Novel single-point vertical measurement film thickness gauge

Abstract

The utility model provides a novel single-point vertical measurement film thickness gauge. The novel single-point vertical measurement film thickness gauge comprises a machine body; the machine body comprises a measuring module horizontally mounted in the machine body, and a test sample is vertically placed at a corresponding position on the outer side of the machine body so as to perform measurement through the measuring module; the measuring module is installed at a corresponding position in the machine body through a fixing support, and a distance sensor module for detecting the distance between the test sample and the measuring module is further arranged on one side of the measuring module in the machine body. The device can efficiently collect and record film thickness data, errors caused by manual operation are avoided, and the accuracy and consistency of the data are guaranteed; through automatic processing of the system, the operation steps of a user are simplified, and the test efficiency is improved; the measurement module is horizontally placed, so that the measurement module can be conveniently combined with automatic equipment, and multi-point efficient measurement of film thickness data is realized; and the appearance design is optimized, so that the equipment is attractive and durable, and has extremely high reliability.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of film thickness gauge, specifically to a novel single point vertical measurement's film thickness gauge. BACKGROUND

[0002] Film thickness gauge utilizes optical interference principle, carries out reflection spectrum measurement to single layer film or multilayer film, and analyzes the thickness and refractive index of transparent or weak absorption thin film and other parameters. The existing film thickness gauges are all single point measurement mode, when single point measurement, the sample is placed on the metal platform at the lower end of the film thickness gauge, the film thickness and refractive index of the center point of the platform can be measured. In order to comprehensively evaluate the uniformity and quality of the film layer, manual sampling and measurement are often required multiple times, however, the manual testing process is complex, the testing efficiency is low, and the testing result is also easily disturbed by human factors, leading to measurement error, thereby affecting the reliability of the film thickness data.

[0003] Since the metal platform is placed at the lower end of the film thickness gauge, the position of the metal platform is relatively limited, it is inconvenient to combine with automatic equipment, and it is difficult to realize automatic multi-point measurement of the sample to be measured, therefore, a film thickness gauge capable of vertically measuring the vertically placed sample is required to cooperate with the automatic equipment to realize the automatic multi-point measurement of the sample to be measured. SUMMARY

[0004] The technical problem solved by the utility model lies in providing a novel single point vertical measurement's film thickness gauge to solve the problems proposed in the above background.

[0005] The technical problem solved by the utility model is realized by the following technical scheme: a novel single point vertical measurement's film thickness gauge, comprising:

[0006] A machine body; the machine body comprises a measurement module horizontally installed in the machine body, and a test sample is vertically placed at a corresponding position outside the machine body to be measured by the measurement module;

[0007] The measurement module is installed at a corresponding position in the machine body through a fixing support, and a distance sensor module for detecting the distance between the test sample and the measurement module is arranged on one side of the measurement module in the machine body;

[0008] The machine body comprises a bottom plate, a front panel and a back plate installed on the side edges of the bottom plate, and the outer sides of the front panel and the back plate are provided with bent cover plates, and the front panel is provided with corresponding through holes corresponding to the measurement module and the distance sensor module.

[0009] As a further scheme of the utility model:

[0010] The fixing support comprises a sleeve and a shelf plate arranged at the lower end of the sleeve, the sleeve is sleeved and arranged at the outer end of the measuring module, the outer end of the sleeve is fixedly provided with a sleeve plate, the sleeve plate is fixedly arranged on the front panel by bolts, the lower end of the sleeve is fixedly arranged on the bottom plate by the shelf plate, so that the stability of the horizontal placement of the measuring module is improved.

[0011] As a further scheme of the utility model,

[0012] The distance sensor module is fixedly arranged on the template, screw holes are arranged on the two sides of the template, and the template is fixedly arranged on the front panel by bolts, waist-shaped holes are arranged on the two sides of the template corresponding to the distance sensor module, and the distance sensor module is adjustably arranged in the waist-shaped holes by bolts, so that the position of the distance sensor module can be adjusted by loosening and removing the bolts to adjust the distance between the distance sensor and the test sample.

[0013] As a further scheme of the utility model,

[0014] The lower end of the machine body is further provided with a support frame, the support frame comprises support side plates fixedly arranged at the lower end of the bottom plate and bases arranged at the outer end of the support side plates, the support side plates are fixedly arranged on the upper end of the bases by bolts, and the support frame is placed at a corresponding position through the bases; an arc-shaped hole is arranged on one side of the base corresponding to the support side plate, and the support side plate is adjustably arranged on the base, so that the installation angle of the machine body can be adjusted according to application requirements.

[0015] As a further scheme of the utility model,

[0016] The bottom plate is provided with support members on the two sides for improving the connection stability between the front panel and the back plate, the bottom of the support member is fixedly arranged on the bottom plate by bolts, the outer end of the support member on one side of the bottom plate is fixedly connected with the front panel, the outer end of the support member on the other side of the bottom plate is fixedly connected with the back plate, and the cover plate is sleeved on the outer end of the front panel and the back plate to form a frame structure.

[0017] As a further scheme of the utility model,

[0018] The machine body is internally provided with a measuring module, a distance sensor module, a power input module, a voltage control module, a communication circuit module and a spectrum analysis module, the voltage control module is provided with two groups respectively to ensure the power supply of each electrical component in the equipment and maintain stable voltage, the distance sensor module is fixed on the front panel of the equipment to ensure that the distance between the test sample and the measuring module meets the corresponding test standard, the measuring module emits test light perpendicular to the test sample and receives reflected light, the spectrum analysis module receives and analyzes the reflected light received by the measuring module and feeds back the analysis result to the computer control software, and the communication circuit module transmits various measurement data to the computer control software and receives control signals from the computer software to realize bidirectional data interaction between the equipment and the computer.

[0019] Compared with the prior art, the beneficial effects of the utility model are that: the measuring module is horizontally fixedly installed in the machine body to detect the test sample placed vertically, the machine body can be arranged on one side of the automatic equipment to be combined with the automatic equipment to realize efficient measurement of the film thickness data at multiple points.

[0020] The device can efficiently collect and record the film thickness data, avoid errors caused by manual operation, ensure the accuracy and consistency of the data, automatically process the system to simplify the operation steps of the user and improve the test efficiency, horizontally place the measuring module to facilitate the combination with the automatic equipment and realize efficient measurement of the film thickness data at multiple points, and the appearance design is optimized to make the equipment not only beautiful but also durable and highly reliable. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 It is an installation structure schematic view of the utility model;

[0022] Fig. 2 It is a machine body three-dimensional structure schematic view of the utility model;

[0023] Fig. 3 It is a support piece installation structure schematic view of the utility model;

[0024] Fig. 4 It is a measuring module installation structure schematic view of the utility model;

[0025] Fig. 5 It is a machine body internal partial installation structure schematic view of the utility model;

[0026] Identified in the figure: 1, the body; 2, measurement module; 3, test sample; 4, fixed support; 5, distance sensor module; 6, support frame; 7, power input module; 8, voltage control module; 9, communication circuit module; 10, spectral analysis module; 11, bottom plate; 12, front panel; 13, back plate; 14, cover plate; 15, through hole; 16, support; 41, sleeve; 42, shelf plate; 43, sleeve plate; 51, template; 52, waist hole; 61, support side plate; 62, base; 63, arc hole. DETAILED DESCRIPTION

[0027] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific drawings.

[0028] As shown in the figure, Figs. 1-5

[0029] The embodiment provides a novel single-point vertical measurement film thickness meter, which comprises:

[0030] The body 1 comprises a measurement module 2 horizontally installed in the body, and a test sample 3 is vertically placed at a corresponding position outside the body to be measured by the measurement module 2.

[0031] The measurement module 2 is installed at a corresponding position in the body through a fixed support 4, and a distance sensor module 5 for detecting the distance between the test sample 3 and the measurement module 2 is further arranged at one side of the measurement module 2 in the body.

[0032] The body comprises a bottom plate 11, a front panel 12 and a back plate 13 installed at the side edges of the bottom plate 11, and the outer side of the front panel 12 and the back plate 13 is provided with a bent cover plate 14, and the front panel 12 is provided with corresponding through holes 15 corresponding to the measurement module 2 and the distance sensor module 5.

[0033] In the embodiment, the fixed support 4 comprises a sleeve 41 and a shelf plate 42 arranged at the lower end of the sleeve 41, the sleeve 41 is sleeved and installed at the outer end of the measurement module 2, the outer end of the sleeve 41 is fixedly installed with a sleeve plate 43, the sleeve plate 43 is fixedly installed on the front panel 12 through bolts, and the lower end of the sleeve 41 is fixedly installed on the bottom plate 11 through the shelf plate 42, so as to improve the stability of the horizontal placement of the measurement module 2.

[0034] In the embodiment, the distance sensor module 5 is fixedly installed on a template 51, screw holes are arranged at both sides of the template 51, and the template 51 is fixedly installed on the front panel 12 through bolts, waist holes 52 are arranged at both sides of the template 51 corresponding to the distance sensor module 5, and the distance sensor module 5 is adjustably installed at the waist holes 52 through bolts, so that the position of the distance sensor module 5 can be adjusted by loosening the bolts, and the distance between the distance sensor and the test sample 3 can be adjusted.​

[0035] In this embodiment, the lower end of the body 1 is also provided with a support frame 6, which comprises support side plates 61 fixedly installed on both sides of the lower end of the bottom plate 11 and bases 62 provided on the outer ends of the support side plates 61. The support side plates 61 are fixedly installed on the upper ends of the bases 62 by bolts to be placed in the corresponding positions through the bases 62. An arc-shaped hole 63 is provided on one side of each base 62 corresponding to the support side plate 61. The support side plates 61 are adjustably installed on the bases 62 to adjust the installation angle of the body 1 according to the application requirements.

[0036] A support member 16 is provided on each side of the bottom plate 11 to enhance the connection stability between the front panel 12 and the back panel 13. The bottom of the support member 16 is fixedly installed on the bottom plate 11 by bolts. The outer end of the support member 16 on one side of the bottom plate 11 is fixedly connected with the front panel 12, and the outer end of the support member 16 on the other side of the bottom plate 11 is fixedly connected with the back panel 13. The cover plate 14 is sleeved on the outer ends of the front panel 12 and the back panel 13 to form a frame structure.

[0037] In this embodiment, the body 1 is also provided with a measurement module 2, a distance sensor module 5, a power input module 7, a voltage control module 8, a communication circuit module 9 and a spectrum analysis module 10. The voltage control module 8 is provided with two groups respectively to supply power to each electrical component in the device and maintain stable voltage. The distance sensor module 5 is fixedly installed on the front panel 12 of the device to ensure that the distance between the test sample 3 and the measurement module 2 meets the corresponding test standard. The measurement module 2 emits test light perpendicular to the test sample 3 and receives reflected light. The spectrum analysis module 10 receives and analyzes the reflected light received by the measurement module 2 and feeds back the analysis results to the computer control software. The communication circuit module 9 transmits various measurement data to the computer control software and receives control signals from the computer software to realize bidirectional data interaction between the device and the computer.

[0038] Specifically, the measurement module 2 is horizontally fixedly installed in the body 1 through the fixing bracket 4 to detect the test sample 3 placed vertically. The body 1 can be arranged on one side of the automatic equipment to be combined with the automatic equipment to realize efficient multi-point measurement of film thickness data.

