Chip test fixture and test turntable
By designing chip testing fixtures and test turntables, and employing multiple pressure head arrays and cylinder systems, uniform force application and rapid pick-and-place of MEMS chips are achieved, solving the problem of high cost of existing equipment and improving testing accuracy and efficiency.
Patent Information
- Application Number
- CN202422505350.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-16
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-10-16
Smart Images
Figure CN223711642U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to chip testing technical field especially relates to chip test fixture and test rotary table. BACKGROUND
[0002] In recent years, the miniaturization trend of MEMS chip is more and more obvious, and the detection demand for MEMS chip is also increasing, MEMS is various, and the MEMS of hundreds of millions of dollars is consumed in the world every year, and is widely used in smart mobile phone, automobile electronics, intelligent manufacturing and other fields. And the market share of MEMS chip depends on its own quality, and the quality detection of MEMS chip usually needs to use the corresponding test seat to realize the control of MEMS chip quality, and the existing product for MEMS chip test has too large manufacturing cost, and cannot realize larger scale popularization and practicality, thereby greatly increasing the manufacturing cost and test cycle of MEMS chip manufacturer, thereby being not conducive to improving the economic benefit. INNOVATION CONTENT
[0003] The utility model aims at providing a kind of chip test fixture and test rotary table, the chip test fixture and test rotary table can improve the uniformity of chip stress to ensure the precision and consistency of chip test, also can pass through strip-shaped through hole to the chip in chip seat Quick pick and place, improve production test efficiency.
[0004] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of: a kind of chip test fixture, comprising: test carrier plate, chip carrier plate being set in the upper of test carrier plate, several chip seats being set on the upper surface of chip carrier plate and pressing plate being set in the upper of chip carrier plate, several pressure heads corresponding to chip seat are provided on the pressing plate, several pressure heads are arranged to form at least 2 pressure head columns, several pressure heads in each pressure head column are arranged along X direction, a strip-shaped through hole extending along X direction is provided between any two adjacent pressure head columns on the upper surface of pressing plate, at least one transverse cylinder that can extend along Y direction perpendicular to X direction is installed on the upper surface of test carrier plate, a movable plate connected with the piston rod of transverse cylinder is slidably arranged above test carrier plate, at least 2 vertical cylinders are installed on the movable plate, and the piston rod of each vertical cylinder is connected with pressing plate.
[0005] The pressing plate further comprises: a bottom plate layer, a top plate layer above the bottom plate layer and two spacer block layers between the bottom plate layer and the bottom plate layer, the upper surface of the bottom plate layer is provided with a plurality of installation through holes corresponding to the pressing heads, the inner diameter of the lower part of the installation through hole through which the pressing head passes is smaller than the inner diameter of the upper part, thereby forming a stop surface in the installation through hole, the lower end surface of the pressing head passing through the installation through hole is lower than the lower surface of the bottom plate layer, the upper part of the pressing head has an outer convex part matched with the stop surface, a spring in a squeezed state is arranged between the upper end surface of each pressing head and the top plate layer above it, so that the outer convex part on the pressing head and the stop surface can be in squeezed contact, when the pressing head on the pressing plate moves above the chip seat with the horizontal cylinder and the piston rod of the vertical cylinder is in a contracted state, the lower end surface of the pressing head is in squeezed contact with the chip in the chip seat.
[0006] The further improved scheme in the above technical solution is as follows:
[0007] 1. In the above scheme, the two spacer block layers are respectively connected with the upper surfaces of the two ends of the bottom plate layer.
[0008] 2. In the above scheme, a positioning column and a positioning guide sleeve matched with each other are arranged between each pressing plate and the top plate layer.
[0009] 3. In the above scheme, the upper ends of the piston rods of the four vertical cylinders are respectively connected with the four corners of the lower surface of the pressing plate.
[0010] 4. In the above scheme, the two horizontal cylinders are respectively installed on the outer sides of the two ends of the pressing plate.
[0011] 5. In the above scheme, a test plate in communication with the upper computer and electrically connected with the chip carrier plate is arranged between the test carrier plate and the chip carrier plate, and two movable plates corresponding to the piston rods of the two horizontal cylinders are respectively slidably installed on the lower surface of the test plate through at least one set of slide rails and slide blocks.
[0012] 6. In the above scheme, the pressing head is a silica gel pressing head, a rubber pressing head or a polyurethane pressing head.
