Vacuum furnace with pressurizing structure

Abstract

The utility model relates to the technical field of advanced manufacturing and automation, and discloses a vacuum furnace with a pressurizing structure, which comprises a bottom plate, a controller is arranged at the top of the bottom plate, support plates are symmetrically and fixedly mounted at the top of the bottom plate, sealing components are arranged at the tops of the support plates, and the pressurizing structure is arranged on the bottom plate. An auxiliary assembly is arranged on one side of the sealing assembly, and the sealing assembly comprises a vacuum furnace shell fixedly installed on the top of the supporting plate. A proper amount of inert gas such as argon and nitrogen is filled into the inert gas storage tank by opening the second valve, then the second valve is closed, then the gas increasing pump is started, the inert gas in the inert gas storage tank is pumped out through the gas pumping pipe by the gas increasing pump, and then the inert gas is conveyed into the vacuum furnace shell through the gas outlet pipe. The second electric valve can control the flow and the entering time of pressurized gas, the air pressure in the furnace is gradually increased, the pressurization condition needed by the technology is achieved, and the effect of continuously treating the materials in the high-pressure inert gas environment is achieved.

Description

Technical Field

[0001] This utility model relates to the field of advanced manufacturing and automation technology, specifically a vacuum furnace with a pressurization structure. Background Technology

[0002] A vacuum furnace is a device that heats materials in a vacuum environment. It is widely used in many fields such as metal heat treatment, ceramic sintering, and semiconductor manufacturing. It can effectively prevent chemical reactions such as oxidation and decarburization of materials during the heating process, thereby improving product quality and surface finish.

[0003] Vacuum furnaces are increasingly widely used in modern materials processing and industrial manufacturing. However, traditional vacuum furnaces have gradually revealed some limitations in practical use. In many complex material processing technologies, a simple vacuum environment can no longer meet diverse needs. For example, certain special chemical reactions or material modification processes not only require initial vacuum conditions to eliminate impurities and oxygen interference, but also require the introduction of a high-pressure environment at specific stages, using inert gases as a protective medium to promote the reaction or improve material properties. However, traditional vacuum furnaces often lack effective pressurization structures and precise inert gas control functions, making it difficult to flexibly switch and precisely control from vacuum to high-pressure inert gas environments. This greatly limits their application scope in fields such as high-end material preparation and fine chemical synthesis, and cannot meet the growing production demands for high material performance and process precision. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum furnace with a pressurization structure, so as to facilitate pressurization of the vacuum furnace.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vacuum furnace with a pressurization structure, comprising a base plate, a controller being provided on the top of the base plate, support plates being symmetrically fixedly installed on the top of the base plate, a sealing assembly being provided on the top of the support plate, and an auxiliary assembly being provided on one side of the sealing assembly.

[0006] Preferably, the sealing assembly includes: a vacuum furnace shell, fixedly mounted on the top of the support plate.

[0007] Preferably, an outer plate is hinged to one side of the vacuum furnace shell, a partition is fixedly fitted inside the vacuum furnace shell, an inner cylinder is fixedly fitted inside the vacuum furnace shell, a heating resistance wire is fitted on the outer wall of the inner cylinder, and both ends of the heating resistance wire extend through the top of the inner wall of the vacuum furnace shell to the outer wall of the vacuum furnace shell. The partition is disposed between the inner cylinder and the vacuum furnace shell. A locking frame is fixedly installed on the outer side of the outer plate, and a handle is fixedly installed on the front of the locking frame. A connecting plate is fixedly installed on one side of the vacuum furnace shell, and a rotating shaft is rotatably connected to the front of the connecting plate via a bearing. A locking rod is fixedly installed at the other end of the rotating shaft, and the locking rod is locked into the interior of the locking frame. A cylinder door is fixedly installed on the inner side of the outer plate, and the cylinder door is adapted to the inner cylinder.

[0008] The engagement frame and engagement rod work together to achieve a good sealing effect. After the outer panel is closed, rotating the engagement rod to engage with the engagement frame effectively prevents gas leakage from the furnace.

[0009] Preferably, the auxiliary components include: a cooling component disposed at the bottom of the sealing component; and a pressurizing component disposed on one side of the sealing component.

