Beam splitter prism adjusting device and alignment equipment

Abstract

The utility model discloses a beam splitter prism adjusting device and alignment equipment, and relates to the technical field of semiconductors. The fixing frame is used for installing the prism assembly, a first adjusting mechanism and a second adjusting mechanism are arranged on the fixing frame, the first adjusting mechanism is used for adjusting the assembling angle of the fixing frame on the vertical plane, and the second adjusting mechanism is used for adjusting the assembling angle of the prism assembly on the horizontal plane. According to the beam splitter prism adjusting device provided by the invention, the installation angles of the prism assembly on the vertical plane and the horizontal plane can be adjusted through the first adjusting mechanism and the second adjusting mechanism on the fixing frame, so that the adjustability of beam splitter prism assembly can be realized, and the beam splitter prism can be ensured to be installed and adjusted to a proper position; and accurate measurement and correction of the overlay error are realized.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to a beam splitter adjustment device and alignment equipment. Background Technology

[0002] In the semiconductor manufacturing field, due to the stringent requirements for overlay precision in photolithography, a beam splitter structure, combined with other high-precision measuring elements, can be used to accurately measure and correct overlay errors, thereby improving the production quality and performance of semiconductor chips. During beam splitter assembly, it is essential to ensure that the beam splitter is positioned correctly to achieve accurate measurement and correction of overlay errors.

[0003] Therefore, how to achieve the adjustability of the beam splitter assembly has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a beam splitter adjustment device to achieve the adjustability of beam splitter assembly.

[0005] Another object of this application is to provide an alignment device having the above-mentioned beam splitter adjustment device.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] A beam splitter adjustment device, comprising:

[0008] Prism assembly;

[0009] A mounting bracket is provided for mounting the prism assembly, and the mounting bracket is provided with a first adjustment mechanism and a second adjustment mechanism. The first adjustment mechanism is used to adjust the mounting angle of the mounting bracket on the vertical plane, and the second adjustment mechanism is used to adjust the mounting angle of the prism assembly on the horizontal plane.

[0010] Optionally, in the above-mentioned beam splitter adjustment device, the first adjustment mechanism includes a first adjustment screw disposed on the fixed frame and a locking nut adapted to the first adjustment screw, wherein the first adjustment screw is disposed perpendicular to the upper surface of the fixed frame.

[0011] Optionally, in the above-mentioned beam splitter adjustment device, the fixing frame has two mutually perpendicular rotation axes, and at least one of the first adjustment screws is provided on both sides of each rotation axis.

[0012] Optionally, in the light-splitting prism adjusting device, the second adjusting mechanism comprises a second adjusting screw for driving the prism assembly to move and an adjusting nut matched with the second adjusting screw, and the side of the fixed frame is provided with a through hole for the second adjusting screw to pass through, the second adjusting screw passes through the through hole and is threadedly matched with the adjusting nut.

[0013] Optionally, in the light-splitting prism adjusting device, the second adjusting screw comprises at least two, and the through hole is matched with the second adjusting screw, and each second adjusting screw is arranged along the horizontal direction of the side of the fixed frame.

[0014] Optionally, in the light-splitting prism adjusting device, the prism assembly comprises a mirror seat and a light-splitting prism, the light-splitting prism is fixed on the mirror seat, and the mirror seat is mounted on the fixed frame.

[0015] Optionally, in the light-splitting prism adjusting device, the mirror seat comprises a base, support side plates and a support bottom plate, the base is movably arranged on the fixed frame, the second adjusting mechanism is used for adjusting the assembly angle of the base on the horizontal plane, the support side plates comprise two oppositely arranged support side plates, the support side plates are arranged on the base, and the support bottom plate is connected between the support side plates, so that the support side plates, the support bottom plate and the base form an installation cavity for mounting the light-splitting prism, the light-splitting prism is located in the installation cavity and is bonded to the support side plates.

[0016] Optionally, in the light-splitting prism adjusting device, the mirror seat further comprises a pressing plate for fixing the light-splitting prism, and the pressing plate is located at the opening side of the installation cavity.

