Detachable block sample tray for atomic layer deposition equipment

Abstract

The utility model relates to a detachable block sample tray for atomic layer deposition equipment, which comprises a bearing part used for at least partially bearing a sample; the bearing part is at least partially supported on the sample table; the hollow part is used for enabling at least part of the sample to be in contact with the sample table; the hollow part is arranged on the bearing part; the positioning part is used for being matched with the sample table for positioning; and the positioning part is arranged on the bearing part. Compared with a single-layer tray in the prior art, a sample can be directly placed on the inner cavity through the hollowed-out structure, heat transfer between the sample and the inner cavity can be more direct, and secondary transfer through the tray is not needed; according to the detachable block sample tray for the atomic layer deposition equipment, provided by the invention, only the position of a sample is limited, and the distribution of precursor airflow is not influenced. The non-uniformity of the process sample is greatly improved, and the method is suitable for a large batch of small-size and small-area samples with the same specification.

Description

TECHNICAL FIELD

[0001] The utility model relates to atomic layer deposition technical field especially relates to a kind of detachable grid sample tray for atomic layer deposition equipment. BACKGROUND

[0002] ALD (Atomic Layer Deposition, atomic layer deposition) process is a kind of method for accurately controlling film thickness and composition on micro-nano scale, and its temperature has important influence on deposition process and film performance. In the atomic layer deposition process, the chemical reaction of a new layer of atomic film is directly associated with the previous layer, and this way makes each reaction deposit only one layer of atom, so it is also called single atomic layer deposition.

[0003] Atomic layer deposition is the process of continuously introducing at least two gas-phase precursor species on a substrate in a heated reactor, and chemical adsorption automatically terminates until the surface is saturated, but inappropriate process temperature hinders the physical adsorption of molecules on the surface.

[0004] When placing sample on sample table, if not positionally limiting sample, sample is easy to produce position shift after closing cavity and when vacuum pump extracts inner cavity to vacuum, and this influences reaction effect. SUMMARY

[0005] Therefore, the utility model provides a kind of detachable grid sample tray for atomic layer deposition equipment.

[0006] Specifically, the utility model is realized by the following technical solutions:

[0007] According to the first aspect of the utility model, provide a kind of detachable grid sample tray for atomic layer deposition equipment, including:

[0008] Bearing part, for at least partial bearing sample;The bearing part is at least partially supported on sample table;

[0009] Hollow part, for at least partial sample and sample table contact;The hollow part is arranged on the bearing part;

[0010] Positioning part, for with the sample table adaptation positioning;The positioning part is arranged on the bearing part.

[0011] Optionally, the bearing part includes: bearing frame, the bearing frame is at least partially supported on the sample table, and the hollow part and the positioning part are arranged on the bearing frame.

[0012] Optionally, the hollow part includes: through-hole, the through-hole is arranged on the bearing frame, and the positioning part is arranged on the bearing frame.

[0013] Optionally, the carrier frame comprises a frame, the frame forms a mounting space in a middle region thereof, the hollow portion is arranged at least partially in the mounting space, and the positioning portion is arranged on the frame.

[0014] Optionally, the carrier frame further comprises a first support rod, two ends of the first support rod are connected to opposite sides of the frame, respectively.

[0015] Optionally, the carrier frame further comprises a second support rod, two ends of the second support rod are connected to opposite sides of the frame, respectively, the second support rod is perpendicular to the first support rod, the second support rod is supported on the first support rod, and the first support rod, the second support rod and the frame jointly form the through hole.

[0016] Optionally, a cross section of the frame is triangular.

[0017] Optionally, a cross section of the first support rod is triangular.

[0018] Optionally, a cross section of the second support rod is triangular.

[0019] Optionally, the positioning portion protrudes outward from a bottom wall surface of the frame.

[0020] The technical scheme provided by the utility model brings at least the following beneficial effects:

[0021] Compared with the single-layer tray in the prior art, the detachable grid sample tray for the atomic layer deposition equipment provided by the application can directly place the sample on the inner cavity, can make the heat transfer between the sample and the inner cavity more direct, and does not need to pass through the secondary transfer of the tray; the detachable grid sample tray for the atomic layer deposition equipment provided by the application only limits the position of the sample, and does not affect the distribution of the precursor gas flow. The non-uniformity of the process sample is greatly improved, and the detachable grid sample tray is suitable for a large number of small-volume and small-area samples of the same specification; the edges of the inlet side and the outlet side are also processed into a structure with a slope, the metal strip is processed into a triangular column structure with a slope, the detachable grid sample tray is convenient for taking and placing the sample, and is beneficial to the diffusion of the source. BRIEF DESCRIPTION OF DRAWINGS

[0022] The drawings incorporated herein and forming a part of the specification, illustrate embodiments consistent with the present utility model and together with the description serve to explain the principle of the present utility model.

