Worm and gear movement mechanism used in electron microscope and electron microscope

Abstract

The utility model discloses a worm and gear movement mechanism used in an electron microscope and the electron microscope. Wherein the worm and gear movement mechanism comprises a base, a motor, a worm, a guide rod and a worm gear; the worm gear is rotationally connected to the base through a connecting bearing, the worm is arranged on one side of the worm gear and meshed with the worm gear, one end of the worm is connected with an output shaft of the motor through a first flexible coupler, the motor is fixedly connected with the base, the other end of the worm is connected with the guide rod through a second flexible coupler, and the guide rod is rotationally connected with the base through a supporting bearing. And axial compression amounts are formed on the first flexible coupler and the second flexible coupler. The worm and gear movement mechanism has the advantages of being high in transmission precision, good in transmission stability, low in manufacturing cost, low in manufacturing difficulty and the like, and can effectively prevent jamming in the transmission process.

Description

TECHNICAL FIELD

[0001] The utility model belongs to electron microscope technical field, especially relate to a worm and gear motion mechanism and electron microscope used in electron microscope. BACKGROUND

[0002] Worm and gear drive is usually driven by motor, and is a main form of mechanical transmission, which has the advantages of wide transmission ratio range, compact structure, small size, smooth movement and low noise.

[0003] At present, in order to realize the relative fixation of the worm, rigid bearings are used as support at both ends of the worm, so that the worm and the worm gear are kept in strong rigid connection, and the output shaft of the motor is also rigidly connected with the worm; however, the worm and gear with rigid connection generally have the problem of difficult meshing gap processing, and too small meshing gap will cause large friction and loss during transmission, increase noise and vibration, and may also cause transmission jamming, and too large meshing gap will reduce the precision and efficiency of transmission. Especially when the worm and gear transmission is used in a scanning electron microscope, there is a holding current in the motor in the non-working state, the vibration generated is transmitted to the worm and gear with rigid connection, and then to the sample, and then reflected to the image of the sample, so that burrs are formed on the edge of the sample in the image, which seriously affects the observation of the sample. UTILITY MODEL CONTENTS

[0004] In view of the above problems, the utility model discloses a worm and gear motion mechanism and electron microscope used in electron microscope to overcome the above problems or at least partially solve the above problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] The utility model discloses a worm and gear motion mechanism used in electron microscope in one aspect, including base, motor, worm, guide rod and worm gear;

[0007] The worm gear is rotatably connected to the base through a connecting bearing, the worm is arranged on one side of the worm gear and engaged with the worm gear, one end of the worm is connected with the output shaft of the motor through a first flexible coupling, the motor is fixedly connected with the base, the other end of the worm is connected with the guide rod through a second flexible coupling, the guide rod is rotatably connected with the base through a supporting bearing, and the first flexible coupling and the second flexible coupling are formed with axial compression amount.

[0008] Further, the normal side gap between the worm and the worm gear is 0.01mm-0.02mm.

[0009] Further, the first flexible coupling and the second flexible coupling comprise a first fixed part, a connecting part and a second fixed part;

[0010] The connecting part is in a spiral structure, and the first fixed part and the second fixed part are connected at two ends of the connecting part respectively; a first through hole is arranged on the first fixed part in an axial direction, a first opening and a first threaded hole are arranged on the first fixed part at one side of the first through hole, and the first threaded hole passes through both sides of the first opening; a second through hole is arranged on the second fixed part in an axial direction, a second opening and a second threaded hole are arranged on the second fixed part at one side of the second through hole, and the second threaded hole passes through both sides of the second opening.

[0011] Further, the mounting plate and the support frame are further included;

[0012] The mounting plate and the support frame are both fixed on the base, the motor is fixedly connected with the mounting plate through screws or bolts, the support frame is fixedly connected with the outer ring of the support bearing, and the guide rod is fixedly connected with the inner ring of the support bearing.

[0013] Further, the support bearing is a deep groove ball bearing, and the connecting bearing is a cross roller bearing.

