Silicon wafer positioning slide holder

Abstract

The utility model discloses a silicon wafer positioning slide holder, which comprises a mounting bottom plate, a fixing frame is vertically mounted on the mounting bottom plate, a basket supporting plate is mounted on the fixing frame in a lifting and sliding manner, the basket supporting plate supports a basket, and a lifting adjusting device for lifting and sliding the basket supporting plate is arranged on the mounting bottom plate. A signal barrier plate is arranged in the fixing frame, a plurality of notches are evenly formed in the signal barrier plate at intervals, a sliding sensor sliding on the signal barrier plate is arranged on the flower basket supporting plate, the notches correspond to silicon wafer grooves in the flower basket in a one-to-one mode, and a bearing plate is installed on the fixing frame. A fixed sensor for sensing the bottom of the silicon wafer is arranged on the bearing plate; the slide holder can accurately detect whether the silicon wafers are placed on the silicon wafer grooves in the flower basket, avoids invalid clamping of a manipulator, and improves the efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer carrying, in particular to a positioning silicon wafer carrier. BACKGROUND

[0002] In the process of silicon wafer production and storage, the silicon wafers are often stored in flower baskets for convenient transfer and processing. After a group of silicon wafers are processed, they need to be stored in the flower baskets again and transferred to the next process. The silicon wafers in the flower baskets are usually clamped by a mechanical hand. The flower baskets are evenly distributed with several layers of silicon wafer slots for placing silicon wafers. During the clamping process of the mechanical hand, the silicon wafers may be placed in the silicon wafer slots with less or missed placement, which causes the mechanical hand to fail to clamp the corresponding silicon wafers after being inserted into the corresponding silicon wafer slot in the next process. The mechanical hand performs an invalid clamping, wasting clamping time and reducing efficiency. SUMMARY

[0003] The technical problem to be solved by the utility model is to provide a positioning silicon wafer carrier which can accurately detect whether the silicon wafer slots in the flower basket are evenly placed with silicon wafers, avoid invalid clamping by the mechanical hand, and improve efficiency.

[0004] To solve the above technical problems, the technical scheme of the utility model is as follows: a positioning silicon wafer carrier, comprising a mounting bottom plate, a fixed frame vertically installed on the mounting bottom plate, a flower basket support plate installed on the fixed frame in a lifting and sliding manner, the flower basket support plate supporting a flower basket, a lifting and adjusting device for lifting and sliding the flower basket support plate provided on the mounting bottom plate, a signal blocking plate provided in the fixed frame, a plurality of notches evenly and spacedly provided on the signal blocking plate, a sliding sensor provided on the flower basket support plate and sliding on the signal blocking plate, the notches corresponding one by one to the silicon wafer slots on the flower basket, a bearing plate installed on the fixed frame, and a fixed sensor provided on the bearing plate and sensing the bottom of the silicon wafer.

[0005] As a preferred scheme, a guide column is vertically installed in the fixed frame, a lifting plate is installed on the guide column in a lifting and sliding manner, the sliding sensor is installed on the lifting plate, the lifting plate is connected to the flower basket support plate, the lifting and adjusting device comprises an adjusting lead screw rotatably installed on the fixed frame, a threaded hole threadedly matched with the lead screw is provided on the lifting plate, and the adjusting lead screw is driven by a rotating power device.

[0006] As a preferred scheme, a manual adjusting mechanism for adjusting the height of the bearing plate is provided on the fixed frame.

[0007] As a preferred scheme, the manual adjusting mechanism comprises a guide rod fixedly installed on the fixed frame, and the bearing plate is slidably installed on the guide rod, and a fixed seat is installed on the fixed frame, and a manual screw rod is rotatably installed on the fixed seat, and the manual screw rod is threaded through the bearing plate.

[0008] As a preferred scheme, the rotating power device comprises a driving motor, the adjusting screw rod is rotatably installed through the installation base plate, the driving motor is fixedly installed above the installation base plate, and a belt transmission structure is arranged between the driving motor and the adjusting screw rod.

[0009] As a preferred scheme, the flower basket supporting plate is provided with a positioning structure for positioning the flower basket.

[0010] After the above technical scheme is adopted, the effect of the present application is that: a positioning silicon wafer carrier stage is provided, which comprises an installation base plate, a fixed frame is vertically installed on the installation base plate, a flower basket supporting plate is slidably installed on the fixed frame, the flower basket supporting plate supports the flower basket, an elevating adjusting device for sliding the flower basket supporting plate is arranged on the installation base plate, a signal blocking plate is arranged in the fixed frame, a plurality of notches are uniformly and spacedly arranged on the signal blocking plate, a sliding sensor is arranged on the flower basket supporting plate and slides on the signal blocking plate, the notches correspond to the silicon wafer grooves on the flower basket one by one, a bearing plate is installed on the fixed frame, and a fixed sensor for sensing the bottom of the silicon wafer is arranged on the bearing plate; first, the flower basket is placed on the flower basket supporting plate, then the elevating adjusting device adjusts the height of the flower basket supporting plate, the sliding sensor slides on the signal blocking plate, when passing through the notches on the signal blocking plate, the sliding sensor senses and stops the flower basket supporting plate from descending, at the same time, the fixed sensor cooperates to detect whether there is a silicon wafer in the silicon wafer groove in the flower basket, then sends an instruction to the mechanical hand to clamp, and the above operation is repeated; the carrier stage can accurately detect whether there is a silicon wafer in each silicon wafer groove in the flower basket, avoids invalid clamping by the mechanical hand, and improves the efficiency.

[0011] In addition, a guide column is vertically installed in the fixed frame, an elevating plate is slidably installed on the guide column, the sliding sensor is installed on the elevating plate, the elevating plate is connected to the flower basket supporting plate, the elevating adjusting device comprises an adjusting screw rod rotatably installed on the fixed frame, a threaded hole matched with the screw rod is arranged on the elevating plate, and the adjusting screw rod is driven by a rotating power device; in this way, the flower basket supporting plate can be elevated and lowered along the guide column through the elevating plate, the elevating plate can be controlled to have an elevating speed on the guide column by driving the screw rod to rotate through the rotating power device, and the flower basket supporting plate can be stably elevated and lowered.

[0012] In addition, a manual adjusting mechanism for adjusting the height of the bearing plate is arranged on the fixed frame, so that the bearing plate and the fixed sensor can be effectively adjusted to have a small distance, the fixed sensor can be more accurately contacted with the silicon wafer, and the flexibility of positioning the silicon wafer can be effectively improved.

[0013] Further, the manual adjusting mechanism comprises a guide rod fixedly installed on a fixed frame, the bearing plate is slidably installed on the guide rod, a fixed seat is installed on the fixed frame, a manual screw rod is rotatably installed on the fixed seat, and the manual screw rod is threaded through the bearing plate.

[0014] Further, the rotating power device comprises a driving motor, the adjusting screw rod is rotatably installed through the installation base plate, the driving motor is fixedly installed above the installation base plate, and a belt transmission structure is arranged between the driving motor and the adjusting screw rod.

[0015] Further, the flower basket supporting plate is provided with a positioning structure for positioning the flower basket, so that the flower basket can be quickly placed and positioned accurately, thereby improving the precision. BRIEF DESCRIPTION OF DRAWINGS

[0016] The utility model will be further described below in combination with the drawings and embodiments.

[0017] Fig. 1 is the perspective view of the utility model embodiment;

[0018] Fig. 2 is the schematic diagram of the manual adjusting mechanism of the utility model embodiment;

[0019] Fig. 3 is the schematic diagram of the structure at the sliding sensor and the signal blocking plate of the utility model embodiment;

[0020] In the drawings: 1, installation base plate; 2, fixed frame; 3, flower basket supporting plate; 4, flower basket; 5, signal blocking plate; 6, notch; 7, sliding sensor; 8, silicon wafer groove; 9, bearing plate; 10, fixed sensor; 11, guide column; 12, lifting plate; 13, adjusting screw rod; 14, threaded hole; 15, connecting support rod; 16, guide rod; 17, fixed seat; 18, manual screw rod; 19, stop block; 20, driving motor; 21, driving wheel; 22, driven wheel; 23, positioning block; 24, mounting seat. DETAILED DESCRIPTION

[0021] The utility model will be further described below in combination with the drawings and embodiments.

[0022] As Figs. 1-3As shown, a positioning silicon wafer carrier platform includes a mounting base plate 1, a fixed frame 2 vertically mounted on the mounting base plate 1, a flower basket support plate 3 vertically slidingly mounted on the fixed frame 2, the flower basket support plate 3 supporting a flower basket 4, the mounting base plate 1 being provided with a lifting adjusting device for lifting and sliding the flower basket support plate 3, the fixed frame 2 being provided with a signal blocking plate 5, the signal blocking plate 5 being uniformly and spacedly provided with a plurality of notches 6, the flower basket support plate 3 being provided with a sliding sensor 7 sliding on the signal blocking plate 5, the notches 6 corresponding to silicon wafer grooves 8 on the flower basket 4, and the fixed frame 2 being provided with a bearing plate 9, the bearing plate 9 being provided with a fixed sensor 10 sensing the bottom of the silicon wafer.

[0023] In the embodiment, a guide column 11 is vertically mounted in the fixed frame 2, a lifting plate 12 is vertically slidingly mounted on the guide column 11, the sliding sensor 7 is mounted on the lifting plate 12, the lifting plate 12 is connected to the flower basket support plate 3, the lifting adjusting device includes an adjusting screw 13 rotatingly mounted on the fixed frame 2, the lifting plate 12 is provided with a threaded hole 14 threadedly cooperating with the screw, and the adjusting screw 13 is driven by a rotating power device; the guide column 11 is fixedly mounted in the fixed frame 2, determining the lifting direction of the flower basket support plate 3, the adjusting screw 13 is arranged side by side with the guide column 11, and the adjusting screw 13 can rotate around its center, so that the lifting plate 12 is lifted along the guide column 11, and the flower basket support plate 3 is integrally connected to the lifting plate 12 through a connecting support rod 15, so that the flower basket support plate 3 and the lifting plate 12 are synchronously lifted, and the flower basket support plate 3 supports the flower basket 4 on both sides, ensuring good support and not affecting the lifting operation; and the signal blocking plate 5 is fixedly mounted in the fixed frame 2, and the sliding sensor 7 is fixedly mounted on the side surface of the lifting plate 12, so that when the lifting plate 12 slides, the sliding sensor 7 can slide along the signal blocking plate 5, and the notches 6 on the signal blocking plate 5 correspond to the silicon wafer grooves 8 in the flower basket 4, so that when the sliding sensor 7 passes through the notches 6, it indicates that the flower basket support plate 3 has been lowered to the corresponding silicon wafer groove 8, and the fixed sensor 10 cooperates to detect whether a silicon wafer is placed in the silicon wafer groove 8, so as to provide double protection and avoid invalid clamping by the mechanical hand, improving the accuracy; the fixed sensor 10 and the sliding sensor 7 in the embodiment are both existing structures on the market, and thus are not described in detail herein.

[0024] As shown in the drawings, Fig. 2 The fixed frame 2 is provided with a manual adjusting mechanism for adjusting the height of the bearing plate 9, so that the bearing plate 9 and the fixed sensor 10 can be effectively lifted and adjusted by a small distance, the fixed sensor 10 can more accurately contact the silicon wafer, and the flexibility of the silicon wafer positioning can be effectively improved.

[0025] In the embodiment, the manual adjusting mechanism comprises guide rods 16 fixedly installed on the fixed frame 2, the carrier plate 9 is slidably installed on the guide rods 16, a fixed seat 17 is installed on the fixed frame 2, a manual screw rod 18 is rotatably installed on the fixed seat 17, the manual screw rod 18 is screwed through the carrier plate 9, the carrier plate 9 extends out of the fixed frame 2, a mounting seat 24 is arranged on the rear side of the fixed frame 2, the guide rods 16 are fixedly installed on the mounting seat 24, the guide rods 16 are provided with two, and the guide rods 16 are provided with stop blocks 19 for limiting the lifting range of the carrier plate 9, the carrier plate 9 is lifted along the guide rods 16, and the manual screw rod 18 is manually rotated to form a screw nut structure through the carrier plate 9 and the manual screw rod 18, so that the carrier plate 9 can drive the fixed sensor 10 to be finely adjusted, the fixed sensor 10 can be more accurately contacted with the silicon wafer, the structure is simple, and the operation is convenient.

[0026] Further, the rotating power device comprises a driving motor 20, the adjusting screw rod 13 is rotatably installed through the mounting base plate 1, the driving motor 20 is fixedly installed above the mounting base plate 1, and a belt transmission structure is arranged between the driving motor 20 and the adjusting screw rod 13; a driving wheel 21 is arranged on the output shaft of the driving motor 20, a driven wheel 22 is arranged on the adjusting screw rod 13, the driving wheel 21 and the driven wheel 22 are located below the mounting base plate 1, and the driving wheel 21 and the driven wheel 22 are directly transmitted through a transmission belt, so that good transmission efficiency is ensured, the installation of the driving motor 20 is facilitated, and the structure can be effectively made more compact.

[0027] In the embodiment, the flower basket supporting plate 3 is provided with a positioning structure for positioning the flower basket 4, the fixed frame 2 needs to be accurately placed in the flower basket 4 for descending the flower basket 4 without being affected, therefore, positioning blocks 23 are arranged on the adjacent corners of the two sides of the flower basket supporting plate 3, the positioning blocks 23 are provided with shapes matched with the adjacent corners of the two sides of the flower basket 4, for abutting against the flower basket 4, facilitating the quick placement of the flower basket 4, and improving the accuracy.

[0028] The working principle of the embodiment is as follows: the flower basket 4 is placed on the flower basket supporting plate 3 through the positioning blocks 23, then the driving motor 20 rotates the driving wheel 21 to drive the transmission belt to rotate the driven wheel 22, so that the adjusting screw rod 13 starts to rotate to drive the lifting plate 12 to descend, at this time, the sliding sensor 7 on the lifting plate 12 also descends until the gap 6 of the signal blocking plate 5, and the descending is paused, meanwhile, the fixed sensor 10 detects whether there is a silicon wafer on the silicon wafer groove 8 in the flower basket 4, if there is a silicon wafer, the mechanical hand clamps the silicon wafer, if there is no silicon wafer, the flower basket supporting plate 3 continues to descend, and then the above operation is repeated.

[0029] The above-described embodiments are only preferred embodiments of the present application, and are not intended to limit the scope of the present application. Various modifications and improvements can be made to the technical solutions of the present application without departing from the design spirit of the present application, and all such modifications and improvements shall fall within the protection scope of the present application as defined by the claims.

Claims

1. A silicon wafer positioning stage, comprising a mounting base plate, characterized in that: A fixed frame is vertically mounted on the mounting base. A flower basket support plate is slidably mounted on the fixed frame, supporting the flower basket. The mounting base is equipped with a lifting adjustment device for the slidable flower basket support plate. A signal blocking plate is provided inside the fixed frame. Several notches are evenly spaced on the signal blocking plate. A sliding sensor that slides on the signal blocking plate is provided on the flower basket support plate. The notches correspond one-to-one with the silicon wafer slots on the flower basket. A carrier plate is mounted on the fixed frame, and a fixed sensor that senses the bottom of the silicon wafer is provided on the carrier plate.

2. The silicon wafer positioning stage as described in claim 1, characterized in that: A guide column is vertically installed inside the fixed frame, and a lifting plate is slidably mounted on the guide column. A sliding sensor is installed on the lifting plate, and the lifting plate is connected to the basket support plate. The lifting adjustment device includes an adjusting screw rotatably mounted on the fixed frame. The lifting plate is provided with a threaded hole that mates with the screw thread. The adjusting screw is driven by a rotation power device.

3. A silicon wafer positioning stage as described in claim 2, characterized in that: The fixed frame is equipped with a manual adjustment mechanism for adjusting the height of the support plate.

4. A silicon wafer positioning stage as described in claim 3, characterized in that: The manual adjustment mechanism includes a guide rod fixedly installed on a fixed frame, a bearing plate slidably mounted on the guide rod, a fixed seat installed on the fixed frame, and a manual screw rotatably installed on the fixed seat, the manual screw threaded through the bearing plate.

5. A silicon wafer positioning stage as described in claim 4, characterized in that: The rotational power device includes a drive motor, the adjusting screw rotates through the mounting base plate, the drive motor is fixedly installed above the mounting base plate, and a belt drive structure is provided between the drive motor and the adjusting screw.

6. A silicon wafer positioning stage as described in claim 5, characterized in that: The flower basket support plate is equipped with a positioning structure for positioning the flower basket.

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