[0017] Optionally, in the light-splitting prism adjusting device, the fixed frame defines an installation slot for accommodating the base, the installation slot defines an adjusting space for adjusting the base, a mounting opening is formed in the bottom wall of the installation slot for the support side plates of the mirror seat to pass through, and the support side plates pass through the mounting opening so that the base is attached to the bottom wall of the installation slot.

[0018] An alignment apparatus comprising the light-splitting prism adjusting device according to any one of the preceding items.

[0019] The adjusting device for the splitting prism provided by the application can adjust the installation angle of the prism assembly in the vertical plane through the first adjusting mechanism on the fixing frame, and then adjust the installation angle of the prism assembly in the horizontal plane through the second adjusting mechanism, so that the prism assembly is adjusted to the appropriate position.

[0020] The technical features mentioned above, the technical features mentioned below, and the technical features shown in the drawings alone can be combined with each other arbitrarily, as long as the combined technical features are not contradictory. All feasible combinations of features are explicitly described herein. Any one of the multiple sub-features included in the same sentence can be applied independently, and does not have to be applied together with other sub-features. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of the provided drawings.

[0022] Figure 1 The structural schematic diagram of the adjusting device for the splitting prism provided by the embodiments of the present application is shown.

[0023] Among them, 100 is the prism assembly, 101 is the mirror seat, 1011 is the base, 1012 is the support side plate, 1013 is the installation cavity, 1014 is the pressing plate, 1015 is the light hole, and 102 is the splitting prism.

[0024] 200 is the fixing frame, and 201 is the installation slot.

[0025] 300 is the first adjusting mechanism, 301 is the first adjusting screw, 3011 is the first screw, 3012 is the second screw, 3013 is the third screw, 3014 is the fourth screw, and 302 is the locking nut.

[0026] 400 is the second adjusting mechanism, 401 is the second adjusting screw, and 402 is the adjusting nut.

[0027] 500 is a rotating shaft, 501 is a first rotating shaft, and 502 is a second rotating shaft. DETAILED DESCRIPTION

[0028] The core of the present application is to provide a light splitting prism adjusting device to realize the adjustability of light splitting prism assembly.

[0029] Another core of the present application is to provide an alignment device with the light splitting prism adjusting device.

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0031] In the field of semiconductor manufacturing, due to the strict requirement of photolithography process on overlay accuracy, the overlay error can be accurately measured and corrected by light splitting prism structure combined with other high-precision measurement elements, so as to improve the production quality and performance of semiconductor chips. When the light splitting prism is assembled, the light splitting prism needs to be adjusted to the appropriate position, so as to realize the accurate measurement and correction of the overlay error.

[0032] Therefore, as shown in Figure 1 the embodiments of the present application disclose a light splitting prism adjusting device, which comprises a prism assembly 100 and a fixing frame 200. The first adjusting mechanism 300 and the second adjusting mechanism 400 on the fixing frame 200 are used to respectively adjust the installation angle of the prism assembly 100 in the vertical plane and the horizontal plane, so as to realize the adjustability of light splitting prism assembly, so as to ensure that the light splitting prism is adjusted to the appropriate position, and realize the accurate measurement and correction of the overlay error.

[0033] The light splitting prism adjusting device disclosed in the embodiments of the present application will be specifically explained and described below. Figure 1

[0034] The prism assembly 100 is installed on the fixing frame 200, and the first adjusting mechanism 300 and the second adjusting mechanism 400 are arranged on the fixing frame 200. When the prism assembly 100 is installed, the installation angle of the fixing frame 200 in the vertical plane can be adjusted by the first adjusting mechanism 300, and since the prism assembly 100 is installed on the fixing frame 200, the installation angle of the prism assembly 100 in the vertical plane can be adjusted, and then the installation angle of the prism assembly 100 in the horizontal plane can be adjusted by the second adjusting mechanism 400, so as to realize the adjustability of light splitting prism assembly, so as to ensure that the light splitting prism is adjusted to the appropriate position, and realize the accurate measurement and correction of the overlay error.​

