Sample stage for carrying circular X-ray plate of scanning electron microscope

Abstract

The utility model discloses a sample stage for carrying a circular X-ray plate of a scanning electron microscope, and relates to the technical field of X-ray plate micro-area analysis. The device comprises a scanning device, the scanning device comprises a workbench, and the bottom of the workbench is fixedly connected with supporting legs. The force for driving the rotating rod to rotate by the motor is matched with components such as the long plate, the short rod A and the connecting plate, so that the long plate is driven to rotate by the motor, the long plate drives the short rod A to perform circular motion, the short rod A drives the connecting plate to perform circular motion, and the connecting plate drives the short rod B to perform displacement in the horizontal direction; and then a short rod B drives a fixing frame to move in the horizontal direction, so that the fixing frame drives a clamping plate to move in the horizontal direction, the effect of clamping the electron microscope circular X-ray plate during scanning is achieved, and the situation that the electron microscope circular X-ray plate falls off due to external force factors and is damaged is avoided.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of light sheet micro area analysis, especially relates to a sample stage for scanning electron microscope circular light sheet loading. BACKGROUND

[0002] The scanning electron microscope is an experimental means that can directly observe the surface information of the sample, and is between the transmission electron microscope and the optical microscope. If the staff observes the sample by naked eyes or magnifying glass, only the main mineral components in the sample can be determined, and therefore the scanning electron microscope needs to be used to obtain the more microscopic structural features and component information in the sample.

[0003] According to the disclosed sample stage for scanning electron microscope circular light sheet loading (publication number: CN220751995U), the light sheet placing module has a plurality of circular through holes in the center as light sheet placing grooves, and the light sheet placing module and the buckle plate have a screw hole and a buckle screw hole on the opposite positions on the two sides for connecting the light sheet placing module and the buckle plate. Three protruding limiting columns are arranged at the top end for limiting the light sheet, and 0°-360° scale lines are arranged for assisting the light sheet direction calibration. The utility model provides a sample stage for scanning electron microscope circular light sheet loading, which is used in cooperation with the light sheet pouring mold and the light sheet automatic grinding and polishing device in actual application, realizes the continuous large-area electron microscope scanning test of the 28mm-diameter circular light sheet without shielding the signal source, but in the above-mentioned device, the light sheet placing module and the buckle plate and other components are matched with each other, and it is difficult to realize the clamping effect of the electron microscope circular light sheet during scanning, so that the electron microscope circular light sheet is dropped due to external factors, and the electron microscope circular light sheet is damaged. Therefore, we specially set up a sample stage for scanning electron microscope circular light sheet loading to prevent the electron microscope circular light sheet from falling. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of sample stages for scanning electron microscope circular light sheet loading, long plate is rotated by motor drive, so that long plate drives short rod A to carry out circumferential motion, further short rod A drives connecting plate to carry out circumferential motion, so that connecting plate drives short rod B to carry out horizontal direction displacement, further short rod B drives fixed frame to carry out horizontal direction displacement, so that fixed frame drives clamping plate to carry out horizontal direction displacement, solve the existing problem.

[0005] To solve the above technical problems, the utility model is realized by the following technical solutions:

[0006] The utility model discloses a sample stage for scanning electron microscope circular light piece carries, including scanning device, scanning device includes workstation, the workstation bottom fixedly connected with support leg, one side of support leg is fixedly connected with reinforcing rod, the workstation top is provided with scanning mechanism, the workstation top is opened with recess, the recess inner wall is opened with rectangle slot,

[0007] The scanning device is internally provided with a clamping device, the clamping device includes a motor, the motor is fixedly connected with the inner wall of the rectangular groove, the output shaft of the motor is fixedly connected with a rotating rod, one end of the rotating rod away from the motor penetrates a long plate, and is fixedly connected with the long plate, the long plate, one end of the long plate penetrates a short rod A, and is rotatably connected with the short rod A, one end of the short rod A away from the long plate penetrates a connecting plate, and is rotatably connected with the connecting plate, one end of the connecting plate away from the short rod A penetrates a short rod B, and is rotatably connected with the short rod B, one end of the short rod B is fixedly connected with a fixing frame, the bottom of the fixing frame is provided with a sliding groove, the inner wall of the recess is fixedly connected with a sliding rod, the inner wall of the recess is fixedly connected with a top cover, the top of the top cover is provided with a through groove, one side of the fixing frame is fixedly connected with a clamping plate.

[0008] Further, the number of support legs is four, two groups, and is mutually symmetrical along the vertical central axis of the workbench, the number of reinforcing rods is four, two groups, and is mutually symmetrical along the vertical central axis of the workbench, the above design is favorable for guaranteeing the stability of the device during operation through four support legs.

[0009] Further, the number of short rods A is two, and is mutually symmetrical along the vertical central axis of the long plate, the number of connecting plates is two, and is central symmetrical along the center point of the rotating rod, the above design is favorable for driving two connecting plates to carry out circumferential motion through two short rods A.

