Vacuum coating machine cavity cooling device

Abstract

The utility model discloses a vacuum coating machine cavity cooling device which comprises a coating machine body and a sealing cover, an air cavity is formed in the sealing cover, a ventilation groove is formed in the side, close to the coating machine body, of the sealing cover, a driving motor is fixedly connected to the side, away from the ventilation groove, of the sealing cover, a fan is fixedly connected to the output end of the driving motor, and a support is fixedly connected into the air cavity. According to the utility model, the electric push rod and the electric telescopic rod are respectively arranged on the coating machine body and the sealing cover, so that the pressing strip can be in contact with the sealing frame and the sealing plate can be in contact with the air inlet hole, and therefore, the coating machine body can be in a closed state, and coating is facilitated; after coating is completed, the electric telescopic rod and the electric push rod contract, then the fan is started to guide air from the air cavity to enter the coating machine body through the ventilation groove, and then the air overflows through the air inlet hole, the cooling cavity and the air outlet groove, so that heat can be conveniently guided out, the cooling effect is improved, and the danger when materials are taken out is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine technical field, concretely relates to a vacuum coating machine cavity cooling device. BACKGROUND

[0002] Vacuum coating machine is a kind of equipment for coating material under higher vacuum degree, usually film body is evaporated at high temperature and clean on workpiece surface, by magnetron sputtering technology, the evaporation molecule of film body can be accelerated under the action of electric field Bombard target material, a large number of target atoms are sputtered, and neutral target atoms are deposited on the substrate to form a film, so as to achieve the effect of coating.

[0003] Vacuum coating machine will produce heat in the coating process, resulting in the coating chamber and coating material at a higher temperature, and when taking out, it will cause burns and coating damage.

[0004] According to the patent number CN219117542U "a kind of vacuum coating machine wall cooling device", it mainly describes that by being provided with fixed frame, pipe and horn cover, air conditioner is bonded at the top of fixed frame, fan is arranged in horn cover, by starting air conditioner, and opening the valve of pipe, so that connecting cover and horn cover are in communication state, air conditioner will discharge cold air from air outlet to connecting cover, and transmit to pipe through connecting cover, and then fan extracts the cold air in pipe and is discharged to cavity, to reduce the temperature around workpiece disc, realize the cooling purpose of substrate on workpiece disc, in the process of material coating, melting material will produce heat and cause heat accumulation in cavity, when opening and taking out material, there is a certain danger.

[0005] Therefore, a kind of vacuum coating machine cavity cooling device is proposed to solve the problem that in the process of material coating, melting material will produce heat and cause heat accumulation in cavity, when opening and taking out material, there is a certain danger. UTILITY MODEL CONTENTS

[0006] The utility model solves the technical problems that in the process of material coating, melting material will produce heat and cause heat accumulation in cavity, when opening and taking out material, there is a certain danger, therefore, a kind of vacuum coating machine cavity cooling device is proposed.

[0007] The utility model discloses a technical scheme that solves technical problems is: a vacuum coating machine cavity cooling device, including coating machine body and the closing cap, be provided with the air cavity on the closing cap, the closing cap is close to the coating machine body one side and is provided with the ventilation groove, the closing cap is away from the ventilation groove one side and is fixedly connected with the drive motor, the drive motor output is fixedly connected with the fan, the air cavity is fixedly connected with the support in, the support is fixedly connected with electric push rod on, the electric push rod output is fixedly connected with the batten, the batten one side contacts and has the closing frame, the closing frame is fixedly connected in the air cavity, the coating machine body is provided with the cooling cavity in, the cooling cavity is fixedly connected with electric telescopic handle on the upside, the electric telescopic handle bottom is provided with the closing plate, the closing plate one side contacts and has the U type frame, the coating machine body is evenly provided with the air inlet in U type frame place, the closing cap is fixedly connected with temperature sensor, temperature sensor is connected display screen through the wire, display screen is fixedly connected in the coating machine body one side, the coating machine body is close to the cooling cavity one side and is provided with the air outlet groove.

[0008] As a preferred technical scheme of the utility model, the coating machine body is fixedly connected with a baffle on both sides, the baffle is located on the upper side of the air outlet groove, and the baffle can guide the airflow and reduce the temperature of the discharged airflow to affect the human body.

[0009] As a preferred technical scheme of the utility model, the coating machine body is in contact with the closing plate, the closing plate is in contact with a guide strip on one side, and the guide strip is fixedly connected with the U type frame, so that the guide strip can guide the closing plate.

