Ultrasonic scanning microscope device

Abstract

The utility model relates to an ultrasonic scanning microscope (SAM) device, which comprises a carrying platform, an ultrasonic scanning microscope and at least one isolation component. The carrying platform is used for carrying at least one to-be-tested object. The isolation assembly is used for enabling the to-be-detected object and the detection liquid to be in an isolation state. Wherein the ultrasonic scanning microscope provides ultrasonic waves through the detection probe to penetrate through the detection liquid and the isolation component attached to the object to be detected, so as to carry out an ultrasonic scanning detection procedure on the object to be detected on the carrying table. According to the utility model, the problems caused by hardware in the prior art are overcome by improving the hardware.

Description

TECHNICAL FIELD

[0001] The present utility model relates to an ultrasonic device, in particular to a scanning acoustic microscope (SAM) device. BACKGROUND

[0002] Ultrasonic waves are transmitted through a medium that can conduct sound waves. When the ultrasonic waves hit the interface of a medium with different densities, part of the energy will be reflected back. These reflected sound wave energies are received by the inspection probe and converted into electrical signals, which are then converted into images and displayed on the screen. Traditional ultrasonic scanning technology uses water as the medium for transmitting sound waves. The object to be tested (such as electronic components) and the inspection probe must be immersed in a detection liquid to maintain a certain distance between the inspection probe and the object to be tested, and then the ultrasonic scanning detection program can be performed. However, many electronic components are not suitable for contact with water. Regardless of whether the electronic components are suitable for contact with water, after the ultrasonic scanning detection program is performed, a time-consuming or high risk of heat damage drying process must be performed. Therefore, the existing technology still needs to be improved, and the problems of the existing technology are caused by hardware. SUMMARY

[0003] Therefore, one purpose of the present utility model is to provide a scanning acoustic microscope (SAM) device that improves the hardware and relies on known software and programs to solve the problems of the known art.

[0004] To achieve the above purpose, the present utility model provides a scanning acoustic microscope device, which includes a carrier for carrying at least one object to be tested, an ultrasonic scanning microscope with an inspection probe, and at least one isolation component for presenting an isolation state between the object to be tested and a detection liquid. The ultrasonic scanning microscope provides an ultrasonic wave that penetrates through the detection liquid and the isolation component attached to the object to be tested via the inspection probe, thereby performing an ultrasonic scanning detection program on the object to be tested on the carrier.

[0005] The isolation component is a bag body, the detection liquid is filled in the bag body to provide a liquid environment, and the detection probe is immersed in the detection liquid in the bag body. The bag body is attached to the object to be tested with an outer surface, and the object to be tested is located in a non-liquid environment.

[0006] The isolation assembly is further provided with a fixing device, which is used to fix the isolation assembly to at least one end of the detection probe, or to expand the isolation assembly to fill the liquid environment with the detection liquid, so that the detection probe is movably located in the liquid environment.

[0007] The isolation assembly is a bag, and the object to be measured is covered in a non-liquid environment inside the bag, so that the bag is attached to the object to be measured with an inner surface. The detection probe is located outside the bag and in a liquid environment provided by the detection liquid.

[0008] The detection liquid is located in the treatment tank to provide the liquid environment, and the object to be measured is immersed in the detection liquid in the treatment tank by the protection of the isolation assembly, so that the object to be measured and the detection liquid are in the isolated state.

[0009] The isolation assembly is attached to all or part of the object to be measured by an external force.

[0010] The external force supply source is a suction device for providing a suction force as the external force, which removes a gas between the isolation assembly and the object to be measured, so that the isolation assembly is tightly or conformally attached to the object to be measured.

[0011] The external force supply source is a push force source for providing a push force as the external force, which tightly or conformally attaches the isolation assembly to the object to be measured by applying the external force.

[0012] The acoustic impedance of the isolation assembly is approximately or identical to the acoustic impedance of the detection liquid.

[0013] The isolation assembly has a deformable structure.

[0014] The isolation assembly includes elastic material and / or stretchable material.

[0015] The material of the isolation assembly is selected from the group consisting of silicone, rubber, plastic, and composite high molecular polymer.

