Clamping mechanism suitable for Foup
By designing a clamping mechanism suitable for Foup, the problems of shaking and oxidation during the inflation process were solved, achieving a stable inflation effect and safety.
Patent Information
- Application Number
- CN202423237508.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Existing Foup inflation equipment with excessive flow can cause shaking and tipping, posing safety hazards, and cannot effectively prevent wafer oxidation reactions.
A clamping mechanism for Foup was designed, including an inflatable chassis, a carrier base, a clamping through hole, and a clamping cylinder. The fixing element driven by the clamping cylinder grips the carrier base to ensure inflation stability.
By firmly gripping the Foup, it prevents shaking and being blown away by strong airflow, improving inflation efficiency, avoiding safety accidents, and extending wafer fabrication time.
Smart Images
Figure CN223712747U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a clamping mechanism suitable for Foup. Background Technology
[0002] As semiconductor manufacturing processes advance, the carriers (foups) used to transport wafers require stricter control over humidity and oxygen levels to minimize contact between the wafers and oxygen / humidity, thus preventing oxidation. Nitrogen purging of the foam is currently the most critical process, and equipment for this purpose is becoming essential in the wafer manufacturing industry.
[0003] During wafer manufacturing, the wafer transport carriers—foups—placed on the OHB (Outer Halo Booth) racks need to be purged with nitrogen to prevent oxidation caused by prolonged placement on the OHB racks and to avoid extending wafer processing time. However, currently, all equipment used for purging on the OHB racks—UTS (Underlying Technology System)—can only purge the foams with a small flow rate (<50L / Min). Excessive purge flow rate can cause the foams to vibrate, potentially blowing them away and causing them to tip over, resulting in significant accidents and losses.
[0004] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of clamping mechanism suitable for Foup, making it more valuable for industrial use. Utility Model Content
[0005] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a clamping mechanism suitable for Foup.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] A clamping mechanism for Foup includes an inflatable chassis with an inflation nozzle connected to it. A carrier base is connected to the inflatable chassis, and a wafer carrier communicating with the inflation nozzle is connected to the carrier base. The inflatable chassis has a first clamping through-hole, and the carrier base has a second clamping through-hole opposite to the first. A clamping bracket is connected to the bottom of the inflatable chassis, and a recess is provided in the middle of the clamping bracket. A return-to-position detection sensor is connected to the recess. A clamping cylinder is connected to the bottom of the clamping bracket, and the drive shaft of the clamping cylinder is connected to a fixing member. The fixing member passes sequentially through the second and first clamping through-holes and connects to a clamping block on the carrier base. A sensing plate cooperating with the return-to-position detection sensor is connected to the fixing member.
[0008] Preferably, in the clamping mechanism applicable to Foup, the clamping cylinder is a planar rotary clamping cylinder.
[0009] Preferably, in the clamping mechanism for Foup, the fixing component includes a fixing connecting tube and a hook, the fixing connecting tube is connected to the drive shaft of the clamping cylinder, the hook is connected to the top of the fixing connecting tube, and the hook and the fixing connecting tube are in a T-shaped structure.
[0010] Preferably, in the clamping mechanism suitable for Foup, the second clamping through hole and the first clamping through hole are rectangular through holes.
[0011] Preferably, in the clamping mechanism for Foup, the clamping block protrudes from the carrier base and contacts and connects with the rotated pawl.
[0012] By means of the above solution, this utility model has at least the following advantages:
[0013] This invention can firmly grip the inflatable base, preventing the Foup from shaking or being blown away by strong air currents, thus improving the inflation effect of the Foup.
[0014] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 This is a schematic diagram of the structure of this utility model;
[0017] Figure 2 This is a top view of the vehicle base of this utility model. Detailed Implementation
[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0019] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0020] Example
[0021] like Figure 1 and Figure 2 As shown, a clamping mechanism suitable for Foup includes an inflatable chassis 1, an inflation nozzle connected to the inflatable chassis 1, a carrier base 2 connected to the inflatable chassis 1, a wafer carrier 3 connected to the carrier base 2 and communicating with the inflation nozzle, a first clamping through hole 4 formed on the inflatable chassis 1, a second clamping through hole 5 connected to the carrier base 2, the second clamping through hole 5 being opposite to the first clamping through hole 4, a clamping bracket 6 connected to the bottom of the inflatable chassis 1, a recess 7 provided in the middle of the clamping bracket 6, a return detection sensor 8 connected to the recess 7, a clamping cylinder 9 connected to the bottom of the clamping bracket 6, a drive shaft of the clamping cylinder 9 being connected to a fixing member 10, the fixing member 10 passing sequentially through the second clamping through hole 5 and the first clamping through hole 4 and connected to a clamping block on the carrier base 2, and a sensing plate 11 cooperating with the return detection sensor 8 connected to the fixing member 10.
[0022] The clamping cylinder 9 described in this utility model is a planar rotary clamping cylinder.
[0023] The fixing component 10 described in this utility model includes a fixing connecting pipe 13 and a hook 14. The fixing connecting pipe 13 is connected to the drive shaft of the clamping cylinder 9, and the hook 14 is connected to the top of the fixing connecting pipe 13. The hook 14 and the fixing connecting pipe 13 form a T-shaped structure. The T-shaped fixing component can grip the base of the vehicle.
[0024] In this utility model, the second clamping through hole 5 and the first clamping through hole 4 are rectangular through holes. The clamping block protrudes from the carrier base 2 and contacts and connects with the rotated hook 14, which can realize the installation and the fixed connection of the carrier base at the same time.
[0025] The working principle of this utility model is as follows:
[0026] During operation, the cylinder is controlled by the solenoid valve to control the air circuit. When the hook is in the released state, the inflatable chassis and the carrier base are in normal connection. At this time, the wafer carrier (Foup) is connected to the carrier base. When the Foup releases the goods, the hook starts to move. The fixing part rotates under the action of the clamping cylinder. After being sensed by the sensor and the sensor chip, the hook hooks and pulls the carrier base.
[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0028] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0029] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0030] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0031] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.
Claims
1. A clamping mechanism for Foup, comprising an inflatable chassis (1), an inflation nozzle connected to the inflatable chassis (1), a carrier base (2) connected to the inflatable chassis (1), and a wafer carrier (3) connected to the carrier base (2) and communicating with the inflation nozzle, characterized in that: The inflatable chassis (1) has a first clamping through hole (4), and the carrier base (2) has a second clamping through hole (5). The second clamping through hole (5) is opposite to the first clamping through hole (4). The bottom of the inflatable chassis (1) is connected to a clamping bracket (6). The middle part of the clamping bracket (6) has a notch (7). The notch (7) is connected to a return detection sensor (8). The bottom of the clamping bracket (6) is connected to a clamping cylinder (9). The drive shaft of the clamping cylinder (9) is connected to a fixing member (10). The fixing member (10) passes through the second clamping through hole (5) and the first clamping through hole (4) in sequence and is connected to the clamping block on the carrier base (2). The fixing member (10) is connected to a sensing plate (11) that cooperates with the return detection sensor (8).
2. The clamping mechanism for Foup according to claim 1, characterized in that: The clamping cylinder (9) is a planar rotary clamping cylinder.
3. A clamping mechanism suitable for Foup according to claim 1, characterized in that: The fixing component (10) includes a fixing connecting pipe (13) and a hook (14). The fixing connecting pipe (13) is connected to the drive shaft of the clamping cylinder (9). The hook (14) is connected to the top of the fixing connecting pipe (13). The hook (14) and the fixing connecting pipe (13) have a T-shaped structure.
4. A clamping mechanism suitable for Foup according to claim 1, characterized in that: The second clamping through hole (5) and the first clamping through hole (4) are rectangular through holes.
5. A clamping mechanism suitable for Foup according to claim 1, characterized in that: The clamping block protrudes from the carrier base (2) and contacts and connects with the rotated hook (14).