Flexible pressure sensing element
By setting a metal thin film layer and a hollow area structure on the substrate layer of the flexible pressure sensing element, the problems of insufficient detection accuracy and sensitivity are solved, realizing two-dimensional pressure sensing on a plane and improving detection accuracy and sensitivity.
Patent Information
- Application Number
- CN202422754976.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-12
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-11-12
AI Technical Summary
Existing flexible pressure sensing elements have insufficient detection accuracy and sensitivity, and are difficult to sense pressure differences on a plane.
By using a metal thin film layer and a hollow area structure set on a substrate layer, and through the design of the bending sub-region and the hollow strip, combined with the piezoelectric sensing layer, two-dimensional pressure sensing in the planar direction is realized.
This improves the detection accuracy and sensitivity of flexible pressure sensing elements, enabling them to sense pressure differences on a plane.
Smart Images
Figure CN223710879U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of sensor especially relates to a flexible pressure sensor element. BACKGROUND
[0002] The flexible pressure sensor element is a kind of sensor that perceives pressure and converts pressure signal into electric signal output according to certain law, and it is usually composed of pressure-sensitive element and signal processing unit, and can be used for monitoring and testing different equipment;The application field of flexible pressure sensor element is wide, such as medical equipment, environmental monitoring, aerospace, industrial automation, consumer electronics and automobile industry etc.
[0003] The flexible pressure sensor element can be divided into piezoresistive, capacitive, piezoelectric or other types according to working principle, wherein piezoresistive flexible pressure sensor element utilizes piezoresistive effect, and generally adopts upper and lower electrode or single electrode form;Capacitive flexible pressure sensor element utilizes capacitance change;And piezoelectric sensor detects pressure change through the piezoresistive effect of semiconductor material.The most widely used is piezoresistive flexible pressure sensor element, which has lower price, higher precision and better linear characteristic.The detection accuracy and sensitivity of existing flexible pressure sensor element need to be further improved, and it also cannot sense the pressure of plane. SUMMARY
[0004] The technical problem to be solved by the utility model is to provide a flexible pressure sensor element, which improves the detection accuracy and sensitivity of flexible pressure sensor element, realizes two-dimensional pressure perception in plane direction, and can perceive the difference of pressure on plane.
[0005] To achieve the above purpose, the technical scheme adopted by the utility model is as follows: a flexible pressure sensor element, comprising: a base material layer, a first metal thin film layer, a second metal thin film layer, a third metal thin film layer and a fourth metal thin film layer located on the same surface of the base material layer, and the first metal thin film layer, the second metal thin film layer, the third metal thin film layer and the fourth metal thin film layer are located on the periphery of the central hollow area on the base material layer.
[0006] The first metal thin film layer, the second metal thin film layer, the third metal thin film layer and the fourth metal thin film layer are isolated by the first hollow area, the second hollow area, the third hollow area and the fourth hollow area arranged on the surface of the base material layer.
[0007] The first hollow area, the second hollow area, the third hollow area and the fourth hollow area are all composed of a curved sub-area part, a first hollow strip and a second hollow strip located on both sides of the curved sub-area part, and the second hollow strip is connected to the central hollow area.
[0008] The curved sub-area further comprises a plurality of hollow vertical strips, adjacent hollow vertical strips in the plurality of hollow vertical strips are connected by a hollow horizontal strip at the head and tail of each of the adjacent hollow vertical strips, and a piezoelectric sensing layer is arranged above the area located on the curved sub-area and the metal thin film layer on both sides of the curved sub-area and close to the curved sub-area.
[0009] The further improved technical solution in the above technical solution is as follows:
[0010] 1. In the above solution, the central hollow area is square in shape.
[0011] 2. In the above solution, the hollow vertical strips and the hollow horizontal strips are vertically arranged.
[0012] 3. In the above solution, the number of the hollow vertical strips is at least 6.
[0013] 4. In the above solution, the first metal thin film layer, the second metal thin film layer, the third metal thin film layer and the fourth metal thin film layer are aluminum metal thin film layers or copper metal thin film layers.
