Low-cost and easy-to-process scanning probe microscope independent scanner

Abstract

The utility model relates to the technical field of scanning probe microscopes, and particularly discloses a scanning probe microscope independent scanner low in cost and easy to process, which comprises a probe and a needle cylinder, the probe is coaxially arranged in the needle cylinder, one end of the needle cylinder is fixedly bonded with an insulating bottom cover, one end of the insulating bottom cover, which is deviated from the needle cylinder, is fixedly bonded with a piezoelectric scanning tube, and the piezoelectric scanning tube is connected with the needle cylinder. An insulating top cover is fixedly adhered to one end, deviating from the insulating bottom cover, of the piezoelectric scanning tube; and an internal sleeve is sleeved outside the insulating top cover and the external piezoelectric scanning tube. The utility model has the advantages of simple structure and low cost, is suitable for batch production, and the imaging effect is not easily influenced.

Description

TECHNICAL FIELD

[0001] The utility model relates to scanning probe microscope technical field especially relates to a low cost easy processing's scanning probe microscope independent scanner. BACKGROUND

[0002] Scanning probe microscope (SPM) is widely used in physics, material science, surface chemistry, biological medicine and other fields. One of the core components of scanning probe microscope is scanner, which is responsible for controlling the accurate movement of the probe and signal acquisition. The traditional scanning probe microscope adopts integrated design, that is, the scanner is directly connected with the stepping motor in rigidity, wherein the stepping motor is responsible for sending the scanner and the probe above it to the sample surface. Since the stepping motor is larger in size and higher in control voltage compared with the scanner, its thermal fluctuation and electrical noise are larger than those of the scanner. Since the stepping motor and the scanner are rigidly connected, these stray signals on the stepping motor are transmitted to the scanner and then to the probe, affecting the imaging quality.

[0003] Previously, a rough approximation motor can be separated from the scanner of the scanning probe microscope mirror body (invention patent application number: 201110187402.3, publication number: CN102866265A) and a low back difference high repeat scanning probe microscope independent scanner (invention patent application number: CN201310552279.X, publication number: CN103616532A) provided a design scheme that the stepping motor and the scanner can be separated, and a structure of the independent scanner, which excludes the stray signals on the stepping motor from the imaging signals, can obtain very clear and stable scanning images. However, this design of the independent scanner also has some disadvantages:

[0004] The structure design of the patent is relatively complex, and the guide rail frame needs to be precisely machined to ensure the smoothness and parallelism of the guide rail. If high-hardness materials such as tungsten are used, slow wire cutting process is also needed, and then the guide rail is polished smooth.

[0005] The slide bar is machined from aluminum oxide or ceramic material, which is difficult to process and high in cost.

[0006] The guide rail and the slide bar need to be polished by hand later, which is low in production efficiency and not conducive to batch production.

[0007] Based on the above problems, the patent is improved based on the above problems, and a design scheme of an independent scanner with simpler structure, lower cost, suitable for batch production, and excellent imaging effect is provided. CONTENT OF THE UTILITY MODEL

[0008] The utility model discloses a low -cost easy processing's scanning probe microscope independent scanner which solves the shortcoming of prior art.

[0009] In order to realize the above-mentioned purpose, the utility model adopts the following technical scheme:

[0010] A low -cost easy processing's scanning probe microscope independent scanner, including probe, needle cylinder, the probe coaxial setting is in needle cylinder, and the one end fixed bonding of needle cylinder has insulating bottom cover, and the one end fixed bonding of insulating bottom cover away from needle cylinder has piezoelectric scanning pipe, and the one end fixed bonding of piezoelectric scanning pipe away from insulating bottom cover has insulating top cover, and the outside sleeve of insulating top cover and external piezoelectric scanning pipe is provided with internal sleeve;

[0011] The outer wall of the internal sleeve is tangent to the first fixed plate, the second fixed plate and the third fixed plate, the one end of the second fixed plate and the third fixed plate away from the internal sleeve is fixedly bonded with an outer frame, the one end of the first fixed plate away from the internal sleeve is fixedly bonded with a spring inner shell, the one end of the spring inner shell away from the first fixed plate is fixedly bonded with a first spring and a second spring, and the one end of the first spring and the second spring away from the spring inner shell is fixedly bonded with a spring outer shell.

[0012] Preferably, the outer diameter of the insulating top cover is larger than the outer diameter of the piezoelectric scanning tube.

[0013] Preferably, the insulating top cover is bonded to the inner side of the internal sleeve.

