Turbine pump assembly and chemical vapor deposition machine

Abstract

The utility model provides a turbine pump assembly and a chemical vapor deposition machine table. The turbine pump assembly comprises a lifting driving mechanism, at least two guide rails and a turbine pump, the lifting driving mechanism supports the at least two guide rails and controls the lifting of the at least two guide rails; the at least two guide rails are connected with the base in a sliding manner; the base is provided with a containing cavity for containing the bottom of the turbine pump. According to the turbine pump assembly, the base for containing the turbine pump is connected with the sliding rail, meanwhile, the sliding rail is arranged on the lifting driving mechanism, and therefore when the turbine pump of the chemical vapor deposition machine table breaks down and needs to be replaced or overhauled, the turbine pump can be conveniently and safely disassembled or assembled, manpower is reduced, and the equipment maintenance cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor processing equipment, more particularly to a turbo pump assembly and a chemical vapor deposition machine. BACKGROUND

[0002] The existing chemical vapor deposition (CVD) machine uses a high-density plasma (HDP) machine, and each working reaction cavity is equipped with a turbo pump (Turbo Pump) to extract air to obtain a lower vacuum degree (μTorr) of the reaction cavity. Generally, the turbo pump is heavy, and the space at this point is relatively narrow. When the turbo pump needs to be replaced, more manpower is required, and accidents or parts falling during the handling process are prone to occur. The replacement of the turbo pump is time-consuming, labor-intensive and inconvenient. How to improve the efficiency and safety of the replacement of the turbo pump has always been a technical problem to be solved during the maintenance of the chemical vapor deposition machine and other equipment. It should be noted that the information disclosed in the above background section is only used to strengthen the understanding of the background of the utility model, and therefore can include information that does not constitute prior art known to those skilled in the art. SUMMARY

[0003] In view of the problems in the prior art, the utility model aims to provide a turbo pump assembly and a chemical vapor deposition machine. The turbo pump assembly is provided with a lifting driving mechanism and guide rails, which facilitates the maintenance and replacement of the turbo pump and reduces the maintenance cost of the semiconductor processing equipment.

[0004] The first aspect of the utility model provides a turbo pump assembly, comprising a lifting driving mechanism, at least two guide rails, a base and a turbo pump.

[0005] The lifting driving mechanism supports the at least two guide rails and controls the lifting of the at least two guide rails.

[0006] The at least two guide rails are in sliding connection with the base.

[0007] The base is provided with a receiving cavity for accommodating the bottom of the turbo pump.

[0008] According to the first aspect of the utility model, the lifting driving mechanism comprises a plurality of hydraulic cylinders or a plurality of air cylinders.

[0009] According to the first aspect of the utility model, a support platform is provided between the lifting driving mechanism and the at least two guide rails.

[0010] According to the first aspect of the utility model, the turbo pump assembly comprises two guide rails, the base is provided with two through holes, and the two guide rails are respectively arranged in the two through holes.

[0011] According to the first aspect of the utility model, the turbine pump assembly further includes a plurality of buckles, the buckle includes a buckle seat and a buckle head matched with the buckle seat;

[0012] The buckle seat is arranged on the outer periphery of the bottom of the turbine pump, and the buckle head is arranged on the outer periphery of the base.

[0013] The buckle seat is arranged on the outer periphery of the base, and the buckle head is arranged on the outer periphery of the bottom of the turbine pump.

[0014] According to the first aspect of the utility model, the turbine pump assembly further includes an elastic member arranged in the accommodating cavity of the base.

[0015] According to the first aspect of the utility model, the turbine pump assembly further includes a control unit configured to control the lifting of the lifting driving mechanism.

[0016] The second aspect of the utility model provides a chemical vapor deposition machine, which comprises the turbine pump assembly of the first aspect.

[0017] The turbine pump assembly of the utility model is connected with the base accommodating the turbine pump and the sliding rail, and the sliding rail is arranged on the lifting driving mechanism, so that when the turbine pump of the chemical vapor deposition machine needs to be replaced or overhauled due to failure, the turbine pump can be conveniently and safely disassembled or installed, manpower is reduced, and equipment maintenance cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0018] The accompanying drawings, which are incorporated into and form part of the specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the application. Other features, objects, and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings according to these drawings without creative labor. In addition, the drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings represent the same or similar parts, and thus repeated description thereof will be omitted. Some block diagrams shown in the drawings are functional entities, which do not necessarily correspond to physically or logically independent entities.

[0019] Figure 1 It is a structural schematic view of the turbine pump assembly of an embodiment of the utility model;

[0020] Figure 2 It is a top view structural schematic view of the turbine pump assembly of an embodiment of the utility model; and

[0021] Figure 3The utility model discloses another embodiment's turbine pump assembly's structure schematic view. DETAILED DESCRIPTION

[0022] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations may, however, be implemented in many different forms and should not be construed as limited to the examples set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the scope of example implementations to those skilled in the art. The described features, structures, or characteristics can be combined in any suitable manner in one or more implementations.

