Graphite electrode insulation protection device in single crystal furnace, thermal field heating system and single crystal furnace

Abstract

The utility model relates to the field of single crystal furnaces, in particular to a graphite electrode insulation protection device in a single crystal furnace, a thermal field heating system and the single crystal furnace, the graphite electrode insulation protection device in the single crystal furnace comprises an insulation sheath, the insulation sheath is made of high-temperature-resistant and insulation materials, and the insulation sheath is used for being sleeved on the outer side of a graphite electrode. According to the graphite electrode, disintegrating slag or volatile matter generated after pulverization of the solid felt sheath can be effectively isolated from being attached to the graphite electrode, the graphite electrode can be continuously guided for use after being cleaned under the condition that the graphite electrode is not affected by factors of other people, the service life of the graphite electrode is greatly prolonged, and ignition accidents of a coil base can be prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to the single crystal furnace field, specifically, relate to a single crystal furnace middle graphite electrode insulation protection device, hot field heating system and single crystal furnace. BACKGROUND

[0002] Prior art:

[0003] In the single crystal silicon manufacturing industry, the heater in the hot field of the single crystal furnace is powered and heated by connecting with the graphite electrode. The current of the heater is large, usually about 2.0 kiloampere when melting. In such a strong current environment, if the graphite electrode is not well protected, it will easily cause a spark phenomenon during the operation of the furnace table, which will cause great damage to the heater, and even directly cause the heater and the graphite electrode to be damaged. The high-purity graphite heater is the most expensive component in the hot field of the single crystal furnace, and will cause the single crystal product to be scrapped, causing huge losses.

[0004] Disadvantages of prior art:

[0005] The graphite electrode protection device currently used is to add a solid felt sheath between the graphite electrode and the soft felt. The solid felt sheath is sleeved on the outside of the graphite electrode in a sleeve type, which isolates it from other hot field components, thereby playing a role in protecting the graphite electrode. However, in a high-temperature environment, the solid felt sheath will powderize during the operation of the furnace table. After powderization, the solid felt sheath will adhere to the graphite electrode and stick together with the graphite electrode, which makes it inconvenient for the operator to operate during the cleaning process, and the graphite electrode cannot be used again, greatly reducing the service life of the graphite electrode. At the same time, it can also cause the graphite electrode to spark, causing a major production accident. Utility model content

[0006] The utility model aims at providing a graphite electrode insulation protection device in a single crystal furnace, which can effectively isolate the powderized slag or volatile matter of the solid felt sheath from adhering to the graphite electrode. The graphite electrode can also be cleaned and used continuously without being affected by other human factors, greatly increasing the service life of the graphite electrode and preventing the furnace table from sparking.

[0007] Another purpose of the utility model is to provide a single crystal furnace, which can effectively isolate the powderized slag or volatile matter of the solid felt sheath from adhering to the graphite electrode. The graphite electrode can also be cleaned and used continuously without being affected by other human factors, greatly increasing the service life of the graphite electrode and preventing the furnace table from sparking.

[0008] The technical solution of the utility model is as follows:

[0009] The utility model provides an insulating protection device for graphite electrode in single crystal furnace, which comprises an insulating sheath made of high-temperature-resistant and insulating material and sleeved on the outer side of the graphite electrode.

[0010] Further, the insulating sheath is made of high-purity quartz material.

[0011] Further, the insulating sheath comprises an upper sheath and a lower sheath designed in a split manner.

[0012] Further, the upper sheath comprises a straight cylinder portion and a blocking ring portion arranged on the outer side of the top of the straight cylinder portion.

[0013] Further, the lower sheath is in a cylindrical shape.

[0014] Further, the straight cylinder portion has the same inner diameter as the lower sheath.

[0015] Further, the straight cylinder portion has the same outer diameter as the lower sheath.

[0016] Further, the straight cylinder portion has an inner diameter of 66 mm and an outer diameter of 76 mm, the blocking ring portion has an outer diameter of 176 mm and a thickness of 10 mm, and the lower sheath has a height of 110 mm.

[0017] A hot field heating system comprises a graphite electrode and a solid felt sheath sleeved on the outer side of the graphite electrode, and further comprises the insulating protection device for graphite electrode in single crystal furnace, which is arranged between the graphite electrode and the solid felt sheath.

[0018] A single crystal furnace comprises the hot field heating system.