[0014] Further, the worm gear is provided with a first fixing hole and a second fixing hole, the first fixing hole is used for fixing a sample table, and the second fixing hole is used for fixing a sensor baffle.

[0015] Further, the worm gear is provided with a third threaded hole, and the worm gear is connected with the connecting bearing through the third threaded hole and screws.

[0016] Further, the motor is a vacuum motor.

[0017] Further, the support bearing, the connecting bearing, the worm and the worm gear are all coated with vacuum lubricating grease.

[0018] The utility model discloses another aspect to a kind of electron microscopes, and the electron microscope includes vacuum cavity and the worm gear and worm movement mechanism used in the electron microscope described above;

[0019] The worm gear and worm movement mechanism is arranged in the vacuum cavity, and the worm gear is used to carry sample table.

[0020] The utility model has the advantages and beneficial effects that:

[0021] The utility model discloses worm gear movement mechanism, through setting up first flexible coupling and second flexible coupling between the worm and the output shaft of motor and support bearing respectively, and first flexible coupling and second flexible coupling all form the compression amount of axial, make the tooth of worm can extrude and closely adhere on the tooth of worm wheel, eliminate the clearance between worm wheel and worm, reduce the requirement of worm gear meshing clearance, not only can effectively improve the transmission accuracy of worm wheel and worm, and also greatly reduce the processing difficulty of worm gear, reduce the processing cost, and the setting of first flexible coupling and second flexible coupling, make the worm wheel and worm not too tight, thereby solve the problem of easy jam when worm gear movement, and first flexible coupling and second flexible coupling can also form the damping, effectively absorb the vibration produced when motor works, and then make transmission more stable. BRIEF DESCRIPTION OF DRAWINGS

[0022] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments with reference made to the accompanying drawings. The drawings are for purposes of illustration only and are not intended to limit the application thereto. The same reference numerals in different drawings denote the same or similar components. In the drawings:

[0023] Figure 1 It is a solid structure diagram of worm gear movement mechanism in an embodiment of the utility model;

[0024] Figure 2 It is the top view of worm gear movement mechanism in an embodiment of the utility model;

[0025] Figure 3 It is a solid structure diagram of first flexible coupling in an embodiment of the utility model;

[0026] Figure 4 It is the sample image of scanning electron microscope of having the worm gear movement mechanism of prior art;

[0027] Figure 5 It is the sample image of scanning electron microscope of having the worm gear movement mechanism in the utility model.

[0028] In the drawing: 1, base, 2, motor, 3, worm, 4, guide rod, 5, worm wheel, 6, connecting bearing, 7, first flexible coupling, 8, second flexible coupling, 9, support bearing, 10, mounting plate, 11, support frame, 12, first fixed hole, 13, second fixed hole, 14, third threaded hole, 15, first fixed part, 16, connecting part, 17, second fixed part, 18, first through hole, 19, first opening, 20, first threaded hole, 21, second opening, 22, second threaded hole. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the utility model clearer, the utility model technical scheme will be described clearly and completely in combination with specific embodiments of the utility model and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0030] The technical scheme provided by each embodiment of the utility model will be described in detail in combination with the drawings.

[0031] One embodiment of the utility model provides a worm and gear movement mechanism used in an electron microscope, as shown in Figure 1 And Figure 2 The worm and gear movement mechanism comprises a base 1, a motor 2, a worm 3, a guide rod 4 and a worm gear 5.

[0032] Specifically, the worm gear 5 is rotatably connected to the base 1 through a connecting bearing 6, that is, the worm gear 5 can rotate relative to the base 1, the worm 3 is arranged on one side of the worm gear 5 and is engaged with the worm gear 5, one end of the worm 3 is connected to the output shaft of the motor 2 through a first flexible coupling 7, the motor 2 is fixedly connected to the base 1, the other end of the worm 3 is connected to the guide rod 4 through a second flexible coupling 8, and the guide rod 4 is rotatably connected to the base 1 through a supporting bearing 9, so that the worm 3 can rotate relative to the base 1. An axial compression amount is formed on each of the first flexible coupling 7 and the second flexible coupling 8. The supporting bearing is a deep groove ball bearing, and the connecting bearing is a cross roller bearing. Of course, the supporting bearing and the connecting bearing can also be other forms of bearings, which are also within the protection scope of the utility model.