[0039] The device can efficiently collect and record film thickness data, avoid errors caused by manual operation, and ensure the accuracy and consistency of the data. Through automatic processing of the system, the operation steps of the user are simplified, and the test efficiency is improved. The measurement module 2 is horizontally placed to facilitate combination with the automatic equipment, thereby realizing efficient multi-point measurement of film thickness data. The appearance design is optimized, so that the device is not only beautiful but also durable, and has high reliability.

[0040] The basic principle and main features of the present application and the advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents. It should be noted that in this document, if there are relationship terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without further limitation, the element defined by the statement "including a" does not exclude the presence of additional identical elements in the process, method, article or device including the element.

Claims

1. A novel single point vertical measurement film thickness gauge characterized by: Include: Machine body (1); the machine body (1) includes a measuring module (2) horizontally mounted in the machine body, and a test sample (3) is vertically placed at a corresponding position outside the machine body to be measured by the measuring module (2); The measuring module (2) is installed at a corresponding position in the machine body by a fixed support (4), and a distance sensor module (5) for detecting the distance between the test sample (3) and the measuring module (2) is also provided on one side of the measuring module (2) in the machine body; The machine body includes a bottom plate (11), a front panel (12) and a back panel (13) mounted on the side of the bottom plate (11), and a bent cover plate (14) is provided on the outside of the front panel (12) and the back panel (13); the front panel (12) is provided with a corresponding through hole (15) corresponding to the measuring module (2) and the distance sensor module (5).

2. A novel single point vertical measurement film thickness gauge as claimed in claim 1, wherein: The fixed support (4) includes a sleeve (41) and a shelf (42) provided at the lower end of the sleeve (41); the sleeve (41) is sleeved and mounted at the outer end of the measuring module (2); the outer end of the sleeve (41) is fixedly mounted with a sleeve plate (43); the sleeve plate (43) is fixedly mounted on the front panel (12) by bolts; the lower end of the sleeve (41) is fixedly mounted on the bottom plate (11) by the shelf (42).

3. A novel single point vertical measurement film thickness gauge as claimed in claim 2, wherein: The distance sensor module (5) is fixedly mounted on a template (51); the template (51) is provided with screw holes on both sides and is fixedly mounted on the front panel (12) by bolts; the template (51) is provided with a waist-shaped hole (52) corresponding to the distance sensor module (5) on both sides; the distance sensor module (5) is adjustably mounted at the waist-shaped hole (52) by bolts.

4. The novel single point vertical measurement film thickness gauge according to claim 1, characterized in that: The lower end of the machine body (1) is also provided with a support frame (6); the support frame (6) includes support side plates (61) fixedly mounted on both sides of the lower end of the bottom plate (11) and bases (62) provided at the outer ends of the support side plates (61); the support side plates (61) are fixedly mounted on the upper ends of the bases (62) by bolts, so as to be placed at a corresponding position by the bases (62); one side of the base (62) is provided with an arc-shaped hole (63) corresponding to the support side plate (61); the support side plate (61) is adjustably mounted on the base (62), so as to adjust the installation angle of the machine body (1) according to application requirements.

5. A novel single point vertical measurement film thickness gauge as claimed in claim 4, wherein: Both sides of the bottom plate (11) are provided with support members (16) for strengthening the connection stability between the front panel (12) and the back panel (13); the bottoms of the support members (16) are fixedly mounted on the bottom plate (11) by bolts; the outer end of the support member (16) on one side of the bottom plate (11) is fixedly connected with the front panel (12); the outer end of the support member (16) on the other side of the bottom plate (11) is fixedly connected with the back panel (13); the cover plate (14) is sleeved on the outer ends of the front panel (12) and the back panel (13) to form a frame structure.

6. A novel single point vertical measurement film thickness gauge as claimed in claim 1, wherein: The machine body (1) is internally provided with a measuring module (2), a distance sensor module (5), a power input module (7), a voltage control module (8), a communication circuit module (9) and a spectrum analysis module (10), and the voltage control module (8) is provided with two groups respectively to ensure the power supply of each electrical component in the device.

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