Rigidity measuring device and grinding and polishing equipment with rigidity detecting function

Abstract

The utility model discloses a rigidity measuring device and grinding and polishing equipment with a rigidity detection function, the rigidity measuring device is used for measuring the rigidity of the grinding and polishing equipment, and the rigidity measuring device comprises a force application piece, a pressure detection piece and a first displacement detection piece, the force application piece and the pressure detection piece are arranged between a main shaft and a working table of the grinding and polishing equipment, the force application piece is used for applying axial force to the main shaft, the pressure detection piece is used for detecting the axial force, the first displacement detection piece is arranged on the main shaft, and the second displacement detection piece is arranged on the working table. The first displacement detection piece is used for detecting the deformation displacement of the main shaft in the axial direction when the main shaft is subjected to the axial force, and the rigidity of the main shaft can be calculated based on the axial force and the deformation displacement. The rigidity of the main shaft can be simply and accurately measured, and the measurement cost is low.

Description

Technical Field

[0001] This utility model relates to the field of grinding and polishing equipment technology, specifically to a stiffness measuring device and a grinding and polishing equipment with stiffness detection function. Background Technology

[0002] Grinding and polishing equipment is an important processing tool in the precision manufacturing industry, widely used for processing various precision parts and semiconductor materials such as silicon wafers, silicon carbide wafers, sapphire, and other brittle and hard materials. The rigidity of the spindle is a crucial factor affecting the performance of grinding and polishing equipment. Insufficient spindle rigidity can lead to decreased processing accuracy and may even damage the workpiece. Therefore, accurate measurement of the spindle rigidity is essential.

[0003] Mechanical stiffness measurement technology is a technique for measuring the stiffness of objects and is widely used in fields such as mechanical manufacturing and structural engineering. Existing stiffness measurement devices for the spindles of grinding and polishing equipment require complex operation and expensive equipment, and the accuracy of the measurement results is limited, which cannot meet the needs of high-precision machining. Therefore, it is necessary to improve the existing stiffness measurement devices for spindles. Utility Model Content

[0004] To address at least one of the problems mentioned in the background art, this utility model provides a stiffness measuring device and a grinding and polishing equipment with stiffness detection function. The stiffness measuring device can simply and accurately measure the stiffness of the spindle with low measurement cost.

[0005] The specific technical solution provided by this utility model is as follows:

[0006] In a first aspect, a stiffness measuring device is provided for measuring the stiffness of a grinding and polishing equipment. The stiffness measuring device includes a force-applying component, a pressure-detecting component, and a first displacement-detecting component. The force-applying component and the pressure-detecting component are disposed between the spindle and the worktable of the grinding and polishing equipment. The force-applying component is used to apply an axial force to the spindle, and the pressure-detecting component is used to detect the axial force. The first displacement-detecting component is disposed on the spindle and is used to detect the axial deformation displacement of the spindle when it is subjected to an axial force.

[0007] As a preferred embodiment of the above scheme, the force-applying component includes a cylinder, which is mounted on the worktable, and the pressure detection component is mounted on the piston shaft of the cylinder.

[0008] As a preferred embodiment of the above scheme, the pressure detection component includes a first end face and a second end face, the first end face abutting against the main shaft, and the second end face fixed to the piston shaft of the cylinder.

[0009] As a preferred form of the above solution, the rigidity measuring device further comprises a second displacement detecting member, which is arranged on the worktable and is used to detect the deformation displacement of the worktable in the axial direction when the spindle is subjected to the axial force.

[0010] As a preferred form of the above solution, the rigidity measuring device further comprises a third displacement detecting member, which is arranged on the base of the grinding and polishing equipment and is used to detect the deformation displacement of the base in the axial direction when the spindle is subjected to the axial force.

[0011] As a preferred form of the above solution, the spindle is arranged on a feeding mechanism of the grinding and polishing equipment, and the feeding mechanism is used to drive the spindle to feed towards the worktable.