[0013] A test turntable is also provided, comprising: a horizontally arranged marble base plate and a first support plate and a second support plate vertically installed on the upper surface of the marble base plate, a chip test fixture is arranged between the first support plate and the second support plate, the chip test fixture is installed on the rotating part of a first turntable rotatable in a first direction, the fixed part of the first turntable is installed on a rotating base, the other end of the rotating base rotatably connected with the first support plate is installed on the rotating part of a second turntable rotatable in a second direction, and the fixed part of the second turntable is installed on the second support plate.
[0014] The further improved scheme in the technical solution is as follows:
[0015] 1. In the scheme, the first support plate and the second support plate are marble support plates.
[0016] 2. In the scheme, a rotating motor and a wire slip ring are mounted on the fixed part of each of the first rotating disc and the second rotating disc to drive the rotating part to rotate.
[0017] Compared with the prior art, the application has the following advantages:
[0018] The chip testing fixture has the following advantages: the plurality of pressing heads are arranged to form at least two pressing head columns, the plurality of pressing heads in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole extending along the X direction is formed between any two adjacent pressing head columns on the upper surface of the pressing plate, at least one transverse cylinder which can extend along the Y direction perpendicular to the X direction is mounted on the upper surface of the test carrier plate, a movable plate connected with the piston rod of the transverse cylinder is slidably arranged above the test carrier plate, at least two vertical cylinders are mounted on the movable plate, the piston rod of each vertical cylinder is connected with the pressing plate, the pressing plate further comprises a bottom plate layer, a top plate layer arranged above the bottom plate layer and a pad layer arranged between the bottom plate layer and the top plate layer, a plurality of mounting through holes corresponding to the pressing heads are formed in the upper surface of the bottom plate layer, the inner diameter of the lower part of the mounting through hole through which the pressing head passes is smaller than the inner diameter of the upper part, so that a stop surface is formed in the mounting through hole, the lower end surface of the pressing head passing through the mounting through hole is lower than the lower surface of the bottom plate layer, the upper part of the pressing head has an outer convex part matched with the stop surface, a spring in a compressed state is arranged between the upper end surface of each pressing head and the top plate layer arranged above the pressing head, so that the outer convex part of the pressing head and the stop surface can be in compressive contact, when the pressing head on the pressing plate moves to above the chip seat with the transverse cylinder and the piston rod of the vertical cylinder is in a contracted state, the lower end surface of the pressing head is in compressive contact with the chip in the chip seat, the elasticity of the pressing head can be used to hold each chip, the chip can be protected from damage caused by overpressure while ensuring stable holding, the uniformity of the force acting on the chip can be improved to ensure the precision and consistency of the chip test, and the chip in the chip seat can be quickly taken out through the strip-shaped through hole, thereby improving the production test efficiency. BRIEF DESCRIPTION OF DRAWINGS
[0019] FIG. 1 is a structural schematic view of a chip testing fixture according to the application; Figure 1 FIG. 2 is a structural schematic view of a chip testing rotating disc according to the application;
[0020] FIG. 3 is a partial structural schematic view of the chip testing rotating disc according to the application; Figure 2 FIG. 4 is a partial structural schematic view of the chip testing fixture according to the application;
[0021] FIG. 5 is a structural schematic view of a chip testing rotating disc according to the application; and Figure 3 FIG. 6 is a partial structural schematic view of the chip testing fixture according to the application.
[0022] Figure 2 is a schematic view of the chip test fixture according to the present application. Figure 4 Figure 2 is a schematic view of the chip test fixture according to the present application.
[0023] In the above drawings: 100, chip; 1, marble base plate; 2, first support plate; 3, second support plate; 4, test carrier plate; 51, first turntable; 52, second turntable; 53, rotary motor; 54, wiring slip ring; 6, rotating base; 7, test plate; 8, chip carrier plate; 9, chip seat; 10, pressing plate; 11, pressing head; 111, outer convex part; 12, vertical air cylinder; 13, horizontal air cylinder; 14, movable plate; 15, strip-shaped through hole; 16, bottom plate layer; 17, top plate layer; 18, cushion block layer; 19, mounting through hole; 191, stop surface; 20, spring. DETAILED DESCRIPTION
[0024] The present application can be further understood by the specific embodiments given below, but they are not a limitation of the present application.
