic cylinder, a second hydraulic oil inlet and outlet and a third hydraulic oil inlet and outlet are arranged at the top and the bottom respectively; a hydraulic cylinder piston is arranged at the first end of the hydraulic cylinder output shaft, and the second end extends out of the hydraulic cylinder;

[0009] The hydraulic oil storage cylinder is internally provided with a second isolation piston, a second gas inlet and outlet is arranged at the top, and a fourth hydraulic oil inlet and outlet is arranged at the bottom.

[0010] The first hydraulic oil inlet and outlet is communicated with the second hydraulic oil inlet and outlet, and the third hydraulic oil inlet and outlet is communicated with the fourth hydraulic oil inlet and outlet.

[0011] As a preferred scheme of the above scheme, the gas-liquid linkage cylinder is located between the gas-liquid conversion cylinder and the hydraulic oil storage cylinder.

[0012] As a preferred scheme of the above scheme, the gas-liquid conversion cylinder, the gas-liquid linkage cylinder and the hydraulic oil storage cylinder are arranged along a straight line.

[0013] As a preferred scheme of the above scheme, the diameter of the hydraulic cylinder is the same as the diameter of the gas cylinder.

[0014] As a preferred scheme of the above scheme, a groove is arranged at the top of the base, and the gas-liquid conversion cylinder, the gas-liquid linkage cylinder and the hydraulic oil storage cylinder are arranged in the groove.

[0015] The utility model discloses a kind of gas-liquid linkage cylinders, gas-liquid conversion cylinders and hydraulic oil storage cylinders, which are used in large-scale grinding and polishing machine field, and make the upper disc part of grinding and polishing disc more stable lifting and more stable to complete pressurizing action, which is different from simple cylinder lifting and pressurizing, and has better stability, more stable hydraulic lifting, and provides greater pressure, so that the machine can be further developed in the direction of heavy load, cylinder barrel is arranged in parallel, better utilize space, and increase space utilization. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 For the utility model, it is viewed from above.

[0017] Figure 2 For Figure 1 Sectional view.

[0018] In the drawing: 1, base; 2, gas-liquid conversion cylinder; 21, first isolation piston; 22, first gas inlet and outlet; 23, first hydraulic oil inlet and outlet; 3, hydraulic oil storage cylinder; 31, second isolation piston; 32, second gas inlet and outlet; 33, fourth hydraulic oil inlet and outlet; 4, hydraulic cylinder; 41, hydraulic cylinder output shaft; 42, second hydraulic oil inlet and outlet; 43, third hydraulic oil inlet and outlet; 44, hydraulic cylinder piston; 5, gas cylinder; 51, gas cylinder pressurizing shaft; 52, gas cylinder first gas inlet and outlet; 53, gas cylinder second gas inlet and outlet; 54, gas cylinder piston. DETAILED DESCRIPTION

[0019] The utility model is further illustrated below in combination with the drawings and specific embodiments.

[0020] As Figure 1 and Figure 2 A pressurizing device suitable for heavy grinding and polishing equipment, comprising: a base 1, the base 1 is provided with a gas-liquid conversion cylinder 2, a gas-liquid linkage cylinder and a hydraulic oil storage cylinder 3. Specifically, a groove is formed in the top of the base 1, and the gas-liquid conversion cylinder 2, the gas-liquid linkage cylinder and the hydraulic oil storage cylinder 3 are arranged in the groove. At the same time, the gas-liquid conversion cylinder 2, the gas-liquid linkage cylinder and the hydraulic oil storage cylinder 3 are arranged along a straight line, and the gas-liquid linkage cylinder is located between the gas-liquid conversion cylinder 2 and the hydraulic oil storage cylinder 3.

[0021] The gas-liquid conversion cylinder 2 is internally provided with a first isolation piston 21, a first gas inlet and outlet 22 is arranged at the top, and a first hydraulic oil inlet and outlet 23 is arranged at the bottom. The first isolation piston 21 separates gas and liquid, and when gas is injected into the gas-liquid conversion cylinder 2, hydraulic oil is extruded.

[0022] The gas-liquid linkage cylinder comprises a hydraulic cylinder 4 and a gas cylinder 5, the gas cylinder 5 is arranged directly above the hydraulic cylinder 4, and the diameter of the hydraulic cylinder 4 is the same as that of the gas cylinder 5. The gas cylinder 5 is internally provided with a gas cylinder supercharging shaft 51, and a gas cylinder first gas inlet and outlet 52 and a gas cylinder second gas inlet and outlet 53 are arranged at the top and the bottom respectively. The gas cylinder supercharging shaft 51 is provided with a gas cylinder piston 54 at the first end, and the second end can be inserted into the hydraulic cylinder 4. The gas cylinder supercharging shaft 51 can be lifted by injecting gas into the gas cylinder 5.

[0023] The hydraulic cylinder 4 is internally provided with a hydraulic cylinder output shaft 41, and a second hydraulic oil inlet and outlet 42 and a third hydraulic oil inlet and outlet 43 are arranged at the top and the bottom respectively. The hydraulic cylinder output shaft 41 is provided with a hydraulic cylinder piston 44 at the first end, and the second end extends out of the hydraulic cylinder 4. The hydraulic cylinder piston 44 divides the hydraulic cylinder 4 into two cavities, and when the hydraulic oil in the two cavities changes, the hydraulic cylinder output shaft 41 can be lifted. The hydraulic cylinder output shaft 41 is connected to the upper grinding disc at the bottom end to drive the upper disc to lift.

