Crystal annealing furnace

Abstract

The utility model discloses a crystal annealing furnace which comprises a crystal annealing furnace body, a cover plate is connected to the front face of the crystal annealing furnace body in a sliding mode, limiting assemblies are arranged on the two sides of the crystal annealing furnace body, and a fixing plate is fixedly connected to the top of the crystal annealing furnace body. A transmission assembly is fixedly installed on the back face of the fixing plate. The limiting assembly is used for limiting the two sides of the cover plate. The output end of the motor drives the first bevel gear to rotate, the first bevel gear drives the second bevel gear to rotate, the second bevel gear rotates to drive the metal rod to wind the steel rope, the steel rope drives the cover plate to move upwards, the cover plate continuously moves to the highest position, and crystal workpieces can be conveniently taken; and meanwhile, the steel rope slides on the top of the limiting rod, the steel rope can be limited, an existing mode of manually opening the cover plate is replaced, the effect of rapidly opening the cover plate is achieved, and functionality is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of crystal annealing furnace, concretely to a crystal annealing furnace. BACKGROUND

[0002] The crystal annealing furnace is a device for annealing crystal materials. The following is a detailed explanation of the crystal annealing furnace: I. Main function Crystal structure optimization: High temperature helps to rearrange the crystal structure, which can eliminate lattice defects and improve the order of the crystal, thereby improving the electronic conduction performance of the semiconductor material. Impurity removal: High-temperature rapid annealing can promote impurities to diffuse out of the semiconductor crystal, reducing the concentration of impurities and improving the electronic properties of semiconductor devices. Other process applications: In CMOS technology, a rapid annealing furnace can be used to remove substrate materials such as silicon oxide or silicon nitride to form ultra-thin SOI (silicon-on-insulator) devices. In addition, it can also be used to activate dopants, change film states, repair implant damage, and other processes.

[0003] The crystal annealing furnace can process crystal materials, but in current use of the crystal annealing furnace, the front side cover plate is opened manually, and the screw needs to be rotated and tightened manually during manual opening. Frequent opening is time-consuming and labor-intensive, and cannot quickly open the work.

[0004] Therefore, it is necessary to design and improve the crystal annealing furnace to effectively prevent the current crystal annealing furnace from being opened manually, and the screw needs to be rotated and tightened manually during manual opening. Frequent opening is time-consuming and labor-intensive, and cannot quickly open the work. INVENTION CONTENTS

[0005] To solve the problems raised in the background art, the purpose of the present utility model is to provide a crystal annealing furnace with the advantages of efficient automatic cover opening, solving the problem of current crystal annealing furnace use, which is opened manually, and the screw needs to be rotated and tightened manually during manual opening. Frequent opening is time-consuming and labor-intensive, and cannot quickly open the work.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: a crystal annealing furnace, comprising a crystal annealing furnace body, a cover plate slidingly connected to the front of the crystal annealing furnace body, a limiting assembly arranged on both sides of the crystal annealing furnace body, a fixed plate fixedly connected to the top of the crystal annealing furnace body, and a transmission assembly fixedly installed on the back of the fixed plate.

[0007] The limiting assembly is used to limit the two sides of the cover plate.

[0008] The transmission assembly is used to control the position of the cover plate.

[0009] As the utility model prefers, the limiting assembly includes a limiting sleeve, the limiting sleeve is fixedly connected to the outside of the crystal annealing furnace body, a limiting slider is slidably connected to the inside of the limiting sleeve, and the limiting slider is fixedly connected to the outside of the cover plate.

[0010] As the utility model prefers, a fixing groove is formed in the outside of the limiting sleeve, a supporting rod is slidably connected to the inside of the fixing groove, and the supporting rod is fixedly connected to the outside of the limiting slider.

[0011] As the utility model prefers, the transmission assembly includes a speed reducer motor, the speed reducer motor is fixedly connected to the back of the fixing plate, a first helical gear is fixedly connected to the output end of the speed reducer motor, a second helical gear is engaged with the top of the first helical gear, a roller holder is fixedly connected to the back of the crystal annealing furnace body, the second helical gear is movably connected to the front of the roller holder, a metal rod is fixedly connected to the back of the roller holder, a steel rope is fixedly connected to the surface of the metal rod, and the bottom of the steel rope is fixedly connected to the top of the cover plate.

[0012] As the utility model prefers, a support is fixedly connected to the top of the fixing plate, a limiting rod is movably connected to the inside of the support, and the limiting rod is slidably connected to the steel rope.

[0013] As the utility model prefers, a protective cover is fixedly installed on the back of the fixing plate, and the protective cover is located on the outside of the speed reducer motor.

[0014] As the utility model prefers, a plurality of heat dissipation openings are formed in the surface of the protective cover.

