Evaporation boat mechanism and evaporation coating equipment

Abstract

The utility model discloses an evaporation boat mechanism and evaporation coating equipment. The evaporation boat mechanism comprises a tank body and a shielding assembly, the tank body is provided with an opening end, and the interior of the tank body is suitable for evaporating coating steam; the shielding assembly comprises a first driving part and a first baffle, the first driving part is in transmission connection with the first baffle, the first baffle is located on one side of the groove body, and the first driving part can drive the first baffle to partially protrude out of the opening end; the first driving piece can further drive the first baffle to be lower than the opening end or flush with the opening end. The first baffle is located on one side of the groove body, the first driving piece can drive the first baffle to partially protrude out of the opening end, so that the wind blocking effect can be achieved, coating steam is prevented from diffusing outwards from the opening end, the first driving piece can further drive the first baffle to be lower than the opening end or flush with the opening end, and therefore the avoiding effect can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to evaporation coating equipment technical field more particularly, it is a kind of evaporation boat mechanism and evaporation coating equipment. BACKGROUND

[0002] In the related art, the evaporation coating equipment generally includes a cavity and a cover plate, an evaporation tank is arranged in the evaporation cavity of the cavity, one side of the evaporation tank has a notch for avoiding parts on the cover plate when the cover plate covers the cavity, and during the evaporation coating process, the evaporation cavity needs to be vacuumized, and during the vacuumization process by the vacuum pump, the aluminum vapor is easily sucked away from the notch of the evaporation tank, thereby affecting the coating effect.

[0003] Therefore, it is necessary to provide a new technical solution to solve the above technical problems. UTILITY MODEL CONTENT

[0004] One object of the utility model is to provide a new technical solution for an evaporation boat mechanism.

[0005] According to the first aspect of the utility model, an evaporation boat mechanism is provided. The evaporation boat mechanism includes:

[0006] A tank body having an open end, the inside of the tank body is suitable for evaporation coating vapor;

[0007] A shielding assembly including a first drive member and a first baffle, the first drive member is drivingly connected to the first baffle, the first baffle is located on one side of the tank body, the first drive member can drive the first baffle to partially protrude from the open end, and the first drive member can also drive the first baffle to be lower than the open end or flush with the open end.

[0008] Optionally, the first drive member can drive the first baffle to move in the vertical direction.

[0009] Optionally, the first drive member drives the first baffle to move in the vertical direction through a crank rocker structure.

[0010] Optionally, the shielding assembly further includes a position detector, and the position detector is suitable for detecting the position of the first baffle.

[0011] Optionally, it further includes a second baffle and a second drive member, the second drive member is drivingly connected to the second baffle, and the second drive member can drive the second baffle to cover or open the open end.

[0012] Optionally, the tank body is provided with a sliding rail, and the second baffle is slidably arranged on the sliding rail.

[0013] Optionally, the side wall of the tank body is provided with a pressure relief port.

[0014] Optionally, it also includes an adjustment plate, which is installed on the side wall of the tank and is adapted to adjust the opening degree of the pressure relief port.

[0015] Optionally, at least one side of the opening end is provided with a rectifier plate extending outward.

[0016] According to a second aspect of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the evaporation boat mechanism described in the above embodiments.

[0017] One technical advantage of this application is that the first baffle is located on one side of the tank, and the first driving member can drive the first baffle part to protrude from the opening end, thereby achieving a wind-blocking effect to reduce the diffusion of coating vapor from the opening end to the outside. The first driving member can also drive the first baffle to be lower than the opening end or flush with the opening end, thereby achieving a clearance function.

[0018] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0019] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0020] Figure 1 This is a partial structural schematic diagram of an evaporation boat mechanism according to an embodiment of this application.

[0021] Figure 2 This is a schematic diagram of the structure of a shielding component according to an embodiment of this application.

[0022] Figure 3 This is a schematic diagram of the structure of a shielding component according to another embodiment of this application.

[0023] Figure 4 This is a schematic diagram of the evaporation boat mechanism according to an embodiment of this application.

[0024] Figure 5 This is a side view of an evaporation boat mechanism according to an embodiment of this application.

