Wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-jet

Abstract

The utility model provides a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-jet, and relates to the technical field of photoetching equipment for manufacturing integrated circuits. Comprising an electromagnetic micro-spraying valve, and two electrode stems externally connected with a power supply are arranged in the electromagnetic micro-spraying valve; electrifying metal wires are arranged on the two opposite sides of the electromagnetic micro-spraying valve, and the electrifying metal wires are suitable for being connected with a high-change power supply to generate a high-frequency alternating magnetic field so as to heat metal liquid in the electromagnetic micro-spraying valve. According to the scheme, a high-frequency alternating magnetic field can be generated by quickly changing the electrifying direction of the wire, so that the metal liquid generates induced electromotive force, and an eddy current is further generated to achieve the effect of heating the metal liquid.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit manufacturing photoetching equipment technical field, specifically, relate to a kind of based on liquid metal electromagnetic micro-jet's wire magnetic field and self-heating integrated device. BACKGROUND

[0002] Currently, mainstream non-contact liquid droplet ejection technology is mainly liquid metal electromagnetic micro-jet technology. When a proper electric field and magnetic field are applied near the liquid metal, the charged particles in the liquid metal will be affected by force according to the Lorentz force law, causing the liquid metal to move and form a micro-jet.

[0003] Metal droplets need to be heated to maintain temperature, which is often achieved by heating sheets. The magnetic field of general electromagnetic micro-jet technology is constructed by magnets. Since different metals need to be kept in a liquid state at a relatively high temperature, high temperature can easily cause the magnetic domain structure of the magnet to become chaotic, reducing its magnetic properties. Even after the temperature decreases, the magnetic properties may not return to their original level. For example, patent CN202010205620.4 discloses an electromagnetic-constrained aluminum alloy component micro-droplet ejector, which has a heater interface that ensures a constant temperature for the internal liquid aluminum alloy, preventing it from condensing into a solid and facilitating temperature control inside the ejector housing. However, the use of magnets to construct the magnetic field can weaken the magnetism of the heater device. SUMMARY

[0004] The utility model discloses a kind of based on liquid metal electromagnetic micro-jet's wire magnetic field and self-heating integrated device, to solve the problem mentioned above.

[0005] The utility model has adopted the following scheme:

[0006] A kind of based on liquid metal electromagnetic micro-jet's wire magnetic field and self-heating integrated device, including electromagnetic micro-jet valve, two electrode rods of external power supply are provided in the electromagnetic micro-jet valve;The two sides opposite of the electromagnetic micro-jet valve are provided with electrified metal wire, the electrified metal wire is suitable for connecting high variable power supply to generate high-frequency alternating magnetic field when the direction of electrification is changed, to further heat the metal liquid inside the electromagnetic micro-jet valve.

[0007] Further, a through head suitable for metal liquid inflow is provided above the electromagnetic micro-jet valve, one end of the through head is provided with a through head external thread for connection on the electromagnetic micro-jet valve, and the other end is provided with a through head internal thread for connection with a metal liquid input pipeline.

[0008] Further, the electrified metal wire is provided with multiple turns in parallel and is fixed outside the electromagnetic micro-jet valve.

[0009] Further, the electromagnetic micro-injection valve is provided with a fixed block outside, and the fixed block is provided with parallel arranged wire slots for fixing the electrified metal wire.

[0010] Further, the electrode rod is provided with external threads for fixed connection on the electromagnetic micro-injection valve, and a connecting rod is arranged at the outer end of the electrode rod for external power supply.

[0011] Further, the electrified metal wire is formed in a shape of a Chinese character " " by bending to be arranged on both sides of the electromagnetic micro-injection valve.

[0012] Further, the electrode rod and the valve body of the electromagnetic micro-injection valve are provided with a sealing washer.

[0013] Beneficial effects:

[0014] The scheme generates a magnetic field by electrifying a wire to replace a magnetic field constructed by a traditional magnet, and generates a high-frequency alternating magnetic field by rapidly changing the electrification direction of the wire, and the high-frequency alternating magnetic field generates an induced electromotive force and an eddy current in the metal liquid, so that self-heating is realized, that is, the magnetic field is generated by the two electrode rods cooperating with the electrified metal wire arranged outside the electromagnetic micro-injection valve to generate heat, which can replace the existing magnet and heating block, avoids the influence of magnet high-temperature demagnetization on the stability of the magnetic field, and improves the stability and reliability of the liquid metal electromagnetic micro-injection. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a cross-sectional structure schematic view of a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection according to an embodiment of the utility model;

[0016] Figure 2 is a wire structure schematic view of a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection according to an embodiment of the utility model;

[0017] Figure 3 is a valve body structure schematic view of a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection according to an embodiment of the utility model;

[0018] Figure 4 is a cross-sectional structure schematic view of a valve body of a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection according to an embodiment of the utility model;

[0019] Figure 5 is a wire structure schematic view of a wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection according to an embodiment of the utility model;

[0020] Figure 6It is the fixed block structure schematic view of the embodiment of the utility model based on liquid metal electromagnetic micro - spray's wire magnetic field and self - heating integrated device;

[0021] Figure 7 It is the electrode pole structure schematic view of the embodiment of the utility model based on liquid metal electromagnetic micro - spray's wire magnetic field and self - heating integrated device;

[0022] Figure 8 It is the power - on direction and corresponding magnetic field direction schematic view of the embodiment of the utility model based on liquid metal electromagnetic micro - spray's wire magnetic field and self - heating integrated device;

[0023] Figure 9 It is the overall structure schematic view of the embodiment of the utility model based on liquid metal electromagnetic micro - spray's wire magnetic field and self - heating integrated device;

[0024] Figure 10 It is the exploded view schematic view of the embodiment of the utility model based on liquid metal electromagnetic micro - spray's wire magnetic field and self - heating integrated device;

[0025] Icon: electrode pole 1, connecting rod 11, electrode pole outer thread 12, sealing washer 2, through head 3, through head outer thread 32, through head inner thread 31, fixed block 4, wire slot 41, electromagnetic micro - spray valve 5, mounting hole 51, input 52, output 54, chamber 53, power - on metal wire 6. DETAILED DESCRIPTION

[0026] Combination Figures 1 to 10 As shown in the figure, the embodiment provides a kind of wire magnetic field and self - heating integrated device based on liquid metal electromagnetic micro - spray, including electromagnetic micro - spray valve 5, the electrode pole 1 of two external power supply being provided in the electromagnetic micro - spray valve 5;The opposite sides of the electromagnetic micro - spray valve 5 are equipped with power - on metal wire 6, and the power - on metal wire 6 is suitable for connecting high variable power supply to generate high frequency alternating magnetic field when the direction of power on is transformed, to further heat the metal liquid in the electromagnetic micro - spray valve 5.

[0027] Combination Figures 1 to 5As shown in the figure, in this embodiment, the electromagnetic micro-spray valve 5 includes a valve body. A chamber 53 is formed inside the valve body. A metal liquid inlet 52, a metal liquid outlet 54, and a mounting hole 51 for the electrode rod 1 are provided on the valve body. The metal liquid inlet 52 is connected to a connector 3 suitable for the inflow of metal liquid. One end of the connector 3 is provided with an external thread 32 of the connector for connecting to the electromagnetic micro-spray valve 5, and the other end is provided with an internal thread 31 of the connector for connecting to a metal liquid input pipe. The metal liquid outlet 54 can be connected to an existing liquid spraying component. The electrode rod 1 is provided with an external thread 12 of the electrode rod for fixedly connecting to the electromagnetic micro-spray valve 5, and a connecting rod 11 is provided at the outer end of the electrode rod 1 for connecting to an external power supply. The electrode rod 1 is connected to the valve body of the electromagnetic micro-spray valve 5 by a threaded connection, which is convenient for installation. A sealing washer 2 is provided on the surface where the electrode rod 1 contacts the electromagnetic micro-spray valve 5. The sealing washer 2 can prevent metal droplets from overflowing from the connection of the electrode rod 1. The sealing washer 2 can also undergo elastic deformation under pressure and closely fit between the connection surfaces, thereby effectively preventing fluid leakage.

[0028] The valve body of the electromagnetic micro-spray valve 5 can be set as a flat cuboid structure. The electrode rod 1 is distributed on the top of the valve body and on both sides of the metal liquid inlet 52.

[0029] Combined with Figures 1 to 10 As shown in the figure, the energized metal wires 6 are distributed on the valve body of the electromagnetic micro-spray valve 5 and are parallelly distributed on opposite sides. In this embodiment, the energized metal wires 6 are arranged on the narrow surface of the flat cuboid structure, so that the magnetic field generated by a smaller number of turns of the energized metal wires 6 can cover the entire electromagnetic micro-spray valve 5. A fixing block 4 is provided outside the electromagnetic micro-spray valve 5. Parallel grooves 41 are provided inside the fixing block 4 for fixing the energized metal wires 6. The energized metal wires 6 can be arranged in multiple parallel turns and are fixed inside the fixing block 4 outside the electromagnetic micro-spray valve 5. Multiple turns of wires can generate a stronger magnetic field. By quickly changing the direction of current flow in the wires to generate a high-frequency alternating magnetic field, more efficient voltage transformation and energy transmission can be achieved. In this embodiment, the energized metal wires 6 are formed into a "冂" shape by bending to be arranged on both sides of the electromagnetic micro-spray valve 5, that is, a set of energized metal wire loops are bent so that a part is located on one side of the valve body of the electromagnetic micro-spray valve 5, a part is located on the other side of the valve body of the electromagnetic micro-spray valve 5, and the remaining part passes above the electrode rod 1 without affecting the operation of the electrode rod 1, and the current directions of the energized metal wires 6 on both sides of the electromagnetic micro-spray valve 5 can be opposite.