[0016] The carrier includes at least one storage platform for carrying the object to be measured.

[0017] The carrier includes at least one adjustment device for adjusting the height and / or inclination angle of at least one side of the object to be measured on the storage platform.

[0018] The adjustment device of the carrier includes at least one control module for externally controlling the adjustment device to adjust the height and / or the tilt angle of the at least one side of the object on the object platform in the detection liquid.

[0019] The carrier is located in at least one processing tank for carrying the object, and the detection liquid is filled in the processing tank to provide a liquid environment.

[0020] The object platform of the carrier is suspended in the detection liquid by the adjustment device in a suspended or elevated manner.

[0021] The carrier includes a plurality of combined expansion platforms, one or more of which constitute the object platform of the carrier, so as to adjust the size of the carrier according to the size of the processing tank.

[0022] The flatness of at least one first area of the carrier is better than that of at least one second area, and the first area corresponds to a measurement area of the object platform and / or the object placed on the object platform.

[0023] The optical sensing device is used to perform an automated optical inspection (AOI) process and / or a position detection process on the object on the carrier above the detection liquid.

[0024] The optical sensing device and the ultrasonic scanning microscope respectively perform the AOI process and / or the ultrasonic scanning detection process on the object before and / or after the object with the isolation component is placed in the detection liquid.

[0025] The optical sensing device performs the position detection process on the object and / or the carrier before and / or after the object with the isolation component is placed in the detection liquid.

[0026] The optical sensing device performs an error correction process to correct a surface detection result of the AOI process and / or a position detection result of the position detection process according to changes in the medium environment in which the object and / or the carrier is located.

[0027] The detection probe of the ultrasonic scanning microscope has an ultrasonic transmitter for outputting the ultrasonic waves and an ultrasonic receiver for receiving the ultrasonic waves, and the ultrasonic transmitter and the ultrasonic receiver are located on the same side or different sides of the object.

[0028] The ultrasonic scanning microscope device has the following advantages.

[0029] (1) The isolation component with waterproof effect is used to cover the measured object, the detection probe and / or the detection liquid, so that the isolation effect between the measured object (such as an electronic component) and the detection liquid (such as water) can be achieved.

[0030] (2) The thickness of the isolation component does not affect the ultrasonic wave transmission, the acoustic impedance of the isolation component is substantially similar to or the same as the acoustic impedance of the detection liquid, and the isolation component can be closely or conformally attached to the surface of the measurement area of the measured object.

[0031] (3) The use of the isolation component to block the contact between the measured object and the detection liquid can effectively solve the problem that the electronic component is not suitable for contacting the detection liquid, and at the same time, the problem of time-consuming or high risk of dry processing can be avoided.

[0032] (4) The stage is matched with the adjusting device to provide functions such as lifting, turning, translation, inclination adjustment, flatness adjustment and / or straightness adjustment.

[0033] (5) The adjusting device can be suspended or raised, so that the stage and the measured object carried thereby are suspended in the detection liquid, and the control module can be located outside the liquid surface, so that the waterproof level requirement does not need to be improved.

[0034] (6) The stage is spliced or connected by a plurality of combined expansion platforms, so that the size of different processing tanks can be adapted, and only the measurement area needs to have a high-precision flatness, without the need for each part to have a high-precision flatness, so that the ultrasonic scanning detection program can be performed.

[0035] (7) By combining the optical sensing device and the ultrasonic scanning microscope, the automatic optical detection surface detection program and the ultrasonic scanning detection program can be performed on and under the liquid surface, respectively, and the positioning and anti-collision functions can be provided. The present application uses the known software and program and improves the hardware to overcome the problems caused by the hardware in the prior art.

[0036] In order to make the examiner have a further understanding and recognition of the technical features and technical effects of the present application, the preferred embodiments and detailed descriptions are provided as follows. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 The operation schematic diagram of the ultrasonic scanning microscope device of the present application is shown, wherein the ultrasonic scanning microscope adopts a reflection detection technology.

[0038] Figure 2The operation schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to prevent the measured object from contacting the detection liquid by the isolation component.

[0039] Figure 3 The operation schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to carry out the ultrasonic scanning detection program in the treatment tank.

