Airway sealing performance detection tool

Abstract

The utility model provides an air passage sealing performance detection tool, the detection tool comprises a pedestal, a ventilation cylinder and a chuck, the middle part of the pedestal is provided with a ventilation hole, one side of the ventilation hole is detachably connected with the ventilation cylinder, and the pedestal is connected with the chuck through the ventilation cylinder to form an I-shaped structure; the base is provided with at least three counterbores in the circumferential direction of the vent hole, and the counterbores are used for connecting the product and the base; the chuck is of a hollow structure, an annular groove is formed in the side, back on to the base, of the chuck, and the annular groove is used for being connected with a vacuumizing device. Through the matching design of the base, the ventilation cylinder and the chuck, a thread sleeve screw can be adopted, a thread sleeve installation link is omitted, the device is directly connected with a product, the device is convenient and rapid to install and detach, a C-shaped clamp is not needed for fixation, the gas tightness is good, the detection working procedure and the working hour can be greatly reduced, the reliability of helium leakage detection is high, and the structure is simple.

Description

TECHNICAL FIELD

[0001] The utility model belongs to welding air channel detection technical field relates to a kind of detection tool of air channel tightness, especially in kind of helium leakage detection tool of semiconductor machine platform gas distribution disc. BACKGROUND

[0002] Helium vacuum leak detection equipment is a kind of equipment using helium to carry out vacuum system leak detection, its principle is to inject helium into the system to be detected, if the system exists leakage, helium will penetrate to the outside of the system through the leakage port. Helium leak detection equipment utilizes the low density and high permeability of helium to detect the concentration of helium outside the system being tested, thereby determining whether there is a leak.

[0003] The prior art discloses a helium detection tool, comprising a first template, a second template, a driving member for driving the first template and / or the second template to move, and a sealing structure arranged between the first template and the second template. The first template and / or the second template has a detection cavity for accommodating a stop valve. The first template and / or the second template is provided with at least one air hole communicating with the detection cavity. The air hole is used to evacuate the detection cavity to meet the vacuum condition. The driving member drives the first template and / or the second template to move towards each other to close the mold to seal the detection cavity with the sealing structure.

[0004] The prior art also discloses a tool clamp for detecting the air tightness of a water channel, comprising an interface clamp and a workpiece clamp. The interface clamp and the workpiece clamp are arranged in a vacuum detection box. The interface clamp comprises a detection cylinder, a moving cylinder, a support rod, a fixed rod, a support plate and a detection hose. The detection hose communicates with the detection cylinder. The two ends of the support rod are hingedly connected to the moving cylinder and the fixed rod, respectively. When the moving cylinder moves, one end of the support rod moves, causing the other end of the support rod to push the fixed rod to rotate. The fixed rod presses the support plate against the inner wall of the water channel.

[0005] The prior art also discloses a helium detection device, comprising a device working cavity. A gas inlet is arranged at the top center of the device working cavity. A gas outlet is arranged at the bottom center of the device working cavity. A helium detection probe and auxiliary sealing blocks symmetrically arranged with each other are arranged on the inner side wall of the device working cavity. An upper sealing ring for sealing detection of the top of the injector cartridge is further arranged below the gas inlet. A sealing gasket tool is arranged above the gas outlet. A combined sealing gasket is embedded in the sealing gasket tool. The combined sealing gasket comprises a sealing gasket base and a sealing gasket ring. An embedding groove is arranged in the sealing gasket base. The sealing gasket ring is embedded and installed in the embedding groove. A gas valve sleeve group for sealing detection of the bottom of the injector cartridge is further arranged on the combined sealing gasket.

[0006] At present, the prior art still has the problems of complex structure, difficult disassembly, need of auxiliary clamp to clamp the product, increased detection time, and general detection accuracy, therefore, it is urgent to design and develop an airway sealing detection tool to overcome the defects of the prior art and meet the actual application requirements. Practical new type content

[0007] In view of the problems in the prior art, the purpose of the utility model is to provide an airway sealing detection tool, in the utility model, through the cooperation of the base, the air cylinder and the chuck, a silk sleeve screw can be used to eliminate the silk sleeve installation link, directly connected with the product, convenient and fast installation and disassembly, without C-shaped clamp fixation, good air tightness, can greatly reduce the detection process time, high reliability of helium leakage detection, simple structure.