[0010] Further, the number of short rods B is two, and is central symmetrical along the center point of the rotating rod, the number of fixing frames is two, and is mutually symmetrical along the vertical central axis of the workbench, the above design is favorable for driving two fixing frames to carry out horizontal direction displacement through two short rods B.

[0011] Further, the shape of the fixing frame is L-shaped, the number of clamping plates is two, and is mutually symmetrical along the vertical central axis of the workbench, the shape of the clamping plate is arc-shaped, the above design is favorable for clamping electron microscope circular light pieces needing detection through two arc-shaped clamping plates.

[0012] Further, one end of the fixing frame away from the sliding groove penetrates the top cover through the through groove, and is slidably connected with the top cover, the sliding rod is slidably connected with the inner wall of the sliding groove, the above design is favorable for limiting the displacement track of the fixing frame through the mutual contact of the sliding rod and the sliding groove.

[0013] The utility model has the following beneficial effects:

[0014] 1, the utility model discloses a motor drive rotating lever carries out the force of rotation with long board, short rod A and connecting plate etc. component mutual cooperation, realized through motor drive long board and rotates, thereby makes long board drive short rod A and carries out the circumferential motion, and further makes short rod A drive connecting plate and carries out the circumferential motion, thereby makes connecting plate drive short rod B and carries out horizontal direction displacement, and further makes short rod B drive fixed frame and carries out horizontal direction displacement, thereby makes fixed frame drive clamping plate and carries out horizontal direction displacement's effect, reached when scanning, the effect of clamping electron microscope round light piece, avoids due to external force factor, makes electron microscope round light piece drop, thereby damages electron microscope round light piece.

[0015] Of course, any product implementing the utility model does not necessarily need to achieve all the advantages described above. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, other drawings can also be obtained according to these drawings.

[0017] Figure 1 It is the three-dimensional appearance structure schematic diagram of the utility model;

[0018] Figure 2 It is the workbench place view three-dimensional structure schematic diagram of the utility model;

[0019] Figure 3 It is the top cover place section view three-dimensional structure schematic diagram of the utility model;

[0020] Figure 4 It is the three-dimensional enlarged view of A in the utility model Figure 3

[0021] In the drawings, the component list represented by each sign is as follows:

[0022] 1, scanning device;101, workbench;102, support leg;103, reinforcing rod;104, scanning mechanism;105, recess;106, rectangular slot;2, clamping device;201, motor;202, rotating lever;203, long board;204, short rod A;205, connecting plate;206, short rod B;207, fixed frame;208, clamping plate;209, sliding slot;210, sliding rod;211, top cover;212, through slot. DETAILED DESCRIPTION

[0023] ​Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0024] Please refer to Figures 1-4 The utility model discloses a kind of sample tables for scanning electron microscope round light piece carrying, including scanning device 1, scanning device 1 includes workbench 101, workbench 101 bottom is fixedly connected with support leg 102, support leg 102 one side is fixedly connected with reinforcing bar 103, workbench 101 top is provided with scanning mechanism 104, workbench 101 top is provided with recess 105, recess 105 inner wall is provided with rectangular groove 106;

[0025] Scanning device 1 is provided with clamping device 2 inside, clamping device 2 includes motor 201, motor 201 is fixedly connected with rectangular groove 106 inner wall, the output shaft of motor 201 is fixedly connected with rotating rod 202, rotating rod 202 is penetrated with long plate 203 away from motor 201 one end, and is fixedly connected with long plate 203, long plate 203, long plate 203 one end is penetrated with short rod A 204, and is rotatably connected with short rod A 204, short rod A 204 is penetrated with connecting plate 205 away from long plate 203 one end, and is rotatably connected with connecting plate 205, connecting plate 205 is penetrated with short rod B 206 away from short rod A 204 one end, and is rotatably connected with short rod B 206, short rod B 206 one end is fixedly connected with fixed frame 207, fixed frame 207 bottom is provided with sliding slot 209, recess 105 inner wall is fixedly connected with sliding rod 210, recess 105 inner wall is fixedly connected with top cover 211, top cover 211 top is provided with through slot 212, fixed frame 207 one side is fixedly connected with clamping plate 208.

[0026] The number of support legs 102 is four, two groups, and is mutually symmetrical along the vertical central axis of workbench 101, the number of reinforcing bars 103 is four, two groups, and is mutually symmetrical along the vertical central axis of workbench 101, the above design is favorable to the stability of the device running through four support legs 102.

[0027] The number of short rod A 204 is two, and is mutually symmetrical along the vertical central axis of long plate 203, the number of connecting plate 205 is two, and is centrally symmetrical along the center point of rotating rod 202, the above design is favorable to the circular motion of two connecting plates 205 driven by two short rod A 204.

[0028] The number of the short rods B206 is two, and the short rods B206 are centrally symmetrical along the center point of the rotating rod 202, the number of the fixing frames 207 is two, and the fixing frames 207 are symmetrical along the vertical central axis of the workbench 101, and the above design is beneficial to drive the two fixing frames 207 to move in the horizontal direction through the two short rods B206.

[0029] The fixing frame 207 is in the shape of L, the number of the clamping plates 208 is two, and the clamping plates 208 are symmetrical along the vertical central axis of the workbench 101, and the clamping plate 208 is in the shape of arc, and the above design is beneficial to clamp the electron microscope circular light sheet to be detected through the two arc-shaped clamping plates 208.

[0030] The end of the fixing frame 207 away from the sliding groove 209 penetrates the top cover 211 through the through groove 212, and is in sliding connection with the top cover 211, the sliding rod 210 is in sliding connection with the inner wall of the sliding groove 209, and the above design is beneficial to limit the displacement track of the fixing frame 207 through the mutual contact of the sliding rod 210 and the sliding groove 209.

[0031] One specific application of the embodiment is that the electron microscope circular light sheet to be scanned is placed on the top of the top cover 211, and then the motor 201 drives the long plate 203 to rotate, so that the long plate 203 drives the short rod A204 to move in a circle, and then the short rod A204 drives the connecting plate 205 to move in a circle, so that the connecting plate 205 drives the short rod B206 to move in the horizontal direction, and then the short rod B206 drives the fixing frame 207 to move in the horizontal direction, so that the fixing frame 207 drives the clamping plate 208 to move in the horizontal direction, so as to achieve the effect of clamping the electron microscope circular light sheet during scanning, avoiding the electron microscope circular light sheet from falling due to external factors, and thus damaging the electron microscope circular light sheet.

[0032] In the description of the present specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0033] The preferred embodiments disclosed above are only used to help describe the utility model. The preferred embodiments do not describe all the details and do not limit the utility model to the specific embodiments. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that the persons skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the entire scope and equivalents thereof.

Claims

1. A sample stage for SEM round light patch mounting, comprising a scanning device (1), characterized in that: The scanning device (1) includes a workbench (101), the bottom of the workbench (101) is fixedly connected with support legs (102), one side of the support legs (102) is fixedly connected with reinforcing rods (103), the top of the workbench (101) is provided with a scanning mechanism (104), and a groove (105) is formed in the top of the workbench (101); and a rectangular groove (106) is formed in the inner wall of the groove (105). The scanning device (1) is internally provided with a clamping device (2), the clamping device (2) includes a motor (201), the motor (201) is fixedly connected with the inner wall of the rectangular groove (106), the output shaft of the motor (201) is fixedly connected with a rotating rod (202), the end of the rotating rod (202) away from the motor (201) penetrates through a long plate (203) and is fixedly connected with the long plate (203), the long plate (203), one end of the long plate (203) penetrates through a short rod A (204) and is rotatably connected with the short rod A (204), the end of the short rod A (204) away from the long plate (203) penetrates through a connecting plate (205) and is rotatably connected with the connecting plate (205), the end of the connecting plate (205) away from the short rod A (204) penetrates through a short rod B (206) and is rotatably connected with the short rod B (206), one end of the short rod B (206) is fixedly connected with a fixing frame (207), the bottom of the fixing frame (207) is provided with a sliding groove (209), the inner wall of the groove (105) is fixedly connected with a sliding rod (210), the inner wall of the groove (105) is fixedly connected with a top cover (211), the top of the top cover (211) is provided with a through groove (212), and one side of the fixing frame (207) is fixedly connected with a clamping plate (208).

2. The sample stage for SEM round light patch mounting according to claim 1, wherein, The number of the support legs (102) is four, two at a time, and they are mutually symmetrical along the vertical central axis of the workbench (101), and the number of the reinforcing rods (103) is four, two at a time, and they are mutually symmetrical along the vertical central axis of the workbench (101).

3. The sample stage for SEM round beam mounting according to claim 2, wherein, The number of the short rod A (204) is two, and they are mutually symmetrical along the vertical central axis of the long plate (203), and the number of the connecting plate (205) is two, and they are centrally symmetrical along the center point of the rotating rod (202).

4. The sample stage for SEM round light patch mounting according to claim 3, characterized in that, The number of the short rod B (206) is two, and they are centrally symmetrical along the center point of the rotating rod (202), and the number of the fixing frame (207) is two, and they are mutually symmetrical along the vertical central axis of the workbench (101).

5. The sample stage for SEM round beam mounting according to claim 4, wherein, The shape of the fixing frame (207) is L-shaped, the number of the clamping plate (208) is two, and they are mutually symmetrical along the vertical central axis of the workbench (101), and the shape of the clamping plate (208) is arc-shaped.

6. The sample stage for SEM round beam mounting according to claim 5, wherein, The end of the fixing frame (207) away from the sliding groove (209) penetrates the top cover (211) through the through groove (212) and is slidably connected with the top cover (211), and the sliding rod (210) is slidably connected with the inner wall of the sliding groove (209).

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