[0040] Figure 4 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to cover the measured object by the isolation component.

[0041] Figure 5 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to cover the detection probe by the fixed isolation component.

[0042] Figure 6 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to cover the detection probe by the expandable isolation component.

[0043] Figure 7 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to cover the detection liquid by the expandable isolation component.

[0044] Figure 8 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to have the adjusting device, wherein the adjusting device is hung on the treatment tank.

[0045] Figure 9 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to have the adjusting device, wherein the adjusting device is hung on the treatment tank.

[0046] Figure 10 The top view schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to have the adjusting device, wherein only the carrier, the measured object and the adjusting device are shown to simplify the icon.

[0047] Figure 11 The cross-sectional schematic diagram of the carrier of the ultrasonic scanning microscope device of the utility model is shown to contain a plurality of combined expansion platforms.

[0048] Figure 12 The top view schematic diagram of the carrier of the ultrasonic scanning microscope device of the utility model is shown to contain a plurality of combined expansion platforms, wherein only part of the structure is shown to simplify the icon.

[0049] Figure 13 The cross-sectional schematic diagram of the ultrasonic scanning microscope device of the utility model is shown to have the optical sensing device, wherein the position of the measured object is located on the liquid surface.

[0050] Figure 14 A cross-sectional view of the ultrasonic scanning microscope device with an optical sensing device is shown, wherein the position of the object to be measured is moved below the liquid surface.

[0051] BRIEF DESCRIPTION OF DRAWINGS

[0052] 10: ultrasonic scanning microscope device

[0053] 20: stage

[0054] 22: object platform

[0055] 22': combined expansion platform

[0056] 23a: first area

[0057] 23b: second area

[0058] 24: adjustment device

[0059] 25: adjustment assembly

[0060] 26: control module

[0061] 27: hook

[0062] 40: ultrasonic scanning microscope

[0063] 42: detection probe

[0064] 42a: ultrasonic transmitter

[0065] 42b: ultrasonic receiver

[0066] 43: end portion

[0067] 44: detection liquid

[0068] 50: isolation assembly

[0069] 52: outer surface

[0070] 54: inner surface

[0071] 55: container

[0072] 56: fixing means

[0073] 60: external force supply source

[0074] 70: processing tank

[0075] 80: optical sensing device

[0076] 100: object to be measured

[0077] 110: measurement area

[0078] 120: object

[0079] F: external force

[0080] F1: suction force

[0081] F2: pushing force DETAILED DESCRIPTION

[0082] To understand the technical features, contents, advantages and effects of the present application, the present application is described in detail below in the form of embodiments with reference to the drawings. The drawings are only schematic and are not necessarily drawn to scale. Therefore, the proportions of the various features should not be interpreted as limiting the scope of the present application. In the drawings, the same reference numerals are used to refer to the same components throughout the various figures and embodiments. In the following description, the terms "first", "second", "third", "fourth" and the like do not necessarily denote any ordinal, chronological or spatial sequence. Rather, such terms are used to distinguish different components or operations from one another.

[0083] In addition, the words used in the specification and claims are generally used in the same sense as commonly understood by one of ordinary skill in the art to which the present application pertains, in the context of the present disclosure and in the context of the special context. Certain words used to describe the present application are discussed below or elsewhere in the specification to provide additional guidance to those skilled in the art in describing the present application.

[0084] As used herein, the terms "first", "second", "third", "fourth" and the like do not necessarily denote any ordinal, chronological or spatial sequence. Rather, such terms are used to distinguish different components or operations from one another.

[0085] Secondly, as used herein, the words "comprise", "include", "have", "contain", and the like are open-ended words that mean "comprising but not limited to".