[0012] As a preferred form of the above solution, the rigidity measuring device further comprises a fourth displacement detecting member, which is arranged on a support base of the grinding and polishing equipment and is used to detect the deformation displacement of the support base in the radial direction and towards the support base when the spindle is subjected to the axial force.

[0013] As a preferred form of the above solution, the feeding mechanism comprises a driving member and a sliding member connected with the driving member, and the spindle is arranged on the sliding member, and the driving member drives the spindle to feed towards the worktable through the sliding member.

[0014] As a preferred form of the above solution, the rigidity measuring device further comprises a fifth displacement detecting member, which is arranged on the sliding member and is used to detect the deformation displacement of the feeding mechanism in the axial direction when the spindle is subjected to the axial force.

[0015] As a preferred form of the above solution, the support base comprises a guide rail member, the sliding member is arranged on the guide rail member and slides along the guide rail member, and the fourth displacement detecting member is arranged on the guide rail member.

[0016] By means of the above technical solution, the rigidity measuring device of the utility model can measure the rigidity of the spindle when the spindle is stationary, the force applying member applies the axial force to the spindle to simulate the feeding force borne by the spindle when the spindle feeds, the pressure detecting member detects the axial force applied by the force applying member to the spindle, the first displacement detecting member detects the deformation displacement of the spindle when the spindle is subjected to the axial force, and finally the rigidity of the spindle is calculated by using the rigidity calculation formula: spindle rigidity=axial pressure / spindle deformation displacement, so that the rigidity of the spindle can be measured only by arranging the force applying member, the pressure detecting member and the first displacement detecting member, the measurement cost is low, the operation is simple, the measurement is accurate by using the formula, and the demand for high-precision machining can be met.

[0017] In a second aspect, a grinding and polishing equipment with rigidity detection function is provided, which comprises a spindle, a worktable and the rigidity measuring device as above. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without any creative effort.

[0019] Figure 1 FIG. 1 is a structural schematic diagram of a rigidity measuring device according to the present application;

[0020] Figure 2 FIG. 2 is a structural schematic diagram of a support seat and a feeding mechanism according to the present application;

[0021] Figure 3 FIG. 3 is a structural schematic diagram of a cylinder and a pressure detecting piece according to the present application;

[0022] Figure 4 FIG. 4 is a structural schematic diagram of a main shaft according to the present application;

[0023] Figure 5 FIG. 5 is a structural schematic diagram of a workbench and a base according to the present application. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present application clearer, the following will combine the drawings in the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without any creative effort are within the protection scope of the present application.

[0025] It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or one or more intermediate elements can exist therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or one or more intermediate elements can exist therebetween. The terms "vertical", "horizontal", "left", "right", "up", "down", "inner", "outer", "bottom", etc. used in the present specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", etc. are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0026] As described in the background section, mechanical stiffness measurement technology is a technique for measuring the stiffness of an object. It is widely used in fields such as mechanical manufacturing and structural engineering. Stiffness is usually represented by K, and stiffness can be calculated using the existing stiffness calculation formula: K = F / δ, where F refers to the applied force and δ refers to the amount of deformation produced by the object. Current stiffness measurements of grinding and polishing equipment mainly estimate the stiffness of the spindle and worktable through experimental methods or theoretical calculations, or through simple mechanical testing methods. However, the accuracy of these methods is limited, failing to meet the requirements of high-precision machining. Furthermore, these methods are complex to operate, requiring specialized technicians, which is not conducive to large-scale application. They are also costly, increasing production costs. In addition, existing measurement technologies cannot measure the stiffness of the entire grinding and polishing equipment, failing to identify the weaker parts, which hinders the optimization and improvement of the equipment.