[0030] Combined with Figure 10As shown, in working, taking the example that the current-carrying metal wire 6 is electrified from right to left, the liquid metal enters into the cavity of the electromagnetic micro-injection valve 5 through the through hole 3, the current-carrying metal wire 6 is electrified from right to left to form a magnetic field, the electrode rod 1 is electrified to form an electric current from left to right inside the liquid metal, the liquid metal is subjected to electromagnetic force in the electromagnetic field, when a proper electric field and magnetic field are applied near the liquid metal, according to the law of Lorentz force, the charged particles in the liquid metal are subjected to force, so that the liquid metal moves and forms a micro-injection; the high-frequency alternating magnetic field generated by quickly changing the electrification direction of the wire can make the metal liquid generate an induced electromotive force and further form an eddy current, so as to realize the effect of heating the metal liquid, while meeting the magnetic field conditions required by the liquid metal micro-injection, the problem that the metal liquid droplets need to rely on heating pieces to maintain the temperature is ingeniously solved, the device structure is simplified, the device complexity and cost are reduced, and the integration and synergy of the overall technology are improved; the disadvantages that the high temperature required by the liquid metal to maintain the liquid state causes the magnetic domain structure of the magnet to be disordered, the magnetism to be weakened, and it is difficult to restore the original level can be avoided, the stability and persistence of the magnetic field are guaranteed, and the liquid metal electromagnetic micro-injection technology is stable.

[0031] It should be understood that the above are only preferred embodiments of the present application, and the protection scope of the present application is not limited to the above embodiments. Any technical solution falling within the concept of the present application belongs to the protection scope of the present application.

[0032] The above introduction of the drawings used in the embodiments only shows some embodiments of the present application, and should not be regarded as a limitation on the scope, and for ordinary skilled in the art, other related drawings can be obtained from the drawings without creative labor.

Claims

1. A wire magnetic field and self-heating integrated device based on liquid metal electromagnetic micro-injection, comprising an electromagnetic micro-injection valve, characterized in that, The electromagnetic micro-injection valve is provided with two electrode rods connected with external power supply; opposite sides of the electromagnetic micro-injection valve are provided with power supply metal wires which are adapted to be connected with high frequency power supply to generate high frequency alternating magnetic field to heat the metal liquid in the electromagnetic micro-injection valve.

2. The liquid-metal electromagnetically micro-jet based lead field and self-heating integrated device according to claim 1, characterized in that, A through head is arranged above the electromagnetic micro-injection valve and is adapted to flow in the metal liquid; one end of the through head is provided with external thread to be connected with the electromagnetic micro-injection valve, and the other end is provided with internal thread to be connected with the metal liquid input pipeline.

3. The liquid-metal electromagnetically micro-jet based wire magnetic field and self-heating integrated device according to claim 1, characterized in that, The power supply metal wires are arranged in parallel with multiple turns and are fixed on the outside of the electromagnetic micro-injection valve.

4. The liquid-metal electromagnetically micro-jet based lead field and self-heating integrated device according to claim 3, characterized in that, The outside of the electromagnetic micro-injection valve is provided with a fixing block which is provided with wire grooves arranged in parallel to fix the power supply metal wires.

5. The liquid-metal electromagnetically micro-jet based wire magnetic field and self-heating integrated device according to claim 1, characterized in that, The electrode rods are provided with external thread to be fixedly connected with the electromagnetic micro-injection valve, and connecting rods are arranged on the outer ends of the electrode rods to be connected with external power supply.

6. The liquid-metal electromagnetically micro-jet based lead field and self-heating integrated device according to claim 1, wherein, The power supply metal wires are arranged in the shape of " " by bending to be arranged on both sides of the electromagnetic micro-injection valve.

7. The liquid-metal electromagnetically micro-jet based lead field and self-heating integrated device according to claim 1, characterized in that, The electrode rods and the valve body of the electromagnetic micro-injection valve are provided with sealing gaskets.

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