Storage bin door pressure spring type sealing structure for chemical vapor deposition equipment

Abstract

The utility model discloses a stock bin door pressure spring type sealing structure for chemical vapor deposition equipment, which comprises a stock bin and a bin door, the stock bin and the bin door are movably connected through a shaft pin, an elastic pressing plate is arranged on the inner side surface of the bin door, and the elastic pressing plate can seal and cover a feed port of the stock bin. The elastic pressing plate is arranged on the inner side face of the bin door, and when the elastic pressing plate covers the feeding port of the bin, the feeding port of the bin can be pre-tightened under the elastic force action of the spring, so that the extrusion boss is more tightly contacted with the sealing ring, and the sealing effect is improved. When the bin door is opened, the bin door can be opened more easily due to the fact that the compressed spring releases elastic force.

Description

TECHNICAL FIELD

[0001] The utility model relates to chemical meteorological deposition technical field, especially relate to a material bin door compression spring type sealing structure for chemical meteorological deposition equipment. BACKGROUND

[0002] CVD (Chemical Vapor Deposition), full name is chemical vapor deposition, it is a chemical reaction process. It is heated to one or more gas (called precursor) decomposition, produces polymerization reaction, and deposits on the substrate surface, forms the required thin film. The deposition gas in the furnace of chemical meteorological deposition equipment needs to heat decomposition gas, and high temperature will be produced in the furnace, and high vacuum, when the material bin door needs to be opened, it is not easy to open.

[0003] Therefore, the utility model aims at providing a material bin door compression spring type sealing structure for chemical vapor deposition equipment, which can conveniently open and close the material bin door. SUMMARY

[0004] In order to overcome the shortcomings and deficiencies existing in the prior art, the purpose of the utility model is to provide a material bin door compression spring type sealing structure for chemical meteorological deposition equipment.

[0005] The utility model discloses a material bin door compression spring type sealing structure for chemical meteorological deposition equipment, which comprises a material bin and a bin door, the material bin and the bin door are connected through a shaft pin, the inner side of the bin door is provided with an elastic pressing plate, and the elastic pressing plate can seal and cover the feeding port of the material bin.

[0006] As an improvement of the material bin door compression spring type sealing structure for chemical meteorological deposition equipment, positioning screws are arranged at four corners of the elastic pressing plate, screw columns are arranged on the inner side of the bin door corresponding to the positions of each positioning screw, the positioning screws are screwed with the screw columns, springs are arranged on each screw column, and one end of the spring abuts against the elastic pressing plate. When the elastic pressing plate covers the feeding port of the material bin, the feeding port of the material bin can be pre-tightened due to the elastic force of the spring, so that the extrusion boss is in close contact with the sealing ring, and the sealing effect is improved. When the bin door is opened, the bin door can be easily opened due to the release of the elastic force of the compressed spring.

[0007] As an improvement of the material bin door compression spring type sealing structure for chemical meteorological deposition equipment, an extrusion boss is arranged on one side of the elastic pressing plate, and the extrusion boss can cover the feeding port of the material bin.

[0008] As an improvement of the spring-loaded sealing structure of the material bin door of the chemical vapor deposition equipment, a sealing ring installation groove is arranged at the feeding port of the material bin.

[0009] As an improvement of the spring-loaded sealing structure of the material bin door of the chemical vapor deposition equipment, a bolt seat is arranged at the edge of the feeding port of the material bin, a bolt is arranged through the bolt seat, a bolt connection seat is arranged at the edge of the bin door, a groove is arranged on the bolt connection seat, and the bolt seat is embedded in the groove and connected with the bolt connection seat and the bolt seat through the bolt.

[0010] As an improvement of the spring-loaded sealing structure of the material bin door of the chemical vapor deposition equipment, a bin door handle is further arranged at the edge of the bin door, the bin door handle is movably connected to the handle seat through a shaft pin, the handle seat is fixedly connected to the edge of the bin door, a hook installation rod is arranged through the bin door handle, and the two ends of the U-shaped hook are fixedly connected to the two ends of the hook installation rod.

[0011] As an improvement of the spring-loaded sealing structure of the material bin door of the chemical vapor deposition equipment, a hook seat is further arranged at the edge of the feeding port of the material bin, and the hook seat cooperates with the U-shaped hook. When the bin door is closed, the U-shaped hook is hooked on the hook seat, and rotating the bin door handle can hook the U-shaped hook on the hook seat, so that the U-shaped hook and the hook seat are prevented from being separated.