[0027] This invention, by detecting pressure and displacement data, can easily and accurately measure the overall (various parts) stiffness of a grinding and polishing equipment at a low cost. Furthermore, analysis of the measurement results can identify areas of weak stiffness within the equipment, providing guidance for optimizing system stiffness and thus improving the overall system performance and stability. Air bearings, which use gas as a lubricant, offer advantages such as low friction, high speed, and high precision, and are widely used in high-speed precision equipment. In existing grinding and polishing equipment, the spindle and worktable are typically driven directly by a motor to rotate the air bearing. The stiffness of the air bearing significantly impacts the performance of the grinding and polishing equipment; therefore, accurate measurement of air bearing stiffness is crucial. This invention can simultaneously measure the stiffness of the air bearing while measuring the stiffness of the spindle and worktable. The embodiments of this invention are explained in detail below.

[0028] Example 1

[0029] See Figure 1 This utility model provides a stiffness measuring device for measuring the stiffness of a grinding and polishing equipment. The device includes a force-applying component 3, a pressure detection component 4, and a first displacement detection component 51. The force-applying component 3 and the pressure detection component 4 are disposed between the main shaft 1 and the worktable 2 of the grinding and polishing equipment. The force-applying component 3 applies an axial force to the main shaft 1, the pressure detection component 4 detects the axial force, and the first displacement detection component 51 is disposed on the main shaft 1. The first displacement detection component 51 detects the axial displacement of the main shaft 1 when subjected to the axial force (i.e., the displacement of the main shaft 1 in the axial direction). Figure 1 The deformation displacement in the z-direction.

[0030] See Figure 4In the embodiment, the main shaft 1 is arranged above the workbench 2, no force applying element 3 and pressure detecting element 4 are arranged between the main shaft 1 and the workbench 2 when the grinding and polishing process is performed, the workpiece is arranged on the workbench 2, the main shaft 1 and the workbench 2 are rotated, the main shaft 1 is fed downward to the workbench 2, the grinding wheel on the main shaft 1 cuts the workpiece, and the workpiece is not processed when the stiffness is measured, that is, the main shaft 1 and the workbench 2 are stationary; the main shaft 1 comprises a shell 11, a main shaft motor 12, an upper air bearing 13 and a connecting flange 14, the main shaft motor 12 is arranged in the shell 11, the lower end of the rotating shaft of the main shaft motor 12 is connected to the upper air bearing 13 and drives the upper air bearing 13 to rotate, the connecting flange 14 is arranged at the lower end of the upper air bearing 13 and is driven to rotate by the upper air bearing 13 during processing, the first displacement detecting element 51 is arranged on the connecting flange 14, the force applying element 3 applies an axial force to the main shaft 1 to simulate the feeding force borne by the main shaft 1 during feeding when the stiffness is measured, the pressure detecting element 4 is in contact with the bottom surface of the connecting flange 14 and is used to detect the axial pressure applied by the force applying element 3 to the main shaft 1, and the first displacement detecting element 51 is used to detect the deformation displacement of the main shaft 1 in the z direction when the main shaft 1 is subjected to the axial force, the deformation displacement comprises a stress deformation displacement of the main shaft 1 and a gas film compression amount of the upper air bearing 13, and finally the stiffness of the main shaft 1 is calculated by using a stiffness calculation formula: main shaft stiffness=axial pressure / main shaft deformation displacement, and the stiffness of the upper air bearing 13 is also obtained.