[0019] Compared with the prior art, the utility model has the beneficial effects that:

[0020] During the operation of the single crystal furnace, the insulating sheath can be added between the graphite electrode and the solid felt sheath, so that the graphite electrode can be effectively prevented from being attached with the slag or volatile matter generated by the pulverization of the solid felt sheath, and the graphite electrode can be cleaned and reused without being affected by other factors, thereby greatly increasing the service life of the graphite electrode and preventing the single crystal furnace from catching fire. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments, and it should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of the drawings.

[0022] Figure 1 is a sectional structure diagram of the insulation sheath of the utility model;

[0023] Figure 2 is a structure diagram of the upper sheath of the utility model;

[0024] Figure 3 is a structure diagram of the lower sheath of the utility model;

[0025] Figure 4 is a sectional structure diagram of the insulation sheath installed between the graphite electrode and the solid felt sheath of the utility model.

[0026] In the drawing:

[0027] 1-upper sheath; 101-straight cylinder part; 102-stop ring part;

[0028] 2-lower sheath;

[0029] 3-graphite electrode;

[0030] 4-solid felt sheath. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the utility model.

[0033] It should be noted that: similar labels and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] In the description of the utility model, it needs to be explained that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the utility model product is used, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0035] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0036] In the description of the utility model, it also needs to be explained that, unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0037] Some embodiments of the utility model will be described in detail below with reference to the drawings. In the case of no conflict, the following examples and features in the examples can be combined with each other.

[0038] Example 1

[0039] A single crystal furnace is a device used to manufacture single crystal silicon, a semiconductor material. In the semiconductor industry, single crystal silicon is the basic material for manufacturing integrated circuits (ICs), photodiodes, solar cells, and other products. Single crystal silicon has a uniform and regular crystal structure, which is crucial for the performance of semiconductor devices.

[0040] The working principle of a single crystal furnace is to melt polycrystalline silicon raw materials under strictly controlled temperature and atmosphere conditions, using a seed crystal to contact the surface of the melt and slowly rotate and lift, so that the molten silicon gradually solidifies into single crystal silicon. This process is commonly known as "pulling crystal method" or "Czochralski process". In this process, factors such as temperature distribution, relative movement speed between seed crystal and melt, and environmental atmosphere need to be precisely controlled to ensure the quality and consistency of single crystal silicon.

[0041] The main components of a single crystal furnace include a heating system, a crucible, a crystal pulling device, a cooling system, a temperature control system, a gas supply system, etc. These components work together to ensure the stability and controllability of the single crystal silicon growth process. With the development of semiconductor technology, the design of single crystal furnaces is constantly improving to meet the production needs of higher purity, larger size, and higher quality single crystal silicon.

[0042] Reference Figures 1-4 The present embodiment provides a graphite electrode insulation protection device in a single crystal furnace, which includes an insulation sheath. The insulation sheath is made of a high-temperature-resistant and insulating material. The insulation sheath is used to cover the outside of the graphite electrode 3.

[0043] Preferably, the insulation sheath is made of high-purity quartz material. High-purity quartz is an absolute insulating material, which has the following advantages:

[0044] 1. High purity: ensures that no impurities are introduced during use, affecting the performance of the protected object.

[0045] 2. High temperature resistance: can withstand high temperatures and is suitable for various high-temperature environments.

[0046] 3. Good chemical stability: resistant to most chemicals and not easily corroded.

[0047] 4. Good insulation performance: effectively protects the graphite electrode 3.

[0048] In this embodiment, the insulation sheath includes an upper sheath 1 and a lower sheath 2 designed separately.

[0049] The upper sheath 1 includes a straight cylinder part 101 and a baffle ring part 102. The baffle ring part 102 is arranged on the outside of the top of the straight cylinder part 101, and the baffle ring part 102 is in the shape of a ring.

[0050] Preferably, the lower sheath 2 is in the shape of a cylinder.

[0051] Preferably, the straight cylinder part 101 has the same inner diameter as the lower sheath 2, and the straight cylinder part 101 has the same outer diameter as the lower sheath 2.

[0052] Preferably, the height of the straight cylinder part 101 is greater than the height of the lower sheath 2.

