Electrode plate of horizontal hot wire CVD (Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a horizontal hot filament CVD equipment electrode plate, which comprises an electrode plate body, a rubber sheath fixedly connected to the side surface of the electrode plate body, a spring fixedly connected to one end, far away from the electrode plate body, of the rubber sheath, a rubber layer fixedly connected to one end, far away from the rubber sheath, of the spring, and a cooling layer fixedly connected to the upper surface of the rubber sheath. A first filter screen is fixedly connected to the side surface of the cooling layer, a fixing ring is fixedly connected to the inner side face of the first filter screen, a limiting ring is fixedly connected to the inner side face of the fixing ring, a ventilation block is fixedly connected to the upper surface of the cooling layer, a cooling fan is fixedly connected to the side inner wall of the ventilation block, a sliding block is slidably connected to the side inner wall of the ventilation block, and a second filter screen is fixedly connected to the inner side face of the sliding block. Water absorption plates are fixedly connected to the inner side faces of the sliding blocks. By means of the components, when the electrode plate is used, the electrode plate can be cooled through air, the oxidation and corrosion speed of the electrode plate in a high-temperature environment is reduced, and the service life of the electrode plate is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of CVD equipment technology, and in particular to an electrode plate for a horizontal hot wire CVD equipment. Background Technology

[0002] Existing horizontal hot-wire CVD equipment integrates the electrode plate with the heating wire, effectively shortening the length of the heating wire and overcoming the defects of severe deformation and short lifespan of long heating wires. However, this direct heating of the electrode plate by the heating wire keeps the electrode plate at a high temperature during use, reducing its lifespan. For example, a horizontal hot-wire CVD equipment electrode plate and horizontal hot-wire CVD equipment disclosed in Chinese Patent Application No. CN202410428188.3, ​​although it integrates the heating wire with the electrode plate and shortens the length of the heating wire within the process unit by connecting multiple short heating wires in series with the internal wiring of the heating wire mounting plate to form a complete heating wire, overcoming the defects of severe deformation and short lifespan of existing long heating wires, still keeps the electrode plate at a high temperature, accelerating the oxidation and corrosion of the electrode plate and reducing its lifespan, thus limiting its application. Utility Model Content

[0003] The purpose of this invention is to at least solve one of the technical problems existing in the prior art, and to provide a horizontal hot-wire CVD equipment electrode plate. A rubber layer and a rubber sheath are used to isolate the cooling layer from the operating area of ​​the CVD equipment, ensuring the airtightness of the CVD equipment during use. Air and cooling water are used in the cooling layer to dissipate heat and cool the electrode plate body, reducing the rate of oxidation and corrosion of the electrode plate body in the high-temperature environment and improving the service life of the electrode plate body. At the same time, a replaceable filter and water absorption plate are provided to remove impurities and moisture in the air, avoiding air corrosion of the electrode plate body.

[0004] This utility model also provides an electrode plate for a horizontal hot wire CVD device as described above, comprising: an electrode plate body, a rubber sheath fixedly connected to the side surface of the electrode plate body, a spring fixedly connected to the end of the rubber sheath away from the electrode plate body, a rubber layer fixedly connected to the end of the spring away from the rubber sheath, and an electrode rod fixedly connected to the upper surface of the electrode plate body.

[0005] A cooling layer is fixedly connected to the upper surface of the rubber sheath. A filter screen is fixedly connected to the side surface of the cooling layer. A fixing ring is fixedly connected to the inner side of the filter screen. A limit ring is fixedly connected to the inner side of the fixing ring. A ventilation block is fixedly connected to the upper surface of the cooling layer. A cooling fan is fixedly connected to the inner side of the ventilation block. A slider is slidably connected to the inner side of the ventilation block. A second filter screen is fixedly connected to the inner side of the slider. A water-absorbing plate is fixedly connected to the inner side of the slider. These components allow for air cooling of the electrode plate during use, reducing the rate of oxidation and corrosion of the electrode plate body in high-temperature environments and improving the service life of the electrode plate body.

[0006] According to the present invention, a horizontal hot-wire CVD equipment electrode plate has a partition fixedly connected to the inner side wall of the cooling layer, and a vent is provided on the lower surface of the partition. Through these components, the cooling pipes can be separated by the partition, allowing air to fully contact and cool the cooling pipes before dissipating heat to the electrode plate body through the vent.

