Clamp for rust removal of sputtering target material and mounting structure

Abstract

The utility model provides a clamp for rust removal of a sputtering target material and a mounting structure. The clamp for rust removal of the sputtering target material comprises a clamp main body and a rotating mechanism arranged at the bottom of the clamp main body, the clamp body comprises a base body, and opposite supporting blocks are arranged on the base body. The supporting blocks are arranged along the outer edge of the base body, a hollow structure is formed between the supporting blocks, and the adjacent ends of the supporting blocks and the base body form a groove structure. Bulges are arranged on the top surface of the supporting block at equal intervals; and the bulges are matched with counter bores of the sputtering target material. According to the clamp, circumferential rotation of the target material is achieved, machining planeness is guaranteed, damage caused by hard contact is eliminated, the target material can be conveniently clamped and moved, the target material is fixed through cooperation of the protrusions and the counter bores, scratches caused by a conventional clamping mode are avoided, and the machining plane is fully exposed. The clamp body is simple in structure, good in operability and machinability and convenient to adapt to different target material specifications.

Description

Technical Field

[0001] This utility model belongs to the field of target manufacturing technology, specifically relating to a fixture and installation structure for rust removal of sputtering targets. Background Technology

[0002] In modern semiconductor manufacturing, optoelectronic device production, and high-precision thin film coating technology, sputtering deposition is an important thin film deposition method widely used in fields such as chips, solar cells, displays, and optical thin films. Sputtering deposition is a physical vapor deposition (PVD) technology in which a target material is physically sputtered under the bombardment of high-energy particles, releasing material atoms or molecules. These atoms or molecules are deposited on the substrate surface to form a thin film. The sputtering target is the core material in the sputtering process, and its performance directly determines the quality and uniformity of the deposited thin film.

[0003] Among these processes, the surface treatment of the target material, especially the rust removal operation, is a crucial step in ensuring the sputtering effect and deposition quality. Rust removal removes surface oxides, rust, and other contaminants to guarantee the target's sputtering performance. Currently, rust removal methods primarily employ mechanical methods such as grinding and sandblasting. These methods generate significant forces, necessitating clamping and securing the target material to ensure optimal processing results.

[0004] CN218363343U discloses a semiconductor target fixture, including a chassis with a convex ring surrounding it. A clamping device is located on the left side of the convex ring, comprising a drive rod and clamping bars. Push blocks, grooves, and bearings are located at both ends of the drive rod. CN214418198U also discloses a target fixture, including a base and clamping teeth disposed on the base. The base is composed of at least three sector-shaped blocks with the same central angle, and the clamping teeth are composed of arc-shaped segments that mate with the sector-shaped blocks. The target fixtures provided by the above-mentioned prior art have several drawbacks. First, their structure is extremely complex, making fixture processing difficult. Second, the contact area between the clamping part and the target is large, failing to fully expose the target processing surface. Furthermore, scratches on the back of the target are easily caused during operation.

[0005] Therefore, based on the problems existing in the current technology, there is a need to provide a target fixture for rust removal processing of sputtering targets. Utility Model Content

[0006] The purpose of this utility model is to provide a fixture and installation structure for rust removal of sputtering targets, which is used for fixing and supporting the targets in the rust removal process of sputtering targets. The structure is simple, and it can fully expose the machined surface of the target and avoid scratches on the non-machined surface.

[0007] To achieve the objective of this utility model, the following technical solution is adopted:

[0008] In a first aspect, the utility model provides a sputtering target rust removal clamp, the sputtering target rust removal clamp includes:

[0009] Clamp main part, and the rotating mechanism who sets up in the bottom of clamp main part;

[0010] The clamp main part includes the base body, opposite support blocks are arranged on the base body;

[0011] The support block is along the outside of the base body and is arranged, and the hollow structure is formed between the support blocks, and the adjacent end of the support block forms the groove structure with the base body;

[0012] The top surface of the support block is provided with equal-interval protrusions, and the protrusions are matched with the counterbore of the sputtering target.