[0053] In this embodiment, since the graphite electrode 3 is a cylinder, the straight cylinder part 101 of the upper sheath 1 and the lower sheath 2 are designed in the shape of a cylinder. Therefore, the insulation sheath designed in the shape of a cylinder has multiple benefits, especially when used in a single crystal furnace. The following are some main advantages:

[0054] 1. Uniform heat transfer:

[0055] The cylindrical shape ensures more uniform heat transfer. Since the cylindrical shape has no sharp corners or protrusions, heat can be distributed more evenly across the outer surface of the jacket, reducing the risk of localized overheating or undercooling. This helps maintain a stable temperature for the molten silicon, which is crucial for single crystal growth.

[0056] 2. Reduces stress concentration:

[0057] The circular design reduces stress concentration phenomena. Compared to other non-circular shapes, the cylindrical design can better disperse thermal stress caused by temperature changes, avoiding cracks or damage to the material in high-temperature environments.

[0058] 3. Improves mechanical strength:

[0059] The cylindrical design can improve the mechanical strength of the material. Quartz materials perform better in uniform stress distribution. The cylindrical design can provide better mechanical support with the same wall thickness, reducing the risk of deformation or breakage.

[0060] 4. Facilitates processing and installation:

[0061] The cylindrical shape is easier to process and install. In industry, circular parts can be made through standard processing equipment (such as lathes), simplifying production processes and reducing costs. In addition, the cylindrical jacket is easier to install in the single crystal furnace, and there is no additional difficulty in the installation process due to complex shape.

[0062] 5. Optimizes space utilization:

[0063] The cylindrical shape helps optimize internal space utilization. In a single crystal furnace, a cylindrical insulation jacket can better adapt to the internal space layout, leaving more operating and maintenance space. This not only improves the overall efficiency of the equipment, but also facilitates maintenance and repair.

[0064] The split design of the insulation jacket in this application has the following advantages: during the operation of the single crystal furnace, the upper half (upper jacket 1) is subjected to much higher temperature baking than the lower half (lower jacket 2). The insulation jacket is a consumable product, and if it is designed as a whole, it will cause resource waste (the entire insulation jacket will be replaced). By using a split design, only the upper half of the insulation jacket needs to be replaced after running a furnace, and the lower half can continue to be used, which saves production costs to some extent.

[0065] The insulation jacket is made of high-purity quartz material with high temperature resistance and insulation, which avoids contact between the graphite electrode 3 and the outside world and prevents sparking, and better protects the graphite electrode 3 from running in an absolutely safe environment, greatly reducing the safety cost during the operation of the single crystal furnace.

[0066] The preferred embodiment in this example is that the inner diameter of the straight section 101 of the upper sheath 1 is 66 mm, the outer diameter is 76 mm, the outer diameter of the baffle ring section 102 is 176 mm, the thickness of the baffle ring section 102 is 10 mm, and the height of the lower sheath 2 is 110 mm. It should be noted that the size or shape of the insulating sheath of the present application is only a preferred embodiment of the present solution and does not limit the protection scope of the present application.

[0067] Example 2

[0068] Referring to Figure 4 A hot field heating system includes a heater, a graphite electrode 3, a solid felt sheath 4 sleeved outside the graphite electrode 3, a sheath disc pressing sheet, and further includes the graphite electrode insulation protection device in the single crystal furnace. The graphite electrode 3 and the solid felt sheath 4 are provided with the graphite electrode insulation protection device in the single crystal furnace.

[0069] Specifically: after the graphite electrode 3 is installed in the hot field of the single crystal furnace, the assembly sequence is as follows: first, the lower sheath 2 is sleeved outside the graphite electrode 3, the solid felt sheath 4 is installed, the soft felt is padded, the sheath disc pressing sheet is covered, the upper sheath 1 is placed in the sheath disc pressing sheet hole, and finally the graphite electrode 3 is placed in the sheath through hole and tightened, that is, the installation is completed.

[0070] The sheath disc pressing sheet in the single crystal furnace is an important component for supporting and protecting the seed crystal and molten silicon during the growth of single crystal silicon. The sheath disc pressing sheet is usually located at a specific position in the single crystal furnace, and its main functions include:

[0071] 1. Support the seed crystal:

[0072] In the early stage of single crystal silicon growth, the sheath disc pressing sheet is used to fix and support the seed crystal. The seed crystal is a single crystal silicon rod used to start the single crystal growth process, usually vertically suspended above the molten silicon.