[0025] Embodiment 1: A chip test fixture, comprising: a test carrier plate 4, a chip carrier plate 8 arranged above the test carrier plate 4, a plurality of chip seats 9 arranged on the upper surface of the chip carrier plate 8, and a pressing plate 10 arranged above the chip carrier plate 8, wherein the pressing plate 10 is provided with a plurality of pressing heads 11 corresponding to the chip seats 9, the plurality of pressing heads 11 are arranged to form at least two pressing head columns, the plurality of pressing heads 11 in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole 15 extending along the X direction is arranged on the upper surface of the pressing plate 10 and between any two adjacent pressing head columns, at least one horizontal air cylinder 13 capable of extending along the Y direction perpendicular to the X direction is mounted on the upper surface of the test carrier plate 4, a movable plate 14 connected to the piston rod of the horizontal air cylinder 13 is slidably arranged above the test carrier plate 4, and at least two vertical air cylinders 12 are mounted on the movable plate 14, wherein the piston rod of each vertical air cylinder 12 is connected to the pressing plate 10.
[0026] The pressing plate 10 further comprises a bottom plate layer 16, a top plate layer 17 above the bottom plate layer 16, and two spacer block layers 18 between the bottom plate layer 16 and the top plate layer 17. The upper surface of the bottom plate layer 16 is provided with a plurality of mounting through holes 19 corresponding to the pressing heads 11. The inner diameter of the lower part of the mounting through hole 19 is smaller than that of the upper part, so as to form a stop surface 191 in the mounting through hole 19. The lower end surface of the pressing head 11 passing through the mounting through hole 19 is lower than the lower surface of the bottom plate layer 16. The upper part of the pressing head 11 is provided with an external convex part 111 matched with the stop surface 191. A spring 20 in a compressed state is arranged between the upper end surface of each pressing head 11 and the top plate layer 17 above it. The external convex part 111 of the pressing head 11 and the stop surface 191 can be in extrusion contact. When the pressing head 11 on the pressing plate 10 moves above the chip seat 9 with the horizontal cylinder 13 and the piston rod of the vertical cylinder 12 is in a retracted state, the lower end surface of the pressing head 11 is in extrusion contact with the chip 100 in the chip seat 9.
[0027] The spacer block layers 18 are connected to the upper surfaces of the two ends of the bottom plate layer 16.
[0028] The pressing plate 10 and the top plate layer 17 are provided with matched positioning columns and positioning guide sleeves.
[0029] The pressing head 11 is a silica gel pressing head.
[0030] Embodiment 2: A test turntable, comprising: a horizontally arranged marble base plate 1, and a first support plate 2 and a second support plate 3 vertically installed on the upper surface of the marble base plate 1. A chip test clamp is arranged between the first support plate 2 and the second support plate 3. The chip test clamp is installed on the rotating part of a first turntable 51 rotatable in a first direction. The fixed part of the first turntable 51 is installed on a rotating base 6. One end of the rotating base 6 is rotatably connected to the first support plate 2, and the other end of the rotating base 6 is installed on the rotating part of a second turntable 52 rotatable in a second direction. The fixed part of the second turntable 52 is installed on the second support plate 3.
[0031] The first support plate 2 and the second support plate 3 are both marble support plates.
[0032] A rotating motor 53 and a wire sliding ring 54 for driving the rotation of the rotating part of each of the first turntable 51 and the second turntable 52 are installed on the fixed part of each of the first turntable 51 and the second turntable 52. The first turntable, the second turntable, the rotating motor, and the wire sliding ring are all obtained by outsourcing and belong to the prior art category, which will not be described herein.
[0033] Embodiment 3: a chip testing fixture, comprising: a testing board 4, a chip board 8 arranged above the testing board 4, a plurality of chip seats 9 arranged on the upper surface of the chip board 8, and a pressing plate 10 arranged above the chip board 8, wherein the pressing plate 10 is provided with a plurality of pressing heads 11 corresponding to the chip seats 9, the plurality of pressing heads 11 are arranged to form at least two pressing head columns, the plurality of pressing heads 11 in each pressing head column are arranged in an interval along an X direction, a strip-shaped through hole 15 extending along the X direction is arranged on the upper surface of the pressing plate 10 between any two adjacent pressing head columns, and at least one transverse cylinder 13 capable of extending along a Y direction perpendicular to the X direction is arranged on the upper surface of the testing board 4, wherein a movable plate 14 connected with the piston rod of the transverse cylinder 13 is slidably arranged above the testing board 4, and at least two vertical cylinders 12 are arranged on the movable plate 14, and the piston rod of each vertical cylinder 12 is connected with the pressing plate 10.