[0035] In some embodiments, in order to facilitate the first adjusting mechanism 300 to adjust the assembly angle of the fixed frame 200 in the vertical plane, as shown in Figure 1 The first adjusting mechanism 300 can include a first adjusting screw 301 arranged on the fixed frame 200 and a locking nut 302 matched with the first adjusting screw 301, that is, one locking nut 302 is arranged corresponding to each first adjusting screw 301, and the first adjusting screw 301 is arranged perpendicularly to the upper surface of the fixed frame 200. At the same time, a through threaded hole is arranged on the fixed frame 200, the first adjusting screw 301 is matched with the threaded hole, and the first adjusting screw 301 passes through the threaded hole from the upper surface of the fixed frame 200 and is out of the lower surface of the fixed frame 200 and abuts against the mounting base plate below the fixed frame 200, so that the length of the first adjusting screw 301 extending out of the threaded hole of the fixed frame 200 can be adjusted by screwing the first adjusting screw 301, and then the height of the fixed frame 200 at this position can be adjusted to realize the adjustment of the assembly angle of the fixed frame 200 in the vertical plane. When the adjustment is completed, the locking nut 302 is matched with the first adjusting screw 301 in the threaded manner and abuts against the upper surface of the fixed frame 200 to lock the adjusted position of the fixed frame 200. It should be noted that the mounting base plate in the above embodiment is arranged on the alignment device, and the mounting angle of the fixed frame 200 and the mounting base plate can be adjusted by the first adjusting mechanism 300, so as to realize the adjustment of the assembly angle of the prism assembly 100 in the vertical plane.

[0036] As shown in Figure 1 The fixed frame 200 can have two rotation axes 500 perpendicular to each other, so that the fixed frame 200 can be adjusted to rotate around the two rotation axes 500 in the vertical plane, thereby realizing the adjustment of the assembly angle of the fixed frame 200 in the vertical plane. In order to realize the adjustment of the fixed frame 200 to rotate around the two rotation axes 500 in the vertical plane, at least one first adjusting screw 301 can be arranged on each side of each rotation axis 500. For the convenience of understanding, the two rotation axes 500 are defined as a first rotation axis 501 and a second rotation axis 502, and the first rotation axis 501 and the second rotation axis 502 are arranged perpendicularly to each other.

[0037] In some embodiments, a first adjusting screw 301 may be provided on each side of the first rotating shaft 501. The two first adjusting screws 301 may be disposed on the second rotating shaft 502, thereby allowing the fixing frame 200 to rotate around the first rotating shaft 501 by rotating the first adjusting screws 301 on both sides of the first rotating shaft 501. Simultaneously, since both first adjusting screws 301 are located on the second rotating shaft 502, the stability of the fixing frame 200 in adjusting the assembly angle around the first rotating shaft 501 can be ensured. Similarly, a first adjusting screw 301 may be provided on each side of the second rotating shaft 502, and both first adjusting screws 301 may be disposed on the first rotating shaft 501. Thus, by rotating the first adjusting screws 301 on both sides of the second rotating shaft 502, the fixing frame 200 can rotate around the second rotating shaft 502. Simultaneously, since both first adjusting screws 301 are located on the first rotating shaft 501, the stability of the fixing frame 200 in adjusting the assembly angle around the second rotating shaft 502 can be ensured.

[0038] In some embodiments, such as Figure 1 As shown, the fixing frame 200 can adopt an approximately rectangular structure. The first rotation shaft 501 and the second rotation shaft 502 can be parallel to two adjacent sides of the fixing frame 200, respectively. Four first adjusting screws 301 can be included, and these four screws 301 can be respectively located at the four corners of the fixing frame 200. For ease of understanding, the four first adjusting screws 301 are defined as first screw 3011, second screw 3012, third screw 3013, and fourth screw 3014. Specifically, the first screw 3011 and second screw 3012 can be symmetrically arranged about the first rotation shaft 501, and the third screw 3013 and fourth screw 3014 can also be symmetrically arranged about the first rotation shaft 501. Furthermore, the first screw 3011 and fourth screw 3014 can be symmetrically arranged about the second rotation shaft 502, and the second screw 3012 and third screw 3013 can also be symmetrically arranged about the second rotation shaft 502.

[0039] When it is necessary to adjust the assembly angle of the fixing frame 200 around the first rotation axis 501, the first screw 3011 and the fourth screw 3014 can be turned in the same direction, that is, the first screw 3011 and the fourth screw 3014 are turned in the same direction, while the second screw 3012 and the third screw 3013 are turned in the opposite direction, that is, the second screw 3012 and the third screw 3013 are turned in the same direction, and the second screw 3012 and the third screw 3013 are turned in the opposite direction to the first screw 3011 and the fourth screw 3014. In this way, the fixing frame 200 can be rotated around the first rotation axis 501 to adjust the assembly angle of the fixing frame 200 around the first rotation axis 501.

