Jig for assisting evaporation table in adding metal source

Abstract

The utility model relates to a jig for assisting an evaporation table in adding a metal source, which is characterized by comprising a cavity, the cavity is detachably connected to coating equipment, a cavity is arranged in the cavity, one side of the cavity is provided with a connecting hole, a rotatable conveying pipe is arranged in the connecting hole, the conveying pipe is used for guiding and conveying the metal source, and the metal source is arranged in the cavity. The conveying pipe can move in the extending direction of the cavity so that the conveying pipe can be close to or away from a crucible in the coating equipment, the two ends of the conveying pipe serve as the feeding end and the discharging end respectively, and a cover body is arranged at the feeding end and used for opening or closing the feeding end. The utility model has the following advantages and effects: the source can be added to the crucible without breaking the vacuum of the coating cavity, and the pollution to the metal source is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field, concretely relates to a jig of metal source is added to auxiliary evaporation station. BACKGROUND

[0002] In the field of vacuum coating, metal source belongs to consumables, and a certain consumption will be caused every time a product is made, so it is necessary to supplement the consumed metal source material into the crucible, which can ensure that the evaporation coating rate, power and the distance from the metal liquid surface after pre-melting of the source material to the umbrella frame are consistent, and the repeatability of the process is ensured.

[0003] When adding the source, the internal crucible needs to be taken out, so the coating chamber needs to be broken to the atmospheric environment, and after the source is added, the crucible is put back into the coating chamber and the vacuum is restored, so the overall machine recovery time is long, and the frequent breaking of the vacuum of the coating chamber will also pollute the environment of the coating chamber to a certain extent.

[0004] Therefore, the Chinese patent technical document with publication number CN209906869U discloses an online adding high melting point metal source device, which comprises: a first bearing structure, which is internally provided with a high melting point metal source and is arranged in a first chamber in a vacuum environment; and a second bearing structure, which is communicated with the first bearing structure through a communication pipe.

[0005] In the above technical solution, when the crucible is added with the source, the solid metal source in the second bearing structure is heated and melted by the coil, and then the liquid metal source can enter the crucible under the action of gravity through the conveying pipe, so as to realize the addition of the source to the crucible. During the process of adding the source, the whole process is in a vacuum state, so it is not necessary to break the vacuum of the coating chamber, and therefore it is not necessary to restore the vacuum of the coating chamber after adding the source, so as to ensure the efficiency of adding the source.

[0006] However, it is found in actual use that the conveying pipe is always lapped on the crucible in the above technical solution, so that the impurities generated by the conveying pipe can easily pollute the metal source in the crucible and affect the subsequent coating quality during long-term use. SUMMARY

[0007] In view of the deficiencies of the prior art, the utility model aims to provide a jig for adding metal source to an auxiliary evaporation station, which can add the source to the crucible without breaking the vacuum of the coating chamber, and avoid polluting the metal source.

[0008] In order to achieve the above object, the utility model provides the following technical scheme: a kind of jig of auxiliary evaporation platform adds metal source, including cavity, the cavity is detachably connected to coating equipment, cavity is equipped with cavity, one side of the cavity is equipped with connecting hole, rotatable conveying pipe is equipped in the connecting hole, the conveying pipe is used to guide metal source and carry, the conveying pipe can move along the extension direction of cavity, so that conveying pipe is close to or away from crucible in coating equipment, two ends of the conveying pipe are used as feeding end and discharge end respectively, the feeding end is equipped with cover, the cover is used to open or close feeding end.

[0009] The utility model further sets up: the conveying pipe includes first connecting section and second connecting section, first connecting section and second connecting section are integrally arranged, the included angle between first connecting section and second connecting section is 125 °, the feeding end is located first connecting section, the second connecting section is located and is equipped with third connecting section on the side away from first connecting section, third connecting section and second connecting section are integrally arranged, the included angle between third connecting section and second connecting section is 125 °, and the discharge end is located third connecting section.

[0010] The utility model further sets up: buffer groove is equipped between first connecting section and second connecting section, and the buffer groove is communicated with the inside of conveying pipe.

[0011] The utility model further sets up: first connecting section is equipped with external thread on the side away from second connecting section, the inner wall of cover is equipped with internal thread, and the cover can be formed screw thread cooperation between first connecting section.

[0012] The utility model further sets up: the outside of cavity is equipped with magnetic fluid sealing pipe opposite connecting hole, magnetic fluid sealing pipe is sleeved on the outer periphery of conveying pipe, and is formed sealing cooperation between conveying pipe.

[0013] The utility model further sets up: the flange plate of cavity is located on the side towards coating equipment, and flange connection is formed between flange plate and coating equipment.

[0014] The utility model further sets up: vacuum joint is equipped on the side away from coating equipment of cavity, and vacuum joint is communicated with cavity.