[0073] 2. Isolation and protection:

[0074] The sheath disc pressing sheet also plays a role in isolation and protection, preventing direct contact between the molten silicon and other parts of the furnace, thereby avoiding contamination and unnecessary chemical reactions. It can help maintain the purity of the molten silicon, ensuring the high-quality growth of single crystal silicon.

[0075] 3. Control the temperature gradient:

[0076] The sheath disc pressing sheet in some designs can also help control the temperature gradient between the molten silicon and the seed crystal. Proper temperature gradient helps control the growth rate and quality of single crystal silicon, thereby obtaining the desired crystal structure and properties.

[0077] 4. Stabilize the growth environment:

[0078] The protection plate pressing piece helps maintain a stable growth environment, ensuring that the temperature and atmosphere conditions of the molten silicon remain consistent during the growth process. This is very important for uniform growth of single crystal silicon and avoiding defects.

[0079] The protection plate pressing piece is usually made of high-temperature-resistant, corrosion-resistant materials such as quartz or high-purity ceramics to ensure that they can still work normally in high-temperature and harsh environments. The use of these materials can also reduce potential contamination of the single crystal silicon growth process.

[0080] The insulation sheath is made of high-purity quartz material, which is a high-temperature-resistant insulation material. After adding the quartz insulation sheath between the graphite electrode 3 and the solid felt sheath 4, it can effectively isolate the contact between the volatile or powdered impurities and the graphite electrode 3 during the operation of the single crystal furnace, preventing the occurrence of sparking; it can effectively protect the service life of the graphite electrode 3.

[0081] Embodiment 3

[0082] A single crystal furnace comprising the heat field heating system.

[0083] The beneficial effects of the technical scheme of the utility model are:

[0084] During the operation of the single crystal furnace, an insulation sheath made of quartz material is added between the graphite electrode 3 and the solid felt sheath 4, which can effectively isolate the attachment of powdered slag or volatile matter of the solid felt sheath 4 on the graphite electrode 3. The graphite electrode 3 can also be cleaned and continue to be used without being affected by other human factors, greatly increasing the service life of the graphite electrode 3 and preventing the occurrence of sparking accidents on the furnace platform.

[0085] Finally, it should be noted that: the above embodiments are only used to illustrate the technical scheme of the utility model, and not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the utility model.

[0086] The above is only the preferred embodiment of the utility model, and is not used to limit the utility model. For those skilled in the art, the utility model can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model shall be included in the protection scope of the utility model.

Claims

1. A graphite electrode insulation protection device in a single crystal furnace, characterized by, The insulating sheath is made of high-temperature-resistant and insulating material and is used for sleeving the graphite electrode (3).

2. The graphite electrode insulation protection device in a single crystal furnace according to claim 1, characterized in that, The insulating sheath is made of high-purity quartz material.

3. The graphite electrode insulation protection device in a single crystal furnace according to claim 1, characterized in that, The insulating sheath comprises an upper sheath (1) and a lower sheath (2) which are separately designed.

4. The graphite electrode insulation protection device in a single crystal furnace according to claim 3, characterized in that, The upper sheath (1) comprises a straight cylinder part (101) and a blocking ring part (102) which is arranged outside the top of the straight cylinder part (101).

5. The graphite electrode insulation protection device in a single crystal furnace according to claim 4, characterized in that, The lower sheath (2) is in a cylindrical shape.

6. The graphite electrode insulation protection device in a single crystal furnace according to claim 5, characterized in that, The straight cylinder part (101) has the same inner diameter as the lower sheath (2).

7. The graphite electrode insulation protection device in a single crystal furnace according to claim 6, characterized in that, The straight cylinder part (101) has the same outer diameter as the lower sheath (2).

8. The graphite electrode insulation protection device in a single crystal furnace according to claim 7, characterized in that, The straight cylinder part (101) has an inner diameter of 66 mm and an outer diameter of 76 mm, the blocking ring part (102) has an outer diameter of 176 mm, the thickness of the blocking ring part (102) is 10 mm, and the height of the lower sheath (2) is 110 mm.

9. A hot field heating system comprising a graphite electrode (3) and a solid felt jacket (4) which is arranged on the outside of the graphite electrode (3), characterized in that The graphite electrode insulating protection device in the single crystal furnace is arranged between the graphite electrode (3) and the solid felt sheath (4).

10. A single crystal furnace characterized by comprising: The thermal field heating system comprises the one according to claim 9.

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