[0010] Preferably, the cooling component includes: a water storage tank, fixedly installed on the top of the base plate; and a drain pipe, connected to one side of the water storage tank.

[0011] Preferably, a semiconductor condenser is provided at the bottom of the water storage tank, a valve is provided at the middle of the drain pipe, a water outlet pipe is connected to the top of the water storage tank, the other end of the water outlet pipe is connected to the bottom of the vacuum furnace shell, an electric valve is provided at the middle of the water outlet pipe, a water pump is connected to one side of the water storage tank, a pump is connected to the other end of the pump, a connecting pipe is connected to the output end of the pump, and the other end of the connecting pipe is connected to the top of the vacuum furnace shell.

[0012] The semiconductor condenser is located at the bottom of the water tank, which can quickly and effectively cool the water in the tank.

[0013] Preferably, the pressurization component includes: an inert gas storage tank, fixedly installed on the top of the base plate; and a vacuum tube, connected to the other side of the vacuum furnace shell.

[0014] Preferably, a vacuum pump is connected to the other end of the vacuum tube, an inlet pipe is connected to the top of the inert gas storage tank, a valve is installed in the middle of the inlet pipe, an exhaust pipe is connected to the bottom of the inert gas storage tank, a booster pump is connected to the other end of the exhaust pipe, an outlet pipe is connected to the output end of the booster pump, the other end of the outlet pipe is connected to the outer shell of the vacuum furnace, and an electric valve is installed in the middle of the outlet pipe.

[0015] After inert gas is introduced into the inert gas storage tank through the inlet pipe, the gas in the tank is extracted by the gas booster pump and transported to the outer shell of the vacuum furnace through the outlet pipe, thereby increasing the gas pressure inside the furnace.

[0016] This invention provides a vacuum furnace with a pressure boosting structure. It has the following beneficial effects:

[0017] (1) This utility model allows for the opening of valve two to fill an inert gas storage tank with an appropriate amount of inert gas, such as argon or nitrogen. Then, valve two is closed, and the gas booster pump is started. The gas booster pump extracts the inert gas from the inert gas storage tank through the extraction pipe and then delivers it to the vacuum furnace shell through the outlet pipe. The electric valve two can control the flow rate and entry timing of the pressurized gas, gradually increasing the gas pressure inside the furnace to achieve the pressurization conditions required by the process, thus continuing to process the material in a high-pressure inert gas environment.

[0018] (2) By opening the handle on the outer panel and rotating the locking rod through the pivot, the outer panel is opened to expose the cylinder door. The material to be processed is placed into the inner cylinder. Then the cylinder door and the outer panel are closed, and the locking rod is rotated again to lock with the locking frame, thereby achieving a sealing effect. Attached Figure Description

[0019] Figure 1 This is a three-dimensional schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a cross-sectional view of the sealing assembly structure of this utility model;

[0021] Figure 3 This is a structural view of the cooling component of this utility model;

[0022] Figure 4 This is a structural view of the booster component of this utility model.

[0023] In the diagram: 1. Base plate; 2. Controller; 3. Sealing assembly; 4. Auxiliary assembly; 5. Support plate.

[0024] 311 Vacuum furnace shell, 312 partition, 313 inner cylinder, 314 heating resistance wire, 315 outer plate, 316 cylinder door, 317 locking frame, 318 handle, 319 connecting plate, 3111 rotating shaft, 3112 locking rod;

[0025] 41 Cooling components, 411 Water storage tank, 412 Semiconductor condenser, 413 Drain pipe, 414 Valve 1, 415 Water outlet pipe, 416 Electric valve 1, 417 Pump, 418 Pumping pipe, 419 Connecting pipe;

[0026] 42. Pressurization component, 421. Inert gas storage tank, 422. Inlet pipe, 423. Valve II, 424. Vacuum pipe, 425. Vacuum pump, 426. Extraction pipe, 427. Gas booster pump, 428. Outlet pipe, 429. Electric valve II. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0029] Example 1:

[0030] A preferred embodiment of the vacuum furnace with a pressure boosting structure provided by this utility model is, for example... Figure 1-4 As shown: A vacuum furnace with a pressurization structure includes a base plate 1, a controller 2 on the top of the base plate 1, support plates 5 symmetrically fixedly mounted on the top of the base plate 1, a sealing assembly 3 on the top of the support plates 5, and an auxiliary assembly 4 on one side of the sealing assembly 3. The sealing assembly 3 includes: a vacuum furnace shell 311, fixedly mounted on the top of the support plates 5; an outer plate 315 hinged to one side of the vacuum furnace shell 311; a partition 312 fixedly fitted inside the vacuum furnace shell 311; an inner cylinder 313 fixedly fitted inside the vacuum furnace shell 311; a heating resistance wire 314 fitted on the outer wall of the inner cylinder 313, with both ends of the heating resistance wire 314 passing through... The top of the inner wall of the vacuum furnace shell 311 extends to the outer wall of the vacuum furnace shell 311. The partition 312 is disposed between the inner cylinder 313 and the vacuum furnace shell 311. A locking frame 317 is fixedly installed on the outer side of the outer plate 315. A handle 318 is fixedly installed on the front of the locking frame 317. A connecting plate 319 is fixedly installed on one side of the vacuum furnace shell 311. A rotating shaft 3111 is rotatably connected to the front of the connecting plate 319 via a bearing. A locking rod 3112 is fixedly installed at the other end of the rotating shaft 3111. The locking rod 3112 is locked and connected to the inside of the locking frame 317. A cylinder door 316 is fixedly installed on the inner side of the outer plate 315. The cylinder door 316 is adapted to the inner cylinder 313.

[0031] Furthermore, in this embodiment, by opening the handle 318 on the outer plate 315, the locking rod 3112 is rotated via the rotating shaft 3111 to disengage it from the locking frame 317, thereby opening the outer plate 315 and exposing the cylinder door 316. The material to be processed is then placed into the inner cylinder 313. The cylinder door 316 and the outer plate 315 are then closed, and the locking rod 3112 is rotated again to engage with the locking frame 317, achieving a seal. The heating resistance wire 314 is then activated to heat the material in the inner cylinder 313. Because the inner cylinder 313 is in a vacuum environment, heat can be transferred to the material more efficiently, allowing it to be processed under specific temperature conditions.

[0032] Example 2:

[0033] Based on Embodiment 1, a preferred embodiment of the vacuum furnace with a pressurization structure provided by this utility model is, for example... Figure 1-4 As shown: Auxiliary component 4 includes: a cooling component 41, disposed at the bottom of sealing component 3; a pressurizing component 42, disposed on one side of sealing component 3; the cooling component 41 includes: a water storage tank 411, fixedly installed on the top of base plate 1; a drain pipe 413, connected to one side of water storage tank 411; a semiconductor condenser 412 is disposed at the bottom of water storage tank 411; a valve 414 is disposed at the middle end of drain pipe 413; a water outlet pipe 415 is connected to the top of water storage tank 411; the other end of water outlet pipe 415 is connected to the bottom of vacuum furnace shell 311; an electric valve 416 is disposed at the middle end of water outlet pipe 415; a pumping pipe 418 is connected to one side of water storage tank 411; a pumping pump 417 is connected to the other end of pumping pipe 418; a connecting pipe 419 is connected to the output end of pumping pump 417; the other end of connecting pipe 419 is connected to the top of vacuum furnace shell 311.

[0034] Furthermore, in this embodiment, by activating the semiconductor condenser 412, the water temperature in the water storage tank 411 is lowered. Then, the electric valve 416 is opened, and the cold water in the water storage tank 411 flows into the partition 312 between the vacuum furnace outer shell 311 and the inner cylinder 313 through the water outlet pipe 415. Heat is carried away through heat exchange, thereby cooling the furnace body and preventing the furnace body temperature from being too high and causing damage to the equipment or affecting the surrounding environment. After cooling is completed, the electric valve 416 is closed, and the pump 417 can be started. The pump 417 draws water from the water storage tank 411 through the water pumping pipe 418 and sends the water back to the partition 312 inside the vacuum furnace outer shell 311 through the connecting pipe 419. The hot water in the partition 312 is then drawn out and discharged through the water outlet pipe 415, realizing the recycling of water in the water storage tank 411. The electric valve 416 can control the timing and flow rate of drainage.

