Electrostatic adsorption disc electrifying device

Abstract

The utility model provides an electrostatic adsorption disc electrifying device, which comprises a device body, the device body comprises a plug assembly, an insulation positioning assembly and a fixing assembly, the insulation positioning assembly comprises an insulation block and a positioning seat, the plug assembly comprises a binding post and a self-adaptive plug, and the fixing assembly comprises a mounting block; a positioning through hole is formed in the supporting seat, a mounting hole is coaxially formed above the positioning through hole, and the diameter of the mounting hole is larger than that of the positioning through hole; the insulating block is coaxially arranged in the positioning through hole; the binding post is inserted into the center of the insulating block and penetrates out of the insulating block from the bottom end; the positioning seat is coaxially sleeved above the binding post; the mounting block is arranged in the mounting hole to press and fix the insulating block and the positioning seat; the self-adaptive plug is connected with the binding post from the upper part; an insertion hole corresponding to the positioning through hole is formed in the bottom surface of the electrostatic adsorption disc, a power-on interface is formed in the insertion hole, and when the supporting seat is mounted below the electrostatic adsorption disc, the self-adaptive plug is correspondingly inserted into the power-on interface.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field especially relates to a static adsorption disc power device. BACKGROUND

[0002] In the semiconductor technology, the wafer etching process, usually in etching process cavity sets up static adsorption disc to fix wafer, the current etching process cavity static adsorption disc power device setting is not reasonable, cannot be reliable fixed, possibly lead to tip discharge, there is the risk of voltage breakdown grounding conductivity, there is also the problem of inaccurate positioning when equipment recovery after dismantling and overhaul, voltage breakdown grounding conductivity is easy to cause damage to static adsorption disc and make it lose its adsorption function, inaccurate positioning when equipment recovery after dismantling and overhaul is easy to cause the failure of the plug-in of power plug, cause the damage of power plug. Therefore, it is necessary to provide a static adsorption disc power device. UTILITY MODEL CONTENTS

[0003] The utility model provides a static adsorption disc power device, optimization structure realizes the accurate positioning and good fixation of plug assembly.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A static adsorption disc power device, including the device body, the device body is installed in the support seat and is inserted to connect static adsorption disc, the device body includes plug assembly, insulating positioning assembly and fixed assembly, the insulating positioning assembly includes insulating block and positioning seat, the plug assembly includes binding post and self -adaptation plug, the fixed assembly includes mounting block, the support seat is provided with positioning through -hole, the positioning through -hole is provided with mounting hole coaxially above, the diameter of mounting hole is greater than the diameter of positioning through -hole, the insulating block is coaxially arranged in the positioning through -hole, the binding post is inserted into the center of insulating block and is worn out insulating block at the bottom end, the positioning seat is coaxially sleeved on the binding post and is pressed to insulating block, the mounting block is arranged in the mounting hole and is coaxially sleeved on the outside of insulating block and positioning seat, the mounting block is fixedly connected with the support seat and is pressed and fixed with insulating block and positioning seat, the self -adaptation plug is connected with the binding post from above, the static adsorption disc bottom surface is provided with the insertion hole corresponding with the positioning through -hole, the insertion hole is provided with power interface, when the support seat is installed below static adsorption disc, the self -adaptation plug is inserted into the power interface correspondingly.

[0006] Preferably, the insulating positioning assembly further includes a positioning sleeve, the top end of the positioning sleeve is inserted into the positioning through-hole from the bottom of the support seat, and the positioning sleeve coaxially covers the bottom end of the insulating block and the bottom end of the binding post.

[0007] Preferably, the fixing assembly further comprises a pressing block, an inner wall of a bottom end of the positioning sleeve is provided with a mounting groove, and the pressing block is coaxially arranged in the mounting groove and sleeved at an outer bottom end of the terminal post.

[0008] Preferably, when the mounting block is mounted into the mounting hole, a top surface of the mounting block is flush with a top surface of the supporting seat.

[0009] Preferably, the top surface of the mounting block is provided with a sealing groove, and a sealing ring is arranged in the sealing groove, so that the mounting block and the electrostatic adsorption disc are sealed.

[0010] Preferably, the self-adapting plug comprises an insertion section, an intermediate section and a connecting section arranged in sequence, an outer diameter of the intermediate section is greater than those of the insertion section and the connecting section, the connecting section is provided with external threads, an inner hole of the terminal post is provided with internal threads matched with the external threads, and the self-adapting plug is connected with the terminal post by screwing the connecting section into the inner hole.

[0011] Preferably, when the self-adapting plug is connected with the terminal post, a bottom surface of the intermediate section is in contact with the positioning seat, and a top surface of the intermediate section is slightly lower than the top surface of the mounting block.

[0012] Preferably, an outer wall of an upper portion of the terminal post is provided with a first positioning protrusion, a top surface of the first positioning protrusion is flush with a top surface of the insulating block when the terminal post is mounted into the insulating block, and a bottom surface of the positioning seat is in contact with the top surface of the first positioning protrusion and the top surface of the insulating block when the positioning seat is mounted to the terminal post.

[0013] Preferably, an inner wall of the positioning seat is provided with a second positioning protrusion, and a bottom surface of the second positioning protrusion is in contact with a top surface of the terminal post when the positioning seat is mounted to the terminal post.

[0014] Preferably, the mounting block, the positioning seat, the insulating block and the supporting seat are all made of insulating material.

[0015] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0016] For example, electrostatic chucking disc power supply device, including device body, device body is installed in support seat and is inserted to connect electrostatic chucking disc;Device body includes plug assembly, insulating positioning assembly and fixing assembly, insulating positioning assembly includes insulating block and positioning seat, plug assembly includes binding post and self-adapting plug, fixing assembly includes mounting block;Support seat is provided with positioning through hole, positioning through hole is provided with mounting hole coaxially above, the diameter of mounting hole is greater than the diameter of positioning through hole;Insulating block is coaxially arranged in positioning through hole, binding post is inserted into the center of insulating block and passes through insulating block at the bottom end;Positioning seat is coaxially sleeved above binding post and is pressed tightly to insulating block, mounting block is arranged in mounting hole and is coaxially sleeved outside insulating block and positioning seat, mounting block is fixedly connected with support seat and is pressed tightly fixed insulating block and positioning seat;Self-adapting plug is connected with binding post from above;The bottom surface of electrostatic chucking disc is provided with insertion hole corresponding to positioning through hole, and power supply interface is arranged in the insertion hole, when support seat is installed below electrostatic chucking disc, self-adapting plug is inserted into power supply interface correspondingly;Through insulating positioning assembly, accurate positioning and reliable insulation of plug assembly are realized, through fixing assembly, good fixation of plug assembly is realized;The service life is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the electrostatic chucking disc power supply device using schematic diagram in the embodiment of the utility model;

[0018] Figure 2 It is the electrostatic chucking disc power supply device structure schematic diagram in the embodiment of the utility model.

[0019] Mark explanation:

[0020] 1-electrostatic chucking disc;11-power supply interface;12-insertion hole;

[0021] 2-support seat;

[0022] 3-device body;31-plug assembly;311-binding post;312-self-adapting plug;32-insulating positioning assembly;321-insulating block;322-positioning seat;323-positioning sleeve;33-fixing assembly;331-mounting block;332-pressing block;333-sealing ring. Specific implementation

[0023] In order to make the purpose, feature and beneficial effect of the utility model more obvious and easy to understand, the specific implementation of the utility model is described in detail below combined with the drawings.It can be understood that the following specific implementation is only used for explaining the utility model, and is not limited to the utility model.And, the same, similar signs in the drawing can be used to refer to the same, similar elements in different embodiments, and the description of the same, similar elements in different embodiments and the description of prior art elements, features, effects, etc.may be omitted.

[0024] Figure 1 is a power-on device using schematic view of the electrostatic chucking disc in the embodiment of the utility model; Figure 2 is a power-on device structure schematic view of the electrostatic chucking disc in the embodiment of the utility model.

[0025] Referring to Figure 1 and Figure 2 , the utility model provides a kind of electrostatic chucking disc power-on device.

[0026] Specifically, electrostatic chucking disc power-on device, including device body 3, device body 3 is installed in support seat 2 and is inserted to connect electrostatic chucking disc 1;Device body 3 includes plug assembly 31, insulating positioning assembly 32 and fixed assembly 33, insulating positioning assembly 32 includes insulating block 321 and positioning seat 322, plug assembly 31 includes binding post 311 and self-adapting plug 312, fixed assembly 33 includes mounting block 331;Positioning through-hole is provided in support seat 2, and mounting hole is coaxially provided above positioning through-hole, and the diameter of mounting hole is greater than the diameter of positioning through-hole;Insulating block 321 is coaxially arranged in positioning through-hole, and binding post 311 is inserted into the center of insulating block 321 and is penetrated out of insulating block 321 at bottom end;Positioning seat 322 is coaxially sleeved above binding post 311 and is pressed to insulating block 321, mounting block 331 is arranged in mounting hole and is coaxially sleeved outside insulating block 321 and positioning seat 322, and mounting block 331 is fixedly connected with support seat 2 by bolt and is pressed and fixed insulating block 321 and positioning seat 322;Self-adapting plug 312 is connected with binding post 311 from above;Electrostatic chucking disc 1 bottom surface is provided with insertion hole 12 corresponding with positioning through-hole, and power-on interface 11 is provided in insertion hole 12, when support seat 2 is installed below electrostatic chucking disc 1, self-adapting plug 312 is inserted into power-on interface 11 correspondingly.Insulating block 321 and positioning seat 322 realize coaxial reliable positioning of binding post 311, mounting block 331 is reliably fixed after realizing multilayer structure whole compression with insulating block 321 and positioning seat 322, and the overall size of device body 3 is reduced, self-adapting plug 312 and power-on interface 11 reliably contact in large area, avoid sharp tip discharge, reduce the risk of voltage breakdown grounding conduction.

[0027] In some embodiments, insulating positioning assembly 32 further includes positioning sleeve 323, the top end of positioning sleeve 323 is inserted into positioning through-hole from the bottom of support seat 2, positioning sleeve 323 is coaxially covered outside the bottom end of insulating block 321 and the bottom end of binding post 311, further strengthen the coaxial positioning of binding post 311 and positioning through-hole, positioning is more accurate, guarantee the vertical setting of plug assembly 31, avoid self-adapting plug 312 being bent after being assembled to electrostatic chucking disc 1.

[0028] In some embodiments, the fixing assembly 33 further comprises a pressing block 332, the inner wall of the bottom end of the positioning sleeve 323 is provided with a mounting groove, the pressing block 332 is coaxially arranged in the mounting groove, and the pressing block 332 is sleeved outside the bottom end of the connecting post 311. The pressing block 332 protects the tail part of the connecting post 311.

[0029] In some embodiments, when the mounting block 331 is installed into the mounting hole, the top surface of the mounting block 331 is flush with the top surface of the supporting seat 2, so that when the supporting seat 2 is installed to the electrostatic chuck 1, the mounting block 331 is tightly attached to the electrostatic chuck 1.

[0030] In some embodiments, the top surface of the mounting block 331 is provided with a sealing groove, and a sealing ring 333 is arranged in the sealing groove. The sealing ring 333 realizes the sealing of the mounting block 331 and the electrostatic chuck 1.

[0031] In some embodiments, the adaptive plug 312 comprises an insertion section, an intermediate section and a connecting section arranged in sequence. The outer diameter of the intermediate section is greater than the outer diameter of the insertion section and the connecting section. The connecting section is provided with external threads. The inner hole of the connecting post 311 is provided with internal threads matched with the external threads. The adaptive plug 312 is connected to the connecting post 311 by screwing the connecting section into the inner hole.

[0032] In some embodiments, when the adaptive plug 312 is connected to the connecting post 311, the bottom surface of the intermediate section is in contact with the positioning seat 322, and the top surface of the intermediate section is slightly lower than the top surface of the mounting block 331.

[0033] In some embodiments, the outer wall of the upper part of the connecting post 311 is provided with a first positioning protrusion. When the connecting post 311 is installed into the insulating block 321, the top surface of the first positioning protrusion is flush with the top surface of the insulating block 321. When the positioning seat 322 is installed to the connecting post 311, the bottom surface of the positioning seat 322 is in contact with the top surface of the first positioning protrusion and the top surface of the insulating block 321. The inner wall of the positioning seat 322 is provided with a second positioning protrusion. When the positioning seat 322 is installed to the connecting post 311, the bottom surface of the second positioning protrusion is in contact with the top surface of the connecting post 311. Multi-layer pressing and fixing are realized.

[0034] In some embodiments, the mounting block 331, the positioning seat 322, the insulating block 321 and the supporting seat 2 are all made of insulating materials.

[0035] Specifically, the electrostatic chuck power supply device provided by the utility model has the following installation process:

[0036] Step 1: The supporting seat 2 is installed, and enough installation space is left below the positioning through hole of the supporting seat 2.

[0037] Step 2: Place the insulating block 321 into the positioning hole of the support base 2 from above, and then place the terminal post 311 in the center of the insulating block 321, and slowly place the terminal post 311 vertically so that the top surface of the first positioning protrusion is flush with the top surface of the insulating block 321;

[0038] Step 3: Place the positioning seat 322 on the top of the terminal post 311, and then place the mounting block 331 on the positioning seat 322 and outside the insulating block 321, so that the bottom surface of the mounting block 331 contacts the bottom surface of the mounting hole of the support base 2; lock the mounting block 331 to the support base 2 with screws, so that the mounting block 331 is flush with the top surface of the support base 2;

[0039] Step 4: Tighten the self-adaptive plug 312 into the terminal post 311;

[0040] Step 5: Place the sealing ring 323 into the sealing groove of the mounting block 331; press the power interface 11 into the insertion hole 12 of the electrostatic chuck 1; place the electrostatic chuck 1 on the top of the support base 2, and the insertion hole 12 is coaxially arranged corresponding to the positioning hole, and the self-adaptive plug 312 is inserted into the power interface 11; at the same time, the mounting block 331 is sealingly connected with the contact surface of the electrostatic chuck 1, and subsequent operation in a vacuum state can be realized;

[0041] Step 6: Insert the positioning sleeve 323 into the positioning hole of the support base 2 from below, and ensure that the positioning sleeve is coaxial with the positioning hole of the support base 2; place the pressing block 332 into the installation groove of the positioning sleeve 323 from below the support base 2, and lock it with screws, to complete the installation.

[0042] In summary, the electrostatic adsorption disc power supply device, comprising a device body 3, the device body 3 is installed in the support seat 2 and is inserted into the electrostatic adsorption disc 1, the device body 3 includes plug assembly 31, insulating positioning assembly 32 and fixed assembly 33, the insulating positioning assembly 32 includes insulating block 321 and positioning seat 322, the plug assembly 31 includes binding post 311 and adaptive plug 312, the fixed assembly 33 includes mounting block 331, the support seat 2 is provided with positioning through hole, the positioning through hole is provided with mounting hole coaxially above, the diameter of the mounting hole is greater than the diameter of the positioning through hole, the insulating block 321 is coaxially arranged in the positioning through hole, the binding post 311 is inserted into the center of the insulating block 321 and is penetrated through the insulating block 321 at the bottom end, the positioning seat 322 is coaxially sleeved above the binding post 311 and is pressed tightly to the insulating block 321, the mounting block 331 is arranged in the mounting hole and is coaxially sleeved outside the insulating block 321 and the positioning seat 322, the mounting block 331 is fixedly connected with the support seat 2 by bolts to press and fix the insulating block 321 and the positioning seat 322, the adaptive plug 312 is connected with the binding post 311 from above, the electrostatic adsorption disc 1 bottom is provided with the insertion hole 12 corresponding to the positioning through hole, the insertion hole 12 is provided with the power supply interface 11, when the support seat 2 is installed below the electrostatic adsorption disc 1, the adaptive plug 312 is inserted into the power supply interface 11 correspondingly, the accurate positioning and good fixation of the plug assembly 31 are realized.

[0043] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The features provided in the present disclosure are intended to be illustrative rather than limiting, unless otherwise specified. In a specific implementation, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and can be combined by any appropriate means rather than only by the specific combinations listed in the claims, as long as it is technically feasible.

[0044] Although the present disclosure has been described as above, the present disclosure is not limited thereto. Any person skilled in the art can make various modifications and modifications without departing from the spirit and scope of the present disclosure, and therefore the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. An electrostatic adsorption disk energizing device, characterized in that, The device includes a main body, which is mounted in a support base and inserted into a connecting electrostatic adsorption tray. The main body comprises a plug assembly, an insulating positioning assembly, and a fixing assembly. The insulating positioning assembly includes an insulating block and a positioning base. The plug assembly includes a terminal block and an adaptive plug. The fixing assembly includes a mounting block. The support base has a positioning through hole, and a mounting hole is coaxially arranged above the positioning through hole, the diameter of which is larger than the diameter of the positioning through hole. The insulating block is coaxially arranged in the positioning through hole, and the terminal block is inserted into the center of the insulating block and protrudes from its bottom end. The insulating block is described above; the positioning seat is coaxially sleeved above the terminal block and presses it against the insulating block; the mounting block is disposed in the mounting hole and coaxially sleeved outside the insulating block and the positioning seat; the mounting block is fixedly connected to the support base to press and fix the insulating block and the positioning seat; the adaptive plug is connected to the terminal block from above; the bottom surface of the electrostatic adsorption tray is provided with an insertion hole corresponding to the positioning through hole, and the insertion hole is provided with a power interface; when the support base is installed below the electrostatic adsorption tray, the adaptive plug is inserted into the power interface accordingly.

2. The electrostatic adsorption disk energizing device according to claim 1, characterized in that, The insulating positioning assembly further includes a positioning sleeve, the top end of which is inserted into the positioning through hole from the bottom of the support base, and the positioning sleeve coaxially covers the bottom end of the insulating block and the bottom end of the terminal block.

3. The electrostatic adsorption disk energizing device according to claim 2, characterized in that, The fixing component also includes a clamping block. The inner wall of the bottom end of the positioning sleeve is provided with a mounting groove. The clamping block is coaxially disposed in the mounting groove and is sleeved outside the bottom end of the terminal block.

4. The electrostatic adsorption disk energizing device according to claim 1, characterized in that, When the mounting block is installed into the mounting hole, the top surface of the mounting block is flush with the top surface of the support base.

5. The electrostatic adsorption disk energizing device according to claim 4, characterized in that, The top surface of the mounting block is provided with a sealing groove, and a sealing ring is provided in the sealing groove. The sealing ring achieves the sealing between the mounting block and the electrostatic adsorption plate.

6. The electrostatic adsorption disk energizing device according to claim 1, characterized in that, The adaptive plug includes an insertion section, an intermediate section, and a connecting section arranged sequentially. The outer diameter of the intermediate section is larger than the outer diameters of the insertion section and the connecting section. The connecting section is provided with an external thread, and the inner hole of the terminal block is provided with an internal thread that matches the external thread. The adaptive plug is screwed into the inner hole through the connecting section to connect to the terminal block.

7. The electrostatic adsorption disk energizing device according to claim 6, characterized in that, When the adaptive plug is connected to the terminal block, the bottom surface of the middle section contacts the positioning seat, and the top surface of the middle section is slightly lower than the top surface of the mounting block.

8. The electrostatic adsorption disk energizing device according to claim 1, characterized in that, The upper outer wall of the terminal block is provided with a first positioning protrusion. When the terminal block is installed into the insulating block, the top surface of the first positioning protrusion is flush with the top surface of the insulating block. When the positioning seat is installed into the terminal block, the bottom surface of the positioning seat contacts the top surface of the first positioning protrusion and the top surface of the insulating block.

9. The electrostatic adsorption disk energizing device according to claim 8, characterized in that, The inner wall of the positioning seat is provided with a second positioning protrusion. When the positioning seat is installed on the terminal block, the bottom surface of the second positioning protrusion contacts the top surface of the terminal block.

10. The electrostatic adsorption disk energizing device according to claim 1, characterized in that, The mounting block, the positioning seat, the insulating block, and the support seat are all made of insulating material.

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