[0007] According to the present invention, in a horizontal hot-wire CVD equipment electrode plate, a cold water pipe is fixedly connected to the side surface of the cooling layer, and a water pump is fixedly connected to one end of the cold water pipe. Through these components, the water pump transports cooling water from the water tank through the cold water pipe to the cooling pipe to cool the intake air.

[0008] According to the present invention, in a horizontal hot-wire CVD equipment electrode plate, a cooling pipe is fixedly connected to the end of the cold water pipe away from the water pump, and the cooling pipe is located between the cooling layer and the partition. Through these components, the cooling pipe is separated by the partition, allowing the air to be fully cooled by the cooling water in the cooling pipe.

[0009] According to the present invention, in a horizontal hot-wire CVD equipment electrode plate, the end of the cooling pipe furthest from the cold water pipe is fixedly connected to a return water pipe, and the end of the return water pipe furthest from the cooling pipe is fixedly connected to a water tank. These components allow the cooled water, after absorbing heat, to be returned to the water tank via the return water pipe.

[0010] According to the present invention, in a horizontal hot-wire CVD equipment electrode plate, the end of the cold water pipe away from the water pump extends through the side surface of the cooling layer into the interior of the cooling layer, and the end of the return water pipe away from the water tank extends through the side surface of the cooling layer into the interior of the cooling layer. These components enable the cold water pipe to deliver cooling water into the cooling pipes within the cooling layer, and after the cooling water cools the air, it returns to the water tank through the return water pipe.

[0011] According to the present invention, in a horizontal hot-wire CVD equipment electrode plate, the side surface of the rubber sheath is slidably connected to the rubber layer, and multiple springs are equidistantly distributed. These components allow the rubber sheath to slide along the rubber layer under the action of the springs, reducing the impact of vibration on the electrode plate body and preventing scratches or other damage to the electrode plate body from contact with other devices, thus improving the service life of the electrode plate.

[0012] According to the present invention, a horizontal hot-wire CVD equipment electrode plate includes a cooling fan located between the cooling layer and the water suction plate, and a water pump fixedly connected to a water tank via a pipe. These components allow the cooling fan to draw air from the ventilation block, filter it through a second filter screen and the water suction plate, and then deliver it into the cooling layer.

[0013] Beneficial effects:

[0014] Compared with existing technologies, the use of rubber layers and rubber sheaths to isolate the cooling layer from the operating area of ​​the CVD equipment ensures the airtightness of the CVD equipment during use. The cooling layer utilizes air and cooling water to dissipate heat and cool the electrode plate body, reducing the rate of oxidation and corrosion of the electrode plate body in the high-temperature environment and improving the service life of the electrode plate body. At the same time, replaceable filters and water absorption plates are set to remove impurities and moisture from the air, avoiding air corrosion of the electrode plate body. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0016] Figure 1 This is an overall structural diagram of the electrode plate of the horizontal hot-wire CVD equipment of this utility model;

[0017] Figure 2 This utility model relates to the electrode plate of a horizontal hot-wire CVD equipment. Figure 1 Partial structural diagram at point A in the middle;

[0018] Figure 3 This is a cross-sectional view of the electrode plate of the horizontal hot-wire CVD equipment of this utility model;

[0019] Figure 4 This is a structural diagram of the cooling pipe of the electrode plate in the horizontal hot-wire CVD equipment of this utility model;

[0020] Figure 5 This is an exploded view of the ventilation block mechanism in the electrode plate of the horizontal hot-wire CVD equipment of this utility model.