[0035] Example 3:

[0036] Based on Embodiments 1 and 2, a preferred embodiment of the vacuum furnace with a pressurization structure provided by this utility model is, for example... Figure 1-4 As shown: the pressurization component 42 includes: an inert gas storage tank 421, which is fixedly installed on the top of the base plate 1; a vacuum tube 424, which is connected to the other side of the vacuum furnace shell 311; a vacuum pump 425 is connected to the other end of the vacuum tube 424; an inlet pipe 422 is connected to the top of the inert gas storage tank 421; a valve 423 is installed in the middle of the inlet pipe 422; an exhaust pipe 426 is connected to the bottom of the inert gas storage tank 421; a gas booster pump 427 is connected to the other end of the exhaust pipe 426; an outlet pipe 428 is connected to the output end of the gas booster pump 427; the other end of the outlet pipe 428 is connected to the vacuum furnace shell 311; and an electric valve 429 is installed in the middle of the outlet pipe 428.

[0037] Furthermore, in this embodiment, by starting the vacuum pump 425, the vacuum pump 425 performs a vacuum pumping operation on the space inside the vacuum furnace shell 311 and the inner cylinder 313 through the vacuum pipe 424, gradually reducing the internal gas pressure, extracting the air and other impurity gases, creating a vacuum environment, opening valve two 423, and filling the inert gas storage tank 421 with an appropriate amount of inert gas such as argon or nitrogen, and then closing valve two 423, then starting the booster pump 427, the booster pump 427 extracts the inert gas in the inert gas storage tank 421 through the evacuation pipe 426, and then delivers it to the vacuum furnace shell 311 through the outlet pipe 428. The electric valve two 429 can control the flow rate and entry timing of the booster gas, gradually increasing the gas pressure inside the furnace to reach the booster conditions required by the process, and continuing to process the materials in a high-pressure inert gas environment.

[0038] In use, first, open the handle 318 on the outer plate 315, and rotate the locking rod 3112 through the rotating shaft 3111 to disengage it from the locking frame 317, thereby opening the outer plate 315 and exposing the cylinder door 316. Place the material to be processed into the inner cylinder 313, then close the cylinder door 316 and the outer plate 315, and rotate the locking rod 3112 again to engage with the locking frame 317 to achieve a seal. Start the vacuum pump 425, which evacuates the space inside the vacuum furnace outer shell 311 and the inner cylinder 313 through the vacuum tube 424, gradually reducing the internal air pressure and extracting air and other impurities. Gas is used to create a vacuum environment to meet specific process requirements, such as preventing material oxidation during heating. Once the required vacuum level is reached, the heating resistance wire 314 is activated to heat the material in the inner cylinder 313. Because the inner cylinder 313 is in a vacuum environment, heat can be transferred to the material more efficiently, allowing it to be processed under specific temperature conditions. If cooling of the furnace body is required during the heating process, the semiconductor condenser 412 can be activated to lower the water temperature in the water storage tank 411. Then, the electric valve 416 is opened, and the water in the water storage tank 411... Cold water flows through outlet pipe 415 into the partition 312 between the vacuum furnace outer shell 311 and inner cylinder 313, where it carries away heat through heat exchange, thus cooling the furnace body and preventing overheating that could damage the equipment or affect the surrounding environment. Once cooling is complete, electric valve 416 is closed, and pump 417 is started. Pump 417 draws water from the water storage tank 411 through water pipe 418 and sends it back to the partition 312 inside the vacuum furnace outer shell 311 via connecting pipe 419. Hot water in the partition 312 is then extracted and discharged through outlet pipe 415, achieving water recycling in the water storage tank 411. Electric valve 416... 6. The timing and flow rate of drainage can be controlled. When the process requires pressurization, valve 2 423 is opened to fill the inert gas storage tank 421 with an appropriate amount of inert gas such as argon or nitrogen. Then valve 2 423 is closed, and the gas booster pump 427 is started. The gas booster pump 427 extracts the inert gas in the inert gas storage tank 421 through the extraction pipe 426 and then delivers it to the vacuum furnace shell 311 through the outlet pipe 428. The electric valve 2 429 can control the flow rate and entry timing of the pressurizing gas, gradually increasing the gas pressure in the furnace to reach the pressurization conditions required by the process, and continue to process the material in a high-pressure inert gas environment.