[0023] In the description of the present specification, the expression of the term "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics expressed in connection with the embodiment or example are included in at least one embodiment or example of the present specification. Also, the specific features, structures, materials or characteristics expressed can be combined in any suitable manner in any one or more embodiments or examples. In addition, the skilled in the art can combine and combine the different embodiments or examples expressed in the present specification and the features of the different embodiments or examples without contradiction.

[0024] Throughout this specification, when it is said that a device is "connected" to another device, this includes not only the case of "direct connection", but also the case of "indirect connection" in which other elements are placed therebetween. The relative spatial terms such as "front", "rear", "upper", "lower" and the like can be used in order to more easily explain the relationship of one device with respect to another device illustrated in the drawings. Such terms mean not only the meaning indicated in the drawings, but also other meanings or operations of the device in use. For example, if the device in the drawing is turned upside down, a device that was explained as "below" other devices is explained as "above" other devices. Therefore, the example term of "below" includes all of the upper and lower. The device can be rotated by 90° or other angles, and the relative spatial terms are also interpreted accordingly.

[0025] Although the terms first, second, etc. can be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first interface and a second interface, etc. are distinguished from each other. Also, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises", "comprising", "includes" and / or "including" specify the presence of stated features, steps, operations, elements, components, items, categories, and / or groups but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, items, categories, and / or groups thereof. The terms "or" and "and / or" as used herein are to be interpreted as inclusive or meaning either or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". An exception to this definition will occur only when a combination of elements, functions, steps or acts are in some way inherently mutually exclusive.

[0026] Although not fully defined, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this description belongs. Terms defined in commonly used dictionaries are to be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and should not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0027] The structure of the turbine pump assembly and the chemical vapor deposition machine of the utility model will be further described below in combination with the drawings and specific embodiments. It should be understood that each specific embodiment does not limit the protection scope of the utility model.

[0028] The utility model provides a turbine pump assembly, Figure 1 The structure of the turbine pump assembly of the utility model is shown in the figure. Specifically, the turbine pump assembly comprises a lifting driving mechanism, at least two guide rails, a base and a turbine pump 9. The lifting driving mechanism is used to support the at least two guide rails, and the lifting driving mechanism controls the lifting of the at least two guide rails. The at least two guide rails are slidably connected with the base, that is, the base can move along the at least two guide rails, so as to realize the change of the position in the sliding rail plane. The turbine pump is arranged in the accommodating cavity 31 of the base. The shape of the accommodating cavity 31 needs to be matched with the bottom of the turbine pump 9 to be accommodated. For example, if the bottom of the turbine pump 9 is provided with an interface connected with a cooling water pipe, the accommodating cavity 31 needs to be designed to avoid 311 at this position.

[0029] Figure 2For the top view of the above embodiment (wherein the turbine pump is not shown), the lifting driving mechanism 1 can include four hydraulic cylinders, the basic structure of the hydraulic cylinder including a cylinder body, a piston, a piston rod, an end cover, a seal and the like, wherein one end of the piston rod is its movable end, and the movable end is connected with one end of the guide rail 2a. Of course, the lifting driving mechanism 1 can also include a plurality of air cylinders, and the movable end of the air cylinder is connected with the guide rail to control the lifting of the two guide rails. The turbine pump assembly includes two guide rails, and the two guide rails 2a are arranged in parallel. The guide rail 2a is provided with a rolling groove, and the bottom of the base 3a is provided with a ball circulating channel matched with the rolling groove of the guide rail 2a. A rolling pair is formed between one rolling groove of each guide rail 2a and one ball circulating channel of the base 3a. In the above embodiment, a support platform (not shown in the figure) can be arranged between the lifting driving mechanism 1 and the base 3a. The two parallel guide rails 2a can be arranged on one surface of the support platform, so that the lifting or lowering of the two guide rails 2a is in a plane.

[0030] Figure 3 For the structure diagram of the turbine pump assembly of another embodiment of the present application, the base 3b is provided with two through holes, and the two parallel guide rails 2b are respectively arranged in the two through holes. Similarly, the rolling groove arranged on the guide rail 2a and the ball circulating channel arranged in the through hole cooperate to form a rolling pair, which will not be described here.

[0031] In some embodiments, the turbine pump assembly can further include a plurality of buckles, the buckle including a buckle seat and a buckle head matched with the buckle seat; the buckle seat can be arranged on the outer periphery of the bottom of the turbine pump, and the buckle head is arranged on the outer periphery of the base; or the buckle seat is arranged on the outer periphery of the base, and the buckle head is arranged on the outer periphery of the bottom of the turbine pump. The buckles can be uniformly arranged on the bottom of the turbine pump or the circumference of the base. The arrangement of the buckles can prevent the turbine pump in the accommodating cavity from tilting during the movement of the base, thereby improving the stability of the turbine pump.