[0008] To achieve this purpose, the utility model adopts the following technical solutions:

[0009] The utility model provides a kind of airway sealing detection tool, the detection tool includes base, air cylinder and chuck, the base middle part is provided with air hole, one side of the air hole is detachably connected with the air cylinder, the base is connected with the chuck and the air cylinder and is presented with work type structure;The base is provided with at least three countersunk holes in the circumferential direction of the air hole, and the countersunk hole is used to connect product and base;The chuck is hollow structure, and the side of the chuck away from the base is provided with annular groove, and the annular groove is used to connect vacuumizing device.Exemplarily, the use method of the utility model airway sealing detection tool specifically includes:

[0010] Product is placed in the position of the center air hole of the side of base away from chuck, product is fastened by the thread sleeve screw of the countersunk hole of base, after the side of chuck provided with annular groove is connected with vacuumizing device, the state of whether there is pressure relief in the vacuumizing process of product is observed by the vacuumizing operation of vacuumizing device, to detect its sealing property.

[0011] In the utility model, through the cooperation of the base, the air cylinder and the chuck, a silk sleeve screw can be used to eliminate the silk sleeve installation link, directly connected with the product, convenient and fast installation and disassembly, without C-shaped clamp fixation, good air tightness, can greatly reduce the detection process time, high reliability of helium leakage detection, simple structure.

[0012] It should be noted that the specific structure, model, etc. of the vacuumizing device in the utility model are not specially limited, and those skilled in the art can make adaptive selection according to actual conditions.

[0013] It should be noted that the at least three countersunk holes in the utility model, for example, can be 3, 4, 5, 6, 7, etc., but are not limited to the listed values, and other values not listed in the range are also applicable.

[0014] It should be noted that the specific shape of the base, the ventilation cylinder and the chuck is not specially limited in the utility model, and a person skilled in the art can make adaptive adjustment according to the actual situation.

[0015] It should be noted that a sealing ring can be arranged at the connection between the base and the product in the utility model to ensure the air tightness of detection.

[0016] It should be noted that the utility model solves the method for detecting the air tightness of the gas distribution plate welding gas channel, is convenient to install and disassemble, reduces detection process time, and speeds up product flow speed; and is simple and reliable in connection with the product and has good air tightness.

[0017] Preferably, the base is a stainless steel base.

[0018] Preferably, the ventilation cylinder is a stainless steel cylinder.

[0019] Preferably, the chuck is a stainless steel chuck.

[0020] It should be noted that stainless steel is used as the material of the overall tooling in the utility model, which can increase the service life of the tooling while ensuring the overall strength of the detection tooling, and the detection accuracy is higher.

[0021] As a preferred technical solution of the utility model, the height of the base is 5-10 cm, for example, can be 5 cm, 6 cm, 7 cm, 8 cm, 9 cm, 10 cm, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.

[0022] The height of the base in the utility model is 5-10 cm, because in this range, the air tightness is higher.

[0023] As a preferred technical solution of the utility model, the ventilation hole is a through hole, and the aperture of the ventilation hole is 5-6 mm, for example, can be 5 mm, 5.1 mm, 5.2 mm, 5.3 mm, 5.4 mm, 5.5 mm, 5.6 mm, 5.7 mm, 5.8 mm, 5.9 mm, 6 mm, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.

[0024] The aperture of the ventilation hole in the utility model is 5-6 mm, because in this range, the air tightness is higher.

[0025] As a preferred technical scheme of the utility model, the diameter of the ventilation cylinder is 15-16mm, for example, it can be 15mm, 15.1mm, 15.2mm, 15.3mm, 15.4mm, 15.5mm, 15.6mm, 15.7mm, 15.8mm, 15.9mm, 16mm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0026] As a preferred technical scheme of the utility model, the length of the ventilation cylinder is 8-10cm, for example, it can be 8cm, 8.2cm, 8.4cm, 8.6cm, 8.8cm, 9cm, 9.2cm, 9.4cm, 9.6cm, 9.8cm, 10cm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0027] The length of the ventilation cylinder in the utility model is 8-10cm, because the air tightness is higher in this range.