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or related technical description, and obviously, other drawings can also be obtained by those skilled in the art without any creative labor on the basis of these drawings.

[0024] Figure 1 A top view of the detachable barrier sample tray for the atomic layer deposition equipment provided by the embodiments of the present application is shown in the figure.

[0025] Figure 2 A bottom view of the detachable barrier sample tray for the atomic layer deposition equipment provided by the embodiments of the present application is shown in the figure.

[0026] Figure 3 A front view of the detachable barrier sample tray for the atomic layer deposition equipment provided by the embodiments of the present application is shown in the figure. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without any creative labor are within the protection scope of the present application.

[0028] Figure 1 A detachable barrier sample tray for the atomic layer deposition equipment suitable for the embodiments of the present application is schematically shown in the figure.

[0029] Referring to Figures 1-3 The present application provides a detachable barrier sample tray for the atomic layer deposition equipment, which comprises:

[0030] A bearing part 10 for at least partially bearing a sample; the bearing part 10 is at least partially supported on a sample table;

[0031] A hollow part 20 for contacting at least part of the sample with the sample table; the hollow part 20 is arranged on the bearing part 10;

[0032] A positioning part 30 for adaptively positioning with the sample table; the positioning part 30 is arranged on the bearing part 10.

[0033] In the embodiments of the present application, the bearing part 10 is supported on the sample table, the sample is supported on the bearing part 10, and at least a part of the sample is in direct contact with the sample table through the hollow part 20, so as to directly receive the heat of the sample table. The positioning part 30 is matched with the positioning structure on the sample table, so as to mount the bearing part 10 on the sample table. The detachable grid sample tray specially designed for the atomic layer deposition (ALD) equipment is designed to optimize the heat transfer efficiency between the sample and the sample table and improve the distribution of the precursor gas flow on the sample, thereby improving the uniformity of the process sample, and is particularly suitable for processing a large number of small-volume and small-area samples of the same specification.

[0034] Bearing part: This part is responsible for at least partially bearing the sample, ensuring the stability of the sample during the deposition process. The bearing part is designed to be firmly supported on the sample table, providing a reliable support surface for the sample.

[0035] Hollow part: This is one of the key innovations of the present application. By setting the hollow part on the bearing part, the sample can be directly placed on the inner cavity formed by the hollow. The advantage of this is that the heat transfer between the sample and the sample table (usually a heating table) becomes more direct and efficient, without the need for secondary transmission through the tray material, thereby improving the efficiency and uniformity of heat transfer.

[0036] Positioning part: This part is designed to be matched with the sample table for positioning, ensuring that the tray can be accurately and stably mounted on the sample table, preventing movement or misalignment during the deposition process, which affects the deposition effect.

[0037] Technical advantages:

[0038] Improved heat transfer efficiency: The hollow design allows the sample to directly contact the heating table, reducing the path and resistance of heat transfer, improving the efficiency and uniformity of heat transfer, which is crucial for ALD processes that require precise temperature control. Optimized gas flow distribution: Traditional single-layer trays may hinder the uniform distribution of precursor gas flow on the sample surface, while the detachable grid design of the present application only restricts the position of the sample without affecting the free flow of precursor gas, thereby helping to achieve more uniform deposition results. Wide applicability: The tray is particularly suitable for processing a large number of small-volume and small-area samples of the same specification, such as microelectronic devices, sensor elements, etc., which can effectively improve production efficiency and product quality.

[0039] In summary, the detachable grid blocking sample tray for atomic layer deposition equipment provided by the utility model effectively solves the problems of low heat transfer efficiency and uneven airflow distribution in the prior art through innovative hollow design and precise positioning mechanism, and provides an efficient and reliable solution for batch processing of small-volume and small-area samples. This innovation not only improves the uniformity and efficiency of the ALD process, but also brings significant technical progress to the production and manufacturing of microelectronics, sensors and other fields.

[0040] Exemplarily, the bearing part 10 comprises a bearing frame 11 which is at least partially supported on the sample table, and the hollow part 20 and the positioning part 30 are arranged on the bearing frame 11.

[0041] In the embodiment of the application, the bearing part 10 comprises at least one bearing frame 11, and at least part of the sample is supported on the bearing frame 11, and the bearing frame 11 is supported on the sample table.

[0042] Exemplarily, the hollow part 20 comprises a through hole 21 arranged on the bearing frame 11, and the positioning part 30 is arranged on the bearing frame 11.

[0043] In the embodiment of the application, the through hole 21 is formed on the bearing frame 11, and the sample directly contacts the sample table through the through hole 21 to receive heat from the sample table.