[0031] Referring to Figure 3 The force applying element 3 comprises a gas cylinder 31 and a gas control assembly (not shown) connected to the gas cylinder 31, the gas cylinder 31 is arranged on the workbench 2, the pressure detecting element 4 is arranged on the piston shaft of the gas cylinder 31, and the force applying element 3 can simulate the force borne by the main shaft 1 under different working conditions. In the embodiment, the gas cylinder 31 is arranged on the workbench 2, so that the gas cylinder 31 and the pressure detecting element 4 can be conveniently taken away from the workbench 2 after the stiffness measurement is completed, and the normal grinding and polishing operation between the main shaft 1 and the workbench 2 is not affected; the gas cylinder 31 is a high-precision gas cylinder, the gas control assembly comprises an electromagnetic valve, a high-precision proportional valve, a speed control valve, an overflow pressure reducing valve and the like, the gas control assembly is connected to the gas cylinder 31 through a gas pipe and is used to accurately control the force applied by the piston shaft of the gas cylinder 31, so that the axial force applied by the gas cylinder 31 to the main shaft 1 can be accurately controlled. The pressure detecting element 4 comprises a first end surface 41 and a second end surface 42, the area of the first end surface 41 is greater than that of the second end surface 42, the first end surface 41 abuts against the main shaft 1, and the second end surface 42 is fixed on the piston shaft of the gas cylinder 31. In the embodiment, the cross section of the pressure detecting element 4 is T-shaped, and the cross section of the first end surface 41 is circular. The pressure detecting element 4 with the T-shaped cross section and the circular cross section of the first end surface 41 can be conveniently fixedly connected to the piston shaft of the gas cylinder 31 and can increase the contact surface with the main shaft 1, so that the axial force applied by the gas cylinder 31 to the main shaft 1 is fast and effective.

[0032] Referring to Figure 1, Figure 5 The stiffness measuring device also includes a second displacement detection element 52, which is disposed on the worktable 2. The second displacement detection element 52 is used to detect the displacement of the worktable 2 in the axial direction (i.e., when the spindle 1 is subjected to the axial force) when the spindle 1 is subjected to the axial force. Figure 1 The deformation displacement (in the z-direction). In this embodiment, the worktable 2 includes, from top to bottom, a machining panel 21, a lower air bearing 22, a machining table base 23, and a machining table motor 24. The upper end of the rotating shaft of the machining table motor 24 is connected to the lower air bearing 22 and drives the lower air bearing 22 to rotate during machining. The lower air bearing 22 and the machining panel 21 are set on the machining table base 23, which is made of high-strength cast iron. The machining panel 21 is set on the upper end of the lower air bearing 22 and is driven to rotate by the lower air bearing 22 during machining. The machining panel 21 can support... The force-applying component 3 and the second displacement detection component 52 are mounted on the machining panel 21. Since the worktable 2 bears a reverse force when the force-applying component 3 applies force to the spindle 1, the second displacement detection component 52 can detect the deformation displacement of the worktable 2 in the z direction. This deformation displacement includes the stress deformation displacement of the worktable 2 and the air film compression of the lower air bearing 22. Therefore, the stiffness of the worktable 2 can be calculated using the stiffness calculation formula: worktable stiffness = axial pressure / worktable deformation displacement. At the same time, the stiffness of the lower air bearing 22 is also obtained.

[0033] See Figure 1 The stiffness measuring device also includes a third displacement detection element 53. The third displacement detection element 53 and the worktable 2 are mounted on the base 6 of the grinding and polishing equipment. The third displacement detection element 53 is used to detect the axial displacement of the base 6 when the spindle 1 is subjected to the axial force (i.e., the displacement of the base 6 in the axial direction). Figure 1 The deformation displacement in the z-direction. In this embodiment, the base 6 is made of high-strength cast iron to ensure the stability of the equipment. The bottom of the base 6 is provided with several anti-vibration feet 7. The machining table base 23 and the machining table motor 24 are fixed on the base 6. When the stiffness is measured, the base 6 bears the reverse force when the force-applying component 3 applies force to the spindle 1. The third displacement detection component 53 can detect the deformation displacement of the base 6 in the z-direction, so that the stiffness of the base 6 can be calculated using the stiffness calculation formula: base stiffness = axial pressure / base deformation displacement.