[0086] The utility model provides a kind of Scanning Acoustic Microscope (SAM) device, it uses the isolation component with waterproof effect to make the isolation effect (or called, barrier effect) between the object to be measured (such as, electronic component) and detection liquid (such as, water), wherein the acoustic impedance difference between the isolation component selected by the utility model and water is lower, and the isolation component does not block the penetration of ultrasonic signal, so the adverse effects of the use of isolation component on ultrasonic scanning detection procedure can be effectively reduced, and the problem that electronic component is not suitable for contact detection liquid can also be avoided, while the problem of time-consuming or higher risk of dry processing of heat damage can be avoided.The isolation component of the utility model can keep the measurement area of the object to be measured from contacting detection liquid in ultrasonic scanning detection procedure in various ways, for example, the isolation component covers the object to be measured, detection probe and / or detection liquid, so that the object to be measured is isolated from detection liquid, for example, at least the measurement area of the object to be measured can be kept from contacting detection liquid in ultrasonic scanning detection procedure.

[0087] Please refer to Figures 1 to 14 As shown in the drawings, Figure 1 The utility model discloses a Scanning Acoustic Microscope device to prevent the object to be measured from contacting detection liquid by isolation component, wherein the Scanning Acoustic Microscope adopts reflection detection technology. Figure 2 The utility model discloses a Scanning Acoustic Microscope device to prevent the object to be measured from contacting detection liquid by isolation component, wherein the Scanning Acoustic Microscope adopts penetration detection technology.The Scanning Acoustic Microscope device 10 of the utility model includes a carrier 20, a Scanning Acoustic Microscope 40 and at least one isolation component 50.The carrier 20 is used to carry at least one object to be measured 100, the isolation component 50 is used to prevent detection liquid 44 from contacting the object to be measured 100, the Scanning Acoustic Microscope 40 has a detection probe 42, and the Scanning Acoustic Microscope 40 is used to provide ultrasonic waves and / or receive ultrasonic waves through the detection probe 42, so as to perform ultrasonic scanning detection procedure on the object to be measured 100.The detection probe 42 includes an ultrasonic transmitter 42a and an ultrasonic receiver 42b, the ultrasonic transmitter 42a is used to output ultrasonic waves, and the ultrasonic receiver 42 is used to receive ultrasonic waves.The ultrasonic transmitter 42a and the ultrasonic receiver 42b of the utility model are not limited to a specific relative position, wherein the ultrasonic transmitter 42a and the ultrasonic receiver 42b can be located on the same side of the object to be measured 100 (such as Figure 1 The example integrated in detection probe 40), can also be located on different sides (such as Figure 2As long as the ultrasonic scanning microscope device and its components can be used to perform the ultrasonic scanning detection procedure of the present application, any corresponding adjustment of the structure or position of the ultrasonic scanning microscope device and its components is within the scope of the present application. Moreover, to avoid complicating the description of the embodiments of the present application, the ultrasonic transmitter 42a and the ultrasonic receiver 42b are located on the same side of the object 100 as an example. The present application can use various conventional ultrasonic scanning microscopes 40 to perform ultrasonic scanning detection procedures using various conventional ultrasonic scanning detection principles, and the structure and operation of the ultrasonic scanning microscope 40 are well known to those skilled in the art, so they will not be described in detail here.

[0088] The stage 20 of the ultrasonic scanning microscope device 10 of the present application includes at least one object platform 22, so that the object 100 can be placed on the object platform 22 of the stage 20. The object platform 22 can be built-in or externally connected to the stage 20, or a region on the stage 20 can be defined as the object platform 22. The stage 20 is not limited to a fixed stage or a movable stage. The movable stage can be a bearing platform with functions such as lifting, steering, translation, inclination adjustment, flatness adjustment, and / or straightness adjustment. Moreover, the stage 20 is not limited to a fixed or movable bearing object 100.