[0044] Exemplarily, the bearing frame 11 comprises a surrounding frame 12 which forms a mounting space in the middle region, and the hollow part 20 is at least partially arranged in the mounting space, and the positioning part 30 is arranged on the surrounding frame 12.

[0045] In the embodiment of the application, the surrounding frame 12 is square, and the middle region of the surrounding frame 12 forms a mounting space, and the positioning part 30 is arranged on the surrounding frame 12 and is adapted to be mounted with the positioning structure on the sample table.

[0046] Exemplarily, the bearing frame 11 further comprises a first support rod 13 and a second support rod 14, two ends of the first support rod 13 are respectively connected to opposite sides of the surrounding frame 12, two ends of the second support rod 14 are respectively connected to opposite sides of the surrounding frame 12, the second support rod 14 is perpendicular to the first support rod 13, the second support rod 14 is supported on the first support rod 13, and the first support rod 13, the second support rod 14 and the surrounding frame 12 jointly form the through hole 21.

[0047] In the embodiment of the present application, the two ends of the first support rod 13 and the second support rod 14 are respectively connected to the two sides of the opposite carrier 11, and the first support rod 13 and the second support rod 14 are perpendicular to each other, and the first support rod 13, the second support rod 14 and the surrounding frame 12 jointly form a through hole 21, and the sample directly contacts the sample table through the through hole 21 to receive the heat on the sample table.

[0048] Exemplarily, the cross section of the surrounding frame 12 is triangular.

[0049] In the embodiment of the present application, the cross section of the surrounding frame 12 is triangular, so that the structure of the surrounding frame 12 has a certain slope, facilitating the support of the sample.

[0050] Exemplarily, the cross section of the first support rod 13 is triangular.

[0051] In the embodiment of the present application, the cross section of the first support rod 13 is triangular, so that the structure of the first support rod 13 has a certain slope, facilitating the support of the sample.

[0052] Exemplarily, the cross section of the second support rod 14 is triangular.

[0053] In the embodiment of the present application, the cross section of the second support rod 14 is triangular, so that the structure of the second support rod 14 has a certain slope, facilitating the support of the sample.

[0054] Exemplarily, the positioning part 30 protrudes outward from the bottom wall surface of the surrounding frame 12.

[0055] In the embodiment of the present application, the positioning part 30 protrudes from the bottom wall surface of the surrounding frame 12 and is inserted into the positioning groove of the sample table, preventing the direction error of the entire detachable grid blocking sample tray.

[0056] The present application provides a detachable grid blocking sample tray for an atomic layer deposition device, which is suitable for single-layer sample process, adopts a matched lower inner cavity, the lower inner cavity is provided with a groove, and the positioning part 30 at the bottom of the sample tray is attached to the groove. The tray is provided with a hollow structure, which only limits the position of the sample and does not affect the heat conduction between the sample table and the sample. The present application provides a detachable grid blocking sample tray for an atomic layer deposition device, which uses metal stainless steel material, the overall frame is square, the metal strip is used to horizontally and vertically divide into nine grids, the metal strip is processed into a triangular column structure with a slope, facilitating the taking and placing of the sample, being conducive to the diffusion of the source, and the edges of the surrounding frame 12 on the source input side and the source output side are also processed into a triangular structure with a slope.

[0057] The detachable grid sample tray for atomic layer deposition equipment provided by the application places the sample in the hollowed-out area, in direct contact with the cavity bottom, so that temperature control is more accurate, which is conducive to improving the uniformity of the sample temperature and the uniformity of the film thickness deposited on the sample surface; the material is stainless steel, which is resistant to high temperature and not easy to deform, and has high hardness and is not easy to deform.

[0058] The detachable grid sample tray for atomic layer deposition equipment provided by the application can place the sample directly on the inner cavity through the hollowed-out setting structure, so that heat transfer between the sample and the inner cavity is more direct, without the need for secondary transfer through the tray; the detachable grid sample tray for atomic layer deposition equipment provided by the application only limits the position of the sample, without affecting the distribution of the precursor gas flow. The non-uniformity of the process sample is greatly improved, and the sample tray is suitable for large quantities of small-volume and small-area samples of the same specification; the edges of the source inlet side and the source outlet side are also processed into a sloped structure, and the metal strip is processed into a sloped triangular columnar structure, which is convenient for taking and placing the sample and is conducive to the diffusion of the source.

[0059] The detachable grid sample tray for atomic layer deposition equipment provided by the application has the specific structure of the bearing part 10 as follows, and aims to provide a stable and efficient sample bearing and heat transfer scheme.

[0060] Bearing part 10

[0061] Bearing frame 11: The bearing frame 11 is the main structure of the entire tray, which is at least partially supported on the sample table. The design of the bearing frame 11 needs to ensure sufficient strength and stability to support the weight of the sample and the possible thermal stress generated during the deposition process.