[0034] See Figure 2 The main spindle 1 is mounted on the feed mechanism 9 of the grinding and polishing equipment. The feed mechanism 9 is used to drive the main spindle 1 to feed towards the worktable 2. The feed mechanism 9 is mounted on the support base 8 of the grinding and polishing equipment. The support base 8 is a column used to support the feed mechanism 9 and the main spindle 1. The support base 8 is made of high-strength cast iron to ensure the stability of the equipment. The stiffness measuring device also includes a fourth displacement detection element 54, which is mounted on the support base 8. The fourth displacement detection element 54 is used to detect the radial displacement of the support base 8 in the direction close to the support base 8 when the main spindle 1 is subjected to axial force (i.e.,...).Figure 1 The fourth displacement detecting member 54 is arranged on the guide rail member 81. When the force applying member 3 applies force to the spindle 1, the guide rail member 81 will be stressed in the y direction and deformed in the y direction, so that the rigidity of the support seat 8 can be calculated by the rigidity calculation formula: support seat rigidity = axial pressure / support seat deformation displacement.

[0035] Referring to Figure 2 In the embodiment, the driving member 91 comprises a driving motor 911 and a ball screw 912, the sliding member 92 comprises a nut 921, a sliding block 922, a sliding plate 923 and a guide block 924, and the guide rail member 81 comprises a vertical linear rail. The driving motor 911 and the linear rail are fixed on the support seat 8, the ball screw 912 is rotatably arranged on the support seat 8, the guide block 924 is fixed on the sliding plate 923 and cooperates with the linear rail, the ball screw 912 is threadedly connected with the nut 921, the nut 921 is fixed in the sliding block 922, the sliding block 922 is fixedly connected with the sliding plate 923, and the spindle 1 is fixed on the sliding plate 923. When the spindle is fed, the driving motor 911 drives the ball screw 912 to rotate, the ball screw 912 drives the nut 921, the sliding block 922, the sliding plate 923 and the spindle 1 to move downward, and the guide block 924 moves along the linear rail to guide the position of the spindle 1. The rigidity measuring device further comprises a fifth displacement detecting member 55 arranged on the sliding member 92, specifically, the fifth displacement detecting member 55 is arranged on the nut 921. The fifth displacement detecting member 55 is used for detecting the deformation displacement of the feeding mechanism 9 in the z direction when the force applying member 3 applies force to the spindle 1, so that the rigidity of the feeding mechanism 9 can be calculated by the rigidity calculation formula: feeding mechanism rigidity = axial pressure / feeding mechanism deformation displacement.

[0036] It should be noted that, referring to Figure 1 , Figure 2 In the embodiment, the measurement reference points of the first displacement detecting member 51 and the second displacement detecting member 52 when detecting the deformation displacement are located on the top surface of the base 6 (A in Figure 1 , the measurement reference points of the third displacement detecting member 53 and the fourth displacement detecting member 54 when detecting the deformation displacement are both taken as one fixed position point outside (D in Figure 1 and B in Figure 2 , and the measurement reference point of the fifth displacement detecting member 55 when detecting the deformation displacement is located on the support seat 8 (C in Figure 2The first displacement detecting member 51, the second displacement detecting member 52, the third displacement detecting member 53, the fourth displacement detecting member 54 and the fifth displacement detecting member 55 in the embodiment are all high-precision displacement sensors, and the pressure detecting member 4 is a high-precision pressure sensor.

[0037] The rigidity measuring device of the utility model can automatically record and detect data in real time without manual operation, greatly simplifies the operation process, reduces the operation difficulty, and has high measurement accuracy and low cost.

[0038] Embodiment two

[0039] The utility model provides a kind of rigidity detection function's polishing and grinding equipment, including main shaft 1, workbench 2, pedestal 6, support seat 8, feed mechanism 9 and like embodiment one rigidity measuring device.

[0040] The polishing and grinding equipment of the embodiment is not provided with force applying member 3 and pressure detecting member 4 between main shaft 1 and workbench 2 when polishing and grinding processing is carried out, workpiece is placed on workbench 2, and abrasive wheel is equipped on the bottom surface of connecting flange 14, main shaft 1 and workbench 2 are rotated, feed mechanism 9 drives main shaft 1 to descend and feed to workbench 2, and abrasive wheel carries out cutting to workpiece;When rigidity measurement is carried out, workpiece is not processed, i.e. main shaft 1 and workbench 2 are stationary, force applying member 3 and pressure detecting member 4 are placed on processing panel 21, force applying member 3 applies axial force to main shaft 1 by pressure detecting member 4, the pressure value detected by pressure detecting member 4 and the deformation displacement amount detected by displacement detecting member at each position are observed and recorded, so as to obtain the rigidity of each part including main shaft 1 and workbench 2, and the performance and stability of the whole system are improved by analyzing the measurement results.