[0021] Legend:

[0022] 1. Rubber layer; 2. Cooling layer; 3. Filter screen one; 4. Return water pipe; 5. Cold water pipe; 6. Water pump; 7. Water tank; 8. Ventilation block; 9. Sliding block; 10. Filter screen two; 11. Limiting ring; 12. Fixing ring; 13. Electrode plate body; 14. Rubber sheath; 15. Spring; 16. Electrode rod; 17. Partition plate; 18. Ventilation port; 19. Cooling pipe; 20. Water absorption plate; 21. Cooling fan. Detailed Implementation

[0023] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0024] Reference Figure 1-5 This utility model discloses a horizontal hot-wire CVD equipment electrode plate, which includes: an electrode plate body 13, a rubber sleeve 14 fixedly connected to the side surface of the electrode plate body 13, the side surface of the rubber sleeve 14 being slidably connected to a rubber layer 1 to protect the edge of the electrode plate body 13, and together with the rubber layer 1 to ensure the airtightness and leakage prevention of the device; a spring 15 fixedly connected to one end of the rubber sleeve 14 away from the electrode plate body 13, there are multiple springs 15 and they are equidistantly distributed to provide a buffering effect for the electrode plate body 13 and reduce the impact of vibration on the electrode plate body 13; the rubber layer 1 is fixedly connected to one end of the spring 15 away from the rubber sleeve 14 to ensure the airtightness of the CVD device during use, and together with the rubber sleeve 14 to protect the electrode plate body 13 and prevent the electrode plate body 13 from contacting other components and causing surface damage; an electrode rod 16 fixedly connected to the upper surface of the electrode plate body 13 for connecting a conductive device to energize the electrode plate body 13;

[0025] A cooling layer 2 is fixedly connected to the upper surface of the rubber sheath 14, serving as a cooling layer for the electrode plate body 13. A filter screen 3 is fixedly connected to the side surface of the cooling layer 2, allowing cooled air to be discharged through the filter screen 3 and preventing dust and other impurities from entering the cooling layer 2. A fixing ring 12 is fixedly connected to the inner side of the filter screen 3, allowing conductive components to be connected to the electrode rod 16 through the fixing ring 12, and also fixing the limiting ring 11. The limiting ring 11, made of rubber, is fixedly connected to the inner side of the fixing ring 12, utilizing the elasticity of the rubber to fix the wire and the limiting ring 11 together, eliminating gaps between the wire and the limiting ring 11. The cooling layer 2... A ventilation block 8 is fixedly connected to the upper surface. Cooling air enters the cooling layer 2 through the ventilation block 8. A cooling fan 21 is fixedly connected to the inner side wall of the ventilation block 8. The cooling fan 21 is located between the cooling layer 2 and the water absorption plate 20. It draws the cooling air into the ventilation block 8 and sends it into the cooling layer 2. A slider 9 is slidably connected to the inner side wall of the ventilation block 8. It drives the filter screen 10 and the water absorption plate 20 to slide out of the ventilation block 8 for replacement. The filter screen 10 is fixedly connected to the inner side of the slider 9 to prevent dust and other impurities from entering the device with the cooling air. The water absorption plate 20 is fixedly connected to the inner side of the slider 9. It contains a desiccant to remove moisture from the drawn-in air.

[0026] A partition 17 is fixedly connected to the inner side wall of the cooling layer 2, isolating the cooling pipe 19 from the electrode plate body 13, allowing the intake air to fully contact the cooling pipe 19. A vent 18 is provided on the lower surface of the partition 17. After the air cools down upon contact with the cooling pipe 19, it passes through the vent 18 and cools the electrode plate body 13. A cold water pipe 5 is fixedly connected to the side surface of the cooling layer 2, sending cooling water into the cooling pipe 19 to cool the air and absorb heat. A water pump 6 is fixedly connected to one end of the cold water pipe 5, and the water pump 6 is fixedly connected to the water tank 7 via a pipe, providing power for the circulation of cooling water in the pipe. The cold water pipe 5 is further... A cooling pipe 19 is fixedly connected to one end of the water pump 6, allowing the cooling water to exchange heat with the air through the cold water pipe 5, thereby cooling the air. The cooling pipe 19 is located between the cooling layer 2 and the partition 17. A return water pipe 4 is fixedly connected to the end of the cooling pipe 19 away from the cold water pipe 5, which sends the cooled water after absorbing heat back to the water tank 7. A water tank 7 is fixedly connected to the end of the return water pipe 4 away from the cooling pipe 19, storing the cooling water used for cooling. The end of the cold water pipe 5 away from the water pump 6 extends through the side surface of the cooling layer 2 and into the interior of the cooling layer 2. The end of the return water pipe 4 away from the water tank 7 extends through the side surface of the cooling layer 2 and into the interior of the cooling layer 2.

