Full-automatic feeding and discharging device for monolithic wafer cleaning machine

Abstract

According to the full-automatic feeding and discharging device for the single-chip wafer cleaning machine, the whole device is arranged in an L shape, the device can be flexibly arranged in a compact space according to site conditions, automatic feeding and discharging are achieved through the wafer taking structure and the wafer feeding structure on the transfer workbench, only manual material box taking and placing are needed, and the working efficiency is greatly improved. And sheet taking cleaning and recovery after cleaning can be automatically carried out, so that the manpower is further saved, and the efficiency is improved. Besides, the device further has the function of automatically detecting and processing abnormal conditions, and once the first mechanical arm is collided and the like in the wafer taking process, the system can immediately send out an alarm signal and pause the current action so as to prevent the structure from being damaged. The stability and reliability of operation of the whole feeding and discharging process are ensured, and meanwhile the resistance of equipment to external interference factors is enhanced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially a full-automatic feeding and discharging device for single wafer cleaning machine. BACKGROUND

[0002] In the preparation process of LED chip, wafer needs to be cut after completing various manufacturing procedures, that is, the wafer is cut into single chip and transferred to the blue film ring for film expansion and cleaning. When the existing cleaning machine cleans the ring, the operator needs to manually put each ring into the cleaning cavity, and then manually take out the wafer after cleaning. The wafer is put in and taken out one by one during the cleaning process, which requires a large amount of labor cost, and if the wafer is not taken out in time, it will waste a certain amount of time and reduce the cleaning efficiency. In addition, the current automatic feeding cleaning machine on the market is mainly in a linear layout, which occupies a large space, and the internal motion arm fork of the equipment does not have a collision prevention function, which may cause damage to the mechanical arm and the product when the material is stuck. SUMMARY

[0003] In order to overcome the above shortcomings, the utility model provides a full-automatic feeding and discharging device for single wafer cleaning machine, which adopts a mechanical arm for full-automatic feeding and discharging, saves labor cost and has high efficiency.

[0004] The technical scheme provided by the utility model is as follows:

[0005] A full-automatic feeding and discharging device for single wafer cleaning machine, comprising:

[0006] A feeding workbench is provided with an opening capable of accommodating a box below the opening, and a lifting platform is provided below the opening. The lifting platform is connected with a first driving member and is lifted and lowered under the driving of the first driving member. The surface of the lifting platform is used for placing the box.

[0007] The box comprises a bottom plate, a left side plate, a right side plate and an upper cover plate, and is used for collecting the ring. The inner walls of the left and right side plates are provided with equidistant horizontal strip structures from bottom to top. Detection holes are arranged between two adjacent horizontal strip structures on the side plate.

[0008] A wafer detection sensor is arranged on the surface of the workbench and one side of the lifting platform. The wafer detection sensor is used for scanning the position of the ring in the box through the detection hole.

[0009] The wafer detection sensor is arranged on the surface of the workbench and one side of the lifting platform. The wafer detection sensor is used for scanning the position of the ring in the box through the detection hole.

[0010] The film feeding structure of the transfer workbench surface comprises an H-shaped fixing frame, left-right translation assemblies installed on the H-shaped fixing frame, a lifting assembly installed on the left-right translation assemblies, and a second mechanical arm installed on the lifting assembly, the left-right translation assemblies are connected with a third driving element, and the left-right translation assemblies move left and right under the driving of the third driving element, the lifting assembly is connected with a fourth driving element, and the lifting assembly is lifted and lowered under the driving of the fourth driving element.

[0011] The feeding workbench and the cleaning machine are diagonally positioned, and the feeding workbench, the transfer workbench and the cleaning machine are arranged in an L shape.

[0012] The full-automatic feeding and discharging device for the single wafer cleaning machine provided by the utility model can at least bring the following beneficial effects:

[0013] 1) After the full-automatic feeding and discharging device is started, the first mechanical arm in the film taking structure on the transfer workbench and the second mechanical arm in the film feeding structure automatically take out the rings in the material box in sequence and feed them into the cleaning machine; after cleaning, the cleaned rings are automatically fed back to the initial position of the material box. When all the rings in the material box are cleaned, an alarm is automatically sent to remind the personnel to handle.

[0014] 2) The film taking structure is provided with an anti-collision assembly, and when the first mechanical arm moves to take a film, the alarm can send an alarm in time after being impacted by external force, and all actions are paused; therefore, when there is foreign matter on the carrier or the material box is placed in a wrong position, the structures in the device can be prevented from being damaged, and the personnel can be notified in time through the alarm.

[0015] 3) The feeding workbench and the transfer workbench in the full-automatic feeding and discharging device are arranged in an L shape with the cleaning machine, so that the front and rear spaces can be shortened, and compared with the automatic feeding cleaning machine arranged in a straight line, the device is more space-saving and convenient to operate.