[0015] Compared with the prior art, the utility model has the advantages of the following:

[0016] 1. The output end of the motor drives the first helical gear to rotate, the first helical gear drives the second helical gear to rotate, the second helical gear drives the metal rod to wind the steel rope, the steel rope drives the cover plate to move upward, the cover plate continuously moves to the highest position, the crystal workpiece is easily taken, the steel rope slides on the top of the limiting rod, the steel rope is limited, the manual opening mode of the cover plate is replaced, the cover plate is quickly opened, and the functionality is relatively high.

[0017] 2. The limiting sleeve is provided, can slide with the limiting slider, can guarantee the stability of the cover plate, the safety is relatively high, and the problem of shaking of the limiting slider is not prone to occur. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic view of the utility model structure;

[0019] Figure 2 It is a three-dimensional expanded schematic view of the structure of the utility model;

[0020] Figure 3 It is a three-dimensional rear view schematic view of the structure of the utility model;

[0021] Figure 4 It is a three-dimensional expanded schematic view of the structure of the utility model Figure 3 It is an enlarged schematic view of position A in the utility model;

[0022] Figure 5 It is an enlarged schematic view of position B in the utility model. Figure 2

[0023] In the figure: 1, crystal annealing furnace body; 2, cover plate; 3, limiting assembly; 31, limiting sleeve; 32, limiting sliding block; 4, fixed plate; 5, transmission assembly; 51, speed reducer motor; 52, first helical gear; 53, second helical gear; 54, roller frame; 55, metal rod; 56, steel rope; 6, fixed groove; 7, support rod; 8, support; 9, limiting rod; 10, protective cover; 11, heat dissipation port. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0025] As Figures 1 to 5 shown, the utility model provides a kind of crystal annealing furnace, including crystal annealing furnace body 1, the front surface of crystal annealing furnace body 1 is slidably connected with cover plate 2, both sides of crystal annealing furnace body 1 are provided with limiting assembly 3, the top of crystal annealing furnace body 1 is fixedly connected with fixed plate 4, the back surface of fixed plate 4 is fixedly installed with transmission assembly 5;

[0026] Limiting assembly 3 is used to limit both sides of cover plate 2;

[0027] Transmission assembly 5 is used to control the position of cover plate 2.

[0028] Reference Figure 5 , limiting assembly 3 includes limiting sleeve 31, limiting sleeve 31 is fixedly connected on the outside of crystal annealing furnace body 1, limiting sleeve 31 is slidably connected with limiting sliding block 32 in the inside, limiting sliding block 32 is fixedly connected with the outside of cover plate 2.

[0029] ​As a technical optimization scheme of the utility model, through the setting of the limiting sleeve 31, sliding between the limiting sleeve 31 and the limiting sliding block 32 can be realized, the stability of the cover plate 2 can be ensured, the safety is relatively high, and the problem of shaking of the limiting sliding block 32 is not prone to occur.

[0030] Reference Figure 5 The outer side of the limiting sleeve 31 is provided with a fixing groove 6, the inside of the fixing groove 6 is slidably connected with a supporting rod 7, and the supporting rod 7 is fixedly connected to the outer side of the limiting sliding block 32.

[0031] As a technical optimization scheme of the utility model, through the setting of the fixing groove 6, sliding between the fixing groove 6 and the supporting rod 7 can be realized, the limiting sliding block 32 can be supported by the supporting rod 7, the supporting effect is excellent, and the user is convenient to use.

[0032] Reference Figure 4 The transmission assembly 5 comprises a speed reducer motor 51, the speed reducer motor 51 is fixedly connected to the back of the fixed plate 4, the output end of the speed reducer motor 51 is fixedly connected with a first helical gear 52, the top of the first helical gear 52 is engaged with a second helical gear 53, the back of the crystal annealing furnace body 1 is fixedly connected with a roller frame 54, the second helical gear 53 is movably connected with the front of the roller frame 54, the back of the roller frame 54 is fixedly connected with a metal rod 55, the surface of the metal rod 55 is fixedly connected with a steel rope 56, and the bottom of the steel rope 56 is fixedly connected with the top of the cover plate 2.

[0033] As a technical optimization scheme of the utility model, through the setting of the transmission assembly 5, the steel rope 56 can be slid, the cover plate 2 can be moved upwards, the cover plate 2 can be automatically lifted and lowered, and the safety is relatively high.

[0034] Reference Figure 3 The top of the fixed plate 4 is fixedly connected with a support 8, the inner side of the support 8 is fixedly movably connected with a limiting rod 9, and the limiting rod 9 is slidably connected with the steel rope 56.

[0035] As a technical optimization scheme of the utility model, through the setting of the support 8, the limiting rod 9 can be supported and moved, the steel rope 56 can be slid, the friction between the steel rope 56 and the limiting rod 9 is effectively reduced, and the safety is relatively high.