[0089] The utility model discloses one of the characteristics lies in having the isolation component 50, in order to make the object 100 and the detection liquid 44 present the isolation state, by this can avoid the object 100 all or partial area contact detection liquid 44, therefore can prevent the object 100 contact detection liquid 44 (such as, liquid or water vapor) and can save the drying treatment time of the object 100. The object 100 and the number of isolation component 50 can be one or multiple respectively, and not limited to corresponding each other and have the same number, the number of object 100 and isolation component 50 can also be not same as each other. In the ultrasonic scanning detection procedure, the ultrasonic scanning microscope 40 provides ultrasonic wave penetration through the detection liquid 44 and the isolation component 50 attached (or called, attached) on the object 100 through the inspection probe 42, in order to carry out ultrasonic scanning detection procedure to the object 100 carried by the stage 20. Then, as long as the detection signal obtained by ultrasonic scanning detection procedure is signal processed, by separating (or called, filtering) the signal of isolation component 50, the measurement result of the object 100 can be obtained. Therefore, the isolation component 50 of the utility model does not substantially affect the operation of ultrasonic scanning detection procedure, and does not affect the ultrasonic wave provided by the inspection probe 42 and / or received. In order to avoid reducing the reflection and refraction phenomenon of ultrasonic wave at the interface between the isolation component 50 and the detection liquid 44, thereby affecting the propagation, absorption, reflection and penetration characteristics of ultrasonic wave, the acoustic impedance of the isolation component 50 is preferably similar to or the same as the acoustic impedance of the detection liquid 44. For example, if the detection liquid 44 is water, the acoustic impedance of water is about 1.5MRayl, then the acoustic impedance of the isolation component 50 is preferably similar to or the same as 1.5MRayl, and the closer the better, wherein the acoustic impedance of the isolation component 50 is about 1.5MRayl to about 3.5MRayl. The detection liquid 44 used in the utility model is not limited to traditional water, and can be selectively changed to use liquid composition with acoustic impedance similar to or the same as the acoustic impedance of the selected isolation component 50, such as aqueous solution or other liquid. Even, as long as the difference between the acoustic impedance of the isolation component 50 and the acoustic impedance of the detection liquid 44 does not affect the operation of ultrasonic scanning detection procedure, it can be applied in the utility model, not limited to similar or the same as each other.

[0090] To avoid the ultrasonic signal interference, the energy loss of sound energy absorption and the interference of additional medium (e.g. air), the isolation component 50 and the object 120 on the test object 100 (e.g. the higher the adhesion degree (i.e. the fitting degree) between the isolation component 50 and the test object 100 is, the better. Because the higher the adhesion degree is, the smaller the gap between the isolation component 50 and the test object 100 will be or even disappear, so the adverse effect of the isolation component 50 on the ultrasonic scanning detection procedure will be smaller. The isolation component 50 is preferably (but not limited to) a deformable structure, and part or all of the isolation component 50 is a deformable structure, and the material of the isolation component 50 is, for example (but not limited to) an elastic material and / or a stretchable material, and the thinner the thickness of the isolation component 50 is, the better, so that the isolation component 50 can be closely or conformally attached to the test object 100 after being subjected to an external force F (e.g. suction force F1 or pushing force F2). For example, the isolation component 50 is, for example, a film structure, preferably a thin film, and the thickness of the isolation component 50 is, for example (but not limited to) less than or equal to about 100 μm, and the thinner the better, wherein the thinner the thickness of the isolation component 50 is, the better the elastic and / or stretchable material is, the better the attachment effect is, and the lower the signal noise and energy absorption loss are. For example, the material of the isolation component 50 is, for example, selected from the group of high molecular polymers consisting of silicone, rubber, plastic and composite high molecular polymer. However, as long as the test object 100 does not have any doubt of contacting the detection liquid 44, for example, the flatness of the surface (e.g. flat surface) of the test object 100 is sufficient to make the isolation component 50 attached thereto provide isolation effect, the material of the isolation component 50 of the present application is not limited to using elastic material and / or stretchable material, which can be various suitable materials, as long as it can play the isolation effect, it can be applied in the present application. In addition, the isolation component 50 is not limited to a single layer film structure, which can also be selectively a multi-layer film structure, and the material of each film layer in the multi-layer film structure can be the same or different. Moreover, the isolation component 50 is not limited to a specific shape, which can be selectively determined according to the shape of the test object 100 to be attached. Even if the isolation component 50 has elastic properties or stretchable properties, the shape can be changed according to the shape of the test object 100.