[0014] Due to the use of the above technical solution, the present application has the following advantages compared with the prior art:
[0015] 1. The flexible pressure sensing element of the present application is composed of a curved sub-area, a first hollow strip and a second hollow strip located on both sides of the curved sub-area, and the second hollow strip is connected to the central hollow area. The curved sub-area further comprises a plurality of hollow vertical strips, and adjacent hollow vertical strips in the plurality of hollow vertical strips are connected by a hollow horizontal strip at the head and tail of each of the adjacent hollow vertical strips. This improves the uniformity of the sensing area and improves the detection accuracy and sensitivity of the flexible pressure sensing element.
[0016] 2. The flexible pressure sensing element of the present application is composed of a curved sub-area, a first hollow strip and a second hollow strip located on both sides of the curved sub-area, and the second hollow strip is connected to the central hollow area. The curved sub-area further comprises a plurality of hollow vertical strips, and adjacent hollow vertical strips in the plurality of hollow vertical strips are connected by a hollow horizontal strip at the head and tail of each of the adjacent hollow vertical strips. This improves the uniformity of the sensing area and improves the detection accuracy and sensitivity of the flexible pressure sensing element. BRIEF DESCRIPTION OF DRAWINGS
[0017] FIG. 1 is a structural schematic diagram of the flexible pressure sensing element of the present application; Figure 1
[0018] FIG. 2 is a partial structural schematic diagram of FIG. 1; Figure 2 Figure 1
[0019] Figure 3 The utility model discloses a partial section structure schematic diagram of flexible pressure sensing element.
[0020] In the above drawing: 1, substrate layer; 101, PCT sublayer; 102, TUP sublayer; 21, first metal film layer; 22, second metal film layer; 23, third metal film layer; 24, fourth metal film layer; 3, hollow area; 4, second hollow strip; 5, piezoelectric induction layer; 6, central hollow area; 7, curved subarea part; 71, hollow vertical strip; 72, hollow horizontal strip; 8, first hollow strip. DETAILED DESCRIPTION
[0021] The specific embodiments given below can further clearly understand the patent, but they are not limited to the patent.
[0022] The utility model will be further described in conjunction with the following examples:
[0023] Example 1: a kind of flexible pressure sensing element, comprising: substrate layer 1, first metal film layer 21, second metal film layer 22, third metal film layer 23 and fourth metal film layer 24 on the same surface of substrate layer 1, this first metal film layer 21, second metal film layer 22, third metal film layer 23, fourth metal film layer 24 are located on the periphery of central hollow area 6 in substrate layer 1;
[0024] The first metal film layer 21, second metal film layer 22, third metal film layer 23, fourth metal film layer 24 are isolated by first hollow area, second hollow area, third hollow area and fourth hollow area arranged on the surface of substrate layer 1 respectively;
[0025] The first hollow area, second hollow area, third hollow area and fourth hollow area are all composed of curved subarea part 7, first hollow strip 8 and second hollow strip 4 located on both sides of curved subarea part 7, and the second hollow strip 4 is connected to the central hollow area 6;
[0026] The curved subarea part 7 further includes a plurality of hollow vertical strips 71, and adjacent hollow vertical strips 71 in the plurality of hollow vertical strips 71 are connected by a hollow horizontal strip 72 at their heads and tails respectively, and a piezoelectric induction layer 5 is arranged above the region of the metal film layer on both sides of the curved subarea part 7 and close to the curved subarea part 7.
[0027] The above-mentioned central hollow area 6 is square in shape.
[0028] The above-mentioned hollow vertical strips 71 and hollow horizontal strips 72 are vertically arranged.
[0029] The number of the above-mentioned hollow vertical strips 71 is 8.
[0030] The first metal thin film layer 21, the second metal thin film layer 22, the third metal thin film layer 23 and the fourth metal thin film layer 24 are aluminum metal thin film layers.
[0031] Embodiment 2: A flexible pressure sensing element, comprising: a substrate layer 1, a first metal thin film layer 21, a second metal thin film layer 22, a third metal thin film layer 23 and a fourth metal thin film layer 24 located on the same surface of the substrate layer 1, and the first metal thin film layer 21, the second metal thin film layer 22, the third metal thin film layer 23 and the fourth metal thin film layer 24 are located on the periphery of the central hollow area 6 of the substrate layer 1.
[0032] The first metal thin film layer 21, the second metal thin film layer 22, the third metal thin film layer 23 and the fourth metal thin film layer 24 are isolated by the first hollow area, the second hollow area, the third hollow area and the fourth hollow area arranged on the surface of the substrate layer 1.
[0033] The first hollow area, the second hollow area, the third hollow area and the fourth hollow area are composed of a curved sub-area 7, a first hollow strip 8 and a second hollow strip 4 located on both sides of the curved sub-area 7, and the second hollow strip 4 is connected to the central hollow area 6.
[0034] The curved sub-area 7 further comprises a plurality of hollow vertical strips 71, and adjacent hollow vertical strips 71 in the plurality of hollow vertical strips 71 are connected by a hollow horizontal strip 72 at the head and tail of each hollow vertical strip 71. A piezoelectric sensing layer 5 is arranged above the region near the curved sub-area 7 between the curved sub-area 7 and the metal thin film layer on both sides of the curved sub-area 7.
[0035] The central hollow area 6 is in the shape of a square.
[0036] The number of the hollow vertical strips 71 is 10.
[0037] The first metal thin film layer 21, the second metal thin film layer 22, the third metal thin film layer 23 and the fourth metal thin film layer 24 are copper metal thin film layers.
[0038] When the flexible pressure sensing element of the embodiment is used, the hollow area is composed of a curved sub-area, a first hollow strip and a second hollow strip located on both sides of the curved sub-area, and the second hollow strip is connected to the central hollow area. The curved sub-area further comprises a plurality of hollow vertical strips, and adjacent hollow vertical strips in the plurality of hollow vertical strips are connected by a hollow horizontal strip at the head and tail of each hollow vertical strip. This improves the uniformity of sensing in the sensing area and improves the detection accuracy and sensitivity of the flexible pressure sensing element.
[0039] Moreover, the first metal film layer, the second metal film layer, the third metal film layer and the fourth metal film layer are located on the periphery of the central hollow area on the substrate layer, and the first metal film layer, the second metal film layer, the third metal film layer and the fourth metal film layer are isolated by the first hollow area, the second hollow area, the third hollow area and the fourth hollow area arranged on the surface of the substrate layer respectively; two-dimensional pressure sensing in the plane direction is realized, and the difference in pressure on the plane can be sensed.
[0040] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and it cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.
Claims
1. A flexible pressure sensing element, characterized by: The application relates to a metal thin film layer structure, which comprises the following parts: a substrate layer (1), a first metal thin film layer (21), a second metal thin film layer (22), a third metal thin film layer (23) and a fourth metal thin film layer (24) located on the same surface of the substrate layer (1), wherein the first metal thin film layer (21), the second metal thin film layer (22), the third metal thin film layer (23) and the fourth metal thin film layer (24) are located on the periphery of a central hollow area (6) of the substrate layer (1); the first metal thin film layer (21), the second metal thin film layer (22), the third metal thin film layer (23) and the fourth metal thin film layer (24) are isolated by a first hollow area, a second hollow area, a third hollow area and a fourth hollow area arranged on the surface of the substrate layer (1); the first hollow area, the second hollow area, the third hollow area and the fourth hollow area are composed of a curved sub-area part (7), a first hollow strip (8) and a second hollow strip (4) located on the two sides of the curved sub-area part (7), and the second hollow strip (4) is connected to the central hollow area (6); the curved sub-area part (7) further comprises a plurality of hollow vertical strips (71), and the adjacent hollow vertical strips (71) are connected by a hollow horizontal strip (72) at the head and tail of each of the hollow vertical strips (71); and a piezoelectric induction layer (5) is arranged above the region of the curved sub-area part (7) and the metal thin film layer on the two sides of the curved sub-area part (7) and close to the curved sub-area part (7).
2. The flexible pressure sensing element of claim 1, wherein: The central hollow area (6) is in the shape of a square.
3. The flexible pressure sensing element of claim 1, wherein: The hollow vertical strips (71) and the hollow horizontal strips (72) are vertically arranged.
4. The flexible pressure sensing element of claim 1, wherein: The number of the hollow vertical strips (71) is at least six.
5. The flexible pressure sensing element of claim 1, wherein: The first metal thin film layer (21), the second metal thin film layer (22), the third metal thin film layer (23) and the fourth metal thin film layer (24) are aluminum metal thin film layers or copper metal thin film layers.