[0028] As a preferred technical scheme of the utility model, the end of the ventilation cylinder away from the base is detachably connected with the chuck.

[0029] Preferably, the diameter of the hollow structure of the chuck is 10-12cm, for example, it can be 10cm, 10.2cm, 10.4cm, 10.6cm, 10.8cm, 11cm, 11.2cm, 11.4cm, 11.6cm, 11.8cm, 12cm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0030] The diameter of the hollow structure of the chuck in the utility model is 10-12cm, because the air tightness is higher in this range.

[0031] As a preferred technical scheme of the utility model, the counterbore is a through hole, and the hole diameter of the counterbore is 1-1.2cm, for example, it can be 1cm, 1.02cm, 1.04cm, 1.06cm, 1.08cm, 1.1cm, 1.12cm, 1.14cm, 1.16cm, 1.18cm, 1.2cm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable; the counterbore is used for thread connection of a silk sleeve screw.

[0032] The hole diameter of the counterbore in the utility model is 1-1.2cm, because the air tightness is higher in this range.

[0033] It should be noted that the silk sleeve screw in the utility model is a component known to those skilled in the art.

[0034] As a preferred technical solution of the utility model, the depth of the annular groove is 5-6mm, for example, it can be 5mm, 5.1mm, 5.2mm, 5.3mm, 5.4mm, 5.5mm, 5.6mm, 5.7mm, 5.8mm, 5.9mm, 6mm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0035] In the utility model, the depth of the annular groove is 5-6mm, because in this range, the air tightness is higher.

[0036] As a preferred technical solution of the utility model, the connecting part of the base and the ventilation cylinder, and the connecting part of the ventilation cylinder and the chuck are provided with sealing rubber rings.

[0037] As a preferred technical solution of the utility model, the thickness of the sealing rubber ring is 2-3mm, for example, it can be 2mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, 2.8mm, 2.9mm, 3mm, etc., but is not limited to the listed values, and other values not listed in the value range are also applicable.

[0038] In the utility model, the thickness of the sealing rubber ring is 2-3mm, because in this range, the air tightness is higher.

[0039] Compared with the prior art, the utility model has the beneficial effects that:

[0040] In the utility model, through the cooperation of the base, the ventilation cylinder and the chuck, a silk sleeve screw can be used, the silk sleeve installation link is eliminated, direct connection with the product is achieved, installation and disassembly are convenient and fast, C-shaped clamps are not needed for fixation, the air tightness is good, detection process time can be greatly reduced, the reliability of helium leakage detection is high, and the structure is simple. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 The structure diagram of the airway sealing detection tool is provided for a specific embodiment of the utility model;

[0042] Among them, 1-base;2-ventilation cylinder;3-chuck;4-counter bore;5-annular groove. CONCRETE EMBODIMENT

[0043] It should be understood that, in the description of the utility model, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0044] It should be noted that, in the description of the utility model, unless otherwise specified and limited, the terms "set", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.

[0045] The technical scheme of the utility model will be further illustrated below by combining the drawings and through specific embodiments.

[0046] In one specific embodiment, the utility model provides a kind of detection tool of airway tightness, as shown in Figure 1 The detection tool includes base 1, air cylinder 2 and chuck 3, the middle part of base 1 is provided with air hole, one side of air hole is detachably connected with air cylinder 2, base 1 is connected with air cylinder 2 and chuck 3 and presents work type structure;Base 1 is provided with at least three countersunk holes 4 in the circumferential direction of air hole, and the countersunk hole 4 is used to connect product and base 1;Chuck 3 is hollow structure, and the side of chuck 3 away from base 1 is provided with annular groove 5, and annular groove 5 is used to connect vacuumizing device.

[0047] In the utility model, through the cooperation design of base 1, air cylinder 2 and chuck 3, can adopt silk sleeve screw, eliminate the silk sleeve link, directly connect with product, installation and removal are both convenient and fast, and do not need C-shaped clamp to be fixed, air tightness is good, can greatly reduce detection process working hours, and the reliability of helium leakage detection is high, and the structure is simple.