[0034] The pressing plate 10 further comprises: a bottom plate layer 16, a top plate layer 17 arranged above the bottom plate layer 16, and two pad block layers 18 arranged between the bottom plate layer 16 and the top plate layer 16, wherein the upper surface of the bottom plate layer 16 is provided with a plurality of mounting through holes 19 corresponding to the pressing heads 11, the inner diameter of the lower part of the mounting through hole 19 through which the pressing head 11 passes is smaller than the inner diameter of the upper part, so as to form a stop surface 191 in the mounting through hole 19, the lower end surface of the pressing head 11 passing through the lower part of the mounting through hole 19 is lower than the lower surface of the bottom plate layer 16, the upper part of the pressing head 11 is provided with an outer convex part 111 matched with the stop surface 191, and a spring 20 in a compressed state is arranged between the upper end surface of each pressing head 11 and the top plate layer 17 arranged above the pressing head 11, so that the outer convex part 111 on the pressing head 11 is in extrusion contact with the stop surface 191, and when the pressing head 11 on the pressing plate 10 moves to above the chip seat 9 with the transverse cylinder 13 and the piston rod of the vertical cylinder 12 is in a contracted state, the lower end surface of the pressing head 11 is in extrusion contact with the chip 100 in the chip seat 9.
[0035] The upper ends of the piston rods of the four vertical cylinders 12 are respectively connected with the four corners of the lower surface of the pressing plate 10.
[0036] The two transverse cylinders 13 are respectively arranged on the outer sides of the two ends of the pressing plate 10.
[0037] A testing board 7 in communication with an upper computer and electrically connected with the chip board 8 is arranged between the testing board 4 and the chip board 8, and the two movable plates 14 corresponding to the piston rods of the two transverse cylinders 13 are respectively slidably arranged on the lower surface of the testing board 7 through at least one set of slide rails 141 and slide blocks 142.
[0038] The pressing head 11 is a polyurethane pressing head.
[0039] The first support plate 2 and the second support plate 3 are marble support plates.
[0040] Firstly, the piston rods of the vertical air cylinders and the horizontal air cylinders are all placed in the first state, so that the pressure heads moving with the vertical air cylinders are away from the chip seats in the vertical direction, and the strip-shaped through holes on the pressing plates moving with the horizontal air cylinders are moved above the chip seats, so as to put the chips into the chip seats;
[0041] The chips to be tested are carried into the chip seats;
[0042] The piston rods of the vertical air cylinders and the horizontal air cylinders are all switched from the first state to the second state, so that the pressure head columns on the pressing plates moving with the horizontal air cylinders are moved above the chips to be tested in the chip seats, and the pressure heads moving with the vertical air cylinders are close to the chip seats in the vertical direction and press the chips to be tested;
[0043] During the process that the pressure heads press the chips to be tested, when the pressure heads have not contacted the chips, the outer convex parts of the pressure heads are in extrusion contact with the stop surfaces in the mounting through holes under the action of the springs, at this time, the lower end surfaces of the pressure heads are at the lowest points of their strokes; when the pressure heads contact the chips, the pressure heads are subjected to the reaction force from the chips, and have a tendency to move upward, so that the elastic pressing of the chips is realized, the chips can be protected, and the uniformity of the force on the chips can be improved, so as to ensure the accuracy and consistency of the test;
[0044] The first turntable and the second turntable are driven to rotate by the rotating motor, so that the chips to be tested in the chip seats are rotated in two directions, in this process, the performance of the chips is tested, and the chips are classified according to the test results, the specific test process and test software do not belong to the invention points of the application, and will not be described here;
[0045] After the test is completed, the first turntable and the second turntable are reset, and the piston rods of the vertical air cylinders and the horizontal air cylinders are switched from the second state back to the first state, so that the pressure heads moving with the vertical air cylinders are away from the chip seats in the vertical direction, and the strip-shaped through holes on the pressing plates moving with the horizontal air cylinders are moved above the chip seats, so as to pick up the chips in the chip seats which have been tested and put the next batch of chips to be tested into the chip seats.
[0046] When the chip test fixture is used, the elastic pressing of the chips can be realized by the pressure heads, the stability of the pressing can be ensured, the chips can be protected from being damaged due to over-pressing, the uniformity of the force on the chips can be improved to ensure the accuracy and consistency of the test of the chips, the chips in the chip seats can be quickly picked up and placed through the strip-shaped through holes, and the production test efficiency is improved.
[0047] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.
