Auxiliary jig for cleaning metal convex target material assembly

Abstract

The utility model relates to an auxiliary jig for cleaning a metal convex target material assembly, in particular to the technical field of surface cleaning, which comprises a hollow protection piece and a supporting piece for fastening the metal convex target material assembly and the hollow protection piece, the hollow protection piece and the supporting piece are connected through a fastening piece. The equivalent circle diameter of the opening in the hollow protection piece is smaller than or equal to the equivalent circle diameter of the convex surface in the metal convex target material assembly; the depth of the hollow protection piece is larger than the thickness of the metal convex target material assembly; and the hollow protection piece is tightly matched with the metal convex target material assembly. According to the cleaning auxiliary jig for the metal convex target material assembly, only the convex face of the target material can be cleaned in the cleaning process, and the defect that the surface is excessively corroded due to the cross influence of acid pickling on the target material and a back plate is overcome; and meanwhile, the surface corrosion defect caused by different reaction effects on a pickling solution when the target material and the back plate are subjected to pickling by using dissimilar metal can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to surface cleaning technical field, concretely relates to a metal convex target material assembly cleaning auxiliary jig, especially relates to a different kind of metal convex target material assembly cleaning auxiliary jig. BACKGROUND

[0002] Sputtering target material is a kind of high-purity metal or alloy material, its surface is handled using special process, obtains certain surface topography and roughness.Sputtering target material is bombarded by high-energy beam stream, releases high-temperature high-energy ion, is deposited on the surface of the object to be plated, forms uniform, dense, strong thin film of binding force.Sputtering target material plays a decisive role in the process of coating, and common sputtering target material also includes alloy, coating material and the like.

[0003] Sputtering target material requires that the surface of sputtering target material has cleanliness when in use, so target material assembly usually needs to be cleaned before use, such as pickling or alkaline cleaning to remove surface residual dirt, dust and other stains,

[0004] CN114887963A discloses a titanium target material cleaning method, which comprises the following steps: titanium target material is sequentially subjected to brushing, secondary cleaning and tertiary cleaning, and then drying to obtain clean titanium target material;The titanium target material has a special side knurling structure, the method adopts brushing, ultrasonic pickling, rinsing and drying, and optimizes the acid type and ratio, to obtain better cleaning effect, significantly reduce the Particle frequency, and complete cleaning with simple process and inexpensive raw materials, to improve the pass rate of products in the overall process.

[0005] CN113773914A discloses a target material cleaning agent and a cleaning method thereof, which comprises: sequentially performing once water washing, pickling, twice water washing and target material cleaner scrubbing on the target material, rinsing the target material surface, and then drying to obtain clean target material.

[0006] However, in the pickling process, due to the different cleaning processes and times required by different positions in the target material assembly, such as target and back plate, without isolated cleaning, the cleaning process will obviously affect the use of the target material assembly, such as excessive surface corrosion. UTILITY MODEL CONTENT

[0007] In view of the problems existing in the prior art, the utility model aims to provide a metal convex target material assembly cleaning auxiliary jig to solve the problem that the pickling process will obviously affect the use of the target material assembly, such as excessive surface corrosion, due to the different cleaning processes and times required by different positions in the target material assembly, such as target and back plate, without isolated cleaning.

[0008] To achieve the purpose, the utility model discloses the following technical scheme:

[0009] The utility model provides a kind of metal convex target material assembly cleaning auxiliary jig, the metal convex target material assembly cleaning auxiliary jig includes:

[0010] Hollow protection piece, fastening metal convex target material assembly and the support of the hollow protection piece;

[0011] The hollow protection piece and support are connected by fastener;

[0012] The equivalent circle diameter of the opening in the hollow protection piece is less than or equal to the equivalent circle diameter of the convex surface in the metal convex target material assembly;

[0013] The depth of the hollow protection piece is greater than the thickness of the metal convex target material assembly;

[0014] The hollow protection piece is closely matched with the metal convex target material assembly.

[0015] The metal convex target material assembly cleaning auxiliary jig provided by the utility model can clean only the convex surface of the target material during the cleaning process, avoiding the cross-influence of cleaning on the target material and the back plate, which can cause excessive corrosion of the surface, and also avoiding the surface corrosion defects caused by different acid washing liquid resistance effects when the target material and the back plate are made of different metals.

[0016] As a preferred technical scheme of the utility model, the hollow protection piece includes a first hollow and a second hollow arranged in sequence along the axial direction;

[0017] The first hollow is closely matched with the convex surface in the metal convex target material assembly.

[0018] As a preferred technical scheme of the utility model, the equivalent circle diameter of the first hollow is less than the equivalent circle diameter of the second hollow.