[0048] It should be noted that the specific structure, model, etc. of the vacuumizing device in the utility model is not specially limited, and the skilled person in the art can make adaptive selection according to the actual situation.

[0049] It should be noted that the at least three countersunk holes 4 in the utility model may be, for example, 3, 4, 5, 6, 7, etc., but are not limited to the listed values, and other unlisted values within the value range are also applicable.

[0050] It should be noted that the specific shape of the base 1, the breather cylinder 2 and the chuck 3 in the utility model is not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation.

[0051] It should be noted that a sealing ring can be provided at the connection between the base 1 and the product in the utility model to ensure the air tightness of the detection.

[0052] Further, the base 1 is a stainless steel base 1.

[0053] Further, the breather cylinder 2 is a stainless steel cylinder.

[0054] Further, the chuck 3 is a stainless steel chuck 3.

[0055] It should be noted that stainless steel is used as the material of the overall tooling in the utility model, which can increase the service life of the tooling while ensuring the overall strength of the detection tooling, and the accuracy of the detection is higher.

[0056] Further, the height of the base 1 is 5-10 cm, for example, it can be 5 cm, 6 cm, 7 cm, 8 cm, 9 cm, 10 cm, etc., but is not limited to the listed values, and other unlisted values within the value range are also applicable.

[0057] Further, the vent hole is a through hole, and the diameter of the vent hole is 5-6 mm, for example, it can be 5 mm, 5.1 mm, 5.2 mm, 5.3 mm, 5.4 mm, 5.5 mm, 5.6 mm, 5.7 mm, 5.8 mm, 5.9 mm, 6 mm, etc., but is not limited to the listed values, and other unlisted values within the value range are also applicable.

[0058] Further, the diameter of the breather cylinder 2 is 15-16 mm, for example, it can be 15 mm, 15.1 mm, 15.2 mm, 15.3 mm, 15.4 mm, 15.5 mm, 15.6 mm, 15.7 mm, 15.8 mm, 15.9 mm, 16 mm, etc., but is not limited to the listed values, and other unlisted values within the value range are also applicable.

[0059] Further, the length of the ventilation cylinder 2 is 8-10 cm, for example, it can be 8 cm, 8.2 cm, 8.4 cm, 8.6 cm, 8.8 cm, 9 cm, 9.2 cm, 9.4 cm, 9.6 cm, 9.8 cm, 10 cm, etc., but not limited to the listed values, other values not listed in this range are also applicable.

[0060] Further, the end of the ventilation cylinder 2 away from the base 1 is detachably connected to the chuck 3.

[0061] Further, the diameter of the hollow structure of the chuck 3 is 10-12 cm, for example, it can be 10 cm, 10.2 cm, 10.4 cm, 10.6 cm, 10.8 cm, 11 cm, 11.2 cm, 11.4 cm, 11.6 cm, 11.8 cm, 12 cm, etc., but not limited to the listed values, other values not listed in this range are also applicable.

[0062] Further, the counterbore hole 4 is a through hole, and the hole diameter of the counterbore hole 4 is 1-1.2 cm, for example, it can be 1 cm, 1.02 cm, 1.04 cm, 1.06 cm, 1.08 cm, 1.1 cm, 1.12 cm, 1.14 cm, 1.16 cm, 1.18 cm, 1.2 cm, etc., but not limited to the listed values, other values not listed in this range are also applicable; the counterbore hole 4 is used for threaded connection of the sleeve screw.

[0063] Further, the depth of the annular groove 5 is 5-6 mm, for example, it can be 5 mm, 5.1 mm, 5.2 mm, 5.3 mm, 5.4 mm, 5.5 mm, 5.6 mm, 5.7 mm, 5.8 mm, 5.9 mm, 6 mm, etc., but not limited to the listed values, other values not listed in this range are also applicable.

[0064] Further, the connection between the base 1 and the ventilation cylinder 2, and the connection between the ventilation cylinder 2 and the chuck 3 are provided with a sealing rubber ring.

[0065] Further, the thickness of the sealing rubber ring is 2-3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but not limited to the listed values, other values not listed in this range are also applicable.

