Electrode stem device for electrostatic eliminator

Abstract

The utility model discloses an electrode stem device for a static electricity eliminator, and belongs to the field of static electricity neutralization. Comprising a high-voltage socket, a supporting sleeve and a discharge electrode protection seat, a high-voltage plug-in is arranged in the high-voltage socket; an insulating sleeve and a metal internal thread pipe are arranged in the supporting sleeve; an electrode needle clamping piece, an electrode plug-in and a silicon electrode are arranged in the discharge electrode protection seat; the upper end of the metal internal thread pipe is fixedly connected with the high-pressure plug-in into a whole; the lower end is fixedly connected with the electrode plug-in into a whole; and under the fixed connection of the metal internal thread pipe, the high-voltage socket, the supporting sleeve and the discharge electrode protection seat are fixed into a whole. No metal part / structure is exposed on the whole surface, pollution of metal particles and oxides thereof to a clean environment is avoided, the discharge stability and the ion directional movement performance are improved, and the charge elimination performance of the space ion rod is optimized; a completely axisymmetric and mechanically connected mounting structure is adopted, so that the purposes of safe and reliable structural connection and more convenient mounting process are achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of static electricity neutralization, especially relate to a pole device for static electricity eliminator. BACKGROUND

[0002] Clean room, also known as clean room or dust-free room, refers to an environment with low pollution level. Its pollution sources mainly include dust, air-borne microorganisms, suspended particles and chemical volatile gases. The definition of clean room is to exclude the dust particles and other pollutants in the air within the space range to achieve a relatively clean environment.

[0003] Clean room is widely used in industries that are particularly sensitive to environmental pollution, for example, in semiconductor production, the requirements for indoor temperature and humidity and cleanliness of clean room are particularly strict, and must be controlled within a certain required range to avoid affecting the production process.

[0004] Indoor ionization system (also known as room ionization system or space ionization system) is a static electricity elimination device for eliminating static electricity in clean room and maintaining static electricity balance in clean room.

[0005] The current mainstream space ionization system (or space ionization product, also known as space static electricity elimination device) has a bar type structure, uses a direct current high voltage power supply, uses a single crystal silicon discharge electrode (pin), and generates a large number of positive and negative air ions by alternately applying positive and negative direct current high voltage to positive and negative electrode pins to neutralize local unbalanced static electricity charges in clean room, achieve efficient and reliable maintenance of space static electricity balance, reduce static adsorption of particles in space, make it easy for contaminated particles to be filtered out by air conditioning purification system, and reduce particle pollution in space.

[0006] The single crystal silicon discharge electrode (pin) mentioned above is used as a corona discharge electrode of the space static electricity elimination device because the electrode made of non-metallic material is completely compatible with silicon wafer / silicon wafer in terms of material to ensure that there is no metal pollution problem affecting the chip circuit.

[0007] The purity and high thermal conductivity of the single crystal silicon discharge electrode, combined with pulse direct current discharge technology, enable the space static electricity elimination device to maintain optimal cleaning performance to meet ISO 5 level (which refers to the level standard of air cleanliness in clean room, which means that the number of particles greater than or equal to 0.5 microns per cubic meter of air in the clean room must be less than 3520, which is equivalent to the 100 level standard of FED 209E) and higher cleanliness requirements.

[0008] Space static elimination device (also known as space ionizer), in order to realize its specific function, usually its rod body part for space static elimination is installed below fan filter unit (FFU, Fan Filter Unit), and utilizes laminar flow to transport positive and negative ions from the roof to the raised floor, and covers the entire clean room.

[0009] Electrode rod device is an important part of space ionizer, and is a discharge device for realizing ionization function. The length of the electrode rod is matched and set according to the height of the clean room roof, and therefore the reliability of the structure directly affects the electric elimination performance of the space ionizer.

[0010] The existing electrode rod device, as shown in Figure 1-1 、 Figure 1-2 、 Figure 1-3 , mainly includes: silicon (Si) electrode needle a, electrode plug b, discharge electrode protection seat c, insulating round sleeve d, high-voltage wire e, supporting round sleeve f, high-voltage socket g, high-voltage plug h, and threaded fixing hole i.

[0011] Among them, the insulating round sleeve d is coaxially sleeved in the supporting round sleeve f, and the high-voltage wire e is arranged in the insulating round sleeve d; the upper end of the high-voltage wire e is electrically connected with the high-voltage plug h arranged in the high-voltage socket g, and the lower end of the high-voltage wire e is electrically connected with the silicon (Si) electrode needle a through the electrode plug b arranged in the discharge electrode protection seat c; or in other words, the electrode plug b and the high-voltage plug h are electrically connected through the high-voltage wire e.

[0012] The discharge electrode protection seat c is integrally connected with the high-voltage socket g through the supporting round sleeve f.

[0013] In order to prevent relative displacement between the supporting round sleeve f and the discharge electrode protection seat c, a metal internal hexagonal bolt is used to fix them together through the threaded fixing hole i on the discharge electrode protection seat c.

[0014] However, it is found in actual use that the prior art has the following technical defects:

[0015] 1) The metal internal hexagonal bolt is used to fix the supporting round sleeve f and the discharge electrode protection seat c through the threaded fixing hole i on the discharge electrode protection seat c; this will cause the discharge electrode protection seat c to be asymmetrically and unevenly stressed, and easily lead to fragmentation of the silicon electrode needle.

[0016] 2) The high-voltage wire e is used to realize electrical connection between the electrode plug b and the high-voltage plug h by welding; this is inconvenient for process operation and has poor reliability.

[0017] 3) Since the metal internal hexagonal bolt is used to fix the discharge electrode protection seat, two problems will be caused:

[0018] First, metal pollution: because the metal hexagonal bolt is close to the silicon discharge electrode, and the discharge voltage of the space ion bar silicon discharge electrode is high, the ions generated by the corona discharge will bombard the metal hexagonal bolt exposed on the surface, which will cause sputtering of metal particles over a long period of time; and the ozone, strong oxidizing free radicals generated during the discharge process will also cause metal corrosion and oxidation reaction of the metal hexagonal bolt, resulting in surface metal corrosion, thereby exacerbating the outbreak of pollution particles and causing harm to the safe production of wafers.

[0019] Second, the surface of the metal hexagonal bolt in the insulating state will form a charge aggregation, generating a large static voltage, thereby causing distortion of the electric field near the discharge electrode, adversely affecting the stability of the discharge and the directional motion of the ions, and thereby affecting the electricity elimination performance of the space ion bar.

[0020] How to avoid metal pollution to the use environment while ensuring the electricity elimination performance of the space ion bar is a technical problem that needs to be solved in actual use. Practical new type content

[0021] The technical problem to be solved by the present application is to provide an electrode rod device for an electrostatic eliminator. The electrode rod device electrically connects the electrode plug-in and the high-voltage plug-in together by using a metal internal threaded pipe, uses an axisymmetric electrode needle clamp to coordinate and fix the electrode plug-in and the discharge electrode protection seat, and all metal parts in the electrode rod sleeve are inside the insulating sleeve plastic part, so that the overall surface is free of any metal components / structures, metal particles and their oxides are prevented from polluting the clean environment, the stability of the discharge and the directional motion performance of the ions are improved, and the electricity elimination performance of the space ion bar is optimized. At the same time, a completely axisymmetric and mechanically connected mounting structure is adopted to realize safe and reliable structure connection and more convenient installation process.

[0022] The technical scheme of the present application is to provide an electrode rod device for an electrostatic eliminator, comprising a high-voltage socket, a support sleeve and a discharge electrode protection seat connected in sequence and coaxially arranged, characterized in that:

[0023] In the high-voltage socket, a high-voltage plug-in is coaxially arranged;

[0024] In the support sleeve, an insulating sleeve and a metal internal threaded pipe are coaxially arranged;

[0025] In the discharge electrode protection seat, an electrode needle clamp, an electrode plug-in and a silicon electrode are coaxially arranged in sequence;

[0026] The upper end of the metal internal threaded pipe is integrally connected with the high-voltage plug-in; the lower end of the metal internal threaded pipe is integrally connected with the electrode plug-in;

[0027] On the body of the electrode plug-in, an electrode plug-in boss is arranged;

[0028] A high-voltage plug boss is arranged on the body of the high-voltage plug;

[0029] A discharge electrode protection seat center hole boss is arranged at the center hole of the discharge electrode protection seat; and a high-voltage socket center hole boss is arranged at the center hole of the high-voltage socket;

[0030] The high-voltage plug boss is arranged outside the high-voltage socket center hole boss; and the electrode plug boss is arranged outside the discharge electrode protection seat center hole boss.