[0019] The equivalent circle diameter of the first hollow is less than or equal to the equivalent circle diameter of the convex surface in the metal convex target material assembly.

[0020] As a preferred technical scheme of the utility model, the equivalent circle diameter of the second hollow is greater than or equal to the maximum equivalent circle diameter of the metal convex target material assembly.

[0021] As a preferred technical scheme of the utility model, the depth of the second hollow is greater than the thickness of the metal convex target material assembly.

[0022] As a preferred technical scheme of the utility model, the support includes a substrate and a support body arranged on the substrate.

[0023] As the preferred technical scheme of the utility model, the height of the support body < the depth of the second hollow.

[0024] As the preferred technical scheme of the utility model, the support body contacts the back plate or the target material in the metal convex target material assembly.

[0025] As the preferred technical scheme of the utility model, the support body and the base plate are connected through bolts, welding or bonding.

[0026] As the preferred technical scheme of the utility model, the support body is distributed in an array on the base plate.

[0027] Compared with the prior art scheme, the utility model has the following beneficial effects:

[0028] The metal convex target material assembly cleaning auxiliary jig provided by the utility model can clean only the convex surface of the target material in the cleaning process, avoids the defects of excessive corrosion of the surface caused by the cross influence of cleaning on the target material and the back plate, and can also avoid the surface corrosion defects caused by different acid washing liquid tolerances when the target material and the back plate are acid washed as dissimilar metals. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a schematic view of the metal convex target material assembly cleaning auxiliary jig provided by the utility model embodiment;

[0030] Figure 2 It is a schematic view of the metal convex target material assembly cleaning auxiliary jig and the metal convex target material assembly after assembly.

[0031] In the drawing: 100-hollow protection piece, 200-bottom plate, 210-support body, 300-metal convex target material assembly.

[0032] The utility model will be further described in detail below. However, the following examples are only simple examples of the utility model, and do not represent or limit the protection scope of the utility model, and the protection scope of the utility model is subject to the claims. DETAILED DESCRIPTION

[0033] In order to better illustrate the utility model and facilitate the understanding of the technical scheme of the utility model, the typical but non-limiting embodiments of the utility model are as follows:

[0034] The embodiment provides a metal convex target material assembly cleaning auxiliary jig, as shown in Figure 1 and Figure 2 The metal convex target material assembly cleaning auxiliary jig comprises:

[0035] The hollow protection piece 100 is fastened with the support of the metal convex target material assembly 300 and the hollow protection piece 100.

[0036] The hollow protection piece 100 and the support piece are connected through fasteners;

[0037] The equivalent circle diameter of the opening in the hollow protection piece 100 is less than the equivalent circle diameter of the convex surface in the metal convex target material assembly 300.

[0038] The depth of the hollow protection piece 100 is greater than the thickness of the metal convex target material assembly 300.

[0039] The hollow protection piece 100 is tightly matched with the metal convex target material assembly 300.

[0040] In the utility model, the metal convex target material assembly 300 refers to the metal material of the target material and the back plate in the metal convex target material assembly 300 being different, for example, titanium target material and aluminum back plate, copper target material and aluminum back plate, aluminum target material and copper back plate, etc., and the convex type refers to the target material or the back plate being designed as a convex structure, for example, the back plate being a convex structure, and then connecting the target material on the convex platform, and for example, the back plate being a plane structure, and connecting the plane target material with a size less than or greater than the back plate on the plane to form a convex structure.

[0041] In the utility model, the shape of the target material and the back plate can be circular, square, rectangular and other commonly used target materials according to conventional design in the field.

[0042] Specifically, after the metal convex target material assembly 300 and the hollow protection piece 100 are assembled in the use process of the cleaning auxiliary jig, the convex part of the metal convex target material assembly 300 protrudes from the hollow protection piece 100, thereby avoiding the exposure of the dissimilar metal back plate or target material part, so that unreasonable corrosion caused by the difference in oxidation and reduction of different metals is avoided in the cleaning process.

[0043] In the utility model, pickling refers to the cleaning process containing acidic media such as inorganic acid and / or organic acid, such as sulfuric acid, hydrochloric acid, nitric acid, hydrofluoric acid, oxalic acid, acetic acid and the like.

[0044] The hollow protection piece 100 comprises a first hollow and a second hollow arranged in sequence along the axial direction.