[0027] Working principle: First, remove the limiting ring 11 from the fixing ring 12 and place it on the energized wire. After connecting the wire to the electrode rod 16, put the limiting ring 11 back into the fixing ring 12. Then, start the cooling fan 21 to draw air into the ventilation block 8. The filter screen 10 filters dust and impurities from the air and removes moisture from the air as it passes through the water suction plate 20, drying the air. After multiple uses, the slider 9 can be removed from the ventilation block 8 to clean and replace the filter screen 10 and the water suction plate 20 before continued use. The filtered air enters the cooling layer 2 and comes into contact with the cooling pipe 19, where it is further cooled by the cooling water. Continuing to cool down, the water pump 6 sends the cooling water in the water tank 7 to the cooling pipe 19 through the cold water pipe 5, and after cooling the air, it returns to the water tank 7 through the return water pipe 4. The fully cooled air comes into contact with the electrode plate body 13 through the vent 18 on the partition 17 and absorbs the heat on the electrode plate body 13, and then is discharged from the filter screen 3. The rubber layer 1 and the rubber sheath 14 effectively ensure the airtightness of the CVD equipment during use and prevent the electrode plate body 13 from contacting other parts during use, which would cause scratches on the surface. At the same time, the spring 15 enhances the buffering effect of the electrode plate body 13 and reduces the impact of vibration on the electrode plate body 13.

[0028] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A horizontal hot filament CVD apparatus electrode plate, characterized by, Include: The electrode plate body (13), the side surface of the electrode plate body (13) is fixedly connected with a rubber sheath (14), one end of the rubber sheath (14) away from the electrode plate body (13) is fixedly connected with a spring (15), one end of the spring (15) away from the rubber sheath (14) is fixedly connected with a rubber layer (1), the upper surface of the electrode plate body (13) is fixedly connected with an electrode rod (16); The upper surface of the rubber sheath (14) is fixedly connected with a cooling layer (2), the side surface of the cooling layer (2) is fixedly connected with a filter screen (3), the inner side of the filter screen (3) is fixedly connected with a fixed ring (12), the inner side of the fixed ring (12) is fixedly connected with a limiting ring (11), the upper surface of the cooling layer (2) is fixedly connected with a ventilation block (8), the side inner wall of the ventilation block (8) is fixedly connected with a cooling fan (21), the side inner wall of the ventilation block (8) is slidingly connected with a sliding block (9), the inner side of the sliding block (9) is fixedly connected with a filter screen (10), the inner side of the sliding block (9) is fixedly connected with a water absorption plate (20).

2. The electrode plate for a horizontal hot filament CVD apparatus according to claim 1, wherein The side inner wall of the cooling layer (2) is fixedly connected with a partition plate (17), the lower surface of the partition plate (17) is provided with a ventilation opening (18).

3. The electrode plate for a horizontal hot filament CVD apparatus according to claim 1, wherein The side surface of the cooling layer (2) is fixedly connected with a cold water pipe (5), one end of the cold water pipe (5) is fixedly connected with a water pump (6); one end of the cold water pipe (5) away from the water pump (6) is fixedly connected with a cooling pipe (19), the cooling pipe (19) is located between the cooling layer (2) and the partition plate (17); one end of the cooling pipe (19) away from the cold water pipe (5) is fixedly connected with a return water pipe (4), one end of the return water pipe (4) away from the cooling pipe (19) is fixedly connected with a water tank (7); one end of the cold water pipe (5) away from the water pump (6) extends through the side surface of the cooling layer (2) to the inside of the cooling layer (2), one end of the return water pipe (4) away from the water tank (7) extends through the side surface of the cooling layer (2) to the inside of the cooling layer (2); the cooling fan (21) is located between the cooling layer (2) and the water absorption plate (20), the water pump (6) is fixedly connected with the water tank (7) through a pipeline.

4. The electrode plate for a horizontal hot filament CVD apparatus according to claim 1, wherein The side surface of the rubber sheath (14) is slidingly connected with the rubber layer (1), the spring (15) has a plurality of and equidistantly distributed.

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