[0040] When the assembly angle adjustment of the fixing frame 200 around the second rotation axis 502 is needed, the first screw rod 3011 and the second screw rod 3012 can be screwed in the same direction, i.e. the screwing directions of the first screw rod 3011 and the second screw rod 3012 are the same, while the third screw rod 3013 and the fourth screw rod 3014 are screwed in the opposite direction, i.e. the screwing directions of the third screw rod 3013 and the fourth screw rod 3014 are the same, and the screwing directions of the third screw rod 3013 and the fourth screw rod 3014 are opposite to those of the first screw rod 3011 and the second screw rod 3012, so that the fixing frame 200 can rotate around the second rotation axis 502, to realize the assembly angle adjustment of the fixing frame 200 around the second rotation axis 502.

[0041] It should be noted that in the above embodiment, only the first adjustment screw rod 301 on one side of the first rotation axis 501 can be screwed to realize the assembly angle adjustment of the fixing frame 200 around the first rotation axis 501, and only the first adjustment screw rod 301 on one side of the second rotation axis 502 can be screwed to realize the assembly angle adjustment of the fixing frame 200 around the second rotation axis 502. Of course, the four first adjustment screw rods 301 can also be screwed in the same direction to realize the lifting adjustment of the fixing frame 200. Alternatively, the first screw rod 3011 and the third screw rod 3013 can be adjusted at the same time to realize the deflection adjustment of the fixing frame 200, and the second screw rod 3012 and the fourth screw rod 3014 can also be adjusted at the same time to realize the deflection adjustment of the fixing frame 200. The specific adjustment mode of the fixing frame 200 can be determined according to the actual assembly situation.

[0042] In the above embodiment, three or more first adjustment screw rods 301 can also be arranged on each side of the rotation axis 500, which is not limited herein.

[0043] In some embodiments, as shown in Figure 1 The second adjustment mechanism 400 can include a second adjustment screw rod 401 capable of moving the prism assembly 100 and an adjustment nut 402 matched with the second adjustment screw rod 401, i.e. each second adjustment screw rod 401 corresponds to one adjustment nut 402. The side of the fixing frame 200 is provided with a through hole through which the second adjustment screw rod 401 can pass. The through hole can be a light hole, and the second adjustment screw rod 401 can be connected with the prism assembly 100. By passing the second adjustment screw rod 401 through the through hole and screwing with the adjustment nut 402, the length of the second adjustment screw rod 401 extending out of the through hole can be adjusted, and the assembly angle adjustment of the prism assembly 100 on the horizontal plane can be realized through the second adjustment screw rod 401. It should be noted that in order to facilitate the assembly between the prism assembly 100 and the fixing frame 200, the second adjustment screw rod 401 can be connected with the prism assembly 100 by a detachable connection mode such as threaded connection, plug-in connection or clamping connection.

[0044] In some embodiments, as shown inFigure 1 As shown, the second adjusting screw 401 can include at least two, and the through hole is adapted to the second adjusting screw 401, that is, each second adjusting screw 401 corresponds to a through hole, so as to ensure that each second adjusting screw 401 can be passed out of the through hole, so that the second adjusting screw 401 can be screwed with the adjusting nut 402 to realize the adjustment of the assembly angle of the prism assembly 100 in the horizontal plane. Specifically, each second adjusting screw 401 is arranged in the horizontal direction of the side of the fixing frame 200. Alternatively, the second adjusting screw 401 can be two, and the two second adjusting screws 401 are located in the same horizontal plane, so that the adjusting nuts 402 of the two second adjusting screws 401 can be simultaneously rotated in opposite directions, that is, the adjusting nuts 402 of the two second adjusting screws 401 are simultaneously screwed in different directions, so that the ends of the two second adjusting screws 401 are respectively moved towards the direction of approaching and moving away from the through hole, and then the prism assembly 100 can be driven to rotate in the horizontal plane by the two second adjusting screws 401, so as to realize the adjustment of the assembly angle of the prism assembly 100 in the horizontal plane. Of course, the adjusting nuts 402 of the two second adjusting screws 401 can also be simultaneously screwed in the same direction, so that the ends of the two second adjusting screws 401 are simultaneously moved towards the direction of approaching or moving away from the through hole, and then the prism assembly 100 can be driven to move in the horizontal plane by the two second adjusting screws 401, so as to realize the adjustment of the assembly position of the prism assembly 100 in the horizontal plane. Alternatively, only the adjusting nut 402 of any one second adjusting screw 401 can be screwed, so that the prism assembly 100 is driven to rotate in the horizontal plane by the second adjusting screw 401, so as to realize the adjustment of the assembly angle of the prism assembly 100 in the horizontal plane. The specific adjustment mode of the prism assembly 100 can be determined according to the actual assembly situation.

[0045] In the above embodiment, the second adjusting screw 401 can also be three or more, which is not limited herein.

[0046] In some embodiments, the through hole on the fixing frame 200 can also be a threaded hole, and the second adjusting screw 401 can be four, and the four second adjusting screws 401 are symmetrically distributed on the two opposite side portions of the fixing frame 200. At this time, one end of the second adjusting screw 401 can be screwed with the through hole on the fixing frame 200 and passed out, and abut against the prism assembly 100, so that the adjustment of the assembly angle of the prism assembly 100 in the horizontal plane can be realized by screwing one or more second adjusting screws 401, and the adjusting nut 402 can be locked at the same time.

[0047] In some embodiments, as Figure 1As shown, the prism assembly 100 can include a mirror seat 101 and a light splitting prism 102, and the light splitting prism 102 is fixed on the mirror seat 101, while the mirror seat 101 can be installed on the fixing frame 200. Specifically, the mirror seat 101 can include a base 1011, support side plates 1012, and a support bottom plate. Among them, the base 1011 can be movably arranged on the fixing frame 200, and the second adjusting mechanism 400 can drive the base 1011 to move on the horizontal plane through the second adjusting screw 401, so as to realize the adjustment of the assembly angle of the prism assembly 100 on the horizontal plane. The support side plates 1012 can include two oppositely arranged support side plates 1012 arranged on the base 1011, and the support bottom plate is connected between the two support side plates 1012, so that the support side plates 1012, the support bottom plate and the base 1011 form an installation cavity 1013, so that the light splitting prism 102 can be bonded with the two support side plates 1012 through UV glue respectively, so that the light splitting prism 102 is located in the installation cavity 1013.

[0048] In some embodiments, as shown in Figure 1 In order to ensure the reliability of the installation of the light splitting prism 102, the mirror seat 101 further includes a pressing plate 1014, and the pressing plate 1014 is located at the opening side of the installation cavity 1013, and the pressing plate 1014 is connected and fixed with the two support side plates 1012 and the support bottom plate through bolts and other fasteners respectively, so as to realize the fixation of the light splitting prism 102 and prevent the light splitting prism 102 from being pulled out from the opening side of the installation cavity 1013. At the same time, in order to ensure the amount of light, light holes 1015 can be formed on the two support side plates 1012 and the pressing plate 1014, so that light can enter the light splitting prism 102 through the light holes 1015. It should be noted that the pressing plate 1014 can be arranged only at the opening position of one side of the installation cavity 1013, and the opening of the other side of the installation cavity 1013 can be matched with other optical elements on the alignment equipment to realize accurate measurement and correction of overlay error.

[0049] In some embodiments, as shown in Figure 1 In order to facilitate the installation of the prism assembly 100 and the fixing frame 200, the fixing frame 200 has an installation groove 201 that can accommodate the base 1011, and the side wall of the installation groove 201 and the outer wall of the base 1011 have an adjustment space that can adjust the position of the base 1011, so that the base 1011 can be moved on the horizontal plane through the second adjusting screw 401 of the second adjusting mechanism 400, and the assembly angle of the prism assembly 100 on the horizontal plane can be adjusted. At the same time, an installation opening is formed on the bottom wall of the installation groove 201 for the support side plates 1012 of the mirror seat 101 to pass through. When the light splitting prism 102 and the mirror seat 101 are assembled, the prism assembly 100 can pass through the installation opening, so that the base 1011 is attached to the bottom wall of the installation groove 201, thereby realizing the quick installation of the prism assembly 100 and the fixing frame 200.

[0050] The application further discloses an aligning device comprising the beam splitter prism adjusting device disclosed in the above embodiments, so that the beam splitter prism adjusting device has all the technical effects of the above beam splitter prism adjusting device, which will not be repeated herein.

[0051] The terms "first", "second", and the like in the description and in the claims of the present application and in the above drawings do not denote any order, quantity, or importance, but are used to distinguish different objects. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but can include steps or units that are not listed.

[0052] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the application. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the application. Therefore, the application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A spectroscopic prism adjustment device, characterized by, The utility model relates to a prism assembly (100) and a fixing frame (200) for mounting the prism assembly (100), wherein the fixing frame (200) is provided with a first adjusting mechanism (300) and a second adjusting mechanism (400), the first adjusting mechanism (300) is used for adjusting the assembly angle of the fixing frame (200) in the vertical plane, and the second adjusting mechanism (400) is used for adjusting the assembly angle of the prism assembly (100) in the horizontal plane. The first adjusting mechanism (300) comprises a first adjusting screw (301) arranged on the fixing frame (200) and a locking nut (302) matched with the first adjusting screw (301), and the first adjusting screw (301) is arranged perpendicularly to the upper surface of the fixing frame (200). The fixing frame (200) has two rotation axes (500) perpendicular to each other, and at least one first adjusting screw (301) is arranged on each side of the rotation axis (500).

2. The spectroscopic prism adjustment device according to claim 1, characterized by The second adjusting mechanism (400) comprises a second adjusting screw (401) for driving the prism assembly (100) to move and an adjusting nut (402) matched with the second adjusting screw (401), and the side of the fixing frame (200) is provided with a through hole for the second adjusting screw (401) to pass through, the second adjusting screw (401) passes through the through hole and is threadedly matched with the adjusting nut (402).

3. The spectroscopic prism adjustment device of claim 2, wherein, The second adjusting screw (401) comprises at least two, and the through hole is matched with the second adjusting screw (401), and each second adjusting screw (401) is arranged in the horizontal direction of the side of the fixing frame (200).

4. The spectroscopic prism adjustment device of claim 1, wherein, The prism assembly (100) comprises a mirror seat (101) and a light splitting prism (102), the light splitting prism (102) is fixed on the mirror seat (101), and the mirror seat (101) is mounted on the fixing frame (200).

5. The spectroscopic prism adjustment device of claim 4, wherein, The mirror seat (101) comprises a base (1011), a support side plate (1012) and a support bottom plate, the base (1011) is movably arranged on the fixing frame (200), the second adjusting mechanism (400) is used for adjusting the assembly angle of the base (1011) in the horizontal plane, the support side plate (1012) comprises two oppositely arranged support side plates (1012), the two support side plates (1012) are arranged on the base (1011), and the support bottom plate is connected between the two support side plates (1012), so that the support side plate (1012), the support bottom plate and the base (1011) form an installation cavity (1013) for mounting the light splitting prism (102), and the light splitting prism (102) is located in the installation cavity (1013) and is bonded to the support side plate (1012).

6. The spectroscopic prism adjustment device of claim 1, wherein, The mirror seat (101) further comprises a pressing plate (1014) for fixing the light splitting prism (102), and the pressing plate (1014) is located at the opening side of the installation cavity (1013).

7. The spectroscopic prism adjustment device of claim 6, wherein, ​ 8. The spectroscopic prism adjustment device of claim 7, wherein, ​ 9. The spectroscopic prism adjustment device of claim 7, wherein, The fixing frame (200) limits a mounting groove (201) for accommodating the base (1011), the mounting groove (201) limits an adjusting space for adjusting the base (1011) inside, a mounting opening for the supporting side plate (1012) of the mirror base (1011) to pass through is arranged on the bottom wall of the mounting groove (201), the supporting side plate (1012) passes through the mounting opening, so that the base (1011) is attached to the bottom wall of the mounting groove (201).

10. An alignment apparatus, characterized by, The spectroscope prism adjusting device comprises the adjusting device according to any one of claims 1-9.

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