[0032] Further, the turbine pump assembly can further include an elastic member (not shown in the figure), which is arranged in the accommodating cavity 31 of the base, to prevent the turbine pump 9 from being damaged due to rigid collision with the accommodating cavity 31.

[0033] In some embodiments, the turbine pump assembly further includes a control unit configured to control the lifting of the lifting driving mechanism. More specifically, when the lifting driving mechanism includes a plurality of hydraulic cylinders, the control unit actually controls the hydraulic valve of the hydraulic cylinder to control the moving end of the hydraulic cylinder, so as to realize the lifting of the guide rail connected with the movable end. The lifting of the base can be more accurately controlled through the control unit.

[0034] The utility model also provides a kind of chemical vapor deposition machine platform, including above-mentioned turbine pump assembly.When the turbine pump of chemical vapor deposition machine platform fails and needs to be removed for inspection and replacement, the screw pipeline connected with the chemical vapor deposition machine platform is removed, the turbine pump is fixed with base by buckle, to prevent the turbine pump from tilting in subsequent moving process, the base is lowered by controlling unit control lifting drive mechanism, so that the turbine pump is separated from machine platform, then turbine pump or base is moved along guide rail, so that it is moved out below machine platform and then repaired and detected.When turbine pump is repaired or replaced with new turbine pump, reverse operation can be performed, i.e., turbine pump or base is moved along guide rail to the connection position below machine platform, turbine pump is raised to the connection position by controlling unit control lifting drive mechanism, turbine pump is connected with chemical vapor deposition machine platform by screw pipeline, and finally buckle is loosened to complete the installation of turbine pump.In the above process, turbine pump or operator can avoid touching other hardware of chemical vapor deposition machine platform, and accidental situations such as turbine pump tilting and falling are also avoided, which improves the efficiency of equipment repair and detection and reduces labor cost and time cost.

[0035] It should be noted that in the technical solutions of the turbine pump assembly and the chemical vapor deposition machine platform of the utility model, each functional module and module unit included therein can correspond to a specific hardware circuit in an integrated circuit structure, so only the improvement of the specific hardware circuit is involved, and the hardware part is not only a carrier for executing control software or computer programs, so the corresponding technical problems are solved and the corresponding technical effects are obtained without involving the application of any control software or computer programs, that is, the utility model only uses the improvement of the hardware circuit structure involved by these modules and units to solve the technical problems to be solved and obtain the corresponding technical effects, and the corresponding functions can be realized without the aid of specific control software or computer programs.

[0036] In summary, the turbine pump assembly of the utility model is connected with the base accommodating the turbine pump and the slide rail, and the slide rail is arranged on the lifting drive mechanism, so that when the turbine pump of the chemical vapor deposition machine platform fails and needs to be replaced or repaired, the turbine pump can be conveniently and safely disassembled or installed, and the labor is reduced to reduce the equipment maintenance cost.

[0037] The above is further detailed description of the utility model in combination with specific preferred embodiments, and the specific implementation of the utility model cannot be limited to these descriptions. For those skilled in the art, apparently, the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A turbopump assembly, characterized in that, Includes a lifting drive mechanism, at least two guide rails, a base, and a turbine pump; The lifting drive mechanism supports the at least two guide rails and controls the lifting of the at least two guide rails; The at least two guide rails are slidably connected to the base; The base is provided with a receiving cavity for accommodating the bottom of the turbine pump.

2. The turbopump assembly according to claim 1, characterized in that, The lifting drive mechanism includes multiple hydraulic cylinders or multiple pneumatic cylinders.

3. The turbopump assembly according to claim 1, characterized in that, A support platform is provided between the lifting drive mechanism and at least two guide rails.

4. The turbopump assembly according to claim 1, characterized in that, The turbopump assembly includes two guide rails, and the base is provided with two through holes, with the two guide rails respectively passing through the two through holes.

5. The turbopump assembly according to claim 1, characterized in that, It also includes multiple buckles, each buckle comprising a buckle base and a buckle head that mates with the buckle base; The fastener is disposed on the outer periphery of the bottom of the turbine pump, and the buckle head is disposed on the outer periphery of the base; or The buckle is disposed on the outer periphery of the base, and the buckle head is disposed on the outer periphery of the bottom of the turbine pump.

6. The turbopump assembly according to claim 1, characterized in that, It also includes an elastic element disposed in the receiving cavity of the base.

7. The turbopump assembly according to claim 1, characterized in that, It also includes a control unit configured to control the lifting and lowering of the lifting drive mechanism.

8. A chemical vapor deposition (CVD) equipment, characterized in that, Includes the turbopump assembly as described in any one of claims 1 to 7.

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