Slide glass boat
By installing insulating supports at the connection between the conductive contacts of the cell carrier boat and the discharge equipment, the problem of arcing in the conductive contact blocks was solved, thereby improving the production yield of the cells and the stability of the equipment.
Patent Information
- Application Number
- CN202422796026.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-15
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-11-15
AI Technical Summary
In existing technologies, insufficient contact between the conductive contact block and the discharge equipment leads to arcing, which affects the yield of silicon wafer production.
An insulating support is installed at the connection between the conductive contact of the carrier boat and the discharge device to form an insulating barrier, which limits the electric field in the connection area and avoids arcing.
By installing insulating supports, the possibility of arcing is reduced, thereby improving the production yield of solar cells and the stability of the equipment.
Smart Images
Figure CN223712723U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of solar cell production, and particularly relates to a wafer boat. BACKGROUND
[0002] The wafer boat is an important device for carrying silicon wafers in the process of manufacturing solar cell wafers, especially in the process of plasma enhanced chemical vapor deposition. In the process of plasma enhanced chemical vapor deposition, the silicon wafers are placed on specific positions of the wafer boat, and then are put into a reaction furnace. The wafer boat is in contact with a discharge device through a conductive contact block to discharge electricity, so that the special gas in the furnace reacts chemically to deposit a thin film on the surface of the silicon wafers, thereby realizing the surface treatment and processing of the silicon wafers.
[0003] However, with the increase of the use frequency and the insufficiency of the contact between the conductive contact block and the discharge device, the arc phenomenon is prone to occur at the conductive contact block. The generated arc is likely to re-arc with the surrounding wafer boat, support rods, metal clamps and other conductive objects, which causes adverse effects on the silicon wafers and leads to the decrease of the production yield of the cell wafers. CONTENT OF THE UTILITY MODEL
[0004] The present application discloses a wafer boat which can improve the production yield of the cell wafers.
[0005] In order to achieve the above-mentioned purpose, the present application discloses a wafer boat, which comprises:
[0006] A wafer boat body, wherein the wafer boat body comprises a plurality of graphite blocks, and the plurality of graphite blocks comprise a conductive contact for electrically connecting with a discharge device;
[0007] A support, which is made of insulating material, is arranged at the bottom of the wafer boat body, and the side of the support facing the wafer boat body is attached to the conductive contact to provide an insulating barrier for the conductive contact.
[0008] Optionally, the length of the support in a first direction is greater than the length of the conductive contact, and the first direction is the arrangement direction of the plurality of graphite blocks.
[0009] Optionally, the conductive contact and the support are detachably connected.
[0010] Optionally, a first plug protrusion is arranged on the conductive contact, a plug through hole is arranged on the support, and the plug protrusion and the plug through hole are plug-fitted.
[0011] Optionally, a second plug protrusion is arranged on the support, and a plug groove is arranged at the bottom of the graphite block adjacent to the conductive contact, and the second plug protrusion and the plug groove are plug-fitted.
[0012] Optionally, along the first direction, the graphite blocks located on both sides of the conductive contact piece include a first graphite block and a second graphite block, the first graphite block is the outermost graphite block, and the insertion groove is arranged on the second graphite block.
[0013] Optionally, the wafer boat further includes a connecting rod, the connecting rod sequentially passes through a plurality of the graphite blocks along the first direction, and passes through the second insertion protrusion.
[0014] Optionally, along the extension direction of the second insertion protrusion, the support piece is provided with a support protrusion away from one side of the bottom of the wafer boat body, and the support protrusion is used to contact the ground.
[0015] Optionally, the support piece includes four, and the four support pieces are symmetrically arranged near four corners of the bottom of the wafer boat body.
[0016] Optionally, the support piece is made of ceramic material.
[0017] Compared with the prior art, the application has the following beneficial effects:
[0018] By arranging the support piece made of insulating material on the body of the wafer boat, and attaching the side of the wafer boat body to the conductive contact piece, when the conductive contact piece is electrically connected with the discharge device, if there is external interference or abnormal condition, for example, instantaneous high voltage impact or uneven electric field distribution, the electric charge is broken down in the air to form a discharge channel to cause arcing phenomenon, due to the existence of the insulating support piece, the electric field is limited in the connection area between the conductive contact piece and the discharge device, reducing the possibility of forming a strong electric field in other positions to cause arcing, as far as possible to avoid the arcing phenomenon at the conductive contact block to cause adverse effects on the silicon wafer, thereby improving the production yield of the battery sheet. BRIEF DESCRIPTION OF DRAWINGS
[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0020] Figure 1 is a structure schematic view of a wafer boat provided by the embodiments of the present application;
[0021] Figure 2 is a structure schematic view of a wafer boat body provided by the embodiments of the present application;
[0022] Figure 3 is a schematic view of the combination of the conductive contact piece and the support piece provided by the embodiments of the present application;
[0023] Figure 4 is a schematic view of a support provided by an embodiment of the present application;
[0024] Figure 5 is a schematic view of an electrically conductive contact provided by an embodiment of the present application.
[0025] Main reference signs
[0026] 1 - wafer boat;
[0027] 100 - wafer boat body; 110 - graphite block; 120 - electrically conductive contact; 1201 - first plug-in protrusion; 130 - plug-in groove; 140 - first graphite block; 150 - second graphite block;
[0028] 200 - support; 210 - plug-in through hole; 220 - second plug-in protrusion; 230 - support protrusion. DETAILED DESCRIPTION
[0029] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.
[0030] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.
[0031] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned part of the terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. Those of ordinary skill in the art can understand the specific meaning of these terms in the present application according to the specific situation.
[0032] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.
[0033] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components whose specific types and structures may be the same or different, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.
[0034] As mentioned in the background section, in related technologies, with the increase in usage frequency and the insufficient contact between the conductive contact block and the discharge equipment, arcing is very likely to occur at the conductive contact block. The generated arc will arc again with the surrounding conductive objects such as the boat, support rod, and metal clamp, which will have an adverse effect on the silicon wafer and lead to a decrease in the production yield of the solar cell.
[0035] To address the aforementioned issues, this application provides a wafer carrier boat. When the conductive contact is electrically connected to the discharge device, if the charge breaks down in the air to form a discharge channel and arcing occurs, the electric field can be confined to the connection area between the conductive contact and the discharge device. This minimizes the risk of arcing at the conductive contact block, which could adversely affect the silicon wafer, thereby improving the production yield of the solar cells.
[0036] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings.
[0037] See Figure 1 and Figure 2 This embodiment provides a substrate carrier boat 1, which includes a substrate carrier boat body 100 and a support member 200. The substrate carrier boat body 100 includes a plurality of graphite blocks 110, among which a conductive contact 120 for electrical connection with a discharge device is included. The support member 200 is made of insulating material and is disposed at the bottom of the substrate carrier boat body 100. The side of the support member 200 facing the substrate carrier boat body 100 is attached to the conductive contact 120 to provide an insulating barrier for the conductive contact 120.
[0038] By setting the support piece 200 of insulating material on the body of the wafer boat 1, and attaching the side of the wafer boat body 100 to the conductive contact piece 120, when the conductive contact piece 120 is electrically connected to the discharge device, if there is external interference or abnormal conditions, such as a momentary high voltage impact or uneven electric field distribution, causing the electric charge to break down in the air to form a discharge channel and arc phenomenon, due to the presence of the insulating support piece 200, the electric field is limited to the connection area between the conductive contact piece 120 and the discharge device, reducing the possibility of forming a strong electric field at other locations and causing arcing, and as much as possible to avoid the occurrence of arcing at the conductive contact block and cause adverse effects on the silicon wafer, thereby improving the production yield of the battery sheet.
[0039] In one possible embodiment, the length of the support piece 200 in the first direction is greater than the length of the conductive contact piece 120, and the first direction is the arrangement direction of the plurality of graphite blocks 110.
[0040] The first direction is Figure 1 the direction indicated by the arrow X.
[0041] By making the length of the support piece 200 greater than the length of the conductive contact piece 120 in the first direction, a larger area of insulation can be provided, further enhancing the insulation protection of the conductive contact piece 120, reducing the risk of electric leakage or arcing caused by electric field leakage or external interference, for example, in an environment with strong electromagnetic field interference around, the longer insulating support piece 200 can better block the influence of external electromagnetic field on the conductive contact piece 120, and due to the increase in the length of the support piece 200, the electric field distribution around the conductive contact piece 120 can be adjusted and optimized to some extent, making the electric field more concentrated and evenly distributed in the connection area between the conductive contact piece 120 and the discharge device, improving the discharge efficiency and stability.
[0042] In addition, the longer support piece 200 can provide more stable support for the wafer boat body 100, which helps to reduce the vibration and deformation of the wafer boat 1 during operation, thereby ensuring the stability of the connection between the conductive contact piece 120 and the discharge device. When the equipment is running at high speed or is subjected to a larger external force impact, the stable support can prevent the position of the conductive contact piece 120 from deviating, ensuring the normal discharge of the discharge device.
[0043] In one possible embodiment, referring to Figure 3 , the conductive contact piece 120 and the support piece 200 are detachably connected.
[0044] Thus, when the conductive contact 120 is worn, damaged or degraded in performance, it can be individually detached for repair or replacement without replacing the entire support 200 or the carrier boat body 100, thereby reducing maintenance costs. For example, if the surface of the conductive contact 120 is oxidized or worn after long-term use, affecting the conductive performance, the detachable design enables the conductive contact 120 to be quickly replaced, allowing the equipment to quickly return to normal operation.
[0045] In one possible embodiment, referring to Figures 3 to 5 , the conductive contact 120 is provided with a first plug protrusion 1201, and the support 200 is provided with a plug through hole 210, and the plug protrusion and the plug through hole 210 are plug-fitted.
[0046] Through the plug-fitting of the first plug protrusion 1201 provided on the conductive contact 120 and the plug through hole 210 provided on the support 200, the conductive contact 120 and the support 200 can be clearly positioned. During installation, the first plug protrusion 1201 is simply inserted into the plug through hole 210 to quickly complete the alignment and connection of the conductive contact 120 and the support 200, thereby improving installation efficiency. In addition, the plug-fitting increases the contact area and the connection point, making the connection between the conductive contact 120 and the support 200 more stable.
[0047] In addition, when the conductive contact 120 needs to be detached for repair, replacement or cleaning, the conductive contact 120 and the support 200 can be easily separated by pulling out the first plug protrusion 1201, which is simple and fast. This detachability helps to reduce maintenance difficulty and cost. If the conductive contact 120 is partially damaged, it can be easily detached for repair or replacement through simple plug-in and plug-out operation.
[0048] Of course, the detachable connection between the conductive contact 120 and the support 200 is not limited to the plug-fitting form described above. It can also be that the conductive contact 120 and the support 200 are respectively provided with matching threads, and the connection and detachment are achieved by rotation. For example, the conductive contact 120 has external threads, and the support 200 has internal threads. The conductive contact 120 is screwed into the threaded hole of the support 200. Alternatively, the conductive contact 120 and the support 200 are respectively provided with corresponding buckles and slots. For example, the conductive contact 120 has a spring buckle, and the support 200 has a corresponding slot. The buckle is connected by being pressed into the slot, and the buckle is detached by being pressed out of the slot. A special quick clamp device can also be used to clamp and fix the conductive contact 120 and the support 200, and the clamp can be loosened to detach them. Those skilled in the art should know.
[0049] In one possible embodiment, referring to Figure 2 andFigure 4 The support 200 is provided with a second insertion protrusion 220, and the bottom of the graphite block 110 adjacent to the conductive contact 120 is provided with an insertion groove 130, and the second insertion protrusion 220 is inserted and matched with the insertion groove 130.
[0050] Through the matching of the second insertion protrusion 220 and the insertion groove 130, a firm connection is formed between the support 200 and the graphite block 110 adjacent to the conductive contact 120, which can better resist various external forces and vibrations, prevent the relative displacement of the graphite block 110 and the support 200 in the arrangement direction of the plurality of graphite blocks 110, ensure the stability of the entire slide boat 1 structure, and the good contact matching helps the heat transfer between the support 200 and the graphite block 110, improves the heat dissipation efficiency, thereby ensuring the temperature stability of the equipment during the working process, and avoids the performance degradation or damage caused by overheating.
[0051] In a possible embodiment, referring to Figure 1 and Figure 2 , along the first direction, the graphite blocks 110 located on both sides of the conductive contact 120 include a first graphite block 140 and a second graphite block 150, the first graphite block 140 is the outermost graphite block 110, and the insertion groove 130 is arranged on the second graphite block 150.
[0052] By arranging the insertion groove 130 on the second graphite block 150 located inside the conductive contact 120 instead of the outermost first graphite block 140, the conductive contact 120 can be protected to some extent, the outermost first graphite block 140 can first withstand possible external collisions or friction, reducing the direct impact on the structure near the conductive contact 120, and since the second graphite block 150 is closer to the conductive contact 120, the arrangement of the insertion groove 130 at its position can positively affect the stability and uniformity of the electric field, thereby improving the discharge effect and stability.
[0053] In a possible embodiment, the slide boat 1 further includes a connecting rod, the connecting rod sequentially passes through the plurality of graphite blocks 110 along the first direction, and passes through the second insertion protrusion 220.
[0054] By making the connecting rods pass through the plurality of graphite blocks 110 and the second plug-in protrusions 220 in the first direction in turn, they are effectively connected together to form a more stable and unified overall structure, which helps to improve the anti-deformation ability of the slide boat 1 under various working conditions, such as when encountering collisions or vibrations during transportation or operation, the structural integrity can be maintained, and the accurate arrangement order and relative position of the plurality of graphite blocks 110 along the first direction can be ensured, avoiding misalignment or deviation between the graphite blocks 110, thereby ensuring the stable performance of the slide boat 1, and the connecting rods passing through the second plug-in protrusions 220 further strengthen the connection stability between the support 200 and the graphite blocks 110, reducing the possibility of connection loosening or failure, thereby improving the reliability and service life of the entire slide boat 1.
[0055] In a possible embodiment, referring to Figure 4 , along the extension direction of the second plug-in protrusion 220, the support 200 is provided with a support protrusion 230 away from the side of the bottom of the slide boat body 100, and the support protrusion 230 is used to contact the ground.
[0056] In this way, the main part of the support 200 can be prevented from directly rubbing and colliding with the ground, thereby reducing the risk of wear and damage of the support 200 and prolonging the service life thereof, and the support protrusion 230 slightly lifts the slide boat body 100, forming a gap between the slide boat body 100 and the ground, which is beneficial to air circulation and helps to dissipate heat and keep dry, which is beneficial to the performance of the slide boat 1 and its internal components, in addition, when the slide boat 1 needs to be moved or carried, the support protrusion 230 can be used as a point of force or lifting point, facilitating the operation of tools or manpower.
[0057] In a possible embodiment, the support 200 includes four, and the four supports 200 are symmetrically arranged near the four corners of the bottom of the slide boat body 100.
[0058] By symmetrically arranging the four supports 200 near the four corners of the bottom of the slide boat body 100, the weight borne by the slide boat 1 can be more evenly distributed on each support point, avoiding the situation that the local force is too large. For example, when the objects placed on the slide boat 1 are unevenly distributed, this symmetrical support can effectively balance the force and prevent the slide boat 1 from tilting or deforming, and the symmetrical support structure can provide stable support in all directions, reducing the shaking and swinging of the slide boat 1 in the horizontal direction. No matter which direction the external force comes from, good stability can be maintained.
[0059] In a possible embodiment, the support 200 is made of ceramic material.
[0060] Since the ceramic has a high resistivity, it can provide excellent insulation effect, effectively prevent current leakage and short circuit, and the ceramic surface is relatively smooth, not easy to adsorb dust and impurities, which helps to keep the working environment of the wafer boat 1 clean, reduces the interference to the discharge process and ensures the electrical safety of the wafer boat 1 in the discharge process. The ceramic can also maintain its physical and chemical properties stable under high temperature environment, and will not deform or lose insulation performance due to high temperature. The ceramic also has high hardness and wear resistance, can withstand long-term use and friction, reduce the wear of the support 200, and prolong its service life. In addition, the ceramic has small size change under temperature change and stress condition, which helps to maintain the precise fit between the support 200 and other components, and ensures the structural stability and performance consistency of the wafer boat 1.
[0061] Of course, the material of the support 200 is not limited to ceramic. For example, the material of the support 200 can also be engineering plastic, glass fiber reinforced plastic, mica, asbestos and other insulating materials. Those skilled in the art should know.
[0062] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the wafer boat of the present application, but not to limit it; although the wafer boat of the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A film carrier boat, characterized in that, include: The substrate carrier body includes a plurality of graphite blocks, among which the plurality of graphite blocks include conductive contacts for electrical connection with a discharge device; A support member, which is made of insulating material, is disposed at the bottom of the substrate boat body, and the side of the support member facing the substrate boat body is in contact with the conductive contact member to provide an insulating barrier for the conductive contact member. The conductive contact and the support are detachably connected. The conductive contact is provided with a first insertion protrusion, and the support is provided with an insertion through hole. The insertion protrusion and the insertion through hole are inserted into each other. The support member is provided with a second insertion protrusion, and the bottom of the graphite block adjacent to the conductive contact member is provided with an insertion groove, and the second insertion protrusion is inserted into the insertion groove.
2. The slide carrier boat according to claim 1, characterized in that, In a first direction, the length of the support member is greater than the length of the conductive contact member, and the first direction is the arrangement direction of the plurality of graphite blocks.
3. The slide carrier boat according to claim 2, characterized in that, Along the first direction, the graphite blocks located on both sides of the conductive contact include a first graphite block and a second graphite block, wherein the first graphite block is the outermost graphite block, and the insertion groove is disposed on the second graphite block.
4. The slide carrier boat according to claim 2, characterized in that, The slide boat also includes a connecting rod that passes sequentially through a plurality of graphite blocks along the first direction and through the second insertion protrusion.
5. The slide carrier boat according to claim 1 or 2, characterized in that, Along the extending direction of the second insertion protrusion, the support member has a support protrusion on the side away from the bottom of the slide boat body, and the support protrusion is used to contact the ground.
6. The slide carrier boat according to claim 1 or 2, characterized in that, The support includes four components, which are symmetrically arranged near the four corners of the bottom of the slide carrier body.
7. The slide carrier boat according to claim 1 or 2, characterized in that, The support component is made of ceramic.