High-precision lifting and rotating device for crucible of single crystal furnace

Abstract

The utility model discloses a high-precision lifting and rotating device for a crucible of a single crystal furnace, which comprises guide rail components arranged on two sides of a vertical column on the crucible furnace and fixedly connected with a processing surface of the vertical column. The sliding assembly is arranged on the guide rail assembly, is in sliding connection with the guide rail assembly, is located between the crucible shaft and the guide rail assembly and is used for driving the crucible shaft to move up and down. And the switching assembly is arranged on the side of the sliding assembly, is in driving connection with the sliding assembly, and is used for driving the sliding assembly to perform slow-speed and fast-speed switching movement through power-on pull-in and power-off separation. In the process that the switching assembly drives the sliding assembly to achieve fast and slow switching motion, the guide rail assemblies located on the two sides of the stand column provide stable and symmetrical supporting for the crucible shaft, offset vibration and even shaking caused by unshared loads or vibration and the like can be effectively avoided, the crucible shaft has higher stability in the up-down motion period, and the service life of the crucible shaft is prolonged. Therefore, the machining precision and the working stability are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace crucible furnace lifting technical field especially, it relates to a single crystal furnace crucible high accuracy lifting rotating device. BACKGROUND

[0002] Single crystal furnace is a kind of in inert gas's environment, with graphite heater to melt polycrystalline silicon etc. Polycrystalline material, using the straight drawing method to grow the device of dislocation-free single crystal.

[0003] Single crystal furnace is mainly composed of vice room, furnace cover, furnace cylinder, crucible etc. Structure, existing lower transmission usually adopts profile welding's stand column, such as China utility model patent application number "CN200820132469.0" discloses a straight drawing single crystal furnace crucible drive device, including lifting drive assembly and rotating drive assembly, lifting drive assembly is equipped with mounting bracket, double guide rail, ball screw, double guide rail and ball screw are fixed on mounting bracket, crucible shaft passes through crucible shaft bearing seat, is fixed on crucible support, crucible support passes through transition connecting block and the nut of ball screw and the slider of double guide rail are connected together, but the double guide rail in the device selects single guide rail, load is not shared phenomenon often appears, single guide rail bearing strength is poor, ball screw is moved up and down on double guide rail, easily appears vibration, and then makes the stability of crucible shaft when running up and down is poor, appears serious creeping problem, finally influences single crystal quality.

[0004] Therefore, when ball screw moves on single guide rail, due to the poor strength, the creeping phenomenon of crucible shaft when moving up and down affects the quality of single crystal. UTILITY MODEL CONTENTS

[0005] In order to solve the problem that the single guide rail due to poor strength leads to the creeping phenomenon of crucible shaft when moving up and down and affects the quality of single crystal, the utility model provides a single crystal furnace crucible high-precision lifting rotating device, which improves the stability during up and down operation and improves the quality of single crystal by guide rail assembly, sliding assembly and switching assembly.

[0006] In order to achieve the above purpose, the utility model is implemented by the following technical solutions:

[0007] A single crystal furnace crucible high-precision lifting rotating device, comprising:

[0008] Guide rail assembly is arranged on both sides of the upstand column of the crucible furnace and fixedly connected with the machining surface of the upstand column.

[0009] Sliding assembly is arranged on the guide rail assembly and slidably connected with the guide rail assembly, located between the crucible shaft and the guide rail assembly, and used for driving the crucible shaft to move up and down.

[0010] The switching assembly is arranged at the side of the sliding assembly and is drivingly connected with the sliding assembly, and is used for driving the sliding assembly to perform slow and fast switching movement through power-on attraction and power-off separation.

[0011] Compared with the prior art, the utility model has the following advantages:

[0012] In the process that the switching assembly drives the sliding assembly to perform fast and slow switching movement, the guide rail assemblies located at the two sides of the stand column provide stable and symmetrical support for the crucible shaft, can effectively avoid deviation, vibration or even shaking caused by unshared load or vibration, and make the crucible shaft have stronger stability during up and down movement, thereby improving the processing precision and working stability.

[0013] Further preferably, the guide rail assembly comprises:

[0014] The guide rail seat is arranged on the stand column and is fixedly connected with the machining surface of the stand column.

[0015] The double guide rails are arranged on the guide rail seat and are fixedly connected with the guide rail seat, the end thereof is coplanar with the end surface of the guide rail seat, and the surface and the two side surfaces thereof are slidingly connected with the sliding assembly.