[0012] The beneficial effects of the present application are that the elastic pressing plate is arranged on the inner side of the bin door, and when the elastic pressing plate covers the feeding port of the material bin, the feeding port of the material bin is pre-tightened due to the elastic force of the spring, so that the extrusion boss is in more close contact with the sealing ring, and the sealing effect is improved. When the bin door is opened, the elastic force of the compressed spring is released, so that the bin door can be more easily opened. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 is the front perspective view of the present application;

[0014] Fig. 2 is the exploded view of the present application;

[0015] Fig. 3 is another direction of the exploded view of the present application;

[0016] The reference signs are: 1, material bin, 2, bin door, 3, elastic pressing plate, 4, positioning screw, 5, screw column, 6, spring, 7, extrusion boss, 8, sealing ring installation groove, 9, sealing ring, 10, bolt seat, 11, bolt, 12, bolt connection seat, 13, groove, 14, bin door handle, 15, handle seat, 16, hook installation rod, 17, U-shaped hook, 18, hook seat. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0018] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0019] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. If the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0020] like Figs. 1-3 As shown, a spring-loaded sealing structure for a hopper door of a chemical vapor deposition equipment includes a hopper 1 and a hopper door 2. The hopper 1 and the hopper door 2 are movably connected by a pivot pin. An elastic pressure plate 3 is provided on the inner side of the hopper door 2, which can seal and cover the feed inlet of the hopper 1.

[0021] Preferably, positioning screws 4 are installed at each of the four corners of the elastic pressure plate 3. A screw post 5 is installed on the inner side of the hopper door 2 corresponding to the position of each positioning screw 4. The positioning screws 4 are screwed to the screw posts 5. A spring 6 is installed on each screw post 5, with one end of the spring 6 abutting against the elastic pressure plate 3. When the elastic pressure plate 3 covers the feed inlet of the hopper 1, the spring force of the spring 6 pre-tightens the feed inlet of the hopper 1, making the extrusion boss contact the sealing ring more tightly and improving the sealing effect. When the hopper door 2 is opened, the compressed spring 6 releases its elastic force, making the hopper door 2 easier to open.

[0022] Preferably, one side of the elastic pressure plate 3 is provided with a pressing boss 7, which can cover the feed inlet of the hopper 1.

[0023] Preferably, the feed inlet of the bin 1 is provided with a sealing ring mounting groove 8, and a sealing ring 9 is arranged in the sealing ring mounting groove 8. The extruding boss 7 on the elastic pressing plate 3 can extrude the sealing ring 9.

[0024] Preferably, the edge of the feed inlet of the bin 1 is provided with a latch seat 10, and a latch 11 is arranged in the latch seat 10. The edge of the bin door 2 is provided with a latch connecting seat 12, and a groove 13 is arranged in the latch connecting seat 12. The latch seat 10 is embedded in the groove 13, and the latch 11 connects the latch connecting seat 12 and the latch seat 10.

[0025] Preferably, the edge of the bin door 2 is further provided with a bin door handle 14, and the bin door handle 14 is movably connected to a handle seat 15 through a shaft pin. The handle seat 15 is fixedly connected to the edge of the bin door 2. A hook mounting rod 16 is arranged in the bin door handle 14, and two ends of a U-shaped hook 17 are fixedly connected to two ends of the hook mounting rod 16.

[0026] Preferably, the edge of the feed inlet of the bin 1 is further provided with a hook seat 18, and the hook seat 18 cooperates with the U-shaped hook 17. When the bin door 2 is closed, the U-shaped hook 17 is hooked on the hook seat 18. Rotating the bin door handle 14 can make the U-shaped hook 17 hook the hook seat 18 tightly, so that the U-shaped hook 17 and the hook seat 18 are prevented from being separated.

[0027] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and structures of the utility model, and the scope of the utility model is defined by the appended claims and their equivalent ranges.

Claims

1. A seal structure for a door of a source vessel of a chemical vapor deposition apparatus, comprising a source vessel and a door, the source vessel and the door being connected by a hinge pin, characterized in that, The inner side of the bin door is provided with an elastic pressing plate, which can seal and cover the feeding port of the bin; Four corners of the elastic pressing plate are provided with positioning screws, the inner side of the bin door is provided with screw columns corresponding to the positions of the positioning screws, the positioning screws are screwed with the screw columns, and springs are arranged on the screw columns.

2. The cartridge door compression spring seal structure for a chemical vapor deposition apparatus according to claim 1, characterized by, One side of the elastic pressing plate is provided with an extrusion boss, which can cover the feeding port of the bin.

3. The cartridge door compression spring seal structure for a chemical vapor deposition apparatus according to claim 2, characterized by, The feeding port of the bin is provided with a sealing ring mounting groove, and the sealing ring mounting groove is provided with a sealing ring.

4. The cartridge door compression spring seal structure for a chemical vapor deposition apparatus according to claim 1, characterized by, The edge of the feeding port of the bin is provided with a bolt seat, the bolt seat is provided with a bolt, the edge of the bin door is provided with a bolt connecting seat, the bolt connecting seat is provided with a groove, the bolt seat is embedded in the groove, and the bolt connecting seat and the bolt seat are connected by the bolt.

5. The cartridge door compression spring seal structure for a chemical vapor deposition apparatus according to claim 1, characterized by, The edge of the bin door is also provided with a bin door handle, the bin door handle is movably connected to a handle seat through a shaft pin, the handle seat is fixedly connected to the edge of the bin door, a hook mounting rod is arranged on the bin door handle, and two ends of a U-shaped hook are fixedly connected to two ends of the hook mounting rod.

6. The cartridge door compression spring seal structure for a chemical vapor deposition apparatus according to claim 5, characterized by The edge of the feeding port of the bin is also provided with a hook seat, and the hook seat cooperates with the U-shaped hook.

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