[0033] It should be noted that the output shaft of the motor 2, the worm 3 and the guide rod 4 need to be coaxially arranged.

[0034] In the worm and gear movement mechanism of the embodiment, the first flexible coupling and the second flexible coupling are arranged respectively between the worm and the output shaft of the motor and the supporting bearing, and an axial compression amount is formed on each of the first flexible coupling and the second flexible coupling, so that the teeth of the worm can be pressed and tightly fitted on the teeth of the worm gear, the gap between the worm gear and the worm is eliminated, the requirement for the meshing gap of the worm and gear is reduced, the transmission accuracy of the worm gear and the worm can be effectively improved, the machining difficulty of the worm and gear is greatly reduced, and the machining cost is reduced. The arrangement of the first flexible coupling and the second flexible coupling prevents the worm gear and the worm from being too tightly matched, thereby solving the problem of easy jamming of the worm and gear during movement. The first flexible coupling and the second flexible coupling can also form damping, effectively absorbing the vibration generated during the operation of the motor, and further making the transmission more stable.

[0035] In the embodiment, the normal side clearance between the worm and the worm wheel is 0.01mm-0.02mm, thereby ensuring the close cooperation and smooth rotation of the worm and the worm wheel and maintaining good precision.

[0036] And, as Figure 2 shown, the first flexible coupling includes a first fixed part 15, a connecting part 16 and a second fixed part 17.

[0037] The connecting part 16 is in a spiral structure, and the first fixed part 15 and the second fixed part 17 are respectively connected at two ends of the connecting part 16, so that the first flexible coupling can be axially deformed and radially deformed; the first fixed part 15 is provided with a first through hole 18 in the axial direction, the first fixed part 15 on one side of the first through hole 18 is provided with a first opening 19 and a first threaded hole 20, the first opening 19 penetrates the first fixed part 15 in the axial direction and communicates with the first through hole 18, and the first threaded hole 20 penetrates both sides of the first opening 19; the second fixed part 17 is provided with a second through hole in the axial direction, and the second fixed part 17 on one side of the second through hole is provided with a second opening 21 and a second threaded hole 22, the second opening 21 penetrates the second fixed part 17 in the axial direction and communicates with the second through hole, and the second threaded hole 22 penetrates both sides of the second opening 21.

[0038] When the first flexible coupling is connected between the motor and the worm, the output shaft of the motor is first inserted into the first through hole 18, and the screw in the first threaded hole 20 is tightened, so that the first opening 19 becomes smaller, and then the first fixed part 15 is tightly fixed on the output shaft of the motor; then, one end of the worm is inserted into the second through hole, and the screw in the second threaded hole 22 is tightened, so that the second opening 21 becomes smaller, and then the second fixed part 17 is tightly fixed on the worm.

[0039] Since the second flexible coupling and the first flexible coupling have the same structure, they will not be described here.

[0040] In addition, as Figure 1 shown, the worm and worm wheel movement mechanism further includes a mounting plate 10 and a support frame 11.

[0041] In detail, the mounting plate 10 and the support frame 11 are both fixed on the base 1, the motor 2 is fixedly connected with the mounting plate 10 through screws or bolts, the support frame 11 is fixedly connected with the outer ring of the support bearing 9, and the guide rod 4 is fixedly connected with the inner ring of the support bearing 9, thereby realizing the fixation of the motor 2 and the support bearing 9 relative to the base 1.

[0042] In the embodiment, as Figure 2 shown, the worm wheel 5 is provided with a first fixed hole 12 and a second fixed hole 13, the first fixed hole 12 is used to fix the sample table, and the second fixed hole 13 is used to fix the sensor stop.