[0013] The utility model discloses a clamp, sets up the base body, and the base body ensures the overall stability of whole clamp, sets up the support block on the base body, and the support block is used for the support of target material edge non -processing area, and the hollow structure formed between the support block is used for accommodating the sputtering area of target material center part, when rust removal operation is carried out to target material, and the other side of rust removal surface is accommodated in the hollow structure, and the hard contact is not formed with the base body or mesa, thereby avoiding the scratch caused by the greater force of rust removal operation, and the sputtering quality is affected, and the recess structure is formed between the end of support block and the base body, and the non -closed type support is formed, and the clamping and moving of target material before and after rust removal process are convenient, and the protrusion of the top surface of support block is matched with the counterbore of the edge non -sputtering area of sputtering target, and the target material is fixed through the cooperation of simple protrusion and hole, avoids the scratch caused by conventional clamping mode and makes the processing plane fully exposed, and the rotating mechanism is arranged at the bottom of clamp main part, and the rotating structure is connected through the base body, can make the clamp main part realize the circumferential rotation around the center, increase the convenience of process operation, and avoid the problem that the unevenness of flatness is caused from single -direction processing.

[0014] Preferably, the height of the support block is 1-10cm, for example, it can be 1cm, 2cm, 3cm, 4cm, 5cm, 6cm, 7cm, 8cm, 9cm or 10cm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0015] Preferably, the width of the support block is 1-2cm, for example, it can be 1cm, 1.2cm, 1.5cm, 1.8cm or 2cm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0016] Preferably, the length of the groove structure is 8-12cm, for example, it can be 8cm, 9cm, 10cm, 11cm or 12cm, but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0017] Preferably, the diameter of the clamp body is 8-12 inches, for example, it can be 8 inches, 9 inches, 10 inches, 11 inches or 12 inches, but is not limited to the listed values, and other unlisted values within the value range are also applicable.

[0018] Preferably, the rotating structure comprises a rotating platform and a fixed base, and the diameter of the rotating platform is greater than the diameter of the clamp body.

[0019] Preferably, the rotating platform and the fixed base are connected through a bearing.

[0020] Preferably, the base body is in the shape of a hollow ring.

[0021] In a second aspect, the utility model provides a mounting structure of the clamp for rust removal of the sputtering target material, the sputtering target material is horizontally placed on the support block, the edge non-sputtering area of the sputtering target material is in contact with the top surface of the support block, the protrusion cooperates with the counterbore of the edge non-sputtering area of the sputtering target material, and the sputtering area of the sputtering target material is accommodated in the hollow structure formed between the support blocks.

[0022] Compared with the prior art, the utility model has the following beneficial effects:

[0023] The clamp for rust removal is designed for target material rust removal operation, realizes circumferential rotation of the target material through a rotating mechanism, increases process convenience, avoids the problem of uneven flatness caused by single direction operation, accommodates non-processed surfaces through a hollow structure, eliminates damage caused by hard contact, facilitates target material clamping and moving through a groove structure, completes target material fixation through the cooperation of the protrusion and the counterbore, avoids scratches caused by conventional clamping methods, and fully exposes the processed plane. The clamp body has a simple structure, good operability and processability, and is convenient for adapting to different target material specifications. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 The utility model provides a clamp for rust removal of sputtering target material for example 1 provides the solid structure schematic diagram of the clamp for rust removal of sputtering target material;

[0025] Figure 2 The utility model provides a clamp for rust removal of sputtering target material for example 1 provides the side view of the clamp for rust removal of sputtering target material;

[0026] Wherein: 11-base body;12-support block;13-groove structure;14-protrusion;21-rotating platform;22-fixed base. DETAILED DESCRIPTION

[0027] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0028] It should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "set", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0029] The technical solutions of the present application will be further illustrated below in conjunction with the drawings and through specific embodiments.