[0062] Hollowed-out part 20

[0063] Through hole 21: The through hole 21 is the main form of the hollowed-out part 20, which is directly arranged on the bearing frame 11, especially in the mounting space of the bearing frame 11. These through holes 21 allow the sample to be in direct contact with the sample table, thereby ensuring efficient heat transfer. The number, size and distribution of the through holes 21 should be optimized according to the size and shape of the sample to ensure the best heat transfer effect and sample stability.

[0064] Positioning part 30

[0065] Positioning mechanism: The positioning part 30 is arranged on the bearing frame 11, especially on the surrounding frame 12, to ensure that the tray can be accurately and stably mounted on the sample table. The design of the positioning part 30 should match the positioning structure on the sample table, such as positioning slots, positioning holes, etc., to prevent the tray from moving or misaligning during the deposition process.

[0066] Detailed structure of the bearing frame 11

[0067] Frame 12: Frame 12 is the main support structure of the carrier 11, which is square in shape, with a mounting space formed in the middle area for placing the sample. The cross-section of the frame 12 is triangular, which not only increases the stability of the structure, but also makes the frame 12 have a certain slope, which is convenient for supporting the sample.

[0068] First support rod 13 and second support rod 14: The first support rod 13 and the second support rod 14 are respectively connected to the opposite two sides of the frame 12, and the second support rod 14 is perpendicular to the first support rod 13. The first support rod 13, the second support rod 14 and the frame 12 together form a through hole 21. This design not only ensures the stability of the through hole 21, but also provides additional support to prevent the sample from deforming or being damaged during deposition. The cross-section of the first support rod 13 and the second support rod 14 is also triangular to increase the stability and support of the structure.

[0069] The protruding design of the positioning part 30: The positioning part 30 protrudes outward from the bottom wall surface of the frame 12, which enables the positioning part 30 to be firmly inserted into the positioning groove of the sample stage, thereby preventing the orientation of the entire tray from being incorrect and ensuring the accuracy and consistency of the deposition process.

[0070] In summary, the detachable barrier sample tray of the present application realizes direct heat transfer between the sample and the sample stage through the innovative design of the bearing part 10, the hollow part 20 and the positioning part 30, optimizes the distribution of precursor gas flow on the sample, and provides stable and efficient sample support. This design is particularly suitable for handling a large number of small-volume and small-area samples of the same specification, such as microelectronic devices, sensor elements, etc., and can significantly improve production efficiency and product quality.

[0071] It should be noted that in the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0072] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0073] In addition, the terms "mount", "set", "provided with", "connected", "linked" should be interpreted broadly. For example, it can be fixed connection, detachable connection, or integral structure; can be mechanical connection, or electrical connection; can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0074] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific type and structure can be the same or different), and are not intended to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "a plurality of" is two or more.

[0075] The above is only a specific embodiment of the present application, so that those skilled in the art can understand or implement the present application. Various modifications of these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features applied herein.

Claims

1. A detachable baffle sample tray for an atomic layer deposition apparatus, characterized in that, The application relates to a sample carrier, comprising: a bearing part for at least partially bearing a sample; the bearing part is at least partially supported on a sample stage; a hollow part for contacting at least part of the sample with the sample stage; the hollow part is arranged on the bearing part; a positioning part for adapting to the sample stage; the positioning part is arranged on the bearing part.

2. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 1, characterized in that, The bearing part comprises a bearing frame which is at least partially supported on the sample stage, and the hollow part and the positioning part are arranged on the bearing frame.

3. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 2, characterized in that, The hollow part comprises a through hole arranged on the bearing frame, and the positioning part is arranged on the bearing frame.

4. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 3, characterized in that, The bearing frame comprises a surrounding frame which forms a mounting space in the middle region, and the hollow part is at least partially arranged in the mounting space, and the positioning part is arranged on the surrounding frame.

5. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 4, characterized in that, The bearing frame further comprises a first supporting rod, and two ends of the first supporting rod are respectively connected to opposite sides of the surrounding frame.

6. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 5, characterized by, The bearing frame further comprises a second supporting rod, and two ends of the second supporting rod are respectively connected to opposite sides of the surrounding frame, the second supporting rod is perpendicular to the first supporting rod, the second supporting rod is supported on the first supporting rod, and the first supporting rod, the second supporting rod and the surrounding frame jointly form the through hole.

7. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 4, wherein The cross section of the surrounding frame is triangular.

8. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 5, wherein, The cross section of the first supporting rod is triangular.

9. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 6, wherein, The cross section of the second supporting rod is triangular.

10. The detachable baffle sample tray for an atomic layer deposition apparatus according to claim 4, wherein, The positioning part protrudes outward from the bottom wall surface of the surrounding frame.

Images