Continuous cavity sealing structure for film coating

Abstract

The utility model belongs to the technical field of coating, and particularly provides a continuous cavity sealing structure for coating, which comprises a cavity, sealing flanges are arranged at two ends of the cavity, and an outer sealing groove for mounting an outer sealing ring and an inner sealing groove for mounting an inner sealing ring are sequentially arranged on each sealing flange. And a sealing ring edge pressing strip for pressing the inner sealing ring is arranged in the sealing flange. The continuous cavity sealing structure for coating provided by the utility model adopts double sealing, the sealing ring can be directly replaced once without disconnecting all the cavities after five years, the maintenance time is prolonged to 10 years, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model mainly relates to vacuum coating technical field, concretely relates to a continuous cavity sealing structure for coating. BACKGROUND

[0002] Vacuum coating mainly refers to a kind of substrate under higher vacuum condition coating, specifically including vacuum ion evaporation, magnetron sputtering and laser sputtering deposition coating and many kinds, mainly divided into chemical gas deposition and physical gas deposition two, vacuum coating equipment needs to have a vacuum chamber, various kinds of spare parts are installed in the vacuum chamber interior, work under high vacuum environment.

[0003] Continuous coating equipment is composed of multiple cavities, is a production line equipment, the sealing mode between traditional multiple cavities is to process dovetail groove on sealing flange, only one sealing, one sealing corresponding sealing ring 5 years one replacement, when replacing, need to disconnect all cavities, after replacement, still need to re-join cavity, debug equipment, vacuum leak detection and test coating, the whole process needs at least 1 month's time, during the period, delay capacity, affect benefit, on this basis, simultaneously in order to meet the market diversification development, a continuous cavity sealing structure for coating is proposed. UTILITY MODEL CONTENT

[0004] 1. The technical problem to be solved by the utility model is:

[0005] The utility model provides a continuous cavity sealing structure for coating to solve the technical problems in the above background technology.

[0006] 2. Technical scheme:

[0007] In order to realize the above purpose, the technical scheme of the utility model is:

[0008] A continuous cavity sealing structure for coating, comprising a cavity, both ends of the cavity are provided with sealing flanges, the sealing flanges are sequentially provided with outer sealing grooves for installing outer sealing rings and inner sealing grooves for installing inner sealing rings, and the sealing flanges are provided with sealing ring pressing strips for pressing the inner sealing rings.

[0009] Preferably, the outer sealing groove and the outer sealing ring are arranged in a similar O shape.

[0010] Preferably, the inner sealing groove and the inner sealing ring are arranged in a similar O shape.

[0011] Preferably, it further comprises a cavity top door arranged on the surface of the cavity.

[0012] Preferably, the sealing flange is internally formed with a cavity structure matched with the cavity.

[0013] Preferably, the sealing flange is provided with a reserved hole position for mounting the sealing ring pressing strip.

[0014] 3. Beneficial effects:

[0015] Compared with the prior art, the technical scheme has the beneficial effects that:

[0016] The continuous cavity sealing structure for coating provided by the utility model adopts double sealing, and after 5 years, the sealing ring can be replaced directly without disconnecting all the cavities, the maintenance time is prolonged to 10 years, and the production efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 It is a whole structure schematic view of the utility model;

[0018] Fig. 2 It is a sealing flange structure schematic view of the utility model;

[0019] Fig. 3 It is a two-group cavity connecting structure schematic view of the utility model.

[0020] Reference Signs:

[0021] 1-cavity; 2-sealing flange; 201-outer sealing groove; 202-inner sealing groove; 3-outer sealing ring; 4-inner sealing ring; 5-sealing ring pressing strip; 6-cavity top door. DETAILED DESCRIPTION

[0022] In order to facilitate the understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings, wherein several embodiments of the utility model are given, however, the utility model can be realized in many different forms, and is not limited to the embodiments described herein, on the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0023] In the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing", "provided with" and other terms should be understood broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0024] It should be noted that the structures not introduced in the utility model are not related to the design points and improvement direction of the utility model, adopt the prior art, and the contents in the above background art belong to the technical cognition range of the inventor, and do not necessarily constitute the prior art.