[0091] The isolation assembly 50 of the utility model can isolate the detection liquid 44 from the object 100, for example, by covering the object 100, the detection probe 42 and / or the detection liquid 44, that is, at least the measurement area 110 of the object 100 can be kept from contacting the detection liquid 44 in the ultrasonic scanning detection process. In short, the utility model aims to keep a part or the whole of the object 100 from contacting the detection liquid 44, so the part or the whole of the object 100 needs to be kept in a non-liquid environment (that is, not in contact with the detection liquid 44), while the ultrasonic scanning microscope 40 is not limited, the detection probe 42 of the ultrasonic scanning microscope 40 can be in a liquid environment or a non-liquid environment. The stage 20, the ultrasonic scanning microscope 40 and the isolation assembly 50 of the utility model are not limited to a specific configuration or a specific operation mode, and can be adjusted accordingly according to the actual needs of the ultrasonic scanning microscope device 10 in the ultrasonic scanning detection process.

[0092] Please refer to Figure 3 and please refer to the other drawings shown, Figure 3 The utility model discloses an ultrasonic scanning microscope device 10 in the operation schematic diagram of the ultrasonic scanning detection process in the treatment tank 70. The ultrasonic scanning microscope device 10 of the utility model can also selectively have a treatment tank 70 to accommodate the detection liquid 44 to provide a liquid environment, and the structure shown in the figure can be put into the treatment tank 70, so as to carry out the ultrasonic scanning detection process in the liquid environment provided by the treatment tank 70. However, the utility model is not limited to this, and the utility model can also selectively omit the treatment tank 70, as long as the detection liquid 44 can provide the liquid environment required by the ultrasonic scanning microscope 40 for the ultrasonic scanning detection process of the object 100, which can be applied to the utility model. Figure 1

[0093] Please refer to Figure 4 and please refer to the other drawings shown, Figure 4 The utility model discloses an ultrasonic scanning microscope device 10 with the cross-sectional schematic diagram of covering the object 100 by the isolation assembly 50. In the first embodiment, the utility model uses the isolation assembly 50 to cover the object 100, so as to avoid the object 100 from contacting the detection liquid 44, wherein the object 100 is located in a non-liquid environment (that is, not in contact with the detection liquid 44), and the detection probe 42 of the ultrasonic scanning microscope 40 is located in the liquid environment provided by the detection liquid 44.

[0094] For example, the isolation assembly 50 is a bag, which is a protective bag, used to cover part or all of the object 100 inside the bag, wherein the inner side surface 54 of the bag is attached to the object 100, so that the object 100 can be located in a non-liquid environment (that is, not in contact with the detection liquid 44). ​

[0095] In the first embodiment, the detection liquid 44 is located in the treatment tank 70 to provide a liquid environment. In the ultrasonic scanning detection procedure, the object 100 is immersed in the detection liquid 44 in the treatment tank 70 under the protection of the isolation assembly 50, so that the object 100 is isolated from the detection liquid 44. In addition, the detection probe 42 of the ultrasonic scanning microscope 40 is immersed in the detection liquid 44 in the treatment tank 70 and located at a distance outside the isolation assembly 50. The distance is not limited to a specific value and can be determined according to the operation of the actual ultrasonic scanning detection procedure. In this way, the ultrasonic scanning microscope 40 can provide ultrasonic waves penetrating through the detection liquid 44 and the isolation assembly 50 attached to the object 100 by the detection probe 42 and receive ultrasonic waves, so as to perform the ultrasonic scanning detection procedure on the object 100 on the stage 20.

[0096] The isolation assembly 50 can be attached to the object 100 by the external force F. The external force F can be, for example, a one-time or continuous suction force, a pushing force, and / or other types of forces. The ultrasonic scanning microscope device 10 can selectively use an external force source (not shown) to provide the above-mentioned external force F. For example, the external force source can be, for example, a suction device to provide a suction force F1 as an external force. The suction device removes the gas (such as air) between the isolation assembly 50 and the object 100, so that the isolation assembly 50 is attached (for example, tightly or conformally attached) to the measurement area 110 of the object 100. For example, the isolation assembly 50 is vacuum-attached to the object 100. The isolation assembly 50 can be wrapped around the object 100 before the object 100 is immersed in the detection liquid 44, and the gas between the isolation assembly 50 and the object 100 is removed by, for example, the suction device, so that the isolation assembly 50 is vacuum-adsorbed on the surface of the object 100. Then, the object 100 wrapped with the isolation assembly 50 is immersed in the detection liquid 44 to perform the ultrasonic scanning detection procedure. In addition, the external force source can also be a pushing force source to provide a pushing force F2 and press the object 100. The pushing force source can be any object capable of providing a one-time or continuous pressing force, such as a pushing assembly. By pressing, the gas between the isolation assembly 50 and the object 100 can be removed, so that the isolation assembly 50 is tightly or conformally attached to the object 100. In other words, since the detection liquid 44 can apply a liquid weight to the object 100, the detection liquid 44 also belongs to a pushing force source.