[0036] Reference Figure 3 The back of the fixed plate 4 is fixedly provided with a protective cover 10, and the protective cover 10 is located at the outer side of the speed reducer motor 51.

[0037] As a technical optimization scheme of the utility model, through the setting of the protective cover 10, the outer side of the speed reducer motor 51 can be protected, the protection effect is excellent, the speed reducer motor 51 is not prone to damage, and the safety is relatively high.

[0038] Reference Figure 3The surface of the protective cover 10 is provided with a plurality of heat dissipation openings 11.

[0039] As a technical optimization scheme of the utility model, the interior of the protective cover 10 can be cooled through the heat dissipation openings 11, effectively improving the heat dissipation effect of the speed reducer motor 51, and the speed reducer motor 51 can operate for a long time without overheating.

[0040] The working principle and use process of the utility model are as follows: when the user needs to open the cover plate 2, the user starts the motor, the output end of the motor drives the first helical gear 52 to rotate, the first helical gear 52 drives the second helical gear 53 to rotate, the second helical gear 53 drives the metal rod 55 to wind the steel cord 56, and the steel cord 56 drives the cover plate 2 to move upward, the cover plate 2 continuously moves to the highest position, the crystal workpiece can be conveniently taken, and the steel cord 56 slides on the top of the limiting rod 9, the steel cord 56 can be limited, and therefore the cover plate 2 can be conveniently opened.

[0041] In summary: the crystal annealing furnace is used in cooperation with the crystal annealing furnace body 1, the cover plate 2, the limiting assembly 3, the limiting sleeve 31, the limiting sliding block 32, the fixed plate 4, the transmission assembly 5, the speed reducer motor 51, the first helical gear 52, the second helical gear 53, the roller frame 54, the metal rod 55 and the steel cord 56, solves the problem that the front cover plate is manually opened, the bolt needs to be rotated and pressed during manual opening, frequent opening is time-consuming and laborious, and the work cannot be quickly opened.

[0042] It should be noted that, in this document, relationship terms such as first and second are used only to differentiate one entity or action from another, and do not necessarily require or imply that these entities or actions exist in any actual relationship or order. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0043] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A crystal annealing furnace comprising a crystal annealing furnace body (1), characterized by, The front side of the crystal annealing furnace body (1) is slidably connected with a cover plate (2), both sides of the crystal annealing furnace body (1) are provided with a limiting assembly (3), and the top of the crystal annealing furnace body (1) is fixedly connected with a fixed plate (4), the back of the fixed plate (4) is fixedly installed with a transmission assembly (5). The limiting assembly (3) is used for limiting both sides of the cover plate (2). The transmission assembly (5) is used for controlling the position of the cover plate (2).

2. A crystal annealing furnace as claimed in claim 1, characterized in that: The limiting assembly (3) comprises a limiting sleeve (31), the limiting sleeve (31) is fixedly connected to the outer side of the crystal annealing furnace body (1), the limiting sleeve (31) is slidably connected with a limiting sliding block (32), and the limiting sliding block (32) is fixedly connected to the outer side of the cover plate (2).

3. A crystal annealing furnace as defined in claim 1, wherein: The outer side of the limiting sleeve (31) is provided with a fixed groove (6), the fixed groove (6) is slidably connected with a supporting rod (7), and the supporting rod (7) is fixedly connected to the outer side of the limiting sliding block (32).

4. A crystal annealing furnace as defined in claim 1, wherein: The transmission assembly (5) comprises a speed reducer (51), the speed reducer (51) is fixedly connected to the back of the fixed plate (4), the output end of the speed reducer (51) is fixedly connected with a first helical gear (52), the top of the first helical gear (52) is engaged with a second helical gear (53), the back of the crystal annealing furnace body (1) is fixedly connected with a roller frame (54), the front side of the second helical gear (53) is movably connected with the roller frame (54), the back of the roller frame (54) is fixedly connected with a metal rod (55), the surface of the metal rod (55) is fixedly connected with a steel rope (56), and the bottom of the steel rope (56) is fixedly connected with the top of the cover plate (2).

5. A crystal annealing furnace as claimed in claim 4, characterized in that: The top of the fixed plate (4) is fixedly connected with a support (8), the inner side of the support (8) is fixedly movably connected with a limiting rod (9), and the limiting rod (9) is slidably connected with the steel rope (56).

6. A crystal annealing furnace as claimed in claim 4, wherein: The back of the fixed plate (4) is fixedly installed with a protective cover (10), and the protective cover (10) is located on the outer side of the speed reducer (51).

7. A crystal annealing furnace as claimed in claim 6, characterized in that: The surface of the protective cover (10) is provided with a plurality of heat dissipation openings (11).

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