[0014] Preferably, the top of the insulating top cover is hollowed out, and a "cross" notch with different length and width is opened at the top.

[0015] Preferably, the outer frame is connected with the stepping motor and the mirror body.

[0016] Preferably, the top of the insulating top cover is hollowed out, and a "cross" notch with different length and width is opened at the top.

[0017] Compared with the prior art, the utility model has the beneficial effects that:

[0018] The utility model improves the structural design and material selection of the scanner, has the characteristics of simple structure, low cost, convenient processing and suitable for batch production, and changes the design of the existing patent for providing pressure by spring sheet. The utility model is pushed by the spring to fix the plate, so that the fixed plate presses the internal sleeve on the other two fixed plates. This triangular fixing mode can provide stable, smooth and repeatable friction force. Meanwhile, the structure that the internal sleeve is tangent to the fixed plate makes the contact area smaller, so that the creep effect of the internal sleeve in the friction process can be reduced, and the back difference of the scanning head is further reduced. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description, obviously, for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Figure 1 It is the first axonometric view of the present application;

[0021] Figure 2 It is the second axonometric view of the present application;

[0022] Figure 3 It is the front view of the present application;

[0023] Figure 4 It is the explosion view of the present application.

[0024] In the figure: 1, probe; 2, needle cylinder; 3, insulating bottom cover; 4, insulating top cover; 5, piezoelectric scanning tube; 6, inner sleeve; 7, first fixed plate; 701, second fixed plate; 702, third fixed plate; 8, first spring; 801, second spring; 9, spring inner shell; 901, spring outer shell; 10, outer frame. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0026] In the description of the present application, it is understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated components or elements must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation of the present application.

[0027] Reference Figure 1 - Figure 4 A low-cost and easy-to-process scanning probe microscope independent scanner, the working principle of the embodiment is: the probe 1 is installed in the needle cylinder 2, the insulating bottom cover 3 is bonded to the needle cylinder 2 and the piezoelectric scanning tube 5 on both sides. The insulating top cover 4 is bonded above the piezoelectric scanning tube 5, the outer diameter of the insulating top cover 4 is slightly larger than the outer diameter of the piezoelectric scanning tube 5, the purpose is to leave a gap between the inner sleeve 6 and the piezoelectric scanning tube 5, and to ensure the free space of the piezoelectric scanning tube 5.

[0028] The outer wall of the inner sleeve 6 is tangent to the first fixed plate 7, the second fixed plate 701 and the third fixed plate 702. The second fixed plate 701 and the third fixed plate 702 are fixedly bonded to the outer frame 10 at the end away from the inner sleeve 6. The spring outer shell 901 is bonded to the first spring 8 and the second spring 801. The first spring 8 and the second spring 801 are bonded to the spring inner shell 9 at the end away from the spring outer shell 901. The spring inner shell 9 is bonded to the first fixed plate 7 at the end away from the first spring 8 and the second spring 801. After the spring outer shell 901 is connected to the outer frame 10, the first fixed plate 7 can press the inner sleeve 6 against the second fixed plate 701 and the third fixed plate 702, providing stable, smooth and repeatable friction. The outer frame 10 is connected to the stepping motor (not shown), the mirror body (not shown) and the like.

[0029] During microscope operation, the first fixed plate 7, the second fixed plate 701, the third fixed plate 702, the first spring 8, the second spring 801, the spring inner shell 9, the spring outer shell 901 and the outer frame 10 are fixed. The stepping motor (which can be any type) pushes the insulating top cover 4, which in turn pushes the inner sleeve 6 to move the piezoelectric scanning tube 5 and the probe 1 relative to the outer frame 10, thereby bringing the probe 1 close to the sample surface. After the probe 1 is brought close to the sample, the stepping motor can be withdrawn, breaking the connection between the stepping motor and the device. If the stepping motor is equipped with a "cross" handle of corresponding size on the top of the insulating top cover 4, the connection can be broken during operation of the device, or the probe 1 can be pulled away from the sample after the operation of the device is completed.

[0030] For the above example, those skilled in the art should know that, in the implementation of the above technical solutions, the inner sleeve 6 is made of quartz glass tube. Quartz glass has the characteristics of small thermal expansion coefficient, smooth surface, hard texture, easy to purchase, no need for custom processing, and no jamming problem.