[0097] Please refer to Figure 5 and Figure 6 and please refer to the other drawings shown in the drawings,Figure 5 FIG. 2 shows a cross-sectional view of the ultrasonic scanning microscope device 10 of the present application with the isolating component 50 fixedly covering the detection probe 42. Figure 6 FIG. 3 shows a cross-sectional view of the ultrasonic scanning microscope device 10 of the present application with the isolating component 50 expandably covering the detection probe 42. In the second embodiment, the isolating component 50 is used to cover the detection probe 42, so as to avoid the contact between the object 100 and the detection liquid 44. Therefore, the object 100 can be located in a non-liquid environment (e.g., an atmospheric environment or a gaseous environment), and the detection probe 42 of the ultrasonic scanning microscope 40 can be located in a liquid environment (e.g., water) provided by the detection liquid 44.

[0098] For example, the isolating component 50 is a bag. The detection liquid 44 is filled in the interior of the isolating component 50 to provide the liquid environment, and the detection probe 42 is immersed in the detection liquid 44 in the isolating component 50. The object 100 is located outside the isolating component 50 and in the non-liquid environment (i.e., not in contact with the detection liquid 44). The outer surface 52 of the isolating component 50 (the bag) is attached to the object 100. Therefore, in the ultrasonic scanning detection procedure of the second embodiment, the object 100 can also be located in the non-liquid environment.

[0099] In the second embodiment, the isolating component 50 is not limited to fixedly or non-fixedly covering the detection probe 42 and the detection liquid 44. For example, the ultrasonic scanning microscope device 10 further comprises a fixing device 56 disposed on the isolating component 50, wherein the fixing device 56 (e.g., a fixed fixing ring) selectively fixes the isolating component 50 to at least one end portion 43 of the detection probe 42 (as shown in FIG. 2), which is helpful for small-range scanning, facilitates the measurement of a small area of multiple samples (i.e., multiple objects 100), or the fixing device 56 (e.g., an expandable fixing bracket) can expand the isolating component 50 into a container 55 filled with the detection liquid 44 (as shown in FIG. 3), which is used to provide the above-mentioned liquid environment, so that the detection probe 42 can move in the container 55, which is helpful for large-range scanning, facilitates the measurement of a large area of a single sample (i.e., a single object 100). Figure 5 Figure 6 Therefore, the ultrasonic scanning microscope 40 can provide ultrasonic waves penetrating through the detection liquid 44 and the isolating component 50 attached to the object 100 by the detection probe 42, and receive the ultrasonic waves, so as to perform the ultrasonic scanning detection procedure on the object 100 on the stage 20.

[0100] ​The utility model discloses further can selectivity by outside force F make the outside surface 52 of isolation component 50 more closely adhere to the whole area or at least one partial area of the object 100 to be measured, for example adhere to the whole object 100 to be measured or adhere to partial object 100 (such as, measurement area 110). The outside force F can be, for example, disposable or continuous suction, thrust and / or other type of force. The ultrasonic scanning microscope device 10 of the utility model can selectivity further include outside force supply source 60, to provide the above-mentioned outside force F. For example, the outside force supply source 60 can be, for example, a suction device, to provide suction as outside force. The suction device removes the gas (such as air) between the isolation component 50 and the object 100 to be measured, so that the isolation component 50 adheres (for example, closely or conformally adheres) to the measurement area 110 of the object 100 to be measured. Taking the suction as the outside force F as an example, the utility model can, for example, place the object 100 to be measured in the empty treatment tank 70, that is, place the object 100 to be measured in the inside of the treatment tank 70 not filled with detection liquid 44, and adhere the outside surface 52 of the isolation component 50 to the treatment tank 70 and / or the object 100 to be measured, and then, for example, remove the gas between the object 100 to be measured and the isolation component 50 by the suction device, thereby making the isolation component 50 adhere (for example, closely or conformally adhere) to the measurement area 110 of the object 100 to be measured. The outside force supply source 60 can also be a thrust source (for example, a push rod or even the detection liquid 44 itself belongs to a thrust source), to provide thrust.