[0015] Compared with prior art, the utility model has the beneficial effects that:

[0016] By setting the conveying pipe which can move along the extension direction of the cavity in the connecting hole of the cavity, thus, when the crucible in the coating equipment is on-line, the metal source can be sent into the conveying pipe first, then the conveying pipe is pushed towards the direction of the coating equipment, so that the conveying pipe can be close to the crucible in the coating equipment, then the discharge end can be made to face the crucible by rotating the conveying pipe, thus, the metal source in the conveying pipe can slide into the crucible under the action of gravity, so that the crucible does not need to be taken out from the coating cavity of the coating equipment, and the on-line source of the crucible can be completed without breaking the vacuum of the coating cavity, after the source of the crucible is completed, the conveying pipe can be pulled away from the crucible, so that the impurities generated by the aging of the conveying pipe can be avoided from falling into the crucible and polluting the metal source in the crucible during long-term use. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Fig. 2 It is a schematic diagram of the internal structure when the utility model is connected with the coating equipment;

[0019] Fig. 3 It is a schematic diagram of the local enlarged structure of A of the utility model. DETAILED DESCRIPTION

[0020] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0022] As Figs. 1 to 3The utility model discloses a kind of jigs of auxiliary evaporation platform adds metal source, including cavity, cavity is detachably connected in coating equipment, by the detachable design of cavity and coating equipment, it can be convenient to disassemble and assemble overall jig, so, when needing to add source to crucible in the coating cavity of coating equipment, just need to connect jig with coating equipment, and when completing the source of crucible, jig can be also removed, to carry out regular maintenance to jig.

[0023] Specifically, the detachable connection structure between the cavity and the coating equipment is that the cavity is located on the side flange plate facing the coating equipment, so when connecting the cavity and the coating equipment, the flange plate on the cavity can be aligned with the flange plate at the cavity door of the coating equipment, and a flange connection can be formed, so that the detachable connection between the cavity and the coating equipment can be realized.

[0024] In addition, a cavity is provided in the cavity, one side of the cavity is provided with a connecting hole, a conveying pipe is provided in the connecting hole, the connecting hole is for the conveying pipe to pass through, the conveying pipe can rotate in the connecting hole, and the two ends of the conveying pipe are used as the feeding end and the discharging end respectively. The conveying pipe is used to guide and convey the metal source. Specifically, the conveying pipe includes a first connecting section and a second connecting section, the first connecting section and the second connecting section are integrally arranged, the included angle between the first connecting section and the second connecting section is 125°, the feeding end is located on the first connecting section, the second connecting section is provided with a third connecting section on the side away from the first connecting section, the third connecting section is integrally arranged with the second connecting section, the included angle between the third connecting section and the second connecting section is 125°, and the discharging end is located on the third connecting section. By forming the included angle between the first connecting section and the second connecting section and the included angle between the second connecting section and the third connecting section, the conveying pipe as a whole is in a bent shape, so that after rotating the conveying pipe, the discharging end of the conveying pipe can be opposite to the crucible. In this way, gravity can have a greater impact on the metal source in the conveying pipe, so as to ensure that the metal source in the conveying pipe slides under the action of gravity component and slides into the crucible, reducing the residue of the metal source in the conveying pipe.

[0025] In addition, a buffer groove is provided between the first connecting section and the second connecting section, the buffer groove is in communication with the inside of the conveying pipe, and the buffer groove is in a spherical shape. Therefore, after the metal source is sent into the conveying pipe, the metal source can slide into the buffer groove for buffering, so as to improve the conveying amount of the metal source by the conveying pipe, and avoid the metal source from sliding out of the conveying pipe when the discharging end is not opposite to the crucible, so as to ensure the accuracy of adding source.

[0026] In the embodiment, the conveying pipe can move along the extension direction of the cavity, so that the conveying pipe can approach or move away from the crucible in the coating equipment during the feeding process. When it is necessary to feed the crucible in the coating equipment on line, the metal source can be first sent into the conveying pipe, and then the conveying pipe is pushed towards the coating equipment, so that the conveying pipe can approach the crucible in the coating equipment. Then, the discharge end can be directed towards the crucible by rotating the conveying pipe. In this way, the metal source in the conveying pipe can slide into the crucible under the action of gravity, so that the crucible does not need to be taken out of the coating cavity of the coating equipment, and the on-line feeding of the crucible can be completed without breaking the vacuum of the coating cavity. After the feeding of the crucible is completed, the conveying pipe can be pulled away from the crucible, so that the impurities generated by aging of the conveying pipe during long-term use can be prevented from falling into the crucible and polluting the metal source in the crucible.

