Mechanism for accurately aligning reflected light and transmitted light in mask plate detection

Abstract

The utility model discloses a mechanism for accurately aligning reflection light and transmission light in mask plate detection, which belongs to the technical field of mask plate detection and comprises a driving structure, a reflection optical system and a transmission illumination module. And the driving structure is used for synchronously driving the reflection optical system and the transmission illumination module. The reflection optical system and the transmission illumination module are synchronously driven by adopting the driving structure, and the reflection center and the transmission center of the reflection optical system and the transmission illumination module can be accurately aligned by utilizing a mechanical structure hard connection method.

Description

TECHNICAL FIELD

[0001] The utility model relates to a mechanism for mask plate detection reflection light and transmission light accurate alignment belongs to mask plate detection technical field. BACKGROUND

[0002] Mask plate is high-precision tool used for pattern "negative" transfer in downstream industry product manufacturing process, is the carrier of bearing pattern design and process technology and intellectual property information. Its precision and quality level will directly affect the final downstream product yield. Mask plate realizes batch production by exposing the circuit pattern of the designer to the substrate or wafer of the downstream industry.

[0003] In the manufacturing process of mask plate, optical detection is indispensable. Traditionally, the detection method based on optical principle uses microscope (or microphotographic camera) and light source to detect mask plate, which can effectively detect the existence of defects and record the position, size and shape of defects. The advantage of this method is that the detection speed is fast, and the cost is relatively low, so it is still one of the methods widely used at present.

[0004] But in actual detection, the transmission light source system is often combined with the reflection light source system. The reflection light source system is mainly used for detecting defects on the surface of the mask plate, such as scratches and stains; while the transmission light source system can penetrate the substrate to detect deeper defects, such as the shedding and fracture of the light shielding film. This comprehensive application method improves the comprehensiveness and accuracy of detection.

[0005] In the current mask plate detection equipment, there are two structures of using reflection and transmission light source systems at the same time. One is that the reflection and transmission centers are fixed and aligned, and the platform carrying the mask plate moves. The other is that the platform carrying the mask plate is fixed and does not move, and the reflection and transmission centers move at the same time. The former structure is stable and most commonly used; but this method will lead to a very large equipment, and the size of the mask plate detection is relatively small. The latter structure is not as stable as the former, and it is quite difficult to align the centers of reflection and transmission lenses when moving; but this structure will make the equipment smaller, and the size of the mask plate to be detected will be greatly increased. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a mechanism for mask plate detection reflection light and transmission light accurate alignment to solve the problems in the above background technology.

[0007] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0008] Compared with the prior art, the utility model provides a mechanism for mask plate detection reflection light and transmission light accurate alignment, including drive structure, reflection optical system and transmission illumination module, reflection optical system and transmission illumination module are up and down setting, drive structure is used for to reflection optical system and transmission illumination module carry out synchronous drive.

[0009] Further, the drive structure includes a portal frame, a synchronization seat is provided at the top of the portal frame, a synchronization frame is provided at the rear side of the synchronization seat, the synchronization frame is connected with the transmission illumination module, a sliding seat is slidably connected to the front side of the portal frame through two slide rails, the sliding seat is connected with the reflection optical system, a linear motor is arranged in the portal frame to drive the sliding seat and the synchronization seat to move, and the linear motor is a coreless linear motor.

[0010] Further, the synchronization frame is in an L-shaped structure, and reinforcing ribs are arranged at the corners of the synchronization frame.

[0011] Further, the reflection optical system comprises a mounting frame and a mounting plate, a focusing motor is arranged at the top of the mounting frame and used for driving the mounting plate to move up and down, an industrial camera interface one is arranged at the front side of the mounting plate, an automatic focusing sensor box is arranged at one side of the industrial camera interface one, an industrial camera interface two is arranged at the other side of the industrial camera interface one, and a reflection light source interface is arranged below the industrial camera interface one.