[0101] Please refer to Figure 7 And please refer to the other drawings shown, in the third embodiment, the utility model uses the isolation component 50 (such as bag body) to cover the detection liquid 44, to avoid the object 100 to contact the detection liquid 44, wherein the object 100 is located in the non-liquid environment (that is, not contact the detection liquid 44), the detection probe 42 of ultrasonic scanning microscope 40 is selectivity located in the non-liquid environment or liquid environment. In the ultrasonic scanning detection procedure, the utility model can place the isolation component 50 covered with detection liquid 44 on the object 100 to be measured, and then place the detection probe 42 of ultrasonic scanning microscope 40 on the isolation component 50 (bag body). Also, in the third embodiment, the utility model makes the two opposite outside surfaces 52 of the isolation component 50 (bag body) adhere to the object 100 to be measured and the detection probe 42 respectively. In this way, the ultrasonic scanning microscope 40 can provide ultrasonic waves through the detection liquid 44 and the isolation component 50 via the detection probe 42, to carry out ultrasonic scanning detection procedure on the object 100 to be measured on the stage 20.

[0102] In the same manner as the first and second embodiments, the isolation assembly 50 can be attached to the entire or at least a portion of the test object 100, such as the entire test object 100 or a portion of the test object 100 (e.g., the measurement area 110), by an external force F. The external force F can be, for example, a one-time or continuous suction force, pushing force, or other type of force. In addition, the isolation assembly 50 can be attached to the detection probe 42 by the external force F. However, since the detection probe 42 is less likely to be affected by the detection liquid 44, the isolation assembly 50 can also be provided with the detection liquid 44 between the outer surface 52 of the isolation assembly 50 and the detection probe 42, such as by dripping the detection liquid 44 between the outer surface 52 of the isolation assembly 50 and the detection probe 42, or by performing an ultrasonic scanning detection procedure in the processing tank 70 filled with the detection liquid 44, so that the detection liquid 44 is automatically filled between the outer surface 52 of the isolation assembly 50 and the detection probe 42, thereby facilitating the measurement of a small area of multiple samples (i.e., multiple test objects 100) or a large area of a single sample (i.e., a single test object 100).

[0103] Since the test object 100 often has uneven surfaces and imperfect horizontal surfaces, when the test object 100 has an inclination angle, the ultrasonic image beyond the focal length range of the detection probe 42 of the ultrasonic scanning microscope 40 will be out of focus, and when the height difference of the test object 100 is greater than the focal length range, the ultrasonic image will also be out of focus.

[0104] Therefore, the platform 20 is a movable platform, such as a bearing platform with functions of lifting, steering, translation, inclination adjustment, level adjustment, and / or straightness adjustment. Please refer to Figures 8 to 10 and please refer to other figures, the platform 20 of the present application can selectively include at least one adjustment device 24, the platform 20 can be placed at any position by the adjustment device 24, such as being placed at the bottom of the processing tank 70 (e.g., as shown in Figure 9 and Figure 9 ), or being hung on the processing tank 70 (e.g., as shown in Figure 8 ), or being placed on any workbench, wherein the number of adjustment devices 24 is, for example, one or more, for adjusting the height and / or inclination angle of at least one side of the test object 100 on the platform 22 of the platform 20.

[0105] The adjustment device 24 is not limited to a manual or electric adjustment assembly, and is not limited to a hand-controlled or electric-controlled electric adjustment assembly, which can operate according to a manual control or an electronic control command. Moreover, the adjustment device 24 can be, for example, a single-axial or multi-axial adjustment assembly 25, such as a screw rod lifting assembly. Taking the adