Ultrasonic cleaning device for round silicon core

Abstract

The utility model relates to the technical field of cleaning devices, in particular to a round silicon core ultrasonic cleaning device which comprises a device body. The device body is provided with a bracket used for bearing the round silicon core, a driving assembly used for driving the bracket to move, a cleaning bin used for conducting ultrasonic cleaning on the round silicon core and a filtering bin used for filtering cleaning liquid in the cleaning bin. The bracket comprises a bracket body and a plurality of supporting plates fixedly connected to one side of the bracket body. The supporting plate comprises a base plate fixedly connected to the frame body and a supporting plate hinged to the base plate. The utility model has the beneficial effects that: in actual use, the round silicon core is placed on the supporting plates from bottom to top, and the upper layer of supporting plate is firstly folded during placement, so that enough operation space is provided when the round silicon core is placed on the lower layer of supporting plate, and the round silicon core can be conveniently placed in the deep position of the supporting plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to a cleaning device technical field, concretely relates to a kind of round silicon core ultrasonic cleaning device. BACKGROUND

[0002] In the semiconductor manufacturing and microelectronics industry, round silicon core (commonly known as silicon wafer or wafer) as core material, the cleanliness of its surface has a vital influence on the performance of final product. With the continuous progress of technology, the cleanliness requirement of silicon wafer surface is also higher and higher, and the traditional cleaning method has been unable to meet the cleaning demand of high precision and high efficiency. Therefore, ultrasonic cleaning technology gradually becomes an important tool in the field of silicon wafer cleaning with its unique cleaning principle and technical advantages.

[0003] The ultrasonic cleaning device utilizes high-frequency ultrasonic waves to generate tiny bubbles in the liquid. These bubbles rapidly expand and burst under the action of ultrasonic waves, forming a powerful impact force. When this impact force acts on the surface of the silicon wafer, it can effectively strip and remove adhered stains, particles, and oxides and other impurities. At the same time, the vibration of the ultrasonic waves can also penetrate the cleaning liquid into the microstructure of the silicon wafer, further improving the cleaning effect.

[0004] However, the existing round silicon core ultrasonic cleaning device usually needs to place the round silicon core on the bracket when in use. Although this bracket design facilitates cleaning operation to some extent, it also has some shortcomings. Since the bracket has a certain depth and is a multi-layer structure, the single-layer space is limited, and when placing the round silicon core in the deep part of the bracket, the operator often has difficulty in accurately placing the silicon wafer in the predetermined position, which undoubtedly increases the difficulty of operation.

[0005] Specifically, when the bracket depth is large, the operator needs to use tools or adjust the posture to place the silicon wafer into the deep part of the bracket, which not only increases the complexity of operation, but also may cause damage to the silicon wafer due to improper operation.

[0006] Therefore, a round silicon core ultrasonic cleaning device is needed to overcome the above problems. SUMMARY

[0007] To solve the above problems, the utility model embodiment provides a kind of round silicon core ultrasonic cleaning device, realize the purpose of solving the problem proposed in background art.

[0008] In order to achieve the above purpose, the utility model embodiment specifically adopts the following technical scheme: a kind of round silicon core ultrasonic cleaning device, including device main body, the device main body is provided with: the bracket for supporting round silicon core, the driving assembly for moving the bracket, the cleaning bin for ultrasonic cleaning to round silicon core, the filter bin for filtering cleaning liquid inside cleaning bin;

[0009] The bracket comprises a bracket body, and a plurality of supporting plates fixedly connected to one side of the bracket body.

[0010] The supporting plate comprises a base plate fixedly connected to the bracket body, and a support plate hingedly arranged on the base plate.

[0011] As a further improvement of the above technical solution:

[0012] The plurality of support plates are fixedly connected together through connecting rods.

[0013] A circular groove is formed in the support plate.

[0014] The driving assembly comprises an electric push rod and a guide assembly arranged in the device main body.

[0015] The guide assembly comprises a guide rail fixedly connected to the inside of the device main body, and a pulley I arranged on the bracket body.

[0016] The bracket body is provided with a pulley II attached to the inner wall of the cleaning bin.

[0017] The beneficial effects of the embodiment of the utility model are as follows:

[0018] In actual use, the circular silicon core is placed on the supporting plate from bottom to top, and the upper supporting plate is folded first when being placed, so that there is enough operation space when the circular silicon core is placed on the lower supporting plate, and the circular silicon core is conveniently placed in the deep part of the supporting plate. BRIEF DESCRIPTION OF DRAWINGS

[0019] Fig. 1 It is a structural schematic view of the first perspective of the utility model;

[0020] Fig. 2 It is a structural schematic view of the second perspective of the utility model;

[0021] Fig. 3 It is a structural schematic view of the bracket of the utility model;

[0022] Fig. 4 It is a structural schematic view of the supporting plate of the utility model.

[0023] In the drawing: 1, device main body; 2, bracket; 3, cleaning bin; 4, filtering bin; 5, driving assembly; 6, pulley II;

[0024] 21, bracket body; 22, supporting plate;

[0025] 51, electric push rod; 52, guide assembly;

[0026] 221, base plate; 222, support plate; 223, circular groove;

[0027] 521, guide rail; 522, pulley one. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art will understand that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application.

