Thermocouple fixing support for wafer temperature detection

Abstract

The utility model provides a thermocouple fixing support for wafer temperature detection, which comprises a first fixing frame and a second fixing frame, the first fixing frame is longitudinally arranged, the second fixing frame is transversely arranged, the second fixing frame is provided with a first end and a second end, the first end is fixedly connected with the middle part of the first fixing frame, and the second end is fixedly connected with the middle part of the second fixing frame. The second end is provided with an open groove, the open groove extends from the end portion of the second end in the length direction of the second fixing frame, and a mounting groove matched with the fixing end of the thermocouple is formed in the position, close to the second end, in the open groove. The mounting groove extends from the top of the second fixing frame in the height direction of the second fixing frame, a positioning step is formed in the open groove, and the position of the fixing end is limited by the positioning step. By adopting the thermocouple fixing support for wafer temperature detection provided by the utility model, the thermocouple can be quickly positioned and fixed at a set height.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and in particular relates to a thermocouple fixing bracket for wafer temperature detection. Background Technology

[0002] In semiconductor technology, thin-film sputtering is a primary process for metal interconnects. Before metal sputtering deposition, the wafer needs to be baked to remove moisture to meet the uniformity and stress requirements of the deposited film. During the baking process, the wafer temperature needs to be monitored using thermocouples. Because the thermocouples are fixed on a lifting ring, and the wafer is horizontally positioned on the lifting ring, the thermocouples need to maintain good contact with the back of the wafer. Therefore, the height of the thermocouples must be adjusted very accurately. Existing thermocouple fixing devices only fix the thermocouples and cannot perform height positioning. Multiple visual adjustments to the fixing height are required, resulting in insufficient accuracy and temperature detection deviations. If the detected temperature is abnormal, the output power of the baking controller will also change accordingly, potentially leading to incomplete moisture removal or excessively high temperatures causing stress fragmentation on the wafer.

[0003] Therefore, it is necessary to provide a thermocouple mounting bracket for wafer temperature detection. Utility Model Content

[0004] This invention provides a thermocouple mounting bracket for wafer temperature detection, enabling rapid positioning and fixing of the thermocouple at a set height.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A thermocouple mounting bracket for wafer temperature sensing includes a first mounting bracket and a second mounting bracket. The first mounting bracket is arranged longitudinally, and the second mounting bracket is arranged laterally. The second mounting bracket has a first end and a second end. The first end is fixedly connected to the middle of the first mounting bracket. The second end is provided with an opening groove that extends from the end of the second end along the length direction of the second mounting bracket. Near the second end, a mounting groove matching the fixed end of the thermocouple is provided in the opening groove. The mounting groove extends from the top of the second mounting bracket along the height direction of the second mounting bracket and forms a positioning step in the opening groove. The positioning step defines the position of the fixed end.

[0007] Optionally, the opening slot extends through the second fixing frame in the height direction.

[0008] Optionally, the second fixing bracket is provided with a locking hole near the mounting groove. The locking hole extends through the width of the second fixing bracket. When the fixed end of the thermocouple is placed in the mounting groove, it is locked and fixed by a bolt passing through the locking hole.

[0009] Optionally, the locking hole communicates with the opening slot.

[0010] Optionally, the mounting groove is disposed on the inner wall of the opening groove, and the mounting groove is an arc-shaped groove that matches the outer diameter of the fixed end.

[0011] Optionally, the positioning step is disposed at the bottom of the mounting groove, and the height of the positioning step matches the height of the wafer, so that when the thermocouple is installed on the LIFT HOOP through the fixing bracket, the thermocouple abuts against the wafer.

[0012] Optionally, the first fixing frame is provided with fixing holes at both ends.

[0013] Optionally, both the first fixing bracket and the second fixing bracket are made of stainless steel.

[0014] Compared with the prior art, the technical solution of this utility model has beneficial effects.

[0015] For example, using this thermocouple mounting bracket for wafer temperature detection, a first longitudinal mounting bracket and a second transverse mounting bracket are provided. An opening groove is provided at the second end of the second mounting bracket, and a mounting groove matching the fixed end of the thermocouple is provided in the opening groove. The bottom of the mounting groove forms a positioning step in the opening groove. The positioning step limits the position of the fixed end, thereby limiting the height of the thermocouple. The height of the thermocouple can be set quickly and accurately, so that the thermocouple abuts against the wafer, improving the accuracy of wafer temperature measurement, facilitating rapid wafer drying, and improving efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the thermocouple fixing bracket structure for wafer temperature detection in an embodiment of this utility model;

[0017] Figure 2 This is a front view of the thermocouple fixing bracket for wafer temperature detection in an embodiment of this utility model;

[0018] Figure 3 This is a side view of a thermocouple mounting bracket for wafer temperature detection in an embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the installation of a thermocouple fixing bracket for wafer temperature detection in an embodiment of this utility model;

[0020] Figure 5 This is a cross-sectional view of the thermocouple mounting bracket for wafer temperature detection in an embodiment of this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. First fixing bracket; 11. Fixing hole;

[0023] 2. Second fixing bracket; 21. First end; 22. Second end; 23. Opening slot; 24. Mounting slot; 25. Locking hole; 26. Positioning step.

[0024] 3. Thermocouple; 31. Fixed terminal;

[0025] 4. Wafers;

[0026] 5. Lifting ring. Detailed Implementation

[0027] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.

[0028] Figure 1 This is a schematic diagram of the thermocouple fixing bracket structure for wafer temperature detection in an embodiment of this utility model; Figure 2 This is a front view of the thermocouple fixing bracket for wafer temperature detection in an embodiment of this utility model; Figure 3 This is a side view of a thermocouple mounting bracket for wafer temperature detection in an embodiment of this utility model; Figure 4 This is a schematic diagram of the installation of a thermocouple fixing bracket for wafer temperature detection in an embodiment of this utility model.

[0029] Reference Figures 1-4 This utility model provides a thermocouple fixing bracket for wafer temperature detection.

[0030] Specifically, the thermocouple mounting bracket for wafer temperature detection includes a first mounting bracket 1 and a second mounting bracket 2. The first mounting bracket 1 is arranged longitudinally, and the second mounting bracket 2 is arranged laterally. The second mounting bracket 2 has a first end 21 and a second end 22. The first end 21 is fixedly connected to the middle of the first mounting bracket 1. The second end 22 is provided with an opening groove 23. The opening groove 23 extends from the end of the second end 22 along the length direction of the second mounting bracket 2. Near the second end 22, the opening groove 23 is provided with a mounting groove 24 that matches the fixed end 31 of the thermocouple 3. The mounting groove 24 extends from the top of the second mounting bracket 2 along the height direction of the second mounting bracket 2 and forms a positioning step 26 in the opening groove 23. The positioning step 26 defines the position of the fixed end 31.

[0031] In some embodiments, the opening slot 23 extends through the second fixing bracket 2 in the height direction, so that the width of the opening slot 23 can be slightly varied at the second end 22, which is beneficial for the fixing end 31 to be set into the mounting slot 24.

[0032] In some embodiments, the second fixing bracket 2 is provided with a locking hole 25 near the mounting groove 24. The locking hole 25 is provided through the width direction of the second fixing bracket 2. When the fixing end 31 of the thermocouple 3 is provided in the mounting groove 24, it is fixed by locking the opening groove 23 with a bolt passing through the locking hole 25.

[0033] In some embodiments, the locking hole 25 communicates with the opening slot 23.

[0034] In some embodiments, the mounting groove 24 is disposed on the inner wall of the opening groove 23. The mounting groove 24 is an arc-shaped groove that matches the outer diameter of the fixed end 31. When the bolt is tightened to fix the opening groove 23, the inner wall of the mounting groove 24 fits against the outer wall of the fixed end 31, which can firmly fix the thermocouple 3 without damaging it.

[0035] In some embodiments, the positioning step 26 is disposed at the bottom of the mounting groove 24, and the height of the positioning step 26 matches the height of the wafer 4, so that when the thermocouple 3 is installed on the lifting ring 5 through the fixed bracket, the thermocouple 3 abuts against the wafer 4.

[0036] In some embodiments, the first fixing frame 1 is provided with fixing holes 11 at both ends, and the first fixing frame 1 is fixed to the lifting ring 5 by bolts passing through the fixing holes 11.

[0037] In some embodiments, both the first fixing frame 1 and the second fixing frame 2 are made of stainless steel.

[0038] In summary, the thermocouple mounting bracket for wafer temperature detection provided by this utility model is provided with a longitudinal first mounting bracket 1 and a transverse second mounting bracket 2. An opening groove 23 is provided at the second end 22 of the second mounting bracket 2, and a mounting groove 24 matching the fixed end 31 of the thermocouple 3 is provided in the opening groove 23. The bottom of the mounting groove 24 forms a positioning step 26 in the opening groove 23. The positioning step 26 limits the position of the fixed end 31, thereby limiting the height of the thermocouple 3. The height of the thermocouple 3 can be set quickly and accurately, so that the thermocouple 3 abuts against the wafer 4, improving the accuracy of wafer temperature measurement, facilitating the rapid drying of the wafer 4, and improving efficiency.

[0039] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.

[0040] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A thermocouple fixing bracket for wafer temperature detection, characterized by, The first fixing frame is longitudinally arranged, and the second fixing frame is transversely arranged.

2. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein The opening slot extends from the end of the second end along the length direction of the second fixing frame.

3. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein The second fixing frame is provided with a locking hole near the mounting slot, and the locking hole is arranged through in the width direction of the second fixing frame.

4. The thermocouple fixing bracket for wafer temperature detection according to claim 3, wherein The locking hole is communicated with the opening slot.

5. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein The mounting slot is arranged on the inner wall of the opening slot, and the mounting slot is an arc-shaped slot matched with the outer diameter of the fixed end.

6. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein The positioning step is arranged on the bottom of the mounting slot, and the height of the positioning step is matched with the height of the wafer, so that the thermocouple is abutted with the wafer when the thermocouple is mounted to the LIFTHOOP through the fixed support.

7. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein Both ends of the first fixing frame are provided with fixing holes.

8. The thermocouple fixing bracket for wafer temperature detection according to claim 1, wherein The material of the first fixing frame and the second fixing frame is stainless steel.

Images