Visual positioning clamp for cutting single crystal wafer

Abstract

The utility model relates to the technical field of single crystal wafer positioning clamps, in particular to a visual positioning clamp for single crystal wafer cutting, which comprises a clamping component and an abutting component. The clamping component comprises a cylindrical rod, an inserting groove is formed in one end face of the cylindrical rod in the axis direction of the cylindrical rod, and external threads are arranged on the outer circumference of the cylindrical rod. The abutting part comprises a box body, one side of the box body is provided with a through hole, and the through hole can be in threaded connection with the external threads. According to the visual positioning clamp for cutting the single crystal wafer, the insertion groove is formed in one end face of the cylindrical rod, the single crystal wafer can be conveniently and rapidly clamped and fixed, the cylindrical rod and the box body are provided with the external threads and the threaded holes which are matched with each other, movement of the single crystal wafer and the cylindrical rod can be limited during cutting, meanwhile, the visibility of the single crystal wafer is improved, and the service life of the single crystal wafer is prolonged. The internal defects of the single crystal wafer can be observed better, and the cutting quality and efficiency are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to single wafer positioning fixture technical field, concretely is a kind of visual positioning fixture for single wafer cutting. BACKGROUND

[0002] Single wafer is a kind of material for making semiconductor, and the single wafer prepared in laboratory needs to be grinded and cut, and during cutting, the single wafer needs to be fixed on a specific fixture, and the fixture used at present is the fixture provided with the single wafer cutting machine.

[0003] The existing fixture is as shown in Figure 3 and Figure 4 When used, the single wafer is first pasted on the end face of the square head of metal rod 3 by using glue, then the cylindrical part of metal rod 3 is inserted into the insertion hole 401 provided on the workbench 4, so that the single wafer faces upward, and then the single wafer is cut.

[0004] During cutting, the metal rod 3 is easy to rotate circumferentially in the insertion hole 401, and the metal rod 3 needs to be fixed by hand. After cutting, the glue needs to be disengaged, which is relatively troublesome, resulting in low cutting efficiency. In addition, the cutting machine leaves different cutting marks on the square head every time it is operated, and the wafer cannot be clearly observed during the next cutting, so it is not easy to observe the defects on the surface of the single wafer, the impurities on the single wafer cannot be well avoided, and the rate of defective single wafer cutting is relatively high. UTILITY MODEL CONTENTS

[0005] The utility model embodiment is to provide a kind of visual positioning fixture for single wafer cutting, which solves the problem that the single wafer is fixed by the existing fixture, which results in low operation efficiency and difficulty in observing internal defects of the single wafer.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] A visual positioning fixture for single wafer cutting, the positioning fixture includes a clamping component and an abutting component;

[0008] The clamping component includes a cylindrical rod, an insertion slot is provided on the end face of the cylindrical rod along the axial direction of the cylindrical rod, and an external thread is provided on the outer circumference of the cylindrical rod.

[0009] The abutting component includes a box body, a through hole is provided on one side of the box body, and the through hole can be threadedly connected with the external thread.

[0010] Further, an opening is provided on the top of the box body.

[0011] Further, a reflective material is provided on the inner wall of the bottom of the box body.

[0012] Further, the number of the perforations is multiple, and the multiple perforations are linearly and equidistantly distributed.

[0013] Further, the slot is a linear slot, and opposite ends of the slot penetrate the cylindrical rod.

[0014] Further, the cylindrical rod is provided with a chamfer on one end of the slot and a screwing part on the other end.

[0015] By means of the above technical scheme, the utility model provides a visual positioning clamp for single wafer cutting. At least the following beneficial effects are provided: the visual positioning clamp for single wafer cutting can conveniently and quickly clamp and fix the single wafer by setting a slot on one end face of the cylindrical rod, can limit the movement of the single wafer and the cylindrical rod during cutting by setting the matching external thread and threaded hole on the cylindrical rod and the box body, and can improve the visibility of the single wafer, so that the internal defects of the single wafer can be better observed, and the quality and efficiency of cutting can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] The accompanying drawings, which are included to provide a further understanding of the utility model, form a part of this application and are incorporated herein to constitute a part of the description:

[0017] Figure 1 It is a schematic diagram of the overall structure of the embodiment of the utility model;

[0018] Figure 2 It is a schematic diagram of the clamping part and the abutting part in the embodiment of the utility model;

[0019] Figure 3 It is a prior single wafer cutting clamping part;

[0020] Figure 4 It is Figure 3 an exploded view.

[0021] In the drawing: 1, clamping part; 101, cylindrical rod; 102, slot; 103, external thread; 104, screwing part; 105, chamfer; 2, abutting part; 201, box body; 202, perforation; 203, inner bottom wall; 204, first inner side wall; 205, second inner side wall; 3, metal rod; 4, workbench; 401, insertion hole. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0023] The single crystal wafer is a material for manufacturing semiconductors, and the single crystal wafer prepared in a laboratory needs to be grinded and cut, and during cutting, the single crystal wafer needs to be fixed on a specific clamp.

[0024] The positioning clamp currently used, as shown in Figure 3 and Figure 4 , comprises a metal rod 3 and a workbench 4, the metal rod 3 is composed of a cylindrical part and a square head, and the workbench 4 is provided with a insertion hole 401 for inserting the cylindrical part. During use, the single crystal wafer needs to be pasted on one end surface of the square head of the metal rod 3 by using glue. During cutting, the metal rod 3 is easy to rotate, and after cutting, the glue needs to be removed, which is relatively troublesome. In addition, the square head surface leaves laser cutting marks back and forth, which seriously affects the visibility of the single crystal wafer and cannot avoid impurities on the single crystal wafer well.

[0025] Therefore, referring to Figure 1 and Figure 2 , the utility model provides a visual positioning clamp for cutting single crystal wafers, which can effectively and quickly fix the single crystal wafers and facilitate observation of internal defects of the single crystal wafers during cutting.

[0026] Specifically, the visual positioning clamp for cutting single crystal wafers comprises a clamping component 1 and an abutting component 2 which are arranged in a matched mode, during use, the single crystal wafer is placed in the clamping component 1, and then the length and position of the single crystal wafer are limited by the abutting component 2.

[0027] As shown in Figure 1 , the clamping component 1 comprises a cylindrical rod 101, an insertion slot 102 is formed on one end surface of the cylindrical rod 101 along the axial direction of the cylindrical rod 101, the insertion slot 102 is a square slot, the width of the insertion slot 102 is not less than the thickness of the single crystal wafer, so that the single crystal wafer can be inserted into the insertion slot 102. The opposite ends of the insertion slot 102 are punched outward to adapt to single crystal wafers of different widths. The depth of the insertion slot 102 is adapted to the specifications of the single crystal wafer and the required cutting length, and during actual production and use, a plurality of positioning clamps with insertion slots 102 of different depths should be reserved to adapt to different requirements.

[0028] The abutting component 2 comprises a box body 201, which is hollow inside, open at the top, and has a five-surface enclosing shape. The box body 201 is internally provided with a first inner side wall 204, a second inner side wall 205, and an inner bottom wall 203. The first inner side wall 204 is oppositely arranged with the second inner side wall 205, and the inner bottom wall 203 is oppositely arranged with the open surface.

[0029] The first inner side wall 204 is provided with a through hole 202 for inserting the cylindrical rod 101. The cylindrical rod 101 is provided with an external thread 103 on the outer circumference. The through hole 202 is a threaded hole matched with the external thread 103. The threaded connection between the cylindrical rod 101 and the through hole 202 can avoid the rotation of the cylindrical rod 101 in the hole during cutting, thereby improving the stability of cutting.

[0030] As a preferred embodiment, the cylindrical rod 101 is provided with a chamfer 105 at one end of the insertion slot 102, which facilitates the butt joint of the cylindrical rod 101 and the through hole 202. The other end of the cylindrical rod 101 is integrally formed with a screwing part 104, which facilitates the threaded connection of the cylindrical rod 101 to the through hole 202.

[0031] As a preferred embodiment, the number of through holes 202 is multiple. The multiple through holes 202 are linearly and equidistantly distributed along the length direction of the first inner side wall 204, which can realize batch cutting and avoid setting only one process at a time, thereby improving the cutting efficiency.

[0032] Please refer to Figure 1 The second inner side wall 205 is used for abutting with the single crystal wafer, thereby positioning the cutting length and avoiding the movement of the single crystal wafer in the insertion slot 102.

[0033] After being fixed, the single crystal wafer is kept a certain distance from the inner bottom wall 203 of the box body 201. During the cutting process, the inner bottom wall 203 will not leave cutting marks, thereby not affecting the visibility of the single crystal wafer.

[0034] As a preferred embodiment, the inner bottom wall 203 is provided with a reflective material, which facilitates clearer observation of the marks on the single crystal wafer. Through the operation of the traditional clamp, the average cutting time of each single crystal wafer is 120S. However, through the operation of the device, the average cutting time of each single crystal wafer is 20S, and the cutting efficiency is improved by 500%.

[0035] The visual positioning clamp for single wafer cutting has the advantages of simple structure, convenient use, high stability, and the like.

[0036] It should be noted that the relational terms herein such as first and second and the like are used solely to distinguish one entity or action from another, without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0037] While the embodiments of the present application have been illustrated and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made therein without departing from the spirit and scope of the application, which is defined by the appended claims and their equivalents.

Claims

1. A visual positioning jig for cutting a single wafer, characterized by, The positioning clamp comprises a clamping component (1) and an abutting component (2); The clamping component (1) comprises a cylindrical rod (101), a slot (102) is formed on one end face of the cylindrical rod (101) along the axial direction of the cylindrical rod (101), and an external thread (103) is arranged on the outer circumference of the cylindrical rod (101); The abutting component (2) comprises a box body (201), a through hole (202) is formed on one side of the box body (201), and the through hole (202) can be threadedly connected with the external thread (103).

2. The visual positioning jig for cutting a single wafer according to claim 1, wherein An opening is arranged on the top of the box body (201).

3. The visual positioning jig for cutting a single wafer according to claim 1, wherein Reflective material is arranged on the inner wall of the bottom of the box body (201).

4. The visual positioning jig for cutting a single wafer according to claim 1, wherein The number of the through holes (202) is multiple, and the multiple through holes (202) are arranged in a linear and equidistant manner.

5. The visual positioning jig for cutting a single wafer according to claim 1, wherein The slot (102) is a linear slot, and opposite ends of the slot (102) penetrate the cylindrical rod (101).

6. The visual positioning jig for cutting a single wafer according to claim 1, wherein A chamfer (105) is arranged on one end of the cylindrical rod (101) with the slot (102), and a screwing part (104) is arranged on the other end.

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