[0043] And, the worm wheel 5 is provided with a third threaded hole 14, and the worm wheel 5 is connected with the connecting bearing 6 through the third threaded hole 14 and a screw.

[0044] In addition, the motor is a vacuum motor, for example, a YC2832 motor, which can work stably in an environment with a vacuum degree of 10 Pa to 5 Pa, and meets the use in a vacuum cavity of an electron microscope.

[0045] Further, the support bearing, the connecting bearing, the worm and the worm wheel are all coated with vacuum lubricating grease, which not only realizes the lubrication of the support bearing, the connecting bearing, the worm and the worm wheel, reduces the generation of friction and vibration, but also is not easy to volatilize in a vacuum environment.

[0046] In another embodiment of the present application, an electron microscope is provided, which comprises a vacuum cavity and the worm and worm gear movement mechanism in the above embodiment.

[0047] The worm and worm gear movement mechanism is arranged in the vacuum cavity, and the worm wheel is used for bearing a sample stage. Figure 4 and Figure 5 It can be found that the sample edge burr phenomenon in the electron microscope image obtained when the electron microscope scans the sample is greatly improved.

[0048] The above is only a specific embodiment of the present application, and based on the above teaching, those skilled in the art can make other improvements or modifications on the basis of the above embodiment. Those skilled in the art should understand that the above specific description is only for better explanation of the purpose of the present application, and the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A worm and gear motion mechanism used in an electron microscope, characterized by comprising: The base, the motor, the worm, the guide rod and the worm wheel are included. The worm wheel is rotatably connected to the base through a connecting bearing, the worm is arranged on one side of the worm wheel and engaged with the worm wheel, one end of the worm is connected to the output shaft of the motor through a first flexible coupling, the motor is fixedly connected to the base, the other end of the worm is connected to the guide rod through a second flexible coupling, the guide rod is rotatably connected to the base through a supporting bearing, and the first flexible coupling and the second flexible coupling are both formed with an axial compression amount.

2. The worm and gear motion mechanism for use in an electron microscope according to claim 1, characterized in that, The normal side gap between the worm and the worm wheel is 0.01mm-0.02mm.

3. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The first flexible coupling and the second flexible coupling include a first fixed part, a connecting part and a second fixed part. The connecting part is in a spiral structure, the first fixed part and the second fixed part are connected to two ends of the connecting part respectively, the first fixed part is provided with a first through hole in the axial direction, the first fixed part on one side of the first through hole is provided with a first opening and a first threaded hole, the first threaded hole passes through both sides of the first opening, the second fixed part is provided with a second through hole in the axial direction, the second fixed part on one side of the second through hole is provided with a second opening and a second threaded hole, and the second threaded hole passes through both sides of the second opening.

4. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The mounting plate and the support frame are also included. The mounting plate and the support frame are both fixed on the base, the motor is fixedly connected to the mounting plate through screws or bolts, the support frame is fixedly connected to the outer ring of the supporting bearing, and the guide rod is fixedly connected to the inner ring of the supporting bearing.

5. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The supporting bearing is a deep groove ball bearing, and the connecting bearing is a cross roller bearing.

6. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The worm wheel is provided with a first fixing hole and a second fixing hole, the first fixing hole is used for fixing a sample table, and the second fixing hole is used for fixing a sensor baffle.

7. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The worm wheel is provided with a third threaded hole, and the worm wheel is connected to the connecting bearing through the third threaded hole and screws.

8. The worm and gear motion mechanism for use in an electron microscope according to claim 1, wherein The motor is a vacuum motor.

9. The worm and gear movement mechanism for use in an electron microscope according to any one of claims 1 to 8, characterized in that The supporting bearing, the connecting bearing, the worm and the worm wheel are all coated with vacuum lubricating grease.

10. An electron microscope, characterized by The electron microscope includes a vacuum cavity and the worm and worm gear movement mechanism used in the electron microscope according to any one of claims 1-9. The worm and worm gear movement mechanism is arranged in the vacuum cavity, and the worm wheel is used for carrying a sample table.

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