[0025] Figure 6 This is a front view of an evaporation boat mechanism according to an embodiment of this application.

[0026] Figure 7 yes Figure 6 The cross-sectional view shown at point AA.

[0027] Figure label:

[0028] 1. Tank; 11. Opening end; 111. First side; 12. Slide rail; 2. Shielding assembly; 21. First driving component; 22. First baffle; 23. Crank rocker structure; 24. Position detector; 25. Output rod; 26. Mounting base; 3. Second baffle; 4. Rotating shaft; 5. First connecting rod; 6. Second connecting rod; 7. Rectifier plate; 8. Cooling roller; 9. Coating baffle; 91. Coating port. Detailed Implementation

[0029] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0030] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0031] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0032] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0034] According to one aspect of this application, an evaporation boat mechanism is provided. For example... Figures 1 to 7 As shown, the evaporation boat mechanism includes a tank 1 and a shielding assembly 2. The tank 1 has an open end 11, and its interior is suitable for evaporating coating vapor. The shielding assembly 2 includes a first driving member 21 and a first baffle 22. The first driving member 21 is tractively connected to the first baffle 22, which is located on one side of the tank 1. The first driving member 21 can cause the first baffle 22 to partially protrude from the open end 11, and can also cause the first baffle 22 to be lower than or flush with the open end 11.

[0035] In this example, the first baffle 22 is located on one side of the tank 1. The first driving member 21 can drive the first baffle 22 to protrude partially from the opening end 11, thereby achieving a wind-blocking effect to reduce the diffusion of coating vapor from the opening end 11 outward. The first driving member 21 can also drive the first baffle 22 to be lower than or flush with the opening end 11, thereby achieving a clearance effect.

[0036] It should be noted that the evaporation boat mechanism is located in the evaporation chamber of the cavity. During the evaporation coating of the base film, the base film is wound around the cooling roller 8, which is located above the tank 1 and corresponds to the opening end 11. This allows the coating vapor in the tank 1 to rise from the opening end 11 and form a coating on the surface of the base film. During the coating process, a vacuum pump is used to evacuate the evaporation chamber. The air inlet of the vacuum pump in the evaporation chamber is located on one side of the tank 1, and the first baffle 22 is located on one side of the tank 1. The first driving member 21 can drive the first baffle 22 to protrude partially from the opening end 11, thereby acting as a windbreak to reduce the diffusion of coating vapor from the opening end 11 and to reduce the amount of vapor being drawn away by the vacuum pump. The coating vapor can be aluminum vapor, etc.

[0037] It should also be noted that the cooling roller 8 is mounted on the cover plate, which pushes the cooling roller 8 into the cavity. The cover plate can seal the cavity, allowing an evaporation chamber to be formed inside. Other components are also provided on the cover plate. During the process of the cover plate pushing the cooling roller 8 into the cavity, the first driving member 21 can drive the first baffle 22 to be lower than or flush with the opening end 11, thereby avoiding other components mounted on the cover plate, such as water pipes.

[0038] For example, such as Figure 1 As shown, the tank 1 has a first side 111. The air inlet of the vacuum pump in the evaporation chamber is located on one side of the first side 111, and the first baffle 22 can be located on the outside of the first side 111. The first driving member 21 can drive the first baffle 22 to protrude from the opening end 11, thereby playing a role in blocking the wind. The first driving member 21 can also drive the upper surface of the first baffle 22 to be lower than or flush with the opening end 11, thereby playing a role in avoiding airflow.

[0039] The groove 1 can be a rectangular groove, and the first side 111 can be one side of the groove 1 along its length. Of course, the specific structure of the groove 1 and the specific position of the first side 111 can be determined by those skilled in the art according to the actual situation, and are not specifically limited here.

[0040] In this example, the first baffle 22 can be a plate structure such as stainless steel or aluminum alloy. Those skilled in the art can determine the structure according to the actual situation, and no specific limitation is made here.