Claims
1. A chip test fixture comprising: Test the carrier plate (4), the chip carrier plate (8) is arranged above the test carrier plate (4), a plurality of chip seats (9) are arranged on the upper surface of the chip carrier plate (8), and a pressing plate (10) is arranged above the chip carrier plate (8), a plurality of pressing heads (11) corresponding to the chip seat (9) are arranged on the pressing plate (10), characterized in that: a plurality of the pressing heads (11) are arranged to form at least two pressing head columns, a plurality of pressing heads (11) in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole (15) extending along the X direction is formed on the upper surface of the pressing plate (10) between any two adjacent pressing head columns, and at least one transverse cylinder (13) which can stretch along the Y direction perpendicular to the X direction is mounted on the upper surface of the test carrier plate (4), a movable plate (14) connected with the piston rod of the transverse cylinder (13) is slidably arranged above the test carrier plate (4), and at least two vertical cylinders (12) are mounted on the movable plate (14), and the piston rod of each vertical cylinder (12) is connected with the pressing plate (10); The pressing plate (10) further comprises: a bottom plate layer (16), a top plate layer (17) located above the bottom plate layer (16), and two spacer block layers (18) arranged between the bottom plate layer (16) and the bottom plate layer (16), a plurality of mounting through holes (19) corresponding to the pressing heads (11) are formed on the upper surface of the bottom plate layer (16), the inner diameter of the lower part of the mounting through hole (19) through which the pressing head (11) passes is smaller than the inner diameter of the upper part, so as to form a stop surface (191) in the mounting through hole (19), the lower end surface of the pressing head (11) passing out of the mounting through hole (19) is lower than the lower surface of the bottom plate layer (16), the upper part of the pressing head (11) has an outer convex part (111) matched with the stop surface (191), and a spring (20) in a compressed state is arranged between the upper end surface of each pressing head (11) and the top plate layer (17) located above the pressing head (11), so that the outer convex part (111) on the pressing head (11) is in extrusion contact with the stop surface (191), when the pressing head (11) on the pressing plate (10) moves above the chip seat (9) with the transverse cylinder (13) and the piston rod of the vertical cylinder (12) is in a retracted state, the lower end surface of the pressing head (11) is in extrusion contact with the chip (200) in the chip seat (9).
2. The chip test fixture of claim 1, wherein: Two spacer block layers (18) are respectively connected with the upper surfaces of both ends of the bottom plate layer (16).
3. The chip test fixture of claim 1, wherein: A positioning column and a positioning guide sleeve matched with each other are arranged between each pressing plate (10) and the top plate layer (17).
4. The chip test fixture of claim 1, wherein: The upper ends of the piston rods of four vertical cylinders (12) are respectively connected with four corner positions of the lower surface of the pressing plate (10).
5. The chip test fixture of claim 1, wherein: Two transverse cylinders (13) are respectively mounted on the outer sides of both ends of the pressing plate (10).
6. The chip test fixture of claim 5, wherein: The test board (7) is arranged between the test board (4) and the chip board (8) and is in communication with the upper computer and electrically connected with the chip board (8), and the two movable plates (14) corresponding to the piston rods of the two horizontal cylinders (13) are respectively slidably installed on the lower surface of the test board (7) through at least one set of slide rails (141) and slide blocks (142).
7. The chip test fixture of claim 1, wherein: The pressure head (11) is a silica gel pressure head, a rubber pressure head or a polyurethane pressure head.
8. A test turntable characterized by: The application relates to a chip testing fixture. The marble base plate (1) is horizontally arranged, and the first support plate (2) and the second support plate (3) are vertically arranged on the upper surface of the marble base plate (1), the chip testing fixture is arranged between the first support plate (2) and the second support plate (3), the chip testing fixture is installed on the rotating part of a first rotating disc (51) which can rotate in a first direction, the fixed part of the first rotating disc (51) is installed on a rotating base (6), one end of the rotating base (6) is rotationally connected with the first support plate (2), and the other end of the rotating base (6) is installed on the rotating part of a second rotating disc (52) which can rotate in a second direction, and the fixed part of the second rotating disc (52) is installed on the second support plate (3).
9. The test turntable of claim 8, wherein: The first support plate (2) and the second support plate (3) are marble support plates.
10. The test turntable of claim 8, wherein: The fixed part of each of the first rotating disc (51) and the second rotating disc (52) is provided with a rotating motor (53) and a wire sliding ring (54) for driving the rotating part to rotate.