[0024] The hydraulic oil storage cylinder 3 is internally provided with a second isolation piston 31, a second gas inlet and outlet 32 is arranged at the top, and a fourth hydraulic oil inlet and outlet 33 is arranged at the bottom. The second isolation piston 31 separates gas and liquid.

[0025] The first hydraulic oil inlet and outlet 23 is in communication with the second hydraulic oil inlet and outlet 42, and the third hydraulic oil inlet and outlet 43 is in communication with the fourth hydraulic oil inlet and outlet 33.

[0026] Working process:

[0027] Fast descent: gas from the first gas outlet 21 into the gas-liquid conversion cylinder 2, hydraulic oil through the first hydraulic oil inlet and outlet 23 discharge, and by the second hydraulic oil inlet and outlet 42 formally into the hydraulic cylinder 4, drive hydraulic cylinder piston 44 and hydraulic cylinder output shaft 41 complete vertical direction of the down action, while the hydraulic cylinder piston 44 below the hydraulic oil, from the third hydraulic oil inlet and outlet 43 discharge, from the fourth hydraulic oil inlet and outlet 33 into the hydraulic oil storage cylinder 3, at this time complete the fast descent of the upper disc portion action.

[0028] Slow descent and pressurization action: air from the first gas inlet and outlet 52 into the cylinder, the cylinder piston 54 below the gas from the second gas inlet and outlet 53 discharge, cylinder pressure shaft 51 complete the descent action; cylinder pressure shaft 51 into the hydraulic cylinder 4, reducing the space of the upper cavity of the hydraulic cylinder 4, drive hydraulic shaft output shaft 51 slowly down, to the work position can not be lowered, at this time the cylinder pressure shaft 51 of the descent makes the hydraulic cylinder 4 upper cavity of the hydraulic oil pressure begins to increase, resulting in the effect of pressurization.

[0029] When the cylinder pressure shaft 51 first rises, open the hydraulic cylinder 4 upper cavity of the hydraulic oil backflow channel, the subsequent hydraulic oil lower cavity of the oil from the hydraulic oil storage cylinder 3 backflow, the hydraulic oil of the upper cavity discharge to the gas-liquid conversion cylinder 2, complete the rising action.

[0030] The above describes the preferred embodiments of the present application in detail. It should be understood that those skilled in the art can make many modifications and changes without creative labor according to the concept of the present application. Therefore, any technical solution obtained by logical analysis, reasoning or limited experiment based on the existing technology according to the concept of the present application shall be within the protection scope defined by the claims.

Claims

1. A pressurizing device suitable for use in a heavy duty lapping and polishing apparatus, characterized by, The utility model relates to a kind of gas-liquid conversion cylinder, gas-liquid linkage cylinder and hydraulic oil storage cylinder, which are arranged on base (1). The gas-liquid conversion cylinder (2) is internally provided with a first isolation piston (21), a first gas inlet and outlet (22) is arranged on the top, and a first hydraulic oil inlet and outlet (23) is arranged on the bottom. The gas-liquid linkage cylinder includes a hydraulic cylinder (4) and a gas cylinder (5). The gas cylinder (5) is arranged above the hydraulic cylinder (4) and internally provided with a gas cylinder supercharging shaft (51). A gas cylinder first gas inlet and outlet (52) and a gas cylinder second gas inlet and outlet (53) are arranged on the top and the bottom respectively. The gas cylinder supercharging shaft (51) is provided with a gas cylinder piston (54) on the first end, and the second end can extend into the hydraulic cylinder (4). The hydraulic cylinder (4) is internally provided with a hydraulic cylinder output shaft (41), a second hydraulic oil inlet and outlet (42) and a third hydraulic oil inlet and outlet (43) are arranged on the top and the bottom respectively. The hydraulic cylinder output shaft (41) is provided with a hydraulic cylinder piston (44) on the first end, and the second end extends out of the hydraulic cylinder (4). The hydraulic oil storage cylinder (3) is internally provided with a second isolation piston (31), a second gas inlet and outlet (32) is arranged on the top, and a fourth hydraulic oil inlet and outlet (33) is arranged on the bottom. The first hydraulic oil inlet and outlet (23) is communicated with the second hydraulic oil inlet and outlet (42). The third hydraulic oil inlet and outlet (43) is communicated with the fourth hydraulic oil inlet and outlet (33). The gas-liquid linkage cylinder is located between the gas-liquid conversion cylinder (2) and the hydraulic oil storage cylinder (3).

2. A pressurizing device for use in a heavy duty lapping and polishing apparatus according to claim 1, wherein The gas-liquid conversion cylinder (2), the gas-liquid linkage cylinder and the hydraulic oil storage cylinder (3) are arranged along a straight line.

3. A pressurizing device for use in a heavy duty lapping and polishing apparatus according to claim 1, wherein The diameter of the hydraulic cylinder (4) is the same as the diameter of the gas cylinder (5).

4. The pressurizing device for heavy-duty lapping and polishing equipment according to claim 1, wherein The base (1) is provided with a groove on the top. The gas-liquid conversion cylinder (2), the gas-liquid linkage cylinder and the hydraulic oil storage cylinder (3) are arranged in the groove.

5. The pressurizing device for heavy duty lapping and polishing equipment according to claim 1, wherein ​

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