[0039] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum furnace with a plenum structure comprising a floor (1), characterised in that: The top of the bottom plate (1) is provided with a controller (2), the top of the bottom plate (1) is fixedly installed with a support plate (5) symmetrically, the top of the support plate (5) is provided with a sealing assembly (3), and one side of the sealing assembly (3) is provided with an auxiliary assembly (4).

2. A vacuum furnace with a plenum according to claim 1, characterized in that: The sealing assembly (3) comprises: A vacuum furnace shell (311) is fixedly installed at the top of the support plate (5).

3. A vacuum furnace with a plenum according to claim 2, characterized in that: One side of the vacuum furnace shell (311) is hingedly connected with an outer plate (315), the inside of the vacuum furnace shell (311) is fixedly sleeved with a partition layer (312), the inside of the vacuum furnace shell (311) is fixedly sleeved with an inner cylinder (313), the outer wall of the inner cylinder (313) is sleeved with a heating resistance wire (314), both ends of the heating resistance wire (314) extend through the inner wall top of the vacuum furnace shell (311) to the outer wall of the vacuum furnace shell (311), the partition layer (312) is arranged between the inner cylinder (313) and the vacuum furnace shell (311), the outer side of the outer plate (315) is fixedly installed with a clamping frame (317), the front surface of the clamping frame (317) is fixedly installed with a handle (318), one side of the vacuum furnace shell (311) is fixedly installed with a connecting plate (319), the front surface of the connecting plate (319) is rotatably connected with a rotating shaft (3111) through a bearing, the other end of the rotating shaft (3111) is fixedly installed with a clamping rod (3112), the clamping rod (3112) is clampedly connected with the inside of the clamping frame (317), and the inner side of the outer plate (315) is fixedly installed with a cylinder door (316).

4. The vacuum furnace with a plenum according to claim 1, wherein: The auxiliary assembly (4) comprises: A cooling component (41) is arranged at the bottom of the sealing assembly (3); A pressurizing component (42) is arranged at one side of the sealing assembly (3).

5. A vacuum furnace with a plenum according to claim 4, characterized in that: The cooling component (41) comprises: A water storage tank (411) is fixedly installed at the top of the bottom plate (1); A drain pipe (413) is communicatively arranged at one side of the water storage tank (411).

6. A vacuum furnace with a plenum according to claim 5, characterized in that: The bottom of the water storage tank (411) is provided with a semiconductor condenser sheet (412), the middle end of the drain pipe (413) is provided with a valve I (414), the top of the water storage tank (411) is communicatively provided with a water outlet pipe (415), the other end of the water outlet pipe (415) is communicated with the bottom of the vacuum furnace shell (311), the middle end of the water outlet pipe (415) is provided with an electric valve I (416), one side of the water storage tank (411) is communicatively provided with a water pumping pipe (418), the other end of the water pumping pipe (418) is communicatively provided with a water pump (417), the output end of the water pump (417) is communicatively provided with a connecting pipe (419), and the other end of the connecting pipe (419) is communicated with the top of the vacuum furnace shell (311).

7. A vacuum furnace with a plenum according to claim 4, characterized in that: The pressurizing component (42) comprises: An inert gas storage tank (421) is fixedly installed at the top of the bottom plate (1); A vacuum pipe (424) is communicatively arranged at the other side of the vacuum furnace shell (311).

8. A vacuum furnace with a plenum according to claim 7, characterized in that: The other end of the vacuum pipe (424) is communicated with a vacuum pump (425), the top of the inert gas storage tank (421) is communicated with an air inlet pipe (422), the middle end of the air inlet pipe (422) is provided with a valve two (423), the bottom of the inert gas storage tank (421) is communicated with an air exhaust pipe (426), the other end of the air exhaust pipe (426) is communicated with a gas booster pump (427), the output end of the gas booster pump (427) is communicated with an air outlet pipe (428), the other end of the air outlet pipe (428) is communicated with the vacuum furnace shell (311), and the middle end of the air outlet pipe (428) is provided with an electric valve two (429).

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