[0016] Therefore, the full-automatic feeding and discharging device provided by the utility model is arranged in an L shape as a whole, can be flexibly arranged in a compact space according to the site conditions, realizes automatic feeding and discharging through the film taking structure and the film feeding structure on the transfer workbench, and only needs manual taking and placing of the material box, so that the taking and cleaning and the recycling after cleaning can be automatically operated, manpower is further saved, and efficiency is improved. In addition, the device also has the functions of automatic detection and processing of abnormal conditions, and once the first mechanical arm collides during the film taking process, the system will immediately send an alarm signal and pause the current action to prevent the structure from being damaged. Not only the stability and reliability of the whole feeding and discharging process are ensured, but also the resistance of the equipment to external interference factors is enhanced. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a top view schematic diagram of the ring in an embodiment of the utility model.

[0018] Figure 2 is a stereogram of the material box in an embodiment of the present application;

[0019] Figure 3 is a stereogram of the full-automatic feeding and discharging device in an embodiment of the present application;

[0020] Figure 4 is an exploded schematic view of the feeding workbench in an embodiment of the present application;

[0021] Figure 5 is a partial schematic view of the material taking workbench in an embodiment of the present application;

[0022] Figure 6 is a stereogram of the front and back translation assembly in an embodiment of the present application;

[0023] Figure 7 is a stereogram of the anti-collision assembly in an embodiment of the present application.

[0024] Reference signs:

[0025] 1-tension ring, 11-outer circular ring, 12-inner circular ring, 13-blue film, 14-wafer, 2-material box, 21-upper cover plate, 22-left side plate, 23-bottom plate, 24-right side plate, 25-horizontal strip structure, 26-detection hole, 27-limiting stop rod, 3-feeding workbench, 31-table top of the feeding workbench, 311-table top opening, 312-wafer detection inductor, 32-carrier, 4-transferring workbench, 41-take-out structure, 411-first mechanical arm, 412-anti-collision assembly, 413-front and back translation assembly, 4131-first sliding table, 4132-first horizontal sliding rail, 4121-supporting plate, 4122-second horizontal sliding rail, 4123-fixing plate, 4124-mounting plate, 4125-elastic member, 4126-limiting stop block, 4127-inductor stop sheet, 4128-inductor, 42-feeding structure, 421-second mechanical arm, 422-lifting assembly, 423-left and right translation assembly, 424-fixing frame, 425-back plate, 5-cleaning machine, 51-air knife. DETAILED DESCRIPTION

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, specific implementation manners of the present application will be described below with reference to the drawings. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained from these drawings without creative labor, and other embodiments can also be obtained. The terms "front", "back", "upper", "lower", "left", "right" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0027] An embodiment of the present application is a full-automatic feeding and discharging device for a single wafer cleaning machine, comprising: a feeding workbench, an opening capable of accommodating a material box is arranged in the center of the workbench, a liftable carrier is arranged below the opening, the carrier is connected with a first driving member and is lifted and lowered under the driving of the first driving member, and the surface of the carrier is used for placing the material box; the material box comprises a bottom plate, a left side plate, a right side plate and an upper cover plate, and is used for collecting a ring; equidistant horizontal strip structures are arranged on the inner walls of the left and right side plates from bottom to top, and a detection hole is further arranged between any two adjacent horizontal strip structures on the side plate; a wafer detection inductor is arranged on the surface of the workbench and one side of the carrier, and is used for scanning the position of the ring in the material box through the detection hole; a wafer taking structure on the surface of the transfer workbench comprises a front-rear translation assembly, a first mechanical arm mounted on the front-rear translation assembly, a fixed end of the first mechanical arm and the front-rear translation assembly, the other end is suspended, the front-rear translation assembly is connected with a second driving member, and advances and retreats under the driving of the second driving member; a wafer feeding structure on the surface of the transfer workbench comprises an H-shaped fixing frame, left-right translation assemblies mounted on the H-shaped fixing frame, a lifting assembly mounted on the left-right translation assemblies, a second mechanical arm mounted on the lifting assembly, the left-right translation assemblies are connected with a third driving member, and move left and right under the driving of the third driving member, the lifting assembly is connected with a fourth driving member, and is lifted and lowered under the driving of the fourth driving member; the feeding workbench and the cleaning machine are in a diagonal position, and the feeding workbench, the transfer workbench and the cleaning machine are arranged in an L shape.

[0028] The ring is circular as a whole, such as Figure 1As shown, the ring 1 includes an outer ring 11 and a detachable inner ring 12, and the outer ring and the inner ring are clamped on the edge of the blue film, so as to tension the blue film 14, and the surface of the blue film adheres to the wafer 14 which is completed cutting. After the wafer is cut into single chips, it is adhered to the surface of the blue film, and the tension of the blue film in the ring is uniformly expanded to increase the gap between the chips, and then each piece is sent into the cleaning machine to remove the debris and other foreign matters generated in the cutting process. In the traditional cleaning process, the ring needs to be manually put into the cleaning cavity, the glass door of the cleaning machine is closed, the swing arm and the two-fluid nozzle in the cleaning machine flush and dehydrate the surface of the chip, and then the glass door is opened, and the ring is manually taken out from the cleaning cavity. A large amount of labor cost is needed, and if the operator is careless, time is wasted and production efficiency is affected.

[0029] In the embodiment, the material box is used to collect the ring to be cleaned, and the structure of the material box is as shown in Figure 2 As shown, the main body of the material box 2 is composed of a bottom plate 23 and left and right side plates 22 and 24 and an upper cover plate 21, the horizontal bar structures 25 on the inner walls of the left and right side plates are symmetrical to each other, the distance between the left and right side plates (excluding the horizontal bar structures) is consistent with the diameter of the ring, the distance between the upper and lower horizontal bar structures is greater than the thickness of the ring, and the pair of symmetrical horizontal bar structures can be used to carry the ring, so that the ring to be cleaned can be pushed from the rear side and placed on the horizontal bar structures. In the embodiment, the number of horizontal bar structures in the inner wall of a single side plate is 13, that is, a maximum of 13 rings can be placed in the material box, and in other embodiments, the number of horizontal bar structures on the side plate can be designed according to the actual situation, such as 10-15 or even more, and the embodiment does not limit this. It should be understood that the more the number of horizontal bar structures is designed, the longer the length of the side plate is. The detection holes 26 are further arranged between any two adjacent horizontal bar structures on the side plate, the detection holes are located on the center line of the side plate, have the same size, and are symmetrical to each other on the left and right side plates, and are used for the wafer detection inductor to detect whether the ring exists on the corresponding horizontal bar structure. The material box does not have front and rear side plates, that is, the side close to the operator and the side away from the operator are in an open state. When the chip is taken out, the first mechanical arm is inserted into the material box from the side away from the operator, and the corresponding ring is lifted and taken out by the first mechanical arm in cooperation with the slight descent of the loading table. In order to prevent the position of the ring after being put into the material box, a limiting stop rod 27 is arranged on the side facing the operator, one end of the limiting stop rod is connected with the upper cover plate, and the other end is connected with the bottom plate. After the ring is pushed into the material box, it cannot exceed the limiting stop rod, that is, all the rings pushed into the material box are in contact with the limiting stop rod and have the same position. In addition, a handle is further arranged on the upper surface of the cover plate of the material box, which is convenient for the operator to take the whole material box. The shape of the handle can be designed as T-shaped or arc-shaped, as long as it is convenient for carrying.

[0030] As shown in Figure 3As shown, the cleaning machine 5 and the feeding workbench 3 are diagonally arranged, and the feeding workbench, the transfer workbench and the cleaning machine are arranged in an L shape. One side of the transfer workbench is connected with the feeding workbench, and the other side is connected with the cleaning machine. The equipment is arranged in a right angle, thereby reducing the required front and back space, and the limited space can be more effectively utilized compared with a linear arrangement. The layout can be adjusted according to the actual site conditions to achieve more flexible layout. The whole automatic feeding and discharging device realizes the transfer of the ring through the sheet taking structure and the sheet feeding structure on the transfer workbench 4. In actual use, the surface of the transfer workbench is also provided with a transparent closed shell, and the transfer workbench can also be closed from the top by using a transparent acrylic shell to protect the precision equipment on the transfer workbench. In the embodiment, the left-right direction refers to the X-axis direction, the front-rear direction refers to the Y-axis direction, and the axial direction refers to the Z-axis direction. Those skilled in the art can refer to the orientation to understand the position and movement direction of each structure. Figure 3 Figure 3 Figure 3

[0031] Figure 4 ​​​The explosion view of the loading workbench has a certain height of the workbench surface 31, and the central part of the workbench surface is provided with an opening 311 capable of accommodating the box, and a lifting platform 32 is arranged below the opening for carrying the entire box and driving the box to lift, the lifting platform is connected with the first driving member, and is lifted and lowered under the driving of the first driving member, so as to drive the entire box to lift and lower. The first driving member is any one of a driving motor and a driving cylinder, and in this embodiment, a driving motor is used as the first driving member, which is matched with a belt connected with the motor output shaft and a guide rail structure, and is in sliding cooperation with the lifting platform to control the lifting platform to lift and lower along the guide rail. In other embodiments, a cylinder or the like can also be used to drive the lifting platform to lift and lower. The workbench surface is also provided with a wafer detection sensor 312, which is located at the central side of the side edge of the opening side of the workbench surface, and the position coordinates correspond to the positions of the detection holes on the center lines of the left side plate and the right side plate of the box. A pair of sensors are respectively arranged on the left side and the right side of the opening of the workbench, corresponding to the detection holes on the right side plate and the left side plate of the box, and the detection holes are used to sense whether the corresponding horizontal strip structure in the box is provided with a ring. The specific detection process is as follows: after the full-automatic loading and unloading device is started, the lifting platform is lowered at a constant speed, the wafer detection sensor scans whether the ring exists at the corresponding position of each detection hole during the lowering process, and sends the position of the ring to the control center of the entire system. It should be noted that when the box is placed in the groove at the bottom of the workbench, one side of the limiting stop rod is placed towards the operator, and the first mechanical arm extends into the box from the other open side to take the wafer; if the orientation is wrong, the first mechanical arm cannot smoothly take the wafer. The surface of the loading workbench is also provided with a running switch, a stop switch and an emergency stop switch, which are convenient for the operator to handle the running status of the full-automatic loading and unloading device at any time, wherein the running switch is used to start the equipment, the stop switch is used to shut down the equipment (including temporary shutdown or termination of operation), and the emergency stop switch is used to power off the control circuit of the equipment in an emergency.

