Supporting mechanism and evaporation coating equipment

Abstract

The utility model discloses a supporting mechanism and evaporation coating equipment. The supporting mechanism comprises a first supporting assembly and a second supporting assembly, the first supporting assembly comprises a first mounting part and a first supporting part, the first supporting part is movably connected to the first mounting part, a first elastic part is arranged between the first supporting part and the first mounting part, and the first mounting part is suitable for being connected with a supporting device; and the second supporting assembly is suitable for being connected with a supported device, and the second supporting assembly comprises a second supporting piece. The first supporting assembly is installed on the supporting device, the second supporting assembly is installed on the supported device, the first supporting piece can support the second supporting piece, and therefore the supported device can be supported, and the first elastic piece is arranged between the first supporting piece and the first installation piece. The first supporting piece is pushed by the first elastic piece to move in the first direction so as to abut against the second supporting piece, and therefore the stable supporting effect on the second supporting piece is achieved, the structure is simpler, and the overall cost is low.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating equipment technology, and more specifically, to a support mechanism and evaporation coating equipment. Background Technology

[0002] In related technologies, when using a PVD (Physical Vapor Deposition) evaporation coating machine to coat the surface of a material, the inside of the evaporation coating machine is in a vacuum state, which can easily lead to severe deformation of the top of the cavity. Currently, the deformation of the cavity is generally reduced by increasing the number of external reinforcing ribs, but this method will increase the amount of steel used in the cavity, thus increasing the cost.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for a support mechanism.

[0005] According to a first aspect of the present invention, a support mechanism is provided. The support mechanism includes:

[0006] A first support assembly includes a first mounting member and a first support member. The first support member is movably connected to the first mounting member. A first elastic member is provided between the first support member and the first mounting member. The first mounting member is adapted to be connected to a support device.

[0007] A second support assembly is adapted to be connected to the supported device, the second support assembly including a second support member;

[0008] The first elastic element can drive the first support element to move along a first direction so that the first support element abuts against the second support element, thereby providing support for the second support element.

[0009] Optionally, the first mounting member is provided with a mounting shaft, and the first support member is slidably connected to the mounting shaft.

[0010] Optionally, the first support member can also rotate along the mounting axis, and multiple first elastic members are provided, which are arranged circumferentially along the mounting axis. The first elastic members are adapted to drive the first support member to move along the mounting axis.

[0011] Optionally, a bushing is provided between the first support member and the mounting shaft.

[0012] Optionally, the first support component further includes a limiting member, which is mounted on the first mounting member and is adapted to limit the movement of the first support component in a first direction.

[0013] Optionally, one end of the limiting member is mounted on the first mounting member shown, and the other end is adapted to abut against the first support member.

[0014] Optionally, the first mounting member has a limiting portion on the side of the first support member away from the limiting member, and the limiting portion is adapted to limit the first support member.

[0015] Optionally, the first mounting member further includes a connecting portion and a reinforcing portion, wherein one end of the limiting member away from the first support member is connected to the connecting portion, one end of the reinforcing portion is connected to the connecting portion, and the other end is connected to the limiting portion.

[0016] Optionally, the first support member is provided with a first support surface, which is adapted to abut against the second support member, and the first support surface is inclined along a first direction.

[0017] Optionally, the second support further includes a second mounting member, which is adapted to be connected to the supported device, and the second support is rotatably connected to the second mounting member.

[0018] According to a second aspect of the present invention, an evaporation coating apparatus is provided. The evaporation coating apparatus includes the support mechanism described in the above embodiments; wherein the support device includes a cover plate, the supported device includes a cavity, the cover plate is adapted to seal and cover the cavity, a first support component is installed on the cover plate, and a second support component is installed on the inner wall of the cavity.

[0019] One technical advantage of this application is that the first support component is installed on the support device, and the second support component is installed on the supported device. The first support component can support the second support component, thereby providing support for the supported device. Furthermore, a first elastic component is provided between the first support component and the first mounting component. The first elastic component pushes the first support component to move along the first direction to abut against the second support component, thereby providing stable support for the second support component. The structure is simpler and the overall cost is lower.

[0020] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0022] Figure 1 This is a schematic diagram of the structure of the first support component according to an embodiment of the present invention.

[0023] Figure 2 This is a structural schematic diagram of the first support component from another perspective of one embodiment of the present invention.

[0024] Figure 3 This is a top view of the first support component according to an embodiment of the present invention.

[0025] Figure 4 yes Figure 3 The cross-sectional view shown at point AA.

[0026] Figure 5 This is a schematic diagram of the support mechanism according to one embodiment of the present invention.

[0027] Figure 6 This is a side view of the support mechanism according to an embodiment of the present invention.

[0028] Figure 7 This is a top view of the support mechanism according to an embodiment of the present invention.

[0029] Figure 8 yes Figure 7 The cross-sectional view shown at BB.

[0030] Figure label:

[0031] 1. First support assembly; 11. First mounting component; 111. Mounting shaft; 112. Limiting part; 113. Reinforcing part; 1131. Reinforcing rib; 114. Connecting part; 12. First support member; 121. First support surface; 13. First elastic member; 14. Limiting member; 2. Second support assembly; 21. Second support member; 22. Second mounting component; 23. Rotating shaft; 24. Second elastic member; 25. Guide roller. Detailed Implementation

[0032] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0033] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0034] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0035] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0037] According to one embodiment of this application, a support mechanism is provided. For example... Figures 1 to 8 As shown, the support mechanism includes a first support assembly 1 and a second support assembly 2. The first support assembly 1 includes a first mounting member 11 and a first support member 12. The first support member 12 is movably connected to the first mounting member 11. A first elastic member 13 is provided between the first support member 12 and the first mounting member 11. The first mounting member 11 is adapted to be connected to a support device. The second support assembly 2 is adapted to be connected to the supported device and includes a second support member 21. The first elastic member 13 can drive the first support member 12 to move along a first direction, so that the first support member 12 abuts against the second support member 21, thereby providing support for the second support member 21.

[0038] In this example, the first support component 1 is installed on the support device, and the second support component 2 is installed on the supported device. The first support component 12 can support the second support component 21, thereby providing support for the supported device. Furthermore, a first elastic component 13 is provided between the first support component 12 and the first mounting component 11. The first elastic component 13 pushes the first support component 12 to move along a first direction to abut against the second support component 21, thereby providing stable support for the second support component 21. The structure is simpler, easier to assemble and transport, and has a lower overall cost.

[0039] The supporting device can be a cover plate, and the supported device can be a cavity. The cover plate can seal the opening of the cavity, and then a vacuum can be drawn inside the cavity. Evaporation coating operations can be performed inside the cavity. The first supporting component 1 can be installed inside the cover plate, and the second supporting component 21 can be installed on the inner wall of the cavity, for example, the second supporting component 21 can be located at the top of the cavity. After the cover plate is sealed on the cavity, the first supporting component 12 can support the second supporting component 21, thereby providing a supporting effect for the cavity and preventing deformation of the cavity.

[0040] It should be noted that the second support component 2 is installed on the upper wall of the cavity and is located in the middle of the upper wall. The two ends of the upper wall can be supported by the side walls of the cavity on both sides, and the middle of the upper wall is supported by the support structure, so as to have a good support effect and prevent the cavity from deforming.

[0041] Of course, the supporting device and the supported device can also have other structures and uses, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0042] like Figure 4 As shown, in this example, the first support member 12 is movably connected to the first mounting member 11, and a first elastic member 13 is provided between the first support member 12 and the first connecting member. During the installation of the cover plate into the cavity, the first support member 12 can come into contact with and collide with the second support member 21. The first elastic member 13 can play a certain buffering role to reduce damage to the first support member 12 and the second support member 21. Furthermore, the first elastic member 13 can drive the first support member 12 to move in a first direction, that is, the second support member 21 will push the first support member 12 to move forward in the first direction, while the first elastic member 13 can drive the first support member 12 to move in the opposite direction in the first direction, so that the first support member 12 abuts against the second support member 21, thereby providing a more stable support effect for the second support member 21.

[0043] For example, the first elastic element 13 can be a compression spring, with one end abutting against the first mounting member 11 and the other end abutting against the first support member 12. Alternatively, the first elastic element 13 can also be a tension spring, capable of pulling the first support member 12 to move. A guide rod is also provided on the first support member 12 and / or the first mounting member 11, and the first elastic element 13 can be sleeved on the guide rod. Alternatively, the first elastic element 13 can also be other types of elastic elements, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0044] In one example, such as Figure 4 As shown, the first mounting member 11 is provided with a mounting shaft 111, and the first support member 12 is slidably connected to the mounting shaft 111.

[0045] like Figure 4 As shown, in this example, the mounting shaft 111 is arranged along a first direction, and the first support member 12 is slidably connected to the mounting shaft 111, thereby enabling it to move along the first direction on the mounting shaft 111. Furthermore, the mounting shaft 111 also provides support for the first support member 12, improving its stability and reliability. For example, the mounting shaft 111 can be a cylindrical shaft, and the first support member 12 can be sleeved onto the mounting shaft 111.

[0046] In one example, such as Figure 3 and Figure 4As shown, the first support member 12 can also rotate along the mounting shaft 111. Multiple first elastic members 13 are provided, and the multiple first elastic members 13 are arranged circumferentially along the mounting shaft 111. The first elastic members 13 are suitable for driving the first support member 12 to move along the mounting shaft 111.

[0047] like Figure 3 and Figure 4 As shown, in this example, the first support member 12 can slide along the mounting shaft 111, and the second support member can also rotate along the mounting shaft 111, thereby improving the flexibility of the first support member 12 to facilitate its cooperation with the second support member 21. Multiple first elastic members 13 are provided, and these multiple first elastic members 13 are spaced apart circumferentially along the mounting shaft 111. During the assembly of the cover plate into the cavity, when the first support member 12 rotates, for example, clockwise, the multiple first elastic members 13 can cooperate with each other, thereby driving the first support member 12 to rotate counterclockwise to reset, ensuring stable contact between the first support member 12 and the second support member 21.

[0048] In this example, the first elastic element 13 can be provided in three, four, or five intervals, etc., as can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0049] In one example, a bushing is provided between the first support member 12 and the mounting shaft 111. The first support member 12 is connected to the mounting shaft 111 via the bushing, thereby improving the smoothness of the movement of the first support member 12 and also helping to reduce wear on the first support member 12 and the mounting shaft 111. Compared to existing solutions that seal lubricating oil between the first support member 12 and the mounting shaft 111, the bushing has a simpler structure and is easier to install.

[0050] In one example, such as Figure 3 and Figure 4 As shown, the first support component 1 further includes a limiting member 14, which is installed on the first mounting member 11 and is adapted to limit the movement position of the first support member 12 in a first direction.

[0051] like Figure 3 and Figure 4 As shown, in this example, the first mounting member 11 is also provided with a limiting member 14, which is used to limit the first support member 12. That is, during the process of sealing the cover plate in the cavity, the second support member 21 abuts against the first support member 12, which will push the first support member 12 to move in the first direction. If the first support member 12 moves too far, it will abut against the limiting member 14, thereby limiting the first support member 12.

[0052] like Figure 3 and Figure 4 As shown, in this example, one end of the limiting member 14 is mounted to the first mounting member 11, and the other end is adapted to abut against the first support member 12. For example, the limiting member 14 can be a limiting rod, one end of which is connected to the first mounting member 11, and the other end can extend toward the first support member 12. In the unassembled state of the first support assembly 1, the first elastic member 13 can push the first support member 12 away from the limiting member 14, and there is a gap between the limiting member 14 and the first support member 12. The limiting member 14 can be a screw, screwed to the first mounting member 11, and the initial distance between the end of the limiting member 14 toward the first support member 12 and the first support member 12 can be adjusted by rotating the limiting member 14.

[0053] Alternatively, the limiting member 14 can be other structures. For example, the limiting member 14 can be a limiting block. The limiting member 14 is installed on the first mounting member 11. When the first support member 12 moves to the preset position, it can abut against the limiting member 14.

[0054] Of course, the specific structure of the limiting member 14 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0055] In one example, such as Figures 1 to 4 As shown, the first mounting member 11 has a limiting part 112 on the side of the first support member 12 away from the limiting member 14, and the limiting part 112 is used to limit the first support member 12.

[0056] like Figures 1 to 4 As shown, in this example, the first support member 12 is further provided with a limiting part 112 on the side away from the limiting member 14. The limiting part 112 can limit the first support member 12 to prevent the first support member 12 from sliding off the mounting shaft 111.

[0057] like Figure 3 and Figure 4 As shown, the limiting part 112 can be a limiting plate structure, and one end of the mounting shaft 111 can be connected to the limiting part 112. For example, one end of the mounting shaft 111 can be connected to the limiting part 112 by means of a flange or screw connection.

[0058] In one example, such as Figures 1 to 4 As shown, the first mounting member 11 further includes a connecting portion 114 and a reinforcing portion 113. One end of the limiting member 14 away from the first support member 12 is connected to the connecting portion 114, and one end of the reinforcing portion 113 is connected to the connecting portion 114, and the other end is connected to the limiting portion 112.

[0059] like Figures 1 to 4As shown, in this example, the connecting part 114 and the limiting part 112 are arranged opposite to each other. One end of the mounting shaft 111 is connected to the limiting part 112, and the other end is connected to the connecting part 114. The connecting part 114 is suitable for connection with a support device. For example, the connecting part 114 can be fixedly mounted on the cover plate by fasteners such as bolts, so that the cover plate can provide support for the side wall of the cavity.

[0060] like Figure 3 As shown, in this example, the first elastic member 13 can be disposed between the connecting portion 114 and the first support member 12, that is, one end of the first elastic member 13 abuts against the first support member 12, and the other end abuts against the connecting portion 114. Furthermore, the limiting member 14 can be a limiting rod, with one end connected to the connecting portion 114 and the other end extending toward the first support member 12.

[0061] like Figures 1 to 3 As shown, in this example, a reinforcing part 113 is also provided between the limiting part 112 and the connecting part 114. That is, one end of the reinforcing part 113 is connected to the connecting part 114, and the other end is connected to the limiting part 112, thereby improving the strength of the first mounting member 11 and improving the stability of the support. Multiple reinforcing parts 113 can be provided; for example, one reinforcing part 113 can be provided on each of the opposite sides of the mounting shaft 111.

[0062] In this example, the connecting part 114 and the reinforcing part 113 can be plate structures, and the plate can be made of materials such as stainless steel or aluminum alloy. The reinforcing part 113 can be integrally formed with the connecting part 114, and the end of the reinforcing part 113 away from the connecting part 114 can be fixedly connected to the limiting part 112 by fasteners such as flanges or bolts.

[0063] like Figures 1 to 3 As shown, in this example, reinforcing ribs 1131 are also provided on the reinforcing part 113 and the connecting part 114, thereby further improving the strength of the first mounting member 11 and enhancing the stability of the first support assembly 1. Multiple reinforcing ribs 1131 can be provided at intervals. For example, two, three, or four ribs can be provided at intervals. Those skilled in the art can determine this according to the actual situation, and no specific limitation is made here.

[0064] In one example, such as Figure 4 and Figure 8 As shown, the first support member 12 is provided with a first support surface 121, which is adapted to abut against the second support member 21, and the first support surface 121 is inclined along a first direction.

[0065] like Figure 4 and Figure 8As shown, in this example, the upper end face of the first support member is the first support surface 121, and the lower end face of the second support member 21 is the second support surface. The first support surface 121 can abut against the second support surface. The first support surface 121 is inclined along the first direction to facilitate assembly. For example, when the cover plate is sealed and assembled into the cavity, the cover plate moves from right to left. The first support assembly 1 is installed on the side of the cover plate facing the cavity. The second support member 21 can gradually abut against the first support surface 121 from the left side of the first support member 12. Along the first direction, the first support surface 121 is gradually inclined upward from left to right. Therefore, when the first support member 12 contacts the second support member 21, it is more conducive to pressing the second support member 21 on top of the first support member 12, thus facilitating assembly.

[0066] like Figure 8 As shown, in this example, the second support member 21 is also provided with a guide roller 25. The guide roller 25 can be rotatably mounted on the second support member 21. When the cover plate is sealed and assembled into the cavity, the guide roller 25 can first contact the first support surface 121 and roll along the first support surface 121, which helps to reduce friction and is more conducive to assembly.

[0067] In one example, such as Figures 5 to 8 As shown, the second support member 21 further includes a second mounting member 22, which is adapted to be connected to the supported device, and the second support member 21 is rotatably connected to the second mounting member 22.

[0068] like Figure 8 As shown, the second mounting member 22 can be fixedly installed on the supported device using fasteners such as studs or bolts. For example, the second mounting member 22 can be fixedly connected to the inner wall of the cavity using bolts. The second support member 21 is rotatably connected to the second mounting member 22 via a rotating shaft 23. The guide roller 25 is located on one side of the radial direction of the rotating shaft 23. Rotation of the second support member 21 can drive the guide roller 25 to rotate upward or downward. By rotatably installing the second support member 21 onto the second mounting member 22, the flexibility of the second support member 21 can be improved, facilitating assembly.

[0069] like Figure 8 As shown, in this example, a second elastic member 24 is provided between the second support member 21 and the second mounting member 22. There are two second elastic members 24, which are located on both sides of the rotating shaft 23 in the radial direction.

[0070] One end of the second elastic member 24 abuts against the second mounting member 22, and the other end abuts against the second support member 21. This not only allows the second support member 21 to rotate around the pivot 23 when it abuts against the first support member 12, ensuring that the second support member 21 and the first support member 12 will not jam, but also prevents the second support member 21 from swaying when it is not under force, thus ensuring the stability of the second support member 21.

[0071] The second elastic element 24 can be a spring. Since springs are relatively lightweight, they can reduce the weight of the second support assembly 2 to some extent. Alternatively, the second elastic element 24 can also be an elastic rubber block. The elastic rubber block allows the second support assembly 21 to rotate around the pivot 23 when under force, and when not under force, the strong elastic force of the rubber block helps maintain the stability of the second support assembly 21. Those skilled in the art can determine the appropriate element based on the specific circumstances; no specific limitations are made here.

[0072] According to another embodiment of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the support mechanism described in the above embodiment; wherein the support device includes a cover plate, the supported device includes a cavity, the cover plate is suitable for sealing the cavity, a first support component 1 is installed on the cover plate, and a second support component 2 is installed on the inner wall of the cavity. The first support component 1 is installed on the cover plate, and the second support component 2 is installed on the inner wall of the cavity. The first support component 12 can support the second support component 21, thereby providing support for the inner wall of the cavity. Furthermore, a first elastic component 13 is provided between the first support component 12 and the first mounting component 11. The first elastic component 13 pushes the first support component 12 to move along a first direction to abut against the second support component 21, thereby providing stable support for the second support component 21. The structure is simpler and the overall cost is lower.

[0073] In this example, the second support member 21 can be located at the top of the cavity. After the cover plate is sealed on the cavity, the first support member 12 can support the second support member 21, thereby providing a supporting effect for the cavity to prevent deformation.

[0074] It should be noted that the second support component 2 is installed on the upper wall of the cavity and is located in the middle of the upper wall. The two ends of the upper wall can be supported by the side walls of the cavity on both sides, and the middle of the upper wall is supported by the support structure, so as to have a good support effect and prevent the cavity from deforming.

[0075] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0076] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A support mechanism, characterized by, The application relates to a support mechanism. The first support assembly comprises a first mounting member and a first support member, the first support member being movably connected to the first mounting member, a first elastic member being arranged between the first support member and the first mounting member, and the first mounting member being adapted to be connected to a support device. The second support assembly is adapted to be connected to a supported device, and comprises a second support member. The first elastic member can drive the first support member to move in a first direction, so that the first support member abuts against the second support member, thereby supporting the second support member.

2. The support mechanism of claim 1, wherein The first mounting member is provided with a mounting shaft, and the first support member is slidably connected to the mounting shaft.

3. The support mechanism of claim 2, wherein, The first support member can also rotate along the mounting shaft, and the first elastic member is provided with a plurality of first elastic members which are arranged along the circumference of the mounting shaft, and the first elastic member is adapted to drive the first support member to move along the mounting shaft.

4. The support mechanism of claim 2, wherein, A bushing is arranged between the first support member and the mounting shaft.

5. The support mechanism of claim 1, wherein, The first support assembly further comprises a limiting member which is mounted on the first mounting member and is adapted to limit the moving position of the first support member in the first direction.

6. The support mechanism of claim 5, wherein, One end of the limiting member is mounted on the first mounting member, and the other end is adapted to abut against the first support member.

7. The support mechanism of claim 5, wherein, The first mounting member is provided with a limiting portion on the side of the first support member away from the limiting member, and the limiting portion is adapted to limit the first support member.

8. The support mechanism of claim 7, wherein, The first mounting member further comprises a connecting portion and a reinforcing portion, one end of the limiting member away from the first support member is connected to the connecting portion, one end of the reinforcing portion is connected to the connecting portion, and the other end is connected to the limiting portion.

9. The support mechanism of claim 1, wherein, The first support member is provided with a first support surface which is adapted to abut against the second support member, and the first support surface is arranged to be inclined in the first direction.

10. The support mechanism of claim 1, wherein, The second support member further comprises a second mounting member which is adapted to be connected to a supported device, and the second support member is rotatably connected to the second mounting member.

11. An evaporation coating apparatus, characterized by The application further relates to a support mechanism comprising any one of the support mechanisms as claimed in claims 1 to 10. The support device comprises a cover plate, and the supported device comprises a cavity, the cover plate is adapted to be tightly arranged on the cavity, the first support assembly is mounted on the cover plate, and the second support assembly is mounted on the inner wall of the cavity.

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