[0010] As a preferred technical scheme of the utility model, the closing plate is fixedly connected with a connecting box at the upper end, the connecting box is fixedly connected with a positioning rod, and the positioning rod is movably inserted into the output end of the electric telescopic handle, so that the connecting box and the positioning rod can be inserted into the electric telescopic handle, thereby reducing the friction between the closing plate and the coating machine body.

[0011] As a preferred technical scheme of the utility model, a spring is sleeved on the positioning rod, and the two ends of the spring are in contact with the electric telescopic handle and the connecting box respectively, so that the spring can avoid the contact between the closing plate and the coating machine body when the electric telescopic handle is retracted.

[0012] As a preferred technical scheme of the utility model, two dustproof nets are fixedly connected in the air cavity on the closing cap, and the dustproof nets are located on the outer sides of the two closing frames, so that the dustproof nets can prevent dust from entering the coating machine body.

[0013] The utility model has the advantages that: through setting up electric push rod and electric telescopic rod respectively on the coating machine body and the cover, the pressing strip can contact the frame, and the sealing plate contacts the air inlet hole, so that the coating machine body can be in the closed state, the coating is facilitated, the electric telescopic rod and the electric push rod are retracted after the coating is completed, the fan is started again, air is guided from the air cavity through the ventilation groove into the coating machine body, then overflows through the air inlet hole, the cooling cavity and the air outlet groove, the heat can be conveniently guided out, the cooling effect is improved, and the danger when the material is taken out is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is a three-dimensional sectional structure schematic diagram of a vacuum coating machine cavity cooling device of a preferred embodiment of the utility model;

[0015] Fig. 2 It is a front view sectional structure schematic diagram of a vacuum coating machine cavity cooling device of a preferred embodiment of the utility model;

[0016] Fig. 3 It is a three-dimensional structure schematic diagram of the connecting box of a vacuum coating machine cavity cooling device of a preferred embodiment of the utility model.

[0017] The reference signs are explained as follows: 1, coating machine body; 2, cover; 3, air cavity; 4, ventilation groove; 5, fan; 6, support; 7, electric push rod; 8, pressing strip; 9, frame; 10, cooling cavity; 11, electric telescopic rod; 12, sealing plate; 13, U-shaped frame; 14, baffle; 15, air inlet hole; 16, dust screen; 17, guide strip; 18, connecting box; 19, positioning rod; 20, spring; 21, temperature sensor; 22, display screen; 23, air outlet groove. DETAILED DESCRIPTION

[0018] The utility model will be further explained in combination with the drawings.

[0019] Please refer to Figs. 1-3The vacuum coating machine cavity cooling device shown, including coating machine body 1 and cover 2, cover 2 is set up air cavity 3, cover 2 is set up ventilation slot 4 near coating machine body 1 side, cover 2 is fixedly connected with drive motor away from ventilation slot 4 side, drive motor output end is fixedly connected with fan 5, air cavity 3 is fixedly connected with support 6, support 6 is fixedly connected with electric push rod 7, electric push rod 7 extension can drive pressing strip 8 contact frame 9, can make cover 2 be in closed state, electric push rod 7 output end is fixedly connected with pressing strip 8, pressing strip 8 side contact has frame 9, frame 9 is fixedly connected in air cavity 3, coating machine body 1 is set up cooling cavity 10, cooling cavity 10 is fixedly connected with electric telescopic rod 11 in upper side, electric telescopic rod 11 extension can make sealing plate 12 enter into U-shaped frame 13, to close air inlet hole 15, make coating machine body 1 inside be in closed state, to facilitate the coating of material to be coated, electric telescopic rod 11 bottom end is provided with sealing plate 12, sealing plate 12 side contact has U-shaped frame 13, coating machine body 1 is evenly set up air inlet hole 15 at U-shaped frame 13, cover 2 is fixedly connected with temperature sensor 21, temperature sensor 21 monitors coating machine body 1 internal temperature, and is observed through display screen 22, temperature sensor 21 is connected display screen 22 through wire, display screen 22 is fixedly connected on coating machine body 1 side, coating machine body 1 is set up air outlet slot 23 near cooling cavity 10 side.

[0020] Wherein, the air outlet slot 23 upper side is provided with baffle 14, baffle 14 is fixedly connected on both sides of coating machine body 1, by setting baffle 14, can be overflowed to the airflow of air outlet slot 23 is guided to lower position, reduce the damage of airflow to human body.

[0021] Wherein, U-shaped frame 13 is fixedly connected with guide strip 17, guide strip 17 is contacted with one side of sealing plate 12, sealing plate 12 is contacted with coating machine body 1, by setting guide strip 17, can be gradually close to air inlet hole 15 when sealing plate 12 moves down, to achieve the effect of closing air inlet hole 15 of coating machine body 1.