[0066] Example 1

[0067] The present embodiment provides a detection tool for airway sealing, wherein:

[0068] The detection tool comprises a base 1, a ventilation cylinder 2 and a chuck 3, the base 1 is provided with a ventilation hole in the middle, one side of the ventilation hole is detachably connected with the ventilation cylinder 2, and the base 1 is connected with the ventilation cylinder 2 and the chuck 3 to form a work-shaped structure; the base 1 is provided with three counterbores 4 around the ventilation hole, and the counterbores 4 are used for connecting products and the base 1; the chuck 3 is a hollow structure, and the chuck 3 is provided with an annular groove 5 on the side away from the base 1, and the annular groove 5 is used for connecting a vacuumizing device.

[0069] The base 1 is a stainless steel base 1, the ventilation cylinder 2 is a stainless steel cylinder, and the chuck 3 is a stainless steel chuck 3.

[0070] The height of the base 1 is 10 cm, the ventilation hole is a through hole, the hole diameter of the ventilation hole is 6 mm, the diameter of the ventilation cylinder 2 is 15 mm, the length of the ventilation cylinder 2 is 8 cm, one end of the ventilation cylinder 2 away from the base 1 is detachably connected with the chuck 3, and the diameter of the hollow structure of the chuck 3 is 10 cm.

[0071] The counterbores 4 are through holes, and the hole diameter of the counterbores 4 is 1 cm; the counterbores 4 are used for threadedly connecting a sleeve screw.

[0072] The depth of the annular groove 5 is 5 mm, the connection between the base 1 and the ventilation cylinder 2 and the connection between the ventilation cylinder 2 and the chuck 3 are all provided with sealing rubber rings, and the thickness of the sealing rubber rings is 2 mm.

[0073] In conclusion, through the cooperation of the base 1, the ventilation cylinder 2 and the chuck 3, a sleeve screw can be used, the installation of a sleeve is omitted, the product is directly connected, the installation and dismounting are convenient and fast, the C-shaped clamp is not needed for fixing, the air tightness is good, the detection process time can be greatly reduced, the reliability of helium leakage detection is high, and the structure is simple.

[0074] The above merely describes the specific implementation of the present application, but the protection scope of the present application is not limited to this, and the skilled in the art should understand that any change or replacement within the technical range disclosed by the present application can be easily thought of by the skilled in the art, and all falls within the protection scope and disclosure range of the present application.

Claims

1. An airway tightness detection tool, characterized by, The detection tool comprises a base, a ventilation cylinder and a chuck, a ventilation hole is arranged in the middle of the base, one side of the ventilation hole is detachably connected with the ventilation cylinder, and the base is connected with the ventilation cylinder and the chuck to form a tool-shaped structure; At least three counterbores are arranged in the circumferential direction of the ventilation hole of the base, and the counterbores are used to connect products and the base; The chuck is a hollow structure, and an annular groove is arranged on the side of the chuck away from the base, and the annular groove is used to connect a vacuumizing device.

2. The airway sealing integrity detection tool of claim 1, wherein, The height of the base is 5-10 cm.

3. The airway sealing integrity detection tool of claim 1, wherein, The ventilation hole is a through hole, and the aperture of the ventilation hole is 5-6 mm.

4. The airway sealing integrity detection tool of claim 1, wherein, The diameter of the ventilation cylinder is 15-16 mm.

5. The airway sealing integrity detection tool of claim 1, wherein, The length of the ventilation cylinder is 8-10 cm.

6. The airway sealing integrity detection tool of claim 1, wherein, The end of the ventilation cylinder away from the base is detachably connected with the chuck. The diameter of the hollow structure of the chuck is 10-12 cm.

7. The airway sealing arrangement of claim 1, wherein, The counterbores are through holes, and the apertures of the counterbores are 1-1.2 cm, and the counterbores are used to threadedly connect a silk sleeve screw.

8. The airway sealing arrangement of claim 1, wherein, The depth of the annular groove is 5-6 mm.

9. The airway sealing arrangement of claim 1, wherein, Sealing rubber rings are arranged at the connection between the base and the ventilation cylinder and at the connection between the ventilation cylinder and the chuck.

10. The airway sealing arrangement of claim 9, wherein the sealing member is configured to be moved from the first position to the second position by a user. The thickness of the sealing rubber ring is 2-3 mm.

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