[0031] For the above example, those skilled in the art should know that, in the implementation of the above technical solutions, the first fixed plate 7, the second fixed plate 701 and the third fixed plate 702 are made of Teflon tape. Teflon tape has the characteristics of smooth surface, aging resistance, easy to purchase, no need for custom processing, and no sticking when the inner sleeve 6 slides.

[0032] For the above example, those skilled in the art should know that, in the implementation of the above technical solutions, the insulating bottom cover 3 and the insulating top cover 4 can be made by 3D printing. The materials can be ordinary insulating materials such as resin, nylon or PLA, which are easy to make.

[0033] For the above example, those skilled in the art should know that when implementing the above technical solutions, the internal sleeve 6 and the second fixed plate 701, the third fixed plate 702 are pressed by the first spring 8, the second spring 801 and the first fixed plate 7, so that the friction mode between the internal sleeve 6 and the first fixed plate 7, the second fixed plate 701 and the third fixed plate 702 is: the sliding friction between the internal sleeve 6 and the first fixed plate 7, the sliding friction between the internal sleeve 6 and the second fixed plate 701, and the sliding friction between the internal sleeve 6 and the third fixed plate 702. The quartz glass is hard and smooth in surface, which effectively ensures the friction lubrication.

[0034] For the above example, those skilled in the art should know that when implementing the above technical solutions, the main components affecting the imaging stability (the current between the probe 1 and the sample) are the probe 1, the needle cylinder 2, the piezoelectric scanning tube 5, and the insulating bottom cover 3 and the internal sleeve 6, that is, the thermal expansion of these components will be transmitted to the probe 1. The insulating top cover 4 is rigidly bonded to the internal sleeve 6, so its thermal expansion is limited by the internal sleeve 6. Among these components, the internal sleeve 6 is made of quartz glass, and the thermal expansion coefficient is small. Although the insulating bottom cover 3 is 3D printed, its volume is very small, and the thickness is only 0.5mm, so its thermal expansion can be ignored. Based on the above analysis, the thermal stability coefficient of the design is very high.

[0035] The device changes the existing design of providing pressure by spring sheet, and the first spring 8, the second spring 801 pushes the first fixed plate 7, so that the first fixed plate 7 presses the internal sleeve 6 on the second fixed plate 701 and the third fixed plate 702. This triangular fixing mode can provide stable, smooth and repeatable friction force, and the tangential structure of the internal sleeve 6 and the fixed plate makes the contact area smaller, which can reduce the creep effect of the internal sleeve 6 in the friction process, and further reduce the backlash of the scanning head.

[0036] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A low cost, easy to manufacture, scanning probe microscope stand-alone scanner comprising a probe (1), a needle cylinder (2), characterized in that, The probe (1) is coaxially arranged in the needle cylinder (2), one end of the needle cylinder (2) is fixedly bonded with an insulating bottom cover (3), one end of the insulating bottom cover (3) away from the needle cylinder (2) is fixedly bonded with a piezoelectric scanning tube (5), one end of the piezoelectric scanning tube (5) away from the insulating bottom cover (3) is fixedly bonded with an insulating top cover (4), the insulating top cover (4) and the piezoelectric scanning tube (5) are externally sleeved with an internal sleeve (6); The outer wall of the internal sleeve (6) is tangent to the first fixed plate (7), the second fixed plate (701) and the third fixed plate (702), one end of the second fixed plate (701) and the third fixed plate (702) away from the internal sleeve (6) is fixedly bonded with an outer frame (10), one end of the first fixed plate (7) away from the internal sleeve (6) is fixedly bonded with a spring inner shell (9), one end of the spring inner shell (9) away from the first fixed plate (7) is fixedly bonded with a first spring (8) and a second spring (801), one end of the first spring (8) and the second spring (801) away from the spring inner shell (9) is fixedly bonded with a spring outer shell (901).

2. A low cost, easy to fabricate, scanning probe microscope stand-alone scanner according to claim 1, wherein, The outer diameter of the insulating top cover (4) is larger than the outer diameter of the piezoelectric scanning tube (5).

3. A low cost, easy to fabricate, scanning probe microscope stand-alone scanner according to claim 1, wherein, The insulating top cover (4) is bonded to one end of the internal sleeve (6) on the inside.

4. The low cost, easy to fabricate, scanning probe microscope standalone scanner of claim 1, wherein, The outer frame (10) is connected with the stepping motor and the mirror body.

5. The low cost, easy to fabricate, scanning probe microscope standalone scanner of claim 1, wherein, The upper part of the insulating top cover (4) is hollowed out, and a "cross" notch with different length and width is opened on the top.

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