[0041] Although the preferred embodiments in the embodiments of the utility model have been described, those skilled in the art can make additional changes and modifications to these embodiments once they know the basic creative concept. Therefore, the appended claims are intended to explain the preferred embodiments and all changes and modifications falling within the scope of the embodiments of the utility model.

[0042] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application also intends to include these modifications and variations.

Claims

1. A rigidity measuring device, characterized by, The rigidity measuring device is used for measuring the rigidity of a polishing equipment, and comprises a force applying member (3), a pressure detecting member (4) and a first displacement detecting member (51), the force applying member (3) and the pressure detecting member (4) are arranged between a spindle (1) and a worktable (2) of the polishing equipment, the force applying member (3) is used for applying an axial force to the spindle (1), the pressure detecting member (4) is used for detecting the axial force, and the first displacement detecting member (51) is arranged on the spindle (1) and used for detecting the deformation displacement of the spindle (1) in the axial direction when the spindle (1) is subjected to the axial force.

2. The rigidity measuring device according to claim 1, characterized in that, The force applying member (3) comprises a pneumatic cylinder (31), the pneumatic cylinder (31) is arranged on the worktable (2), and the pressure detecting member (4) is arranged on a piston shaft of the pneumatic cylinder (31).

3. The rigidity measuring device of claim 2, wherein The pressure detecting member (4) comprises a first end face (41) and a second end face (42), the first end face (41) abuts against the spindle (1), and the second end face (42) is fixed on the piston shaft of the pneumatic cylinder (31).

4. The rigidity measuring device of claim 1, wherein Further comprising a second displacement detecting member (52), the second displacement detecting member (52) is arranged on the worktable (2) and used for detecting the deformation displacement of the worktable (2) in the axial direction when the spindle (1) is subjected to the axial force.

5. The rigidity measuring device of claim 1, wherein Further comprising a third displacement detecting member (53), the third displacement detecting member (53) is arranged on a base (6) of the polishing equipment and used for detecting the deformation displacement of the base (6) in the axial direction when the spindle (1) is subjected to the axial force.

6. The rigidity measuring device of claim 1, wherein The spindle (1) is arranged on a feeding mechanism (9) of the polishing equipment, and the feeding mechanism (9) is used for feeding the spindle (1) to the worktable (2).

7. The rigidity measuring device of claim 6, wherein Further comprising a fourth displacement detecting member (54), the fourth displacement detecting member (54) and the feeding mechanism (9) are arranged on a support base (8) of the polishing equipment, and the fourth displacement detecting member (54) is used for detecting the deformation displacement of the support base (8) in the radial direction and close to the support base (8) when the spindle (1) is subjected to the axial force.

8. Stiffness measuring device according to claim 6 or 7, characterized in that The feeding mechanism (9) comprises a driving member (91) and a sliding member (92) connected with the driving member (91), the spindle (1) is arranged on the sliding member (92), and the driving member (91) feeds the spindle (1) to the worktable (2) through the sliding member (92).

9. The rigidity measuring device of claim 8, wherein, Further comprising a fifth displacement detecting member (55), the fifth displacement detecting member (55) is arranged on the sliding member (92) and used for detecting the deformation displacement of the feeding mechanism (9) in the axial direction when the spindle (1) is subjected to the axial force.

10. A polishing equipment with a rigidity detection function, characterized in that, The polishing equipment comprises the spindle (1), the worktable (2) and the rigidity measuring device according to any one of claims 1-9.

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