[0012] Further, the transmission illumination module comprises a micro-motion platform, a transmission lens group is arranged at the top of the micro-motion platform, a lens is arranged at the top of the transmission lens group, and a light source optical fiber is arranged at one side of the transmission lens group.

[0013] Compared with the prior art, the utility model has the beneficial effects that:

[0014] By adopting the drive structure to synchronously drive the reflection optical system and the transmission illumination module, the reflection and transmission centers of the reflection optical system and the transmission illumination module can be accurately aligned by using the method of mechanical structure hard connection. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings required to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to the structures shown in the drawings without paying creative labor for the person skilled in the art.

[0016] Figure 1 It is the overall structural schematic view of the utility model;

[0017] Figure 2 It is a structural schematic view of the driving structure of the utility model;

[0018] Figure 3 It is a structural schematic view of the reflection optical system of the utility model;

[0019] Figure 4 It is a structural schematic view of the transmission illumination module of the utility model.

[0020] In the drawing: 100, driving structure; 200, reflection optical system; 300, transmission illumination module; 101, gantry; 102, synchronous seat; 103, linear motor; 104, slide rail; 105, slide seat; 106, synchronous frame; 107, reinforcing rib; 201, mounting frame; 202, industrial camera interface one; 203, industrial camera interface two; 204, reflection light source interface; 205, automatic focusing sensor box; 206, focusing motor; 207, mounting plate; 301, micro-motion platform; 302, transmission lens group; 303, lens; 304, light source optical fiber. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] Please refer to Figures 1-4 The utility model provides a kind of technical scheme:

[0023] As Figure 1 As shown in a kind of mechanism for mask plate detection reflection light and transmission light accurate alignment, including driving structure 100, reflection optical system 200 and transmission illumination module 300, reflection optical system 200 and transmission illumination module 300 are arranged in upper and lower, driving structure 100 is used to drive reflection optical system 200 and transmission illumination module 300 synchronously, by using driving structure 100 to drive reflection optical system 200 and transmission illumination module 300 synchronously, the reflection and transmission center of reflection optical system 200 and transmission illumination module 300 can be accurately aligned using the method of mechanical structure hard connection.

[0024] As Figure 2As shown, the driving structure 100 includes a gantry 101, the top of the gantry 101 is provided with a synchronous seat 102, the rear side of the synchronous seat 102 is provided with a synchronous frame 106, the synchronous frame 106 is connected with the transmission illumination module 300, the front side of the gantry 101 is slidably connected with a sliding seat 105 through two slide rails 104, the sliding seat 105 is connected with the reflection optical system 200, the gantry 101 is provided with a linear motor 103 for driving the sliding seat 105 and the synchronous seat 102 to move, the linear motor 103 is a coreless linear motor, the synchronous frame 106 is in an L-shaped structure, the corners of the synchronous frame 106 are provided with reinforcing ribs 107, which can enhance the stability and strength of the synchronous frame 106 and ensure the stable operation of the transmission illumination module 300 during the driving process.

[0025] As shown in the figure, Figure 3 As shown, the reflection optical system 200 includes a mounting frame 201 and a mounting plate 207, the top of the mounting frame 201 is provided with a focusing motor 206 for driving the mounting plate 207 to move up and down, the front side of the mounting plate 207 is provided with an industrial camera interface one 202, one side of the industrial camera interface one 202 is provided with an automatic focusing sensor box 205, the other side of the industrial camera interface one 202 is provided with an industrial camera interface two 203, the lower side of the industrial camera interface one 202 is provided with a reflection light source interface 204, the focusing distance of the reflection optical system can be adjusted conveniently through the focusing motor 206 to adapt to different detection requirements, and the setting of multiple interfaces facilitates the connection of different detection equipment, improving the flexibility and functionality of detection.