[0022] Wherein, the output end of electric telescopic rod 11 is movably inserted with positioning rod 19, the positioning rod 19 is fixedly connected in the adapter box 18, the adapter box 18 is fixedly connected on the upper end of the sealing plate 12, by setting the adapter box 18, cooperating with the positioning rod 19, can reduce the friction between the sealing plate 12 and the coating machine body 1 when moving.

[0023] Wherein, the adapter box 18 and the electric telescopic rod 11 are respectively contacted with both sides of the spring 20, the spring 20 is sleeved with the positioning rod 19, by setting the spring 20, can make the sealing plate 12 and the coating machine body 1 appear spacing when the electric telescopic rod 11 is completely retracted.

[0024] The outer side of the two frame seals 9 is provided with a dust screen 16, the dust screen 16 is fixedly connected in the air cavity 3, and the air cavity 3 is located on the cover 2, so that dust is prevented from entering the inside of the coating machine body 1.

[0025] Working principle: after the coating is completed, the temperature sensor 21 detects the temperature inside the coating machine body 1, the display screen 22 provides intuitive observation, when the temperature is too high, the electric push rod 7 and the electric telescopic rod 11 are retracted, at this time, the pressing strip 8 and the sealing plate 12 move, at this time, the air cavity 3 and the air inlet hole 15 are in an open state, then the driving motor is started to drive the fan 5 to rotate, and the air flow enters the ventilation groove 4 from both ends of the air cavity 3, the dust screen 16 provides resistance, and the material is cooled, then the air flow overflows through the air outlet groove 23 and the baffle 14.

[0026] The above is only the preferred embodiment of the present application, it should be pointed out that, for those skilled in the art, without departing from the principles of the present application, can make a number of improvements and refinements, these improvements and refinements should also be considered as the protection scope of the present application.

[0027] The other parts not described in the present application are all prior art, so here is not described.

[0028] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical scheme of the present application, rather than limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the present application.

Claims

1. A vacuum coating chamber cooling device, comprising a coating machine body (1) and a cover (2), characterized in that, The cover (2) is provided with a wind cavity (3), the cover (2) is provided with a ventilation groove (4) close to the film coating machine body (1), the cover (2) is fixedly connected with a driving motor away from the ventilation groove (4), the driving motor output end is fixedly connected with a fan (5), the wind cavity (3) is fixedly connected with a support (6), the support (6) is fixedly connected with an electric push rod (7), the electric push rod (7) output end is fixedly connected with a pressing strip (8), the pressing strip (8) side is in contact with a frame (9), the frame (9) is fixedly connected in the wind cavity (3), the film coating machine body (1) is provided with a cooling cavity (10), the cooling cavity (10) is fixedly connected with an electric telescopic rod (11) on the upper side, the electric telescopic rod (11) bottom end is provided with a sealing plate (12), the sealing plate (12) side is in contact with a U-shaped frame (13), the film coating machine body (1) is uniformly provided with an air inlet hole (15) at the U-shaped frame (13), the cover (2) is fixedly connected with a temperature sensor (21), the temperature sensor (21) is connected with a display screen (22) through a wire, the display screen (22) is fixedly connected on one side of the film coating machine body (1), the film coating machine body (1) is provided with an air outlet groove (23) close to the cooling cavity (10).

2. The vacuum coating machine cavity cooling device of claim 1, wherein, The film coating machine body (1) is fixedly connected with a baffle (14) on both sides, the baffle (14) is located on the upper side of the air outlet groove (23).

3. The vacuum coating chamber cooling device of claim 2, wherein, The film coating machine body (1) is in contact with the sealing plate (12), the sealing plate (12) side is in contact with a guide strip (17), the guide strip (17) is fixedly connected with the U-shaped frame (13).

4. The vacuum coating chamber cooling device of claim 3, wherein the cooling device is a cooling device for cooling the chamber of a vacuum coating machine. The sealing plate (12) upper end is fixedly connected with a connecting box (18), the connecting box (18) is fixedly connected with a positioning rod (19), the positioning rod (19) is movably inserted into the output end of the electric telescopic rod (11).

5. The vacuum coating chamber cooling device of claim 4, wherein the cooling device is a cooling device for a vacuum coating chamber of a vacuum coating machine. The positioning rod (19) is sleeved with a spring (20), and the two ends of the spring (20) are respectively in contact with the electric telescopic rod (11) and the connecting box (18).

6. The vacuum coating chamber cooling device of claim 1, wherein, The cover (2) is fixedly connected with two dust screens (16) in the wind cavity (3), and the dust screens (16) are located outside the two frames (9).

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