[0027] In addition, a cover is arranged at the feeding end, and the cover is used to open or close the feeding end. Specifically, an outer thread is arranged on the side of the first connecting section away from the second connecting section, and an inner thread is arranged on the inner wall of the cover. The cover can be threadedly connected with the first connecting section, so that the feeding end can be opened or closed by rotating the cover. In this way, after the metal source is sent into the conveying pipe, the cover can be screwed to prevent external air from entering the cavity cavity through the conveying pipe and affecting the vacuum degree between the cavity and the coating cavity. In addition, it should be noted that a valve for opening or closing the cavity door is arranged at the cavity door of the coating equipment. Therefore, when the cover needs to be unscrewed to open the feeding end, the valve closes the cavity door at this time. In this way, external air can be prevented from entering the coating cavity through the conveying pipe and affecting the vacuum degree in the coating cavity.

[0028] In the embodiment, a magnetic fluid sealing pipe opposite to the connecting hole is further arranged on the outside of the cavity. The magnetic fluid sealing pipe adopts an existing structure, is sleeved on the outer periphery of the conveying pipe, and is in sealing connection with the conveying pipe. The arrangement of the magnetic fluid sealing pipe can ensure the sealing performance of the connection between the conveying pipe and the cavity, so that the leakage between the conveying pipe and the cavity can be prevented when the cavity door is opened, and the vacuum degree in the coating cavity can be affected.

[0029] In the embodiment, a vacuum joint is further arranged on the side of the cavity away from the coating equipment. The vacuum joint is in communication with the cavity. In this way, after the metal source is sent into the conveying pipe and the cover is screwed, the vacuum joint can be externally connected to a vacuumizing device to vacuumize the cavity by the vacuumizing device. In this way, the cavity can be ensured to be in a vacuum state when the metal source in the conveying pipe is subsequently sent into the crucible, so that the vacuum degree of the coating cavity of the coating equipment can be further ensured.

[0030] The implementation principle of the scheme is as follows:

[0031] Firstly, the valve in the coating equipment is closed, and the cavity is connected to the coating equipment, so that the cavity cavity can be opposite to the cavity door of the coating equipment, then the cover is loosened to open the feeding end, and the metal source is sent into the conveying pipe, the metal source can slide into the buffer groove under the action of gravity for storage, then the cover is tightened to close the feeding end, and the external vacuum equipment is connected to the vacuum joint, the cavity is vacuumized by the vacuum equipment, then the cavity door is opened by the valve, and the conveying pipe is pushed to move the conveying pipe towards the crucible in the coating cavity of the coating equipment, when the discharge end is above the crucible, the conveying pipe is rotated to make the discharge end face the crucible, at this time, the metal source in the buffer groove can slide into the crucible under the action of gravity, after the source of the crucible is completed, the conveying pipe is pulled away from the crucible, then the cavity door is closed again by the valve in the coating equipment, and the cover is loosened again to prepare for the source of the next crucible.

[0032] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model. Those skilled in the art can make modifications to the embodiment without creative contribution after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. A jig for assisting a metal source to be added to an evaporation station, characterized by, The cavity is detachably connected to a coating equipment, a cavity is arranged in the cavity, a connecting hole is arranged on one side of the cavity, a rotatable conveying pipe is arranged in the connecting hole, the conveying pipe is used for guiding and conveying a metal source, the conveying pipe can move along the extension direction of the cavity so that the conveying pipe is close to or away from a crucible in the coating equipment, and the two ends of the conveying pipe are used as a feeding end and a discharging end respectively.

2. The metal source adding jig for an auxiliary evaporation station according to claim 1, wherein The conveying pipe comprises a first connecting section and a second connecting section, the first connecting section and the second connecting section are integrally arranged, the included angle between the first connecting section and the second connecting section is 125°, the feeding end is located in the first connecting section, the second connecting section is located on the side away from the first connecting section and is provided with a third connecting section, the third connecting section is integrally arranged with the second connecting section, the included angle between the third connecting section and the second connecting section is 125°, and the discharging end is located in the third connecting section.

3. The metal source adding jig for an auxiliary evaporation station according to claim 2, wherein A buffer groove is arranged between the first connecting section and the second connecting section, and the buffer groove is in communication with the inside of the conveying pipe.

4. The metal source adding jig for an auxiliary evaporation station according to claim 2, wherein An outer thread is arranged on the side of the first connecting section away from the second connecting section, an inner thread is arranged on the inner wall of the cover, and the cover and the first connecting section are in threaded cooperation.

5. The metal source addition jig for an auxiliary evaporation station of claim 1, wherein, A magnetic fluid sealing pipe opposite to the connecting hole is arranged on the outside of the cavity, the magnetic fluid sealing pipe is sleeved on the outer periphery of the conveying pipe and is in sealing cooperation with the conveying pipe.

6. The apparatus of claim 1, wherein the apparatus further comprises a metal source. A flange plate is arranged on the side of the cavity facing the coating equipment, and the flange plate and the coating equipment are in flange connection.

7. The apparatus of claim 1, wherein the apparatus further comprises a metal source. A vacuum joint is arranged on the side of the cavity away from the coating equipment, and the vacuum joint is in communication with the cavity.

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