[0026] As shown in the figure, Figure 4 As shown, the transmission illumination module 300 includes a micro-motion platform 301, the top of the micro-motion platform 301 is provided with a transmission lens group 302, the top of the transmission lens group 302 is provided with a lens 303, one side of the transmission lens group 302 is provided with a light source optical fiber 304, the micro-motion platform 301 can fine-tune the transmission lens group 302 to ensure the accuracy of the transmission light, and the light source optical fiber 304 provides stable light source for transmission illumination.

[0027] The workflow of the embodiment is: the reflective optical system 200 is connected and installed through the sliding seat 105 and the slide rail 104 of the gantry 101, ensuring that it can slide stably, the transmission illumination module 300 is connected through the synchronous frame 106 and the synchronous seat 102, and forms a stable overall structure with the gantry 101, after the linear motor 103 is started, the sliding seat 105 and the synchronous seat 102 can be driven to move at the same time, since the linear motor is a coreless linear motor, it has high precision and response speed, can realize synchronous and accurate movement of the reflective optical system 200 and the transmission illumination module 300, and ensure accurate alignment of the reflection and transmission centers, in the reflective optical system 200, the focusing motor 206 can adjust the up-down position of the mounting plate 207 according to detection requirements, so as to change the focal length of the reflective optical system, the industrial camera can be connected through the industrial camera interface one 202 and the industrial camera interface two 203, the automatic focusing sensor box 205 can assist in realizing the automatic focusing function, the reflective light source provides reflective light through the reflective light source interface 204, in the transmission illumination module 300, the light source optical fiber 304 provides light source for the transmission lens group 302, the transmission lens group 302 can be finely adjusted through the fine movement platform 301, so as to optimize the effect of the transmission light, and the lens 303 accurately projects the transmission light on the mask plate, so as to realize comprehensive and accurate detection of the mask plate.

[0028] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A mechanism for precise alignment of reflected light and transmitted light for mask plate detection, comprising a driving structure (100), a reflected optical system (200) and a transmitted illumination module (300), characterized in that, The reflective optical system (200) and the transmission illumination module (300) are arranged in an up-down mode, and the driving structure (100) is used for synchronously driving the reflective optical system (200) and the transmission illumination module (300).

2. A mechanism for precise alignment of reflected and transmitted light for mask inspection according to claim 1, wherein, The driving structure (100) comprises a gantry (101), the top of the gantry (101) is provided with a synchronous seat (102), the rear side of the synchronous seat (102) is provided with a synchronous frame (106), the synchronous frame (106) is connected with the transmission illumination module (300), the front side of the gantry (101) is slidably connected with a sliding seat (105) through two slide rails (104), the sliding seat (105) is connected with the reflective optical system (200), and the gantry (101) is internally provided with a linear motor (103) for driving the sliding seat (105) and the synchronous seat (102) to move.

3. A mechanism for precise alignment of reflected and transmitted light for mask inspection according to claim 2, wherein, The synchronous frame (106) is in an L-shaped structure, and reinforcing ribs (107) are arranged at the corners of the synchronous frame (106).

4. The mechanism for precise alignment of reflected and transmitted light for mask inspection according to claim 1, wherein, The reflective optical system (200) comprises a mounting frame (201) and a mounting plate (207), the top of the mounting frame (201) is provided with a focusing motor (206) for driving the mounting plate (207) to move up and down, the front side of the mounting plate (207) is provided with an industrial camera interface one (202), one side of the industrial camera interface one (202) is provided with an automatic focusing sensor box (205), the other side of the industrial camera interface one (202) is provided with an industrial camera interface two (203), and the lower side of the industrial camera interface one (202) is provided with a reflective light source interface (204).

5. The mechanism for precise alignment of reflected and transmitted light for mask inspection according to claim 1, wherein, The transmission illumination module (300) comprises a micro-motion platform (301), the top of the micro-motion platform (301) is provided with a transmission lens group (302), the top of the transmission lens group (302) is provided with a lens (303), and one side of the transmission lens group (302) is provided with a light source optical fiber (304).

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