[0016] The first limiting strip is arranged on the sliding assembly and is detachably connected with the sliding assembly, the end thereof extends to the outside of the guide rail seat, and is used for blocking the vibration of the sliding assembly on the double guide rails.

[0017] By adopting the above technical scheme, two groups of guide rail assemblies are arranged at the two sides of the stand column, the load weight on the sliding assembly can be shared at the two sides of the stand column, the sliding assembly can stably and reliably move up and down, and the first limiting strip blocks the vibration or shaking caused by the instantaneous deviation of the sliding assembly relative to the double guide rails, thereby further limiting.

[0018] Further preferably, the sliding assembly comprises:

[0019] The slide table is arranged between the crucible shaft and the stand column, is matched with the lead screw of the crucible shaft, and the lead screw is detachably connected with the bearing seat at the upper and lower ends of the stand column.

[0020] The slide blocks are two in number and are arranged on the slide table, one side wall thereof is fixedly connected with the inner wall of the slide table, and the other side wall thereof is slidingly connected with the double guide rails.

[0021] By adopting the above technical scheme, the slide table is slidingly connected with the double guide rails at the two sides of the stand column through the two slide blocks, the load borne by the slide table during movement is shared at the two sides of the stand column, the vibration or shaking caused by the instantaneous deviation of the slide block on the double guide rails is reduced, the slide block can stably and reliably move up and down, and the problem of climbing is reduced.

[0022] Further preferably, the switching assembly comprises:

[0023] Slow motor, arranged on one side of the sliding table, connected with the lead screw drive, used to drive the lead screw to rotate slowly.

[0024] Fast motor, arranged on one side of the slow motor, connected with the lead screw, used to drive the lead screw to rotate fast.

[0025] Electromagnetic clutch, arranged between the slow motor and the fast motor, respectively connected with the slow motor and the fast motor, the slow motor and the fast motor are connected in parallel, the electromagnetic clutch switches the slow motor and the fast motor through energizing and de-energizing.

[0026] The above technical scheme is adopted, the electromagnetic clutch is used to control the switching work between the slow motor and the fast motor, and the smooth switching of the lead screw between slow motion and fast motion is realized.

[0027] Further optimization is that the lead screw is a C5 precision ball screw.

[0028] The above technical scheme is adopted, the precision of the ball screw reaches 0.018mm or more, and the accurate distance of the vertical movement of the crucible shaft is ensured.

[0029] Further optimization is that the first limiting strip includes:

[0030] The limiting piece is arranged on the side wall of the sliding table and is fixedly connected with the sliding table.

[0031] The blocking strip is arranged on the limiting piece, one end of the blocking strip is fixedly connected with the limiting piece, and the other end of the blocking strip crosses the sliding block and extends to the outside of the guide rail seat.

[0032] The above technical scheme is adopted, the limiting piece and the blocking strip together block the vibration or shaking of the sliding block on the double guide rails, and play an auxiliary role in preventing the sliding block from creeping due to vibration during movement.

[0033] Further optimization is that the guide rail seat is L-shaped.

[0034] The above technical scheme is adopted, and space is provided for the movement of the sliding block on the double guide rails.

[0035] Further optimization is that a second limiting strip is arranged on the side wall of the guide rail seat, the second limiting strip is located in the guide rail seat, and the second limiting strip is screw-connected with the L-shaped outer wall of the guide rail seat and the outer wall of the double guide rails.

[0036] The above technical scheme is adopted, the second limiting strip plays a role in blocking the shaking of the double guide rails in the direction of vertical movement, and at the same time, the second limiting strip also contacts with the inner side wall of the sliding block in this direction, preventing the sliding block from shaking.

[0037] Further optimization is that the number of the second limiting strips is four, and every two limiting strips are arranged on the side wall of the double guide rail as a group.

[0038] By adopting the technical scheme, the stability can be improved through the contact in the whole movement stroke of the sliding block.

[0039] Further optimization is that the material of the column is carbon steel plate.

[0040] By adopting the technical scheme, the column is welded and processed by carbon steel plate, so that the load capacity of the traditional profile welded column is improved, and the strength is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 It is a structural schematic view of the embodiment.

[0042] Figure 2 It is a structural schematic view of the side view of the embodiment.

[0043] Figure 3 It is a structural schematic view of the embodiment in the embodiment.

[0044] Figure 4 It is a structural schematic view of the first limiting strip in the embodiment.

[0045] Reference signs: 1 - lead screw; 2 - base plate; 3 - switching assembly; 31 - slow motor; 32 - fast motor; 33 - electromagnetic clutch; 4 - magnetic fluid; 5 - crucible shaft; 6 - guide rail assembly; 61 - double guide rail; 62 - first limiting strip; 621 - limiting sheet; 622 - blocking strip; 63 - guide rail seat; 64 - second limiting strip; 7 - encoder; 8 - column; 9 - sliding assembly; 91 - sliding table; 92 - sliding block. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings Figures 1-4 The utility model is further introduced in detail.

[0047] A single crystal furnace crucible high-precision lifting and rotating device, as shown in the figure, comprises: Figure 1 As shown in the figure, comprising:

[0048] The guide rail assembly 6 is arranged on both sides of the column 8 of the crucible furnace and is fixedly connected with the processing surface of the column 8.

[0049] The sliding assembly 9 is arranged on the guide rail assembly 6 and is slidingly connected with the guide rail assembly 6, is located between the crucible shaft 5 and the guide rail assembly 6, and is used for driving the crucible shaft 5 to move up and down.

[0050] The switching assembly 3 is arranged on the side of the sliding assembly 9 and is drivingly connected with the sliding assembly 9, is used for driving the sliding assembly 9 to perform slow and fast switching movement through power-on attraction and power-off separation.

[0051] During the process of switching component 3 driving sliding component 9 to achieve fast and slow switching motion, the guide rail components 6 located on both sides of column 8 provide stable and symmetrical support for crucible shaft 5, which can effectively avoid offset vibration or even shaking caused by load sharing or vibration, so that crucible shaft 5 has stronger stability during up and down movement, thereby improving processing accuracy and working stability.

[0052] Specifically, such as Figure 1 and Figure 3 As shown, the guide rail assembly 6 in this embodiment includes:

[0053] The guide rail seat 63 is set on the column 8, located on both sides of the column 8, and is fixedly connected to the machined surface of the column 8.

[0054] The double guide rail 61 is mounted on the guide rail base 63 and is fixedly connected to the guide rail base 63. Its end is on the same plane as the end face of the guide rail base 63, and its surface and two sides are slidably connected to the sliding component 9.

[0055] The first limiting strip 62 is provided on the sliding component 9 and is detachably connected to the sliding component 9. Its end extends to the outside of the guide rail seat 63 to prevent the sliding component 9 from vibrating on the double guide rail 61.

[0056] Two sets of guide rail assemblies 6 are set on both sides of the column 8, which can distribute the load weight on the sliding assembly 9 to both sides of the column 8, so that the sliding assembly 9 can move up and down smoothly and reliably. Moreover, the first limiting strip 62 on the outside of the guide rail seat 63 prevents the vibration or shaking caused by the instantaneous offset of the sliding assembly 9 relative to the double guide rail 61, thus playing a further limiting role.

[0057] Specifically, such as Figure 1 and Figure 3 As shown, the sliding component 9 in this embodiment includes:

[0058] The slide table 91 is located between the crucible shaft 5 and the column 8, and cooperates with the lead screw 1 of the crucible shaft 5. The lead screw 1 passes through the slide table 91 and is detachably connected to the bearing seats at the upper and lower ends of the column 8.

[0059] There are two sliders 92, which are respectively set on the slide table 91. One side wall of the slider is fixedly connected to the inner wall of the slide table 91, and the other side wall is slidably connected to the double guide rail 61.

[0060] The slide table 91 is connected to the double guide rail 61 on both sides of the column 8 by two sliders 92. This structure distributes the load of the slide table 91 during movement to both sides of the column 8, reducing the vibration or shaking caused by the instantaneous offset of the slider 92 on the double guide rail 61. This allows the slider 92 to move up and down smoothly and reliably, reducing the problem of crawling.

[0061] Specifically, such as Figure 1 and Figure 2 As shown, the switching component 3 in this embodiment includes:

[0062] A slow-speed motor 31 is located on one side of the slide table 91 and is connected to the lead screw 1 for driving the lead screw 1 to rotate slowly.

[0063] The fast motor 32 is located on one side of the slow motor 31, and its output end is connected to the lead screw 1 to drive the lead screw 1 to rotate rapidly.

[0064] An electromagnetic clutch 33 is disposed between a slow motor 31 and a fast motor 32, and is electrically connected to both the slow motor 31 and the fast motor 32. The slow motor 31 and the fast motor 32 are connected in parallel. The electromagnetic clutch 33 controls the rotation of the slow motor 31 and the fast motor 32 by switching between being energized and de-energized.

[0065] The switching between the slow motor 31 and the fast motor 32 is controlled by the electromagnetic clutch 33, so that the control screw 1 can be smoothly switched between slow and fast motion.

[0066] Specifically, such as Figure 1 and Figure 3 As shown, in this embodiment, the lead screw 1 is a C5 grade precision ball screw 1, and the precision of the ball screw 1 reaches more than 0.018mm, ensuring the precise distance of vertical movement of the crucible shaft 5.

[0067] Specifically, such as Figure 3 and Figure 4 As shown, the first limiting bar 62 in this embodiment includes:

[0068] The limiting piece 621 is set on the side wall of the slide table 91 and is fixedly screwed to the slide table 91.

[0069] A stop bar 622 is provided on the limiting piece 621. One end of the stop bar 622 is fixedly connected to the limiting piece 621, and the other end spans the slider 92 and extends to the outside of the guide rail seat 63.

[0070] The limiting piece 621, together with the stop bar, prevents the slider 92 from vibrating or shaking on the double guide rail 61, and plays an auxiliary role in preventing the slider 92 from crawling due to vibration during movement.

[0071] Specifically, such as Figure 1 and Figure 4 As shown, the guide rail seat 63 in this embodiment is L-shaped, and the slider 92 moves on the double guide rail 61 to provide space.

[0072] Specifically, such as Figure 3 and Figure 4As shown, in this embodiment, a second limiting strip 64 is provided on the side wall of the guide rail seat 63. The second limiting strip 64 is located inside the guide rail seat 63 and is screwed to the L-shaped outer wall of the guide rail seat 63 and the outer wall of the double guide rail 61 respectively. The second limiting strip 64 plays the role of preventing the double guide rail 61 from shaking in the direction of vertical movement. At the same time, in this direction, the second limiting strip 64 also contacts the inner side wall of the slider 92 to prevent the slider 92 from shaking.

[0073] Specifically, such as Figure 3 and Figure 4 As shown, in this embodiment, there are four second limiting bars 64, with two limiting bars arranged in a group on the side wall of the double guide rail 61 to ensure that the slider 92 can improve stability through contact throughout its entire movement stroke.

[0074] Specifically, such as Figure 2 and Figure 3 As shown, the column 8 in this embodiment is made of carbon steel plate. The use of carbon steel plate for welding the column 8 improves the load-bearing capacity of the traditional profile welded column 8 and further enhances its strength.

[0075] Specifically, such as Figure 1 As shown, the column 8 in this embodiment is made of carbon steel plate, and the welding process solves the problem of insufficient strength of the traditional profile welded column 8.

[0076] Please combine Figures 1-4 The working principle of this embodiment is described in detail below:

[0077] During the operation of the single crystal furnace, the crucible shaft 5 needs to provide rotation and vertical movement. This device uses a double guide rail 61 with a slider 92 mounted on the machined surface of the column 8. The double guide rail 61 provides stable and symmetrical support for the crucible shaft 5, enabling smooth movement of the crucible shaft 5, reducing vibration and noise, and thus ensuring the stability and reliability of the guide rails. The ball screw 1 is installed in the bearing seats at the upper and lower ends of the column 8, and engages with a nut inside the slide table 91 mounted on the double guide rail 61. When the motor drives the screw 1 to rotate, the nut connected to the screw 1 drives the slide table 91 to move vertically up and down, thereby causing the crucible shaft 5 to move vertically up and down. An electromagnetic clutch 33 mounted on the base plate 2 is used to switch between fast and slow movement of the crucible shaft 5. When the electromagnetic clutch 33 is energized and engaged, the slow-speed motor 31 operates, driving the lead screw 1 to rotate slowly, thereby causing the crucible shaft 5 to move slowly in the vertical direction. When the electromagnetic clutch 33 is de-energized, the fast-speed motor 32 drives the lead screw 1 to rotate at high speed, thereby causing the crucible shaft 5 to move rapidly in the vertical direction. The C5-grade precision ball screw 1 has a lead accuracy of over 0.018mm, ensuring the precise vertical movement distance of the crucible shaft 5. A 2000-line encoder 7 mounted on the top of the lead screw 1 is used to measure the linear distance of the crucible shaft 5 during vertical movement, with almost no error and high precision.

[0078] In summary, since the double guide rail 61 has two guide rails and a slider 92, it can effectively avoid offset and shaking caused by load sharing or vibration, thereby improving machining accuracy and working stability. Compared with the existing single guide rail, the double guide rail 61 has stronger stability and higher accuracy.

[0079] This specific embodiment is merely an explanation of the utility model and is not intended to limit it. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of protection of this utility model.

Claims

1. A high-precision lifting and rotating device for a single crystal furnace crucible, characterized in that, include: The guide rail assembly (6) is set on both sides of the column (8) on the crucible furnace and is fixedly connected to the machined surface of the column (8); A sliding component (9) is disposed on the guide rail assembly (6) and slidably connected to the guide rail assembly (6). It is located between the crucible shaft (4) and the guide rail assembly (6) and is used to drive the crucible shaft (4) to move up and down. The switching component (3) is located on the side of the sliding component (9) and is driven to connect with the sliding component (9). It is used to drive the sliding component (9) to switch between slow and fast movements by energizing and de-energizing.

2. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 1, characterized in that, The guide rail assembly (6) includes: Guide rail base (63) is provided on the column (8), located on both sides of the column (8), and fixedly connected to the machined surface of the column (8); The double guide rail (61) is disposed on the guide rail seat (63) and fixedly connected to the guide rail seat (63). Its end is coplanar with the end face of the guide rail seat (63), and its surface and two sides are slidably connected to the sliding component (9). The first limiting strip (62) is disposed on the sliding assembly (9) and is detachably connected to the sliding assembly (9). Its end extends to the outside of the guide rail seat (63) to prevent the sliding assembly (9) from vibrating on the double guide rail (61).

3. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 2, characterized in that, The sliding component (9) includes: A slide (91) is disposed between the crucible shaft (4) and the column (8) and cooperates with the lead screw (1) of the crucible shaft (4). The lead screw (1) passes through the slide (91) and is detachably connected to the bearing seats at the upper and lower ends of the column (8). Two sliders (92) are respectively set on the slide table (91). One side wall of the slider is fixedly connected to the inner wall of the slide table (91), and the other side wall is slidably connected to the double guide rail (61).

4. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 3, characterized in that, The switching component (3) includes: A slow-speed motor (31) is located on one side of the slide (91) and is connected to the lead screw (1) for driving the lead screw (1) to rotate slowly. A fast motor (32) is located on one side of the slow motor (31), and its output end is connected to the lead screw (1) to drive the lead screw (1) to rotate rapidly. An electromagnetic clutch (33) is disposed between the slow motor (31) and the fast motor (32), and is electrically connected to the slow motor (31) and the fast motor (32) respectively. The slow motor (31) and the fast motor (32) are connected in parallel. The electromagnetic clutch (33) controls the rotation of the slow motor (31) and the fast motor (32) by switching between energizing and de-energizing.

5. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 3, characterized in that, The lead screw (1) is a C5 grade precision ball screw (1).

6. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 5, characterized in that, The first limiting bar (62) includes: A limiting piece (621) is provided on the side wall of the slide (91) and is fixedly screwed to the slide (91); A stop bar (622) is provided on the limiting piece (621), one end of which is fixedly connected to the limiting piece (621), and the other end spans the slider (92) and extends to the outside of the guide rail seat (63).

7. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 5, characterized in that, The guide rail seat (63) is L-shaped.

8. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 7, characterized in that, A second limiting strip (64) is provided on the side wall of the guide rail seat (63). The second limiting strip (64) is located inside the guide rail seat (63). The second limiting strip (64) is screwed to the L-shaped outer wall of the guide rail seat (63) and the outer wall of the double guide rail (61) respectively.

9. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 8, characterized in that, The number of the second limiting strips (64) is 4, and every 2 of the limiting strips are arranged in a group on the side wall of the double guide rail (61).

10. The high-precision lifting and rotating device for a single crystal furnace crucible according to claim 5, characterized in that, The dual guide rail (61) consists of two guide rails.

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