[0031] The electrode plug boss, the high-voltage plug boss, the discharge electrode protection seat center hole boss and the high-voltage socket center hole boss are fixedly connected through the metal inner threaded pipe, and are matched with each other in structure, so that the high-voltage socket, the support sleeve and the insulating sleeve, the discharge electrode protection seat, the electrode needle clamping piece and the electrode plug are fixedly installed as a whole.

[0032] Specifically, the metal inner threaded pipe forms an electric path between the high-voltage plug and the electrode plug.

[0033] Further, the high-voltage plug is electrically connected with the silicon electrode needle through the metal inner threaded pipe and the electrode plug.

[0034] Specifically, the electrode needle clamping piece is in a buckle type structure and is clamped in the discharge electrode protection seat.

[0035] Further, the electrode plug boss is in a hexagonal nut shape; and the high-voltage plug boss is in a hexagonal nut shape.

[0036] Specifically, the lower end of the electrode plug is a sleeve with two slits, and the two slits are in a long strip shape and are symmetrically distributed; and the upper end of the electrode plug is a cylinder with external threads, and the middle part is in a hexagonal nut shape.

[0037] Further, the radial cross-section of the insulating sleeve is in a circular shape; and the radial cross-section of the support sleeve is approximately in a square shape, so as to be matched and installed with the electrode protection seat and the high-voltage socket.

[0038] Specifically, the high-voltage socket is in a buckle type installation structure, and the whole electrode rod device is installed and fixed to the corresponding buckle part of the space ion bar through the buckle type high-voltage socket.

[0039] Further, an annular raised platform is arranged on the outer periphery of the high-voltage socket, and a round gasket is arranged on the raised platform.

[0040] Compared with the prior art, the advantages of the utility model are as follows:

[0041] 1. The technical solution connects the electrode plug and the high-voltage plug together through the metal internal thread pipe, and fixes the discharge electrode protection seat through the metal internal thread pipe and the electrode plug, which realizes safe and reliable electrical connection and simplifies the installation process.

[0042] 2. The installation structure is completely axisymmetric and mechanically connected; the axisymmetric electrode needle clamp is used to fix the electrode plug and the discharge electrode protection seat, so that the force of each part is completely symmetrical and uniform, and the silicon electrode needle will not be broken.

[0043] 3. Unlike the discharge electrode protection seat with a cylindrical shape in the prior art, the discharge electrode protection seat of the technical solution has a square tube shape, which is more convenient for installing or dismounting the electrode rod device on the ion rod body, so as to clean and maintain.

[0044] 4. All metal parts in the electrode rod set of the technical solution are inside the insulating plastic sleeve, and there is no exposed metal part / structure on the surface, which avoids metal particles and their oxides from polluting the clean environment, wafer processing and subsequent integrated circuit production.

[0045] 5. All metal parts in the electrode rod set of the technical solution are inside the insulating plastic sleeve, and there is no exposed metal part / structure on the surface, which will not cause the distortion of the electric field near the discharge electrode, so that the stability of the discharge and the performance of the directional motion of the ions are improved, and the space ion rod is optimized. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1-1 It is a structural schematic diagram of the existing electrode rod device;

[0047] Figure 1-2 It is a structural schematic diagram of the existing electrode rod device;

[0048] Figure 1-3 It is a structural schematic diagram of the existing electrode rod device;

[0049] Figure 2-1 It is a structural schematic diagram of the electrode rod device of the technical solution;

[0050] Figure 2-2 It is a structural schematic diagram of the electrode rod device of the technical solution;

[0051] Figure 3 It is a structural schematic diagram of the electrode rod device of the technical solution;

[0052] Figure 4 It is a structural schematic diagram of the electrode rod device of the technical solution;

[0053] Figure 5It is a bottom structure schematic view of the electrode rod device of the technical scheme;

[0054] Figure 6 It is an axial structure schematic view of the electrode rod device of the technical scheme;

[0055] Figure 7 It is an exploded axial view of the electrode rod device of the technical scheme;

[0056] Figure 8 It is a structure schematic view of the electrode needle clamping piece of the technical scheme;

[0057] Figure 9 It is a structure schematic view of the electrode protection seat of the technical scheme;

[0058] Figure 10 It is a structure schematic view of the high-voltage socket of the technical scheme.

[0059] In the figure, a is a prior art Si electrode needle, b is a prior art electrode plug, c is a prior art discharge electrode protection seat, d is a prior art insulating round sleeve, e is a prior art high-voltage wire, f is a prior art supporting round sleeve, g is a prior art high-voltage socket, h is a prior art high-voltage plug, and i is a threaded fixing hole;

[0060] 0 is an electrode needle clamping piece, 1 is a Si electrode needle, 2 is an electrode plug, 2-1 is an electrode plug boss, 3 is a discharge electrode protection seat, 3-1 is a discharge electrode protection seat center hole boss, 4 is an insulating sleeve, 5 is a metal inner threaded pipe, 6 is a supporting sleeve, 7 is a high-voltage socket, 7-1 is a high-voltage socket center hole boss, 8 is a high-voltage plug, 8-1 is a high-voltage plug boss, and 9 is a round gasket. DETAILED DESCRIPTION

[0061] The utility model will be further described below in combination with the drawings.

[0062] The utility model discloses a technical scheme, sets up a set of each other's matching buckle type discharge electrode protection seat and electrode needle clamping piece for the protection and fixed of Si electrode needle.

[0063] The lower end is a sleeve with an opening, the upper end is a cylindrical outer thread, and the middle is a hexagonal nut-shaped electrode plug.

[0064] Insert the outer threaded cylindrical end of the electrode plug into the round hole in the center of the electrode protection seat from bottom to top. Insert the metal pipe with internal threads (hereinafter referred to as metal inner threaded pipe) from top to bottom into the round hole in the center of the electrode protection seat, and screw it into the electrode plug, so that the electrode plug, electrode protection seat and metal inner threaded pipe are preliminarily fixed together.

[0065] From top to bottom, an insulating sleeve and a supporting sleeve are sleeved on the metal internal threaded pipe and the electrode protection seat.

[0066] A buckle type high voltage socket is arranged, and the lower end of the high voltage socket is inserted into the supporting sleeve from top to bottom; a high voltage plug with a threaded cylinder at the lower end, a smooth ball column at the upper end and a hexagonal nut shape in the middle is inserted into the mounting hole at the center of the high voltage socket from top to bottom, and is screwed onto the metal internal threaded pipe. At this time, the whole electrode rod device is assembled.

[0067] The electrode rod device is screwed into the corresponding installation position of the space ion bar from bottom to top through the buckle type high voltage socket.

[0068] Specifically, the structure and assembly process are as follows:

[0069] As shown in Figure 2-1 , Figure 2-2 , and shown in Figure 3 , Figure 7 , the technical scheme provides an electrode rod device for an electrostatic eliminator, which comprises a high voltage socket 7, a supporting sleeve 6 and a discharge electrode protection seat 3 arranged coaxially in sequence.

[0070] Among them, the high voltage plug 8 is coaxially arranged in the high voltage socket 7; the insulating sleeve 4 and the metal internal threaded pipe 5 are sleeved and arranged in the supporting sleeve 6; the electrode plug 2, the silicon electrode 1 and the electrode needle clamping piece 0 are coaxially arranged in sequence in the discharge electrode protection seat 3.

[0071] A raised platform is arranged on the outer periphery of the high voltage socket 7, and a round gasket 9 is sleeved and arranged on the raised platform.

[0072] The upper end of the metal internal threaded pipe 5 is integrally connected with the high voltage plug 8; the lower end of the metal internal threaded pipe 5 is integrally connected with the electrode plug 2.

[0073] Internal threads are arranged at both ends of the metal internal threaded pipe 5; external threads are arranged at the lower end of the high voltage plug 8; external threads are arranged at the upper end of the electrode plug 2.

[0074] The upper end of the metal internal threaded pipe 5 is integrally connected with the high voltage plug 8; the lower end of the metal internal threaded pipe 5 is integrally connected with the electrode plug 2.

[0075] The silicon electrode needle 1 is arranged in the electrode plug 2.

[0076] The electrode plug 2 and the silicon electrode needle 1 are arranged in the electrode needle clamping piece 0.

[0077] The electrode needle clamping piece 0 is arranged in the buckle type discharge electrode protection seat 3.

[0078] On the body of the electrode plug 2, there is an electrode plug boss 2-1; on the body of the high voltage plug 8, there is a high voltage plug boss 8-1.

[0079] The electrode plug boss 2-1 is hexagonal nut shaped, and the high voltage plug boss 8-1 is hexagonal nut shaped.

[0080] On the central hole of the discharge electrode protection seat 3, there is a discharge electrode protection seat central hole boss 3-1; on the central hole of the high voltage socket 7, there is a high voltage socket central hole boss 7-1.

[0081] The high voltage plug boss is arranged outside the high voltage socket central hole boss; the electrode plug boss is arranged outside the discharge electrode protection seat central hole boss.

[0082] The electrode plug boss 2-1 and the high voltage plug boss 8-1, in the screwing mode of the metal internal threaded pipe 5, through the structural cooperation of the electrode plug boss and the high voltage socket boss, integrate the high voltage socket 7, the support sleeve 6 and the insulating sleeve 4 in it, and the discharge electrode protection seat 3 and the electrode needle card 0 and the silicon electrode needle 1 in it.

[0083] The electrode needle card 0 adopts a buckle type structure and is clamped in the discharge electrode protection seat 3.

[0084] The metal internal threaded pipe 5 constitutes an electric path between the high voltage plug 8 and the electrode plug 2.

[0085] The high voltage plug 8 is electrically connected with the silicon electrode needle 1 through the metal internal threaded pipe 5 and the electrode plug 2.

[0086] 1) Referring to Figure 2-1 , Figure 2-2 , in combination with Figure 3 , Figure 7 , the technical solution sets a set of matched buckle type discharge electrode protection seat 3 (see Figure 9 ) and electrode needle card 0 (see Figure 8 ), which are used for protecting and fixing the silicon electrode needle 1.

[0087] 2) An electrode plug 2 is arranged, the lower end of which is a sleeve with two openings, the two openings are long strip-shaped and symmetrically distributed; the upper end is a cylindrical body with external threads, and the middle part is hexagonal nut shaped.

[0088] 3) The silicon electrode needle 1 is inserted into the sleeve with openings of the electrode plug 2 from the lower end to the upper end.

[0089] 4) One end of the electrode plug 2 with external threads is inserted into the circular hole at the axial center of the electrode protection seat 3 from the lower end to the upper end.

[0090] 5) Set a metal internal thread pipe 5, metal internal thread pipe both ends are equipped with internal thread;It is inserted from top to bottom into the round hole of electrode protection seat 3 at the shaft center and is screwed into the threaded cylinder of electrode plug 2, so that electrode plug 2, electrode protection seat 3, metal internal thread pipe 5 are preliminarily fixed together.

[0091] 6) An insulating sleeve 4 and a support sleeve 6 are sequentially sleeved on metal internal thread pipe 5 and electrode protection seat 3 from top to bottom. The radial cross-sectional profile of insulating sleeve 4 is circular;And the radial cross-sectional profile of support sleeve 6 is approximately square, which can be matched and installed with electrode protection seat 3 and high-voltage socket 7 (see Figure 10 ) (see Figure 7 )。

[0092] 7) Set a buckle type high-voltage socket 7, and insert the lower end into the support sleeve 6 from top to bottom. The high-voltage socket 7 is also designed as a buckle type mounting structure, and the entire electrode rod device can be installed in the corresponding buckle part of the space ion bar through it.

[0093] 8) Set a high-voltage plug 8, which is a threaded cylinder at the lower end, a smooth spherical cylinder at the upper end, and a hexagonal nut shape in the middle;It is inserted into the mounting hole at the shaft center of high-voltage socket 7 from top to bottom, and is screwed into metal internal thread pipe 5.

[0094] The technical scheme of the utility model, through metal internal thread pipe, electrode plug and high-voltage plug are fixedly connected as a whole, and electrode plug and high-voltage plug are also electrically connected together;Adopt completely axisymmetric, mechanical connection mounting structure, and the electrode needle card piece of axisymmetric shape is used to coordinate and fix electrode plug and discharge electrode protection seat, so that the force of each side is completely symmetrical and uniform, and the silicon electrode needle will not be broken;The discharge electrode protection seat is approximately in the shape of a square cylinder, which is more convenient for installing the electrode rod device on the ion bar body or disassembling the electrode rod device from the ion bar body for cleaning and maintenance;Meanwhile, all metal components in the electrode rod sleeve of the technical scheme are inside the insulating plastic sleeve, and the surface of the electrode rod sleeve has no exposed metal components / structures, which avoids the pollution of metal particles and oxides to the clean environment, wafer processing and subsequent integrated circuit production, and avoids the pollution of metal particles and oxides to the clean environment;And all metal components in the electrode rod sleeve are inside the insulating plastic sleeve, and the surface has no exposed metal components / structures, so that the electric field distortion near the discharge electrode will not be caused, the stability of discharge and the directional motion performance of ions are improved, and the electricity elimination performance of the space ion bar is optimized.

[0095] The utility model can be widely used in the design and manufacturing field of electrode rod device of electrostatic eliminator.

Claims

1. An electrode rod device for an electrostatic eliminator, comprising a high-voltage socket, a support sleeve and a discharge electrode protection seat connected in sequence and coaxially, characterized in that: a high-voltage insert is coaxially arranged in the high-voltage socket; an insulating sleeve and a metal inner threaded tube are coaxially arranged in the support sleeve; an electrode needle clamping piece, an electrode insert and a silicon electrode are coaxially arranged in the discharge electrode protection seat in sequence; the upper end of the metal inner threaded tube is fixedly connected with the high-voltage insert; the lower end of the metal inner threaded tube is fixedly connected with the electrode insert; an electrode insert boss is arranged on the body of the electrode insert; a high-voltage insert boss is arranged on the body of the high-voltage insert; a discharge electrode protection seat center hole boss is arranged at the center hole of the discharge electrode protection seat; a high-voltage socket center hole boss is arranged at the center hole of the high-voltage socket; the high-voltage insert boss is arranged outside the high-voltage socket center hole boss; the electrode insert boss is arranged outside the discharge electrode protection seat center hole boss; the electrode insert boss and the high-voltage insert boss are fixedly connected with the discharge electrode protection seat center hole boss and the high-voltage socket center hole boss to fix and install the high-voltage socket, the support sleeve, the insulating sleeve in the support sleeve, the discharge electrode protection seat, the electrode needle clamping piece and the electrode insert in the discharge electrode protection seat as a whole; inner threads are arranged at both ends of the metal inner threaded tube; an outer thread is arranged at the lower end of the high-voltage insert; an outer thread is arranged at the upper end of the electrode insert; the upper end of the metal inner threaded tube is screw-connected with the high-voltage insert; the lower end of the metal inner threaded tube is screw-connected with the electrode insert; the metal inner threaded tube forms an electric path between the high-voltage insert and the electrode insert; the high-voltage insert is electrically connected with the silicon electrode needle through the metal inner threaded tube and the electrode insert; the electrode needle clamping piece is clamped in the discharge electrode protection seat in a buckle type structure; the electrode insert boss is in the shape of a hexagonal nut; the high-voltage insert boss is in the shape of a hexagonal nut; the lower end of the electrode insert is a sleeve with two slits, the two slits are in the shape of long strips and are symmetrically distributed; the upper end of the electrode insert is a cylindrical body with an outer thread, and the middle part is in the shape of a hexagonal nut; the radial cross-sectional profile of the insulating sleeve is circular; the radial cross-sectional profile of the support sleeve is approximately square, and the support sleeve is matched and installed with the discharge electrode protection seat and the high-voltage socket; the high-voltage socket is a buckle type installation structure, and the entire electrode rod device is installed and fixed to the corresponding buckle part of a space ionizer through the buckle type high-voltage socket; a ring-shaped raised platform is arranged at the outer periphery of the high-voltage socket, and a circular gasket is arranged on the raised platform. ​ ​ ​ ​ ​ ​ ​ ​ ​ 2. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ ​ ​ ​ ​ 3. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 4. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 5. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 6. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 7. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 8. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 9. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​ 10. The electrode rod assembly for an electrostatic precipitator of claim 1 wherein ​

Images