[0030] Embodiment 1

[0031] The present embodiment provides a sputtering target rust removal clamp as shown in Figure 1 and Figure 2 The sputtering target rust removal clamp comprises:

[0032] A clamp body and a rotating mechanism arranged at the bottom of the clamp body.

[0033] The clamp body comprises a base body 11, and opposite support blocks 12 are arranged on the base body 11.

[0034] The support blocks 12 are arranged along the outer edge of the base body, and a hollow structure is formed between the support blocks 12, and the adjacent ends of the support blocks 12 form a groove structure 13 with the base body 11.

[0035] The top surface of the support block 12 is provided with equidistant protrusions 14, and the protrusions 14 are matched with the counterbores of the sputtering target.

[0036] The base body 11 is in the shape of a hollow ring, and the width of the ring is the same as that of the support block 12.

[0037] The height of the support block 12 is 2cm, and the width is 1cm.

[0038] The length of the groove structure 13 is 10cm.

[0039] The diameter of the clamp body is 8 inches.

[0040] The rotating structure comprises a rotating platform 21 and a fixed base 22, both of which are cylindrical.

[0041] The rotating platform 21 and the fixed base 22 are connected through bearings, and the diameter of the rotating platform 21 is 8.5 inches.

[0042] The installation structure of the sputtering target rust removal clamp comprises:

[0043] The sputtering target is horizontally placed on the support blocks 12, the edge non-sputtering area of the sputtering target is in contact with the top surface of the support blocks 12, the protrusions 14 are matched with the counterbores of the edge non-sputtering area of the sputtering target, and the sputtering area of the sputtering target is accommodated in the hollow structure formed between the support blocks 12.

[0044] Embodiment 2

[0045] The sputtering target rust removal clamp comprises:

[0046] A clamp body and a rotating mechanism arranged at the bottom of the clamp body.

[0047] The clamp body comprises a base body 11, and opposite support blocks 12 are arranged on the base body 11.

[0048] The support blocks 12 are arranged along the outer edge of the base body, a hollow structure is formed between the support blocks 12, and adjacent end portions of the support blocks 12 form a groove structure 13 with the base body 11.

[0049] The top surface of the support block 12 is provided with equidistant protrusions 14, and the protrusions 14 are matched with the counterbores of the sputtering target.

[0050] The base body 11 is in the shape of a hollow ring, and the width of the ring is the same as that of the support blocks 12.

[0051] The height of the support block 12 is 1 cm, and the width is 2 cm.

[0052] The length of the groove structure 13 is 8 cm.

[0053] The diameter of the clamp body is 12 inches.

[0054] The rotating structure comprises a rotating platform 21 and a fixed base 22, both of which are cylindrical.

[0055] The installation structure of the sputtering target rust removal clamp comprises:

[0056] The sputtering target is horizontally placed on the support blocks 12, the edge non-sputtering area of the sputtering target is in contact with the top surface of the support blocks 12, the protrusions 14 are matched with the counterbores of the edge non-sputtering area of the sputtering target, and the sputtering area of the sputtering target is accommodated in the hollow structure formed between the support blocks 12.

[0057] Example 3

[0058] The embodiment provides a clamp for rust removal of a sputtering target, and the clamp comprises:

[0059] A clamp body and a rotating mechanism arranged at the bottom of the clamp body.

[0060] The clamp body comprises a base body 11, and opposite support blocks 12 are arranged on the base body 11.

[0061] The support blocks 12 are arranged along the outer edge of the base body, a hollow structure is formed between the support blocks 12, and adjacent end portions of the support blocks 12 form a groove structure 13 with the base body 11.

[0062] The top surface of the support block 12 is provided with equidistant protrusions 14, and the protrusions 14 are matched with the counterbores of the sputtering target.

[0063] The base body 11 is in the shape of a hollow ring, and the width of the ring is the same as that of the support blocks 12.

[0064] The height of the support block 12 is 5 cm, and the width is 1.5 cm.

