Air extractor and rotary spraying type wet process all-in-one machine

Abstract

The utility model discloses an air extracting device and a rotary spraying type wet process all-in-one machine, the air extracting device comprises an air extracting pipeline and an air extracting part, the air inlet end of the air extracting pipeline is located in a machine box, the air inlet end of the air extracting part is communicated with the air extracting pipeline, and the exhaust end of the air extracting part is connected into a waste gas pipeline of a factory; the air exhaust part is configured to exhaust air in the air exhaust pipeline, so that negative pressure is formed in the air exhaust pipeline, and volatile gas of a solvent in the case is introduced into the waste gas pipeline to be exhausted after passing through the air exhaust pipeline. According to the air exhaust device, through the arrangement of the air exhaust pipeline and the air exhaust part, vaporized chemical solution and redundant gas in the machine box are exhausted out of the spin dryer.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing equipment technology, and in particular to an air extraction device and a rotary spray wet processing integrated machine. Background Technology

[0002] A wafer is a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. It is called a wafer because of its circular shape. Various circuit element structures can be fabricated on silicon wafers to create electronic components with specific electrical functions.

[0003] The rotary spray wet process machine is a wet drying machine used in wafer manufacturing in the semiconductor industry. It can be used for wet process processes with solvents such as strong acids, strong alkalis, and organic solvents, and is suitable for most wet processes of wafers from 2 inches to 12 inches.

[0004] Currently, in the existing rotary spray wet processing machine, the solvents (strong acids, strong alkalis, organic solvents, etc.) used in the wafer processing will evaporate inside the machine. The evaporated gas will adhere to the surface of the components inside the machine, causing pollution or corrosion to the components. Utility Model Content

[0005] To address the related technical problems, the purpose of this utility model is to provide a ventilation device with liquid recovery function to solve the problem of discharging vaporized chemical solutions and excess gas from the spin dryer; in addition, this utility model also provides a wafer processing device including the above-mentioned ventilation device with liquid recovery function.

[0006] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions:

[0007] An air extraction device includes an air extraction pipe and an air extraction component, wherein:

[0008] The air inlet of the exhaust pipe is located inside the casing, the air inlet of the exhaust component is connected to the exhaust pipe, and the exhaust outlet of the exhaust component is connected to the factory's waste gas pipe.

[0009] The air extraction component is configured to extract air from the air extraction pipe to create a negative pressure inside the air extraction pipe. The volatile gases of the solvent inside the chassis are then introduced into the exhaust pipe and discharged.

[0010] Optionally, the exhaust pipe includes an exhaust manifold, which is horizontally installed inside the chassis. An air inlet is provided on the exhaust manifold, and the air inlet of the exhaust component is connected to the exhaust manifold. The volatile gases of the solvent inside the chassis are introduced into the exhaust pipe through the air inlet and discharged.

[0011] Optionally, the extraction pipe may also include a first branch pipe and a second branch pipe, wherein:

[0012] The bottom of the first branch pipe is connected to the first end of the exhaust main pipe in the horizontal direction, and the top of the first branch pipe is fixed to the top of the chassis.

[0013] The bottom of the second branch pipe is connected to the second end of the main exhaust pipe in the horizontal direction, and the top of the second branch pipe is fixed to the top of the chassis.

[0014] Both the top of the first and second branch pipes are equipped with air extraction components.

[0015] Optionally, the main exhaust pipe, the first branch pipe, and the second branch pipe are located on the same side inside the chassis, and the first branch pipe and the second branch pipe are arranged in parallel and both are perpendicular to the main exhaust pipe.

[0016] Optionally, the internal space of the chassis is divided into at least two layers. The upper layer contains a processing unit for processing wafers, and the lower layer contains a storage tank for storing solvents required for the process and a liquid supply assembly. The liquid supply assembly is configured to supply solvents to the processing unit according to the process requirements of the wafers.

[0017] Optionally, the first branch pipe is located above the storage tank, the bottom end of the first branch pipe is closed, and a leakage hole is opened at the bottom end of the first branch pipe. The leakage hole is connected to the storage tank through a pipeline. The evaporating gas of the solvent in the first branch pipe is condensed and flows back into the storage tank through the pipeline.

[0018] Optionally, the air intake end on the main exhaust pipe is located in the lower space of the chassis.

[0019] Optionally, the air inlet end includes several vent holes on the bottom surface of the air extraction main pipe, with the several vent holes spaced apart in the horizontal direction.

[0020] Optionally, the air intake end includes a vent hole opened on the bottom surface of the air intake manifold, the vent hole being elongated and extending horizontally.

[0021] A rotary jet wet process integrated machine includes the aforementioned air extraction device.

[0022] The beneficial effects of this utility model are as follows: Compared with the prior art, the exhaust device with liquid recovery function provided by this utility model has the following beneficial effects:

[0023] 1. By installing air extraction pipes and components, the vaporized chemical solution and excess gas inside the spin dryer are discharged, reducing corrosion to the internal components and minimizing impact on service life.