[0045] In the utility model, the hollow protection piece 100 can better cooperate with the metal convex target material assembly 300 through the two hollow structures of hierarchical design to improve the protection effect, for example, the first hollow limits the protruding degree of the convex type of the metal convex target material assembly 300, and the specific protruding degree is reasonably designed according to the cleaning requirement, and one kind of metal material can be selected to be completely protruded for cleaning, or one kind of metal material can be selected to be partially protruded for cleaning, and the second hollow protects the remaining part, thereby avoiding the acid corrosion of the acid liquid to other parts in the cleaning process.

[0046] The hollow protection piece 100 is tightly matched with the metal convex target material assembly 300, and the tight matching is realized by the gradual change structure and the convex surface in the metal convex target material assembly 300, and the tight matching is improved.

[0047] The first hollow is tightly matched with the convex surface in the metal convex target material assembly 300.

[0048] The equivalent circle diameter of the first hollow is less than the equivalent circle diameter of the second hollow.

[0049] The equivalent circle diameter of the first hollow is less than or equal to the equivalent circle diameter of the convex surface in the metal convex target material assembly 300.

[0050] The equivalent circle diameter of the second hollow is greater than or equal to the maximum equivalent circle diameter of the metal convex target material assembly 300.

[0051] The depth of the second hollow is greater than the thickness of the metal convex target material assembly 300.

[0052] The support includes a substrate 200 and a support body 210 arranged on the substrate 200.

[0053] In the utility model, the metal convex target material assembly 300 and the hollow protection piece 100 can be fixed and tightly matched by the cooperation of the support, so that the cleaning solution in the cleaning process does not enter the inside of the jig from the gap to corrode other parts.

[0054] Further, under the premise of ensuring the cleaning effect, a soft material such as a pad layer can be added to the position where the hollow protection piece 100 and the metal convex target material assembly 300 contact, so that the hollow protection piece 100 and the metal convex target material assembly 300 are tightly contacted when they contact, and the contact surface is not damaged.

[0055] The height of the support body 210 is less than the depth of the second hollow.

[0056] Further, the height of the support body 210 is reasonably controlled, the support and the hollow protection piece 100 are tightly attached, and the cleaning solution does not enter the hollow protection piece 100 in the cleaning process.

[0057] The support body 210 contacts the back plate or the target material in the metal convex target material assembly 300.

[0058] The support body 210 and the substrate 200 are connected by bolts, welding or adhesion.

[0059] The utility model discloses, support 210 is connected with base plate 200 through bolt, can be used in cooperation to the metal convex target material assembly 300 of different thicknesses flexibly, and the use range of jig is widened.

[0060] Wherein, the support 210 is array distribution on the base plate 200.

[0061] The utility model discloses, the shape of support 210 is specifically according to actual need and carries out reasonable design, such as the support 210 of cylindrical array distribution, or interval distribution's strip support 210, or for the convex platform of whole, to realize the top holding, fixed and locked of metal convex target material assembly 300.

[0062] Wherein, hollow protection piece can select to adopt the preparation of corrosion material, such as acrylic material, PVC material etc.

[0063] Further, in order to illustrate the protection effect that metal convex target material assembly cleaning auxiliary jig provided by the utility model can reach in the cleaning process, the following actual example is used to explain, and the specific as follows:

[0064] Example 1

[0065] The metal convex target material assembly cleaning auxiliary jig used in the embodiment includes the following:

[0066] Hollow protection piece, fastening metal convex target material assembly and the support of hollow protection piece;

[0067] The hollow protection piece and support are connected through fastener;

[0068] The equivalent circle diameter of the opening in the hollow protection piece is equal to the equivalent circle diameter of the convex surface in the metal convex target material assembly;

[0069] The depth of the hollow protection piece is 2 times the thickness of the metal convex target material assembly;

[0070] The hollow protection piece is closely matched with the metal convex target material assembly.

[0071] The hollow protection piece is sequentially provided with first hollow and second hollow along the axial direction;

[0072] The first hollow, that is, the opening corresponding, is closely matched with the metal convex target material assembly.

[0073] The equivalent circle diameter of the first hollow is less than the equivalent circle diameter of the second hollow.

[0074] The equivalent circle diameter of the second hollow is 1.2 times the maximum equivalent circle diameter of the metal convex target material assembly.

[0075] The second hollow has a depth of 1.5 times the thickness of the metal convex target assembly.

[0076] The support member includes a base plate and a support body disposed on the base plate.

[0077] The height of the support body is the minimum vertical distance between the surface of the base plate and the surface of the metal convex target assembly after assembly.

[0078] The support body is in contact with the back plate or the target material in the metal convex target assembly.

[0079] The support body is connected to the base plate by bolts.

[0080] The support body is distributed in an array on the base plate.