[0065] The length of the groove structure 13 is 12 cm.

[0066] The diameter of the clamp body is 8 inches.

[0067] The rotating structure comprises a rotating platform 21 and a fixed base 22, the rotating platform 21 and the fixed base 22 are connected through a bearing, and the diameter of the rotating platform 21 is 8.5 inches.

[0068] The embodiment also provides a mounting structure of the clamp for rust removal of the sputtering target, and the mounting structure is:

[0069] The sputtering target is horizontally placed on the support blocks 12, the edge non-sputtering area of the sputtering target is in contact with the top surface of the support blocks 12, the protrusions 14 are matched with the counterbores of the edge non-sputtering area of the sputtering target, and the sputtering area of the sputtering target is accommodated in the hollow structure formed between the support blocks 12.

[0070] Comparative Example 1

[0071] The comparative example provides a clamp for rust removal of a sputtering target, and compared with the example 1, the top surface of the support block is not provided with the protrusion, and the rest is the same as the example 1.

[0072] In the present comparative example, the top surface of the support block is not provided with a protrusion, and in the rust removal operation, the fixation of the target material only relies on the friction between the non-sputtering surface of the edge of the target material and the top surface of the support block, the horizontal force generated in the rust removal is large, the target material is easy to move, and at the same time, scratches are generated on the non-processed surface of the target material in contact with the top surface of the clamp.

[0073] The rust removal clamp is designed for target material rust removal operation, realizes the circumferential rotation of the target material through the rotating mechanism, increases the process convenience, avoids the problem of uneven flatness caused by single direction operation, accommodates the non-processed surface through the hollow structure, eliminates the damage caused by hard contact, facilitates the clamping and moving of the target material through the groove structure, completes the fixation of the target material through the cooperation of the protrusion and the counterbore, avoids scratches caused by the conventional clamping mode, and fully exposes the processed plane.

[0074] The above only describes the specific implementation of the present utility model, but the protection scope of the present utility model is not limited to this, and the skilled person in the art should understand that any change or replacement within the technical range disclosed by the present utility model, which can be easily thought of by any person skilled in the art, falls within the protection scope and disclosure range of the present utility model.

Claims

1. A fixture for rust removal from sputtering targets, characterized in that, The sputtering target rust removal clamp comprises: a clamp body, and a rotating mechanism arranged at the bottom of the clamp body; the clamp body comprises a base body, and opposite support blocks are arranged on the base body; the support blocks are arranged along the outer edge of the base body, and a hollow structure is formed between the support blocks, and adjacent ends of the support blocks form a groove structure with the base body; the top surface of the support block is provided with equidistant protrusions matched with the counterbores of the sputtering target.

2. The rust removal jig for a sputtering target according to claim 1, characterized by The height of the support block is 1-10 cm.

3. The rust removal jig for a sputtering target according to claim 1, characterized by The width of the support block is 1-2 cm.

4. The rust removal jig for a sputtering target according to claim 1, characterized by The diameter of the clamp body is 8-12 inches.

5. The rust removal jig for a sputtering target according to claim 1, characterized by The length of the groove structure is 8-12 cm.

6. The rust removal jig for a sputtering target according to claim 1, characterized by The rotating mechanism comprises a rotating platform and a fixed base, and the diameter of the rotating platform is greater than that of the clamp body.

7. The rust removal jig for sputtering targets according to claim 6, characterized by The rotating platform is connected with the fixed base through a bearing.

8. The rust removal jig for sputtering targets according to claim 1, characterized by The base body is in the shape of a hollow ring.

9. A mounting structure of the jig for rust removal of a sputtering target according to any one of claims 1 to 8, characterized by The sputtering target is horizontally placed on the support blocks, the edges of the sputtering target are in contact with the top surface of the support blocks, the protrusions are matched with the counterbores of the edges of the sputtering target, and the sputtering region of the sputtering target is accommodated in the hollow structure formed between the support blocks.

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