[0024] 2. The combination of extraction pipes and extraction components results in a simple structure and reduces production costs;

[0025] 3. The extraction pipe and extraction components are located on the same side of the upper layer inside the casing and connected to the liquid storage tank, which has the effect of recovering condensed gas into the liquid storage tank. Attached Figure Description

[0026] To more clearly illustrate and understand the technical solutions in the embodiments of this utility model, the accompanying drawings used in the background technology and embodiment description of this utility model will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of an exhaust device with liquid recovery function provided in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of an exhaust device with liquid recovery function provided in an embodiment of the present invention. Detailed Implementation

[0029] The present invention will be further described in detail below with reference to the accompanying drawings.

[0030] To facilitate understanding of this utility model, a more complete description of it will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of this utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0031] Please see Figures 1 to 2 As shown, this embodiment provides a ventilation device with liquid recovery function, which includes a ventilation pipe 1 and a ventilation component 2, wherein:

[0032] The air inlet of the air extraction pipe 1 is located inside the casing 3. The air inlet of the air extraction component 2 is connected to the air extraction pipe 1, and the exhaust end of the air extraction component 2 is connected to the factory's waste gas pipe.

[0033] The air extraction component 2 is configured to extract air from the air extraction pipe 1 to create a negative pressure in the air extraction pipe 1. The volatile gases of the solvent in the casing 3 are introduced into the exhaust pipe and discharged after passing through the air extraction pipe 1.

[0034] It is evident that by setting up the air extraction pipe 1 and the air extraction component 2, the vaporized chemical solution and excess gas inside the casing 3 are discharged from the spin dryer, reducing the corrosion of the internal components of the spin dryer and affecting its service life.

[0035] In one embodiment, the exhaust pipe 1 includes an exhaust manifold 10, which is horizontally installed inside the housing 3. An air inlet is provided on the exhaust manifold 10, and the air inlet of the exhaust component 2 is connected to the exhaust manifold 10. The volatile gases of the solvent inside the housing 3 are introduced into the exhaust pipe through the air inlet by the exhaust component 2 and discharged.

[0036] It can be seen that by installing the main exhaust pipe 10 horizontally, the exhaust range at the intake end of the main exhaust pipe 10 is increased, thereby increasing the exhaust efficiency.

[0037] In one embodiment, the exhaust pipe 1 further includes a first branch pipe 11 and a second branch pipe 12. The bottom of the first branch pipe 11 is connected to the first end of the exhaust main pipe 10 in the horizontal direction, and the top of the first branch pipe 11 is fixed to the top of the casing 3. The bottom of the second branch pipe 12 is connected to the second end of the exhaust main pipe 10 in the horizontal direction, and the top of the second branch pipe 12 is fixed to the top of the casing 3. Exhaust components 2 are installed on the top of both the first branch pipe 11 and the second branch pipe 12.

[0038] Specifically, the opening connecting the first branch pipe 11 to the main exhaust pipe 10 is located on the bottom side wall, and the opening connecting the second branch pipe 12 to the main exhaust pipe 10 is located at the bottom end of the second branch pipe 12.

[0039] It can be seen that by setting the air extraction component 2 on the first branch pipe 11 and the second branch pipe 12 respectively, the air extraction efficiency is increased.

[0040] In one embodiment, the main exhaust pipe 10, the first branch pipe 11, and the second branch pipe 12 are located on the same side inside the casing 3. The first branch pipe 11 and the second branch pipe 12 are arranged in parallel and are both perpendicular to the main exhaust pipe 10.

[0041] It is evident that placing the main exhaust pipe 10, the first branch pipe 11, and the second branch pipe 12 on the same side results in a reasonable structure and facilitates installation.

[0042] In one embodiment, the internal space of the chassis 3 is divided into at least two layers. The upper layer contains a processing unit for processing wafers, and the lower layer contains a storage tank (not shown) for storing solvents required for the process and a supply assembly (not shown). The supply assembly is configured to supply solvents to the processing unit according to the process requirements of the wafers.

[0043] As can be seen, placing the liquid storage tank in the lower space facilitates the recovery of gas by the gas extraction pipe 1 and the gas extraction component 2.

[0044] In one embodiment, the first branch pipe 11 is located above the storage tank. The bottom end of the first branch pipe 11 is closed, and a leakage hole 13 is provided at the bottom end of the first branch pipe 11. The leakage hole 13 is connected to the storage tank through a pipeline. After the evaporation gas of the solvent in the first branch pipe 11 is condensed, it flows back into the storage tank through the pipeline.

[0045] As can be seen, a leakage hole 13 is opened at the bottom of the first branch pipe 11, which, together with the pipeline, condenses the volatile gas and flows it back into the storage tank. The structure is simple and easy to use.