[0032] The wafer taking mechanism on the transfer workbench is used to take the ring to be cleaned from the box, and also includes putting the cleaned ring back into the box. The height of the transfer workbench is lower than that of the loading workbench, such as Figure 5As shown, the height of the first mechanical arm 411 in the piece-taking structure 41 is also lower than the table surface of the feeding workbench (the feeding workbench is provided with an opening for the first mechanical arm to enter), the end close to the feeding workbench is suspended, and the end away from the feeding workbench is connected with the front-rear translation assembly 413, which is connected with the second driving member and advances and retreats under the driving of the second driving member, thereby driving the first mechanical arm 411 to advance and retreat. The first mechanical arm adopts a supporting mode to transport the stretcher ring and is in a plate-shaped structure, and therefore, the upper surface thereof is provided with protruding arc-shaped limiting strips, the inner wall of the arc-shaped limiting strips is consistent with the shape of the outer wall of the stretcher ring, and the arc-shaped limiting strips are provided with at least two, which are respectively located at the two ends of the diameter of the stretcher ring, so as to ensure that the stretcher ring does not displace or fall during movement; the arc-shaped limiting strips can also be directly arranged in a ring shape around the stretcher ring, as long as the position of the stretcher ring is not affected during movement.

[0033] The thickness of the first mechanical wall is relatively thin, especially the thickness of the suspended end, which is less than the distance between the upper and lower horizontal strip structures in the magazine, so as to be able to extend into the magazine between the upper and lower horizontal strip structures, and the horizontal strip structure at the lowermost end in the magazine will not be placed with the stretcher ring. When taking the piece, the front-rear translation assembly drives the first mechanical arm to move forward, the suspended end extends into the magazine between the horizontal strip structure at the lowermost end and the bottom plate, the stage slightly descends, and the stretcher ring on the horizontal strip structure at the lowermost end is lifted by the first mechanical arm, then the front-rear translation assembly drives the first mechanical arm to move backward, and the stretcher ring is taken out. Next, the second mechanical arm sucks the stretcher ring from the first mechanical arm and sends it into the cleaning machine for cleaning, after cleaning, the second mechanical arm takes the stretcher ring out of the cleaning machine and places it back to the surface of the first mechanical arm. Then the first mechanical arm places the cleaned stretcher ring back to the magazine, the front-rear translation assembly drives the first mechanical arm and the stretcher ring on the surface thereof to move forward, the suspended end extends into the magazine between the horizontal strip structure at the lowermost end and the horizontal strip structure above it, the stage slightly ascends, and the stretcher ring on the first mechanical arm is lifted by the horizontal strip structure at the lowermost end, and the stretcher ring is placed back, then the front-rear translation assembly drives the first mechanical arm to return to the default position.

[0034] In an example, the front-rear translation assembly in the piece-taking structure is as shown in Figure 6As shown, the first sliding table 4131 includes a groove-shaped bottom, and a first horizontal sliding rail 4132 matching the groove of the first sliding table, the first sliding table and the first horizontal sliding rail are slidingly connected, and move forward and backward along the first horizontal sliding rail under the driving of the second driving member. The first horizontal sliding rail is a protruding strip structure relative to the table top, to prevent derailment during movement, it further includes a groove structure parallel to the strip structure, at this time, in addition to the groove-shaped structure of the bottom of the first sliding table matching the protruding strip structure, the side of the first sliding table also extends an L-shaped side arm downward into the groove structure, which moves forward and backward in the groove structure corresponding to the forward and backward movement of the first sliding table. The first horizontal sliding rail is arranged along the movement direction of the first mechanical arm, i.e. extending from the rear away from the loading workbench to the workbench, the length of the first horizontal sliding rail should be set according to the actual situation, since the ring needs to be finally sent into the cleaning machine, the length of the first horizontal sliding rail should be designed according to the relative position between the cleaning machine and the loading workbench, if the distance between the position of the cleaning machine and the loading workbench (i.e. along the Y-axis direction) is large, the length of the first horizontal sliding rail should be designed to be long enough to take out the ring from the loading frame and move it backward to the corresponding coordinate position of the cleaning machine on the Y-axis. The default state of the first sliding table is away from the rear of the loading workbench, the surface of the first sliding table is formed with a threaded hole, which is connected with the fixed end of the first mechanical arm through a bolt, and the first sliding table moves to drive the first mechanical arm to move forward and backward. The second driving member is any one of a driving motor and a driving cylinder, in this embodiment, a driving motor is used as the second driving member, which is connected with a belt and a guide rail structure connected with the output shaft of the motor, and is connected with the first sliding table to control the first sliding table to move forward and backward along the first horizontal guide rail, in other embodiments, a cylinder or the like can also be used to drive the first sliding table to move forward and backward.

[0035] Further, to prevent accidental collision and damage during the process of taking the film, a collision prevention assembly is also configured in the film taking structure, such as Figures 5-7 As shown, the green one is the collision prevention assembly (the collision prevention assembly is green to facilitate differentiation, and other colors can also be used in practice), the collision prevention assembly 412 is arranged on the upper surface of the first sliding table of the front and rear translation assembly 413, and the first mechanical arm 411 is connected with the collision prevention assembly 412. The internal structure of the collision prevention assembly is as shown in Figure 7As shown, the support plate 4121, the second horizontal slide rail 4122 on the surface of the support plate, the direction of the second horizontal slide rail is parallel to the first horizontal slide rail, and the length of the second horizontal slide rail is shorter than the length of the support plate; and the fixed plate 4123 fixed on the surface of the support plate near the side of the feeding workbench and perpendicular to the second horizontal slide rail in the plane, the end of the second horizontal slide rail towards the fixed plate has a spacing with the fixed plate, the mounting plate 4124 slidably connected with the second horizontal slide rail, the bottom of the mounting plate matches the shape of the second horizontal slide rail, and the surface of the mounting plate is formed with screw holes for connecting with the first mechanical arm; the elastic member 4125 is arranged between the fixed plate and the mounting plate, one end of the elastic member is connected to the side surface of the mounting plate towards the fixed plate, and the other end of the elastic member is connected to the fixed plate; the end surface of the end of the second horizontal slide rail towards the fixed plate is further provided with an axial limiting stopper 4126, the upper end of the limiting stopper is in contact with the side surface of the mounting plate, and the limiting stopper is used to prevent the mounting plate from moving along the second horizontal slide rail towards the end of the fixed plate. The side surface of the mounting plate is provided with an inductor stopper 4127, the side surface provided with the inductor stopper is adjacent to the side surface connected with the elastic member, and the inductor 4128 corresponding to the stopper is fixed on the surface of the support plate. In an example, the mounting plate includes a groove-shaped second slide rail matching the shape of the second horizontal slide rail at the bottom and a flat plate fixed on the upper surface of the second slide rail, the second slide rail is slidably connected with the second horizontal slide rail, and the surface of the second slide rail is formed with two screw holes arranged along the second horizontal slide rail for fixing the flat plate, and the flat plate is formed with two screw holes arranged perpendicular to the direction of the second horizontal slide rail for connecting with the first mechanical arm. The second horizontal slide rail and the fixed plate on the surface of the support plate are arranged in a T shape, the second horizontal slide rail is relatively located on the side away from the feeding workbench, the fixed plate is relatively located on the side close to the feeding workbench, and a certain distance is formed between the fixed plate and the second horizontal slide rail, the length of the second horizontal slide rail is shorter than the length of the support plate, and the relative position of the second horizontal slide rail is deviated to the side away from the feeding workbench, the mounting plate is slidably connected with the second horizontal slide rail, and the end of the mounting plate towards the fixed plate is in contact with the limiting stopper on the end surface of the second horizontal slide rail, thereby preventing the mounting plate from sliding along the second horizontal slide rail towards the end of the fixed plate, and not preventing the mounting plate from sliding towards the end away from the fixed plate.

[0036] Therefore, under normal circumstances, when the first mechanical wall takes the film, the anti-collision assembly and the first mechanical arm move back and forth with the first sliding table, and during the movement, the overhanging end of the first mechanical arm does not touch any structure, and only after entering the material box, the first mechanical arm lifts the taut ring from the upper surface. The relative positions of the structures inside the anti-collision assembly do not change, and the relative positions of the anti-collision assembly and the first mechanical arm do not change. The sensor blocking piece on the side of the mounting plate is located in the range corresponding to the fixed sensor on the surface of the support plate, i.e. the presence of the anti-collision assembly does not affect the normal film taking or returning process of the first mechanical arm. When an abnormal situation occurs, such as the material box being placed incorrectly so that the side plate faces the first mechanical wall, or foreign matter falling into the carrier, the overhanging end of the first mechanical arm will be impacted during normal forward movement, and the mounting plate connected to the first mechanical arm will move backward along the second horizontal guide rail, simultaneously bringing the sensor blocking piece on the side of the mounting plate out of the sensor range. At this time, the controller receives an abnormal signal, issues an alarm and stops all actions to avoid damaging the equipment. The elastic member can be a spring or other elastic part that is in a default state of tension, i.e. under normal conditions, the fixed plate and the mounting plate are pulled closer to each other by the tension of the elastic member. When the resistance of the first mechanical arm is sufficient to offset the tension of the elastic member, the mounting plate will move backward, an alarm will be issued, and false alarms or false alarms during normal movement will be avoided. The technician can also adjust the state of the elastic member according to the actual situation, such as reducing the tension of the elastic member when the equipment state is unstable, issuing an alarm at any time once an abnormality occurs, and better adjusting the equipment. When the equipment state is stable, the tension of the elastic member can be appropriately increased. Small abnormalities (such as ordinary mechanical vibration) do not affect normal operation and do not issue an alarm. Only when a larger abnormality occurs will an alarm be issued.

[0037] The film taking structure on the material taking workbench is used to transfer the taut ring from the surface of the first mechanical arm to the cleaning cavity of the cleaning machine, and to take out the cleaned taut ring from the cleaning cavity and place it back on the surface of the first mechanical arm. The H-shaped fixing frame is axially installed on the surface of the transfer workbench and supports the entire film taking structure. The fixing frame has a certain width and height, and a transverse reinforcing rib is specially added in the middle of the fixing frame to enhance the strength of the fixing frame itself and improve the safety of the entire film taking structure. The technician can also set additional reinforcing ribs according to the weight capacity of the fixing frame, which is not limited in this embodiment. Figure 5As shown, the second mechanical arm 421 in the film feeding structure 42, the lifting assembly 422, and the left-right translation assembly 423 are all mounted on the fixed frame 424. The second mechanical arm 421 is a horizontal bottom plate with a pneumatic suction cup on the lower surface. The suction cup can suck the taut ring from the surface of the first mechanical arm. Since the taut ring has a blue film clamped inside, the pneumatic suction cup can be attached to the surface of the blue film to transfer the entire taut ring. In order to avoid affecting the LED chips pasted on the blue film, the position of the suction cup should be at the edge of the blue film. By default, the horizontal bottom plate of the second mechanical arm is located directly above the taut ring on the surface of the first mechanical arm. After the first mechanical arm takes the taut ring out of the magazine, the second mechanical arm is driven by the lifting assembly to descend to the surface of the taut ring, and then is lifted to the initial position. Then, the second mechanical arm is driven by the left-right translation assembly to enter the cleaning machine to the right. The second mechanical arm is lowered again and the suction cup is desorbed so that the taut ring is placed on the surface of the rotating tray in the cleaning cavity. After cleaning, the second mechanical arm repeats the above actions in reverse, sucks the taut ring from the rotating tray, and moves to the left to move out of the cleaning machine and is transferred to the surface of the first mechanical arm.

[0038] The third driving member for driving the left-right translation assembly and the fourth driving member for driving the lifting assembly are any one of a driving motor and a driving cylinder. In this embodiment, the left-right translation assembly and the lifting assembly are both driven by a cylinder. The left-right translation assembly is horizontally arranged, and the lifting assembly is axially arranged. The left-right translation assembly includes a first cylinder fixing seat, a first cylinder guide rod, and a first guide rod connecting piece. The first cylinder guide rod is connected between the first cylinder fixing seat and the first guide rod connecting piece and is telescopic under the driving of compressed air. The left-right translation assembly is horizontally arranged, so the first guide rod connecting piece moves left and right with the telescopic movement of the first cylinder guide rod. The length of the first cylinder guide rod needs to be determined according to the relative position of the transfer workbench and the cleaning machine to ensure that the second mechanical arm can at least move to the right into the cleaning machine. The lifting assembly 422 includes a second cylinder fixing seat, a second cylinder guide rod, and a second guide rod connecting piece. The second cylinder guide rod is connected between the second cylinder fixing seat and the second guide rod connecting piece and is telescopic under the driving of compressed air. The left-right translation assembly is axially arranged, so the second guide rod connecting piece rises or falls with the telescopic movement of the second cylinder guide rod. The length of the second cylinder guide rod needs to be determined according to the relative height of the transfer workbench and the cleaning machine to ensure that the second mechanical arm can at least move upward to enter the side door of the cleaning machine. The second cylinder fixing seat in the lifting assembly is fixed on the first guide rod connecting piece in the left-right translation assembly, and the second mechanical arm is fixed with the second guide rod connecting piece in the lifting assembly. Therefore, through the cooperation of the left-right translation assembly and the lifting assembly, the left and right movement and the up and down movement of the second mechanical arm can be realized. In other embodiments, those skilled in the art can also use a driving motor to drive the left-right translation assembly and the lifting assembly, or use a combination of a driving motor and a driving cylinder to drive, as long as the left and right movement and the up and down movement of the second mechanical arm can be realized. This embodiment does not limit this.

[0039] As shown in Figure 5 The left-right translation assembly 423 is fixed on a back plate 425 with a width consistent with the H-shaped fixing frame, and the back plate is connected to the fixing frame 424 through bolts on both sides. The two support columns of the H-shaped fixing frame have multiple fixing holes distributed axially, which are used to adjust the height of the left-right translation assembly installed on the H-shaped fixing frame. By changing the position of the fixing hole on the fixing frame for connecting the back plate, the height of the left-right translation assembly can be changed, and at the same time, the height of the lifting assembly connected to the left-right translation assembly and the second mechanical arm is also changed, so that the second mechanical arm can be better adjusted to adapt to the height of the cleaning machine. At the same time, by adjusting the height of the second mechanical arm, the full-automatic loading and unloading device can be applied to different models of single-piece cleaning machines, such as the DCS141 model cleaning machine of the Japanese DISCO company and the UNUS-CS108 model cleaning machine of the Suzhou Juxi company (which only has cleaning function and needs to be manually placed and taken out one by one).

[0040] In addition, in order to improve the time of raising and lowering the glass door on the side of the traditional cleaning machine, the side facing the second mechanical arm of the cleaning machine in the embodiment is designed as an open type, and a air knife is arranged at the top with the outlet of the air knife facing downward. As shown in Figure 3 The width of the air knife 51 is consistent with the width of the side door of the cleaning machine. During the cleaning process of the cleaning machine, the air knife is automatically opened and controlled, and compressed air is blown out downward from the outlet, forming an air curtain isolation to block the water mist in the cleaning machine from spreading to the outside through the open side door. After the cleaning is completed, the air knife is automatically closed for control, which is convenient for the second mechanical arm to take out the cleaned ring. Compared with the traditional lifting glass door, the waiting process of raising and lowering the glass door is eliminated, the waiting time is reduced, and the cleaning efficiency is improved to a certain extent.

[0041] The full-automatic loading and unloading device further includes a controller and an alarm, the position sensors in the first driving member, the second driving member, the third driving member, the fourth driving member, the air knife, the wafer detection sensor, and the anti-collision assembly are electrically connected to the controller, and the controller is also connected to the control unit of the cleaning machine for receiving the communication signal of the cleaning machine and controlling the corresponding actions of the full-automatic loading and unloading device according to the signal. The alarm is used to inform the operator to handle the relevant situation in time, which is a three-color alarm light and a buzzer, and different colors and sounds are emitted according to different situations, such as green light in normal working state, yellow light flickering and buzzer ringing for 10 seconds in first alarm, and red light flickering and buzzer continuously buzzing in second alarm.

[0042] The controller can be PLC or single-chip microcomputer, which is used for running the whole automatic feeding and discharging device, feeding process, discharging process and abnormal reaction. For the feeding process, the following actions are included: after the operator correctly places the box containing the rings to be cleaned on the carrier, the automatic feeding and discharging device is started, then the wafer detection sensor automatically scans the position of the rings in the box and sends it to the controller, the controller is used for recording the rings detected by the wafer detection sensor, then the first driving part and the second driving part are controlled to take the rings out of the box, that is, the first mechanical arm and the carrier cooperate to take the rings out of the detected position to the first mechanical arm. At the same time, the third driving part and the fourth driving part are controlled to cooperate to send the rings into the cleaning cavity of the cleaning machine, that is, the second mechanical arm transfers the rings from the first mechanical arm to the surface of the rotating tray of the cleaning machine through the cooperation of the left-right translation assembly and the lifting assembly, and then the air knife is automatically opened and the cleaning machine automatically performs cleaning.

[0043] Then, the discharging process is started: the discharging process is basically the reverse running of the feeding process, in this process, the cleaning machine sends a cleaning completion signal to the controller, after receiving the communication signal of the cleaning completion, the controller is used for closing the air knife after the cleaning machine completes the cleaning, the controller controls the third driving part and the fourth driving part to cooperate to take the rings out of the cleaning cavity of the cleaning machine, that is, the second mechanical arm transfers the rings from the surface of the rotating tray of the cleaning machine to the first mechanical arm through the cooperation of the left-right translation assembly and the lifting assembly; and the first driving part and the second driving part are controlled to cooperate to put the rings into the original position of the box, that is, the first mechanical arm and the carrier cooperate to take the rings out of the first mechanical arm to the original position. In the cleaning process, according to the number of rings in the box, the above feeding and discharging processes are repeated to clean the rings one by one; after all the rings in the box are cleaned, the controller is used for controlling the alarm to issue a first alarm after all the rings in the box are cleaned, and all actions are suspended, waiting for the operator to take the box off the carrier. For abnormal reaction: the controller is used for controlling the alarm to issue a second alarm when the position sensor in the anti-collision assembly does not detect the corresponding baffle, and all actions are suspended. At this time, the first mechanical arm may have collided, causing the sensor baffle in the anti-collision assembly to be out of the sensor range, and all actions are suspended to avoid damage to the equipment, and the second alarm can inform the operator to handle it in time.

[0044] It should be noted that the above embodiments can be freely combined as needed. The above is only a preferred embodiment of the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, which should be considered as the protection scope of the present application.

Claims

1. A full-automatic loading and unloading device for a single wafer cleaning machine, characterized in that, The utility model relates to a full-automatic feeding and discharging device, including: The feeding workbench is provided with an opening in the center for accommodating the material box, and a lifting platform is arranged below the opening, the lifting platform is connected with the first driving element and is lifted and lowered under the driving of the first driving element, and the surface of the lifting platform is used for placing the material box; The material box comprises a bottom plate, a left side plate, a right side plate and an upper cover plate, and is used for collecting the ring, equidistant horizontal strip structures are arranged on the inner walls of the left and right side plates from bottom to top, and detection holes are arranged between two adjacent horizontal strip structures on the side plates; A wafer detection sensor is arranged on the surface of the workbench and one side of the lifting platform, and the wafer detection sensor is used for scanning the position of the ring in the material box through the detection hole; The pick-up structure on the surface of the transfer workbench comprises a front-rear translation assembly, a first mechanical arm mounted on the front-rear translation assembly, the fixed end of the first mechanical arm is fixed to the front-rear translation assembly, the other end is suspended, the front-rear translation assembly is connected with the second driving element, and the front-rear translation assembly advances and retreats under the driving of the second driving element; The sheet feeding structure on the surface of the transfer workbench comprises an H-shaped fixing frame, left-right translation assemblies mounted on the H-shaped fixing frame, a lifting assembly mounted on the left-right translation assemblies, and a second mechanical arm mounted on the lifting assembly, the left-right translation assemblies are connected with the third driving element, and the left-right translation assemblies move left and right under the driving of the third driving element, the lifting assembly is connected with the fourth driving element, and the lifting assembly is lifted and lowered under the driving of the fourth driving element; The feeding workbench and the cleaning machine are diagonally arranged, and the feeding workbench, the transfer workbench and the cleaning machine are arranged in an L shape.

2. The full-automatic feeding and discharging device according to claim 1, wherein The front-rear translation assembly in the pick-up structure comprises a first sliding table with a groove-shaped bottom, and a first horizontal sliding rail matched with the groove of the first sliding table, the first sliding table is slidingly connected with the first horizontal sliding rail and moves forward and backward along the first horizontal sliding rail under the driving of the second driving element.

3. The full-automatic feeding and discharging device according to claim 2, wherein The pick-up structure further comprises an anti-collision assembly mounted on the surface of the first sliding table in the front-rear translation assembly, comprising: a support plate, a second horizontal sliding rail protruding on the surface of the support plate, the direction of the second horizontal sliding rail is parallel to the first horizontal sliding rail, and the length of the second horizontal sliding rail is smaller than the length of the support plate; a fixed plate fixed to the surface of the support plate near the side of the feeding workbench and perpendicular to the second horizontal sliding rail in the plane, and there is a gap between the end of the second horizontal sliding rail facing the fixed plate and the fixed plate; an installation plate slidingly connected with the second horizontal sliding rail, the bottom of the installation plate is matched with the shape of the second horizontal sliding rail, and screw holes are formed on the surface of the installation plate for connecting with the first mechanical arm; an elastic element arranged between the fixed plate and the installation plate, one end of the elastic element is connected to the side of the installation plate facing the fixed plate, and the other end is connected to the fixed plate; the end of the second horizontal sliding rail facing the fixed plate is further provided with an axial limiting stopper, the upper end of the limiting stopper is in contact with the side of the installation plate, and the limiting stopper is used for preventing the installation plate from moving to the end of the second horizontal sliding rail facing the fixed plate. The installation plate side is provided with an inductor blocking piece, the side provided with the inductor blocking piece is adjacent to the side for connecting with the elastic member, and an inductor corresponding to the blocking piece is fixed to the surface of the support plate.

4. The full-automatic loading and unloading device according to claim 3, characterized in that, The side of the cleaning machine facing the second mechanical arm is designed as an open type, and a wind knife is arranged at the top, and the outlet of the wind knife faces downward.

5. The full-automatic loading and unloading device according to claim 4, characterized in that, The full-automatic loading and unloading device further comprises a controller and an alarm, the first driving member, the second driving member, the third driving member, the fourth driving member, the wind knife, the wafer detection inductor and the position inductor in the anti-collision assembly are electrically connected with the controller, and the controller is further connected with a control unit of the cleaning machine; The controller is used for recording the wafer ring detected by the wafer detection inductor, and controlling the first driving member and the second driving member to take out the wafer ring from the box, and simultaneously controlling the third driving member and the fourth driving member to cooperate to send the wafer ring into the cleaning cavity of the cleaning machine, and starting the wind knife, so that the cleaning machine automatically performs cleaning; The controller is used for closing the wind knife after the cleaning machine completes cleaning, controlling the third driving member and the fourth driving member to cooperate to take out the wafer ring from the cleaning cavity of the cleaning machine, and controlling the first driving member and the second driving member to cooperate to place the wafer ring into the original position of the box; The controller is used for controlling the alarm to issue a first alarm and suspending all actions after all wafer rings in the box are completely cleaned; The controller is used for controlling the alarm to issue a second alarm and suspending all actions when the position inductor in the anti-collision assembly does not detect the corresponding blocking piece.

6. The full-automatic loading and unloading device according to any one of claims 1-5, wherein The surface of the transfer workbench is further provided with a transparent closed shell.

7. The full-automatic loading and unloading device according to any one of claims 1-5, wherein The first mechanical arm is a plate-shaped structure provided with a convex arc-shaped limiting strip on the upper surface, the fixed end is fixedly connected with the front and rear translation assemblies, and the other end is suspended; and the inner wall of the arc-shaped limiting strip is consistent in shape with the outer wall of the wafer ring.

8. The full-automatic loading and unloading device according to any one of claims 1-5, wherein The second mechanical arm is a horizontal bottom plate provided with a pneumatic suction cup on the lower surface.

9. The full-automatic loading and unloading device according to any one of claims 1-5, wherein The first driving member, the second driving member, the third driving member and the fourth driving member are one of a driving motor and a driving cylinder.

10. The full-automatic loading and unloading device according to any one of claims 1-5, wherein The H-shaped fixing frame is axially provided with a plurality of fixing holes for adjusting the height of the left and right translation assemblies mounted on the H-shaped fixing frame.

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