[0081] Based on the auxiliary jig, different dissimilar metal convex targets are cleaned as follows:

[0082] I. Copper target and aluminum back plate, cleaned with 20% nitric acid, after assembly, the convex copper target is higher than the surface of the hollow protective member, and after cleaning, the surface of the copper target achieves good cleaning effect, and the aluminum back plate is not corroded by the acid solution due to the isolation of the auxiliary jig, and still retains the original surface properties.

[0083] II. Titanium target and aluminum back plate, cleaned with 15% nitric acid, after assembly, the convex titanium target is higher than the surface of the hollow protective member, and after cleaning, the surface of the titanium target achieves good cleaning effect, and the aluminum back plate is not corroded by the acid solution due to the isolation of the auxiliary jig, and still retains the original surface properties.

[0084] III. Copper target and copper back plate, due to the design of the cleaning process, only the copper target needs to be pickled, at this time, after assembly, the convex copper target is higher than the surface of the hollow protective member, and after cleaning with 50% sulfuric acid, the surface of the copper target achieves good cleaning effect, and the copper back plate is not affected by the acid solution due to the isolation of the auxiliary jig, and still retains the original surface properties.

[0085] IV. Aluminum target and aluminum back plate, due to the design of the cleaning process, only the aluminum target needs to be pickled, at this time, after assembly, the convex aluminum target is higher than the surface of the hollow protective member, and after cleaning with concentrated nitric acid, the surface of the aluminum target achieves good cleaning effect, and the aluminum back plate is not affected by the acid solution due to the isolation of the auxiliary jig, and still retains the original surface properties.

[0086] V, titanium target material and aluminum back plate, using mass concentration of 20 sodium hydroxide is cleaned, after assembly convex titanium target material is all higher than the surface of the hollow protection piece, after cleaning the surface of titanium target material realizes good cleaning effect, at the same time, aluminum back plate is isolated by auxiliary jig and is not corroded by lye, still retains the original surface performance.

[0087] From the above examples, the metal convex target material assembly cleaning auxiliary jig can realize reasonable protection of the cleaning part during cleaning, avoid excessive cleaning and unnecessary cleaning, improve the cleaning effect, and ensure the stability of the metal convex target material assembly cleaning.

[0088] The above describes the preferred embodiments of the utility model, but the utility model is not limited to the specific details in the above embodiments, within the technical concept of the utility model, the technical scheme of the utility model can be variously modified, and these simple modifications all belong to the protection scope of the utility model.

[0089] In addition, it should be noted that various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction, and in order to avoid unnecessary repetition, the utility model will not further describe various possible combination manners.

[0090] In addition, various different embodiments of the utility model can also be combined in any manner, as long as they do not deviate from the concept of the utility model, and they should also be considered as disclosed by the utility model.

Claims

1. A metal convex target material assembly cleaning aid, characterized by, The metal convex target assembly cleaning auxiliary jig comprises: a hollow protection member, a support member fastening the metal convex target assembly and the hollow protection member; the hollow protection member and the support member are connected by fasteners; the equivalent circle diameter of the opening in the hollow protection member is less than the equivalent circle diameter of the convex surface in the metal convex target assembly; the depth of the hollow protection member is greater than the thickness of the metal convex target assembly; the hollow protection member is closely matched with the metal convex target assembly.

2. The metal convex target assembly cleaning aid of claim 1, wherein the hollow protection member comprises a first hollow and a second hollow arranged in sequence along the axial direction; the first hollow is closely matched with the convex surface in the metal convex target assembly.

3. The metal convex target assembly cleaning aid of claim 2, wherein the equivalent circle diameter of the first hollow is less than the equivalent circle diameter of the second hollow; the equivalent circle diameter of the first hollow is less than the equivalent circle diameter of the convex surface in the metal convex target assembly.

4. The metal convex target assembly cleaning aid of claim 2, wherein the equivalent circle diameter of the second hollow is greater than the maximum equivalent circle diameter of the metal convex target assembly.

5. The metal convex target assembly cleaning aid of claim 2, wherein the depth of the second hollow is greater than the thickness of the metal convex target assembly.

6. The metal convex target assembly cleaning aid of claim 2, wherein the support member comprises a base plate and a support body arranged on the base plate.

7. The metal convex target assembly cleaning aid of claim 6, wherein the height of the support body is less than the depth of the second hollow.

8. The metal convex target assembly cleaning aid of claim 6, wherein the support body is in contact with the back plate or the target material in the metal convex target assembly.

9. The metal convex target assembly cleaning aid of claim 6, wherein the support body and the base plate are connected by bolts, welding or adhesion.

10. The metal convex target assembly cleaning aid of claim 6, wherein the support body is distributed in an array on the base plate.

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