[0046] In one implementation, the air inlet on the main exhaust pipe 10 is located in the lower space of the chassis 3.

[0047] It is evident that by placing the exhaust manifold 10 in the lower space, the collection of volatile gases is facilitated, thereby improving the collection efficiency.

[0048] In one embodiment, the air inlet includes a plurality of vent holes on the bottom surface of the air extraction manifold 10, and the plurality of vent holes are spaced apart in the horizontal direction.

[0049] It is evident that by setting several vents, the suction force on the bottom of the vents can be increased, which has the advantage of increasing exhaust efficiency.

[0050] In one embodiment, the air intake end includes a vent hole opened on the bottom surface of the air extraction manifold 10. The vent hole is elongated and extends in the horizontal direction.

[0051] It is evident that setting elongated vent holes can increase the air extraction range and improve exhaust efficiency.

[0052] A rotary jet wet process integrated machine includes the aforementioned air extraction device.

[0053] Application areas of rotary jet wet scrubbing machines include

[0054] Etching / Cleaning: Metal etching, III / V etching with endpoint detection, oxide etching, silicon etching, chromium etching, nitride etching, UBM etching, glass etching.

[0055] Developing / Removing: Organic removal and cleaning, cleaning of etching residues, post-HF processing.

[0056] The working principle of the above-mentioned air extraction device is as follows:

[0057] The extraction component 2 extracts air from the main extraction pipe 10 through the first branch pipe 11 and the second branch pipe 12 and discharges it into the casing 3. The gas condenses in the extraction pipe 1, flows through the inner wall to the bottom of the first branch pipe 11, and flows through the leakage hole 13 and the pipe to the storage tank.

[0058] In the embodiments disclosed in this utility model, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this utility model according to the specific circumstances.

[0059] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above examples. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A vacuum device, characterized in that, The air extraction device includes an air extraction pipe and an air extraction component, wherein: The air inlet of the extraction pipe is located inside the casing, the air inlet of the extraction component is connected to the extraction pipe, and the exhaust end of the extraction component is connected to the factory's waste gas pipe. The air extraction component is configured to extract air from the air extraction pipe to create a negative pressure inside the air extraction pipe, and the volatile gases of the solvent in the chassis are introduced into the exhaust pipe and discharged after passing through the air extraction pipe.

2. The air extraction device according to claim 1, characterized in that, The exhaust pipe includes an exhaust manifold, which is horizontally installed inside the chassis. The exhaust manifold is provided with an air inlet. The air inlet of the exhaust component is connected to the exhaust manifold. The volatile gases of the solvent inside the chassis are introduced into the exhaust pipe through the exhaust component via the air inlet and then discharged.

3. The air extraction device according to claim 2, characterized in that, The extraction pipe also includes a first branch pipe and a second branch pipe, wherein: The bottom of the first branch pipe is connected to the first end of the main exhaust pipe in the horizontal direction, and the top of the first branch pipe is fixed to the top of the chassis. The bottom of the second branch pipe is connected to the second end of the main exhaust pipe in the horizontal direction, and the top of the second branch pipe is fixed to the top of the chassis. The air extraction component is installed at the top of both the first branch pipe and the second branch pipe.

4. The air extraction device according to claim 3, characterized in that, The main exhaust pipe, the first branch pipe, and the second branch pipe are located on the same side inside the chassis. The first branch pipe and the second branch pipe are arranged in parallel and are both perpendicular to the main exhaust pipe.

5. The air extraction device according to claim 3, characterized in that, The internal space of the chassis is divided into at least two layers. The upper layer contains a processing unit for processing wafers, and the lower layer contains a storage tank for storing solvents required for the process and a liquid supply assembly. The liquid supply assembly is configured to supply solvents to the processing unit according to the process requirements of the wafers.

6. The air extraction device according to claim 5, characterized in that, The first branch pipe is located above the liquid storage tank. The bottom end of the first branch pipe is closed, and a leakage hole is provided at the bottom end of the first branch pipe. The leakage hole is connected to the liquid storage tank through a pipeline. After the evaporation gas of the solvent in the first branch pipe condenses, it flows back into the liquid storage tank through the pipeline.

7. The air extraction device according to claim 5, characterized in that, The air inlet on the main exhaust pipe is located in the lower space of the chassis.

8. The air extraction device according to claim 2, characterized in that, The air inlet includes a plurality of vent holes formed on the bottom surface of the main exhaust pipe, and the plurality of vent holes are spaced apart in a horizontal direction.

9. The air extraction device according to claim 2, characterized in that, The air inlet includes a vent hole formed on the bottom surface of the main exhaust pipe, the vent hole being elongated and extending horizontally.

10. A rotary jet wet laminator, characterized in that, The rotary jet wet cleaning machine includes the air extraction device described in any one of claims 1-9.

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