[0041] In one example, the first driving member 21 can drive the first baffle 22 to move vertically. The opening end 11 of the groove 1 faces upward, and the first baffle 22 is located on one side of the groove 1. The first driving member 21 can drive the first baffle 22 to move upward so that the first baffle 22 can partially protrude from the opening end 11. Furthermore, the first driving member 21 can also drive the first baffle 22 to move downward to provide a clearance function. This arrangement helps save installation space.

[0042] In one example, such as Figure 2 and Figure 3 As shown, the first driving member 21 drives the first baffle 22 to move in the vertical direction through the crank rocker structure 23.

[0043] like Figure 2 and Figure 3 As shown, in this example, the first driving element 21 can be a rotary actuator such as a rotary motor. The first driving element 21 and the first baffle 22 are connected by a transmission structure, which can be a crank-rocker structure 23. The first driving element 21 drives the crank to rotate, and the rocker arm is an output rod 25 connected to the first baffle 22, thereby enabling the first baffle 22 to move upward or downward. Through the crank-rocker structure 23, the first baffle 22 can reciprocate. The first driving element 21 rotates, and the first baffle 22 has no limit to its travel. When the first baffle 22 moves to a suitable position, the first driving element 21 stops rotating.

[0044] Of course, the specific structure of the crank-rocker structure 23 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0045] like Figure 2 and Figure 3 As shown, in this example, the shielding assembly 2 also includes a mounting base 26, which can be installed on the outer wall of the tank 1 by means of screwing, snap-fitting, or welding. The first driving member 21 can be installed on the mounting base 26 by means of snap-fitting or screwing. The mounting base 26 has a mounting cavity, and the crank rocker structure 23 is disposed in the mounting cavity. The output rod 25 is slidably disposed on the mounting base 26, and one end of the output rod 25 is connected to the first baffle 22 and can drive the first baffle 22 to move.

[0046] Alternatively, the first driving element 21 can also be a linear driving element such as a linear motor or cylinder, which is directly connected to the first baffle 22 for movement. Of course, the specific structure of the first driving element 21 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0047] like Figure 2 and Figure 3As shown, in this example, one end of the output rod 25 is rotatably connected to the first baffle 22. That is, the first baffle 22 and the output rod 25 can be connected by a rotating shaft. The first baffle 22 can rotate relative to the output rod 25, thereby facilitating the adjustment of the tilt angle of the first baffle 22 and improving the convenience of using the shielding assembly 2.

[0048] In one example, such as Figure 2 and Figure 3 As shown, the blocking component 2 also includes a position detector 24, which is adapted to detect the position of the first baffle 22.

[0049] like Figure 2 and Figure 3 As shown, in this example, the position detector 24 can be mounted on the mounting base 26. The position detector 24 can detect the position of the output rod 25, thereby detecting the position of the first baffle 22. For example, when the position detector 24 detects the output rod 25, the first drive member 21 moves the first baffle 22 downward to a position that can be avoided, so that the cover plate can be assembled into the cavity. For example, the position detector 24 can be a photoelectric detector, a contact or proximity position sensor, etc.

[0050] In this example, the position detector 24 can also detect when the first baffle 22 moves to the windproof position. That is, after the position detector 24 detects that the first baffle 22 is in the preset windproof position, the first drive component 21 stops operating, thereby enabling the first baffle 22 to achieve a better windproof effect. The position detector 24 may include two position sensors. The two position sensors can respectively detect whether the first baffle 22 is in the avoidance position or the windproof position.

[0051] Of course, the specific settings of the position detector 24 can be determined by those skilled in the art according to the actual situation, and no specific limitations are made here.

[0052] In one example, such as Figure 5 and Figure 7 As shown, the evaporation boat mechanism also includes a second baffle 3 and a second driving member. The second driving member is connected to the second baffle 3 and can drive the second baffle 3 to seal or open the opening end 11.

[0053] like Figure 5 and Figure 7As shown, the second baffle 3 is movably positioned relative to the opening end 11, and the second driving component can drive the second baffle 3 to seal the opening end 11. When the evaporation coating equipment is first started, the inside of the tank 1 needs to be preheated. After heating to a suitable temperature, aluminum wire is then conveyed for dry evaporation. This process is called "lubrication," that is, immersing the inside of the tank 1 in molten aluminum. During this process, a high temperature will be continuously generated. The base film is located above the opening end 11, and continuous high temperature can easily damage the base film, resulting in waste. Therefore, during the lubrication process, the second baffle 3 seals the opening end 11, which can play a role in heat insulation and avoid waste of the base film. After lubrication, the second driving component can drive the second baffle 3 to open the opening end 11, thereby enabling the evaporation coating operation of the base film.

[0054] In this example, the second baffle 3 can be made of stainless steel or aluminum alloy, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0055] In one example, such as Figure 1 As shown, the groove 1 is provided with a slide rail 12, and the second baffle 3 is slidably disposed on the slide rail 12.

[0056] like Figure 1 As shown, in this example, the trough 1 is provided with slide rails 12 on both sides along the length direction, and the slide rails 12 extend on one side along the width direction. The second baffle 3 can move along the slide rails 12, thereby opening or closing the opening end 11.

[0057] In this example, the two opposite sides of the groove 1 along its length are a first side 111 and a second side, respectively. The first side 111 and the second side are respectively provided with slide rails 12, and the two opposite ends of the second baffle 3 are slidably disposed on the slide rails 12. The second driving member can drive the second baffle 3 to slide on the slide rails 12 to open or close the opening end 11.

[0058] like Figure 5 As shown, in this example, the second driving component is connected to the second baffle 3 via a linkage structure, and the second driving component can be installed in the groove 1. The linkage structure includes a first link 5 and a second link 6. One end of the first link 5 is connected to the rotating shaft 4 of the second driving component, and the other end of the first link 5 is rotatably connected to the second link 6. The end of the second link 6 furthest from the first link 5 is rotatably connected to the second baffle 3. The second driving component can be a rotary motor or other driving component. The second driving component drives the rotating shaft 4 to rotate, thereby enabling the second baffle 3 to slide along the slide rail 12 via the linkage structure.

[0059] Of course, the second driving component can also be other driving structures, such as linear motors or cylinders, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0060] In one example, the side wall of the tank 1 is equipped with a pressure relief port. Because of the evaporation of molten aluminum inside the tank 1, there is a certain positive pressure compared to the evaporation chamber. Higher pressure indicates greater kinetic energy of the aluminum vapor molecules, resulting in a denser and more adhesive coating. However, high pressure can push large aluminum molecule clusters, falling aluminum ash, or droplets from explosions in the molten pool onto the surface of the base film, causing defects such as bumps on the coating surface or burn-through. The pressure relief port on the side wall of the tank 1 releases harmful pressure, maintaining the pressure within the tank 1 at a reasonable level to improve the coating effect.

[0061] In one example, the evaporation boat mechanism also includes an adjustment plate mounted on the side wall of the tank 1, the adjustment plate being adapted to adjust the opening degree of the pressure relief port.

[0062] In this example, an adjusting plate is adjustablely mounted on the side wall of the tank 1. The size of the pressure relief port opening can be adjusted via the adjusting plate, thereby allowing for proper pressure relief and maintaining the pressure within the tank 1 at a reasonable value to improve the coating effect. Specifically, the adjusting plate is positioned at the pressure relief port and can partially cover it. The position of the adjusting plate can be adjusted to change the area of ​​the pressure relief port covered, thus adjusting the size of the pressure relief port opening. The specific size of the pressure relief port opening can be determined by those skilled in the art based on actual conditions, and is not specifically limited here.

[0063] The adjustment plate can be made of stainless steel, aluminum alloy, or sheet metal, etc. Those skilled in the art can determine the material according to the actual situation, and no specific limitation is made here.

[0064] In one example, such as Figure 1 As shown, at least one side of the opening end 11 is provided with a rectifier plate 7 extending outward.

[0065] like Figure 1 As shown, in this example, a rectifier plate 7 is provided on one side of the opening end 11, and the rectifier plate 7 extends outward. Figure 4 yes Figure 7 As shown, during evaporation coating, a coating baffle 9 is provided above the tank 1. A cooling roller 8 is provided on the side of the coating baffle 9 away from the tank 1. A rectifier plate 7 can correspond to the lower end face of the coating baffle 9. There is a gap between the rectifier plate 7 and the coating baffle 9. By setting the rectifier plate 7, the shape of the airflow can be constrained when the coating vapor in the tank 1 diffuses to the outside of the tank 1 or when the vacuum advances into the tank 1, thus extending the length of the airflow movement, increasing the guiding resistance, and preventing the generation of rotating airflow and turbulence in the tank 1, which would cause fluctuations in the coating vapor in the tank 1.

[0066] like Figure 1As shown, in this example, the rectifier plate 7 can be disposed on multiple sides of the opening end 11, that is, the rectifier plate 7 is disposed on multiple sides of the opening end 11. During the evaporation coating process, the second baffle 3 opens the opening end 11 and is located on one side of the opening end 11, so that the second baffle 3 can also act as the rectifier plate 7 during the evaporation coating process.

[0067] In this example, the rectifier plate 7 can be fixedly connected to the side wall of the tank 1 by means of snap-fit ​​or screw connection, and the upper end surface of the rectifier plate 7 can be flush with the opening end 11. The rectifier plate 7 can be made of stainless steel, aluminum alloy, or sheet metal, etc. The specific dimensions of the rectifier plate 7 can be determined by those skilled in the art according to the actual situation, and are not specifically limited here.

[0068] According to another aspect of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the evaporation boat mechanism described in the above embodiment. The evaporation boat mechanism includes a tank 1 and a shielding assembly 2. The tank 1 has an open end 11, and the interior of the tank 1 is suitable for evaporating coating vapor. The shielding assembly 2 includes a first driving member 21 and a first baffle 22. The first driving member 21 is tractively connected to the first baffle 22, which is located on one side of the tank 1. The first driving member 21 can drive the first baffle 22 to partially protrude from the open end 11, and can also drive the first baffle 22 to be lower than or flush with the open end 11. The first baffle 22, located on one side of the tank 1, and the ability of the first driving member 21 to drive the first baffle 22 to partially protrude from the open end 11, provides a wind-blocking effect to reduce the diffusion of coating vapor from the open end 11. The ability of the first driving member 21 to drive the first baffle 22 to be lower than or flush with the open end 11 also provides a deflection effect.

[0069] like Figures 4 to 7 As shown, the base film is wound around the cooling roller 8, and the coating baffle 9 is provided with a coating port 91, that is, the coating port 91 is a through hole that passes through the coating baffle 9 along the thickness direction. One end of the coating port 91 corresponds to the base film, and the other end corresponds to the opening end 11 of the tank 1. The coating vapor in the tank 1 can flow from the coating port 91 to the surface of the base film.

[0070] In this example, the evaporation coating equipment also includes a cavity and a cover plate. The cooling roller 8 and the coating baffle 9 are disposed on one side of the cover plate. An evaporation chamber is disposed inside the cavity, and an evaporation boat mechanism is disposed inside the evaporation chamber. The cover plate can drive the cooling roller 8 and the coating baffle 9 into the cavity, and the cover plate can seal the cavity to facilitate the evacuation of the cavity.

[0071] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0072] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. An evaporation boat mechanism, characterized by, The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism.

2. The evaporation boat mechanism according to claim 1, characterized by The application relates to an evaporation boat mechanism.

3. The evaporation boat mechanism according to claim 1, characterized by The application relates to an evaporation boat mechanism.

4. The evaporation boat mechanism according to claim 1, characterized by The application relates to an evaporation boat mechanism.

5. The evaporation boat mechanism according to claim 1, wherein The application relates to an evaporation boat mechanism.

6. The evaporation boat mechanism according to claim 5, characterized in that The application relates to an evaporation boat mechanism.

7. The evaporation boat mechanism according to claim 1, wherein The application relates to an evaporation boat mechanism.

8. The evaporation boat mechanism according to claim 7, characterized in that The application relates to an evaporation boat mechanism.

9. The evaporation boat mechanism according to claim 1, wherein The application relates to an evaporation boat mechanism.

10. An evaporation coating apparatus, characterized by The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application relates to an evaporation boat mechanism. The application

Images