[0025] Referring to Figs. 1-3 The embodiment provides a continuous cavity sealing structure for coating, comprising a cavity 1, sealing flanges 2 are arranged at both ends of the cavity 1, outer sealing grooves 201 for mounting outer sealing rings 3 and inner sealing grooves 202 for mounting inner sealing rings 4 are sequentially arranged on the sealing flanges 2, and sealing ring pressing strips 5 for pressing the inner sealing rings 4 are arranged in the sealing flanges 2.

[0026] The continuous cavity sealing structure for coating provided by the utility model adopts double sealing, after 5 years, it is not necessary to disconnect all cavities, but can directly replace the sealing ring once, the maintenance time is prolonged to 10 years, and the production efficiency is improved.

[0027] In the preferred embodiment, the outer sealing groove 201 and the outer sealing ring 3 are arranged in an O-shaped manner.

[0028] In the preferred embodiment, the inner sealing groove 202 and the inner sealing ring 4 are arranged in an O-shaped manner.

[0029] In the preferred embodiment, a cavity top door 6 arranged on the surface of the cavity 1 is further included, which is used for opening the cavity 1 and mounting the corresponding inner sealing ring 4 and sealing ring pressing strip 5.

[0030] In the preferred embodiment, the sealing flange 2 is internally formed with a cavity structure matched with the cavity 1.

[0031] In the preferred embodiment, the sealing flange 2 is internally formed with a cavity structure matched with the cavity 1.

[0032] As Fig. 3 shown, only two cavities are connected, and in actual production, 10-30 cavities may be connected, the traditional structure is a time-wasting process for replacing the sealing ring at the connection position, the structure provided by the embodiment is used for installing only the outer sealing ring 3 at the first time, and the inner sealing ring 4 is installed after 5 years, and due to the reserved hole position in the inner side of the sealing flange 2 in the cavity 1, the sealing ring pressing strip 5 is convenient to install, and when the cavity top door 6 is opened, the inner sealing ring 4 is first placed in the inner sealing groove 202 from the cavity top door 6, and then the sealing ring pressing strip 5 is fixed, so that all cavities are not disconnected for replacing the sealing ring, and the cavities are disconnected once every 10 years for replacing the sealing ring.

[0033] The above-described embodiments only express certain implementation manners of the present application, and the description is relatively specific and detailed, but should not be understood as a limitation on the scope of the present application; it should be pointed out that, for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application; therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A continuous cavity sealing structure for coating, comprising a cavity (1), characterized in that: Both ends of the cavity (1) are provided with sealing flanges (2), the sealing flanges (2) are sequentially provided with outer sealing grooves (201) for installing outer sealing rings (3) and inner sealing grooves (202) for installing inner sealing rings (4), and the sealing flanges (2) are provided with sealing ring pressing strips (5) for pressing the inner sealing rings (4).

2. The continuous cavity sealing structure for coating according to claim 1, characterized in that: The outer sealing grooves (201) and the outer sealing rings (3) are arranged in an O-shaped manner.

3. The continuous cavity sealing structure for coating according to claim 1, characterized in that: The inner sealing grooves (202) and the inner sealing rings (4) are arranged in an O-shaped manner.

4. The continuous cavity sealing structure for coating according to claim 1, characterized in that: A cavity top door (6) is further arranged on the surface of the cavity (1).

5. The continuous cavity sealing structure for coating according to claim 1, characterized in that: The sealing flanges (2) are internally formed with a cavity structure matched with the cavity (1).

6. The continuous cavity seal structure for coating according to claim 1, wherein: The sealing flanges (2) are internally provided with reserved hole positions for installing the sealing ring pressing strips (5).

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