[0029] Referring to Figs. 1 to 4 The embodiment of the present application discloses a kind of circular silicon core ultrasonic cleaning device, including device main body 1, device main body 1 is provided with: bracket 2 for supporting circular silicon core, for driving bracket 2 to move driving assembly 5, for ultrasonic cleaning to circular silicon core cleaning bin 3, for filtering the cleaning liquid in cleaning bin 3 filter bin 4;When actually using, circular silicon core is placed on bracket 2, moves bracket 2 by driving assembly 5, so that bracket 2 enters the inside of cleaning bin 3 and is cleaned, ultrasonic transducer is provided in the inside of cleaning bin 3, after adding cleaning liquid in the inside of cleaning bin 3, ultrasonic cleaning is carried out by ultrasonic transducer, while filtering the cleaning liquid in cleaning bin 3 by filter bin 4;

[0030] Bracket 2 includes frame body 21, a plurality of supporting plates 22 are fixedly connected on one side of frame body 21;

[0031] Supporting plate 22 includes base plate 221 fixedly connected on frame body 21, support plate 222 hingedly arranged on base plate 221;By rotating support plate 222, support plate 222 can be folded on base plate 221, so that the folding of supporting plate 22 can be realized.

[0032] When actually using, circular silicon core is placed on supporting plate 22 from bottom to top, when placing, first fold the upper supporting plate 22, so that there is enough operating space when placing circular silicon core on the lower supporting plate 22, to facilitate the placement of circular silicon core in the deep part of supporting plate 22.

[0033] As a further description of the present application:

[0034] A plurality of support plates 222 are fixedly connected together by connecting rods;

[0035] When actually using, a plurality of supporting plates 22 are needed to support circular silicon core, after connecting a plurality of supporting plates 222 by support plate 222, a plurality of supporting plates 222 can be folded at one time.

[0036] As a further description of the present application:

[0037] Round groove 223 is opened on support plate 222;Circular silicon core is supported by round groove 223, to facilitate the limiting of a plurality of circular silicon cores.

[0038] As a further illustration of the present application:

[0039] The driving assembly 5 comprises an electric push rod 51 and a guide assembly 52 arranged inside the device body 1.

[0040] In actual use, the piston rod of the electric push rod 51 is fixed on the frame body 21, the bracket 2 is driven to move up and down by the electric push rod 51, after the circular silicon core is placed on the bracket 2, the bracket 2 is driven to enter the inside of the cleaning bin 3 for cleaning by the electric push rod 51, after the cleaning is completed, the electric push rod 51 drives the bracket 2 to move upward, so that the bracket 2 is separated from the inside of the cleaning bin 3.

[0041] The guide assembly 52 is arranged to limit the movement of the bracket 2, and the movement stability of the bracket 2 is improved.

[0042] As a further illustration of the present application:

[0043] The guide assembly 52 comprises guide rails 521 fixedly connected inside the device body 1 and pulleys one 522 arranged on the frame body 21, and pulleys two 6 arranged on the frame body 21 and abutting against the inner wall of the cleaning bin 3, so as to improve the movement stability of the frame body 21.

[0044] It should be noted that, in the description of the present application, the terms "center, upper, lower, left, right, vertical, horizontal, inner, outer" and other terms indicating direction or positional relationship are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore it cannot be understood as a limitation of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0045] In addition, it should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] The term "comprising" or any other similar word is intended to encompass the inclusion of one or more elements, steps, or components, but not to the exclusion of other elements, steps, or components. It is noted that not all of the activities or elements described above are required, that a portion of a specific activity or device can not be required, and that the present technology can include yet other structures and activities or devices not expressly mentioned herein.

[0047] Thus far, the technical solutions of the present application have been described in conjunction with the preferred embodiments shown in the drawings, but those skilled in the art will readily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the relevant technical features without deviating from the principles of the present application, and the technical solutions after these changes or replacements will all fall within the protection scope of the present application.

Claims

1. A circular silicon core ultrasonic cleaning device, characterized in that, The device comprises a device body (1), a bracket (2) for supporting a round silicon core is arranged on the device body (1), a driving assembly (5) for driving the bracket (2) to move, a cleaning bin (3) for ultrasonic cleaning of the round silicon core, and a filtering bin (4) for filtering cleaning liquid in the cleaning bin (3). The bracket (2) comprises a frame body (21) and a plurality of supporting plates (22) fixedly connected to one side of the frame body (21); the supporting plate (22) comprises a base plate (221) fixedly connected to the frame body (21) and a supporting plate (222) hingedly arranged on the base plate (221).

2. The apparatus according to claim 1, wherein The plurality of supporting plates (222) are fixedly connected together through connecting rods.

3. The apparatus according to claim 1, wherein A round groove (223) is formed in the supporting plate (222).

4. The apparatus according to claim 1, wherein The driving assembly (5) comprises an electric push rod (51) and a guide assembly (52) arranged in the device body (1).

5. The apparatus according to claim 4, wherein The guide assembly (52) comprises a guide rail (521) fixedly connected to the inside of the device body (1) and a pulley I (522) arranged on the frame body (21).

6. The apparatus according to claim 5, wherein The frame body (21) is provided with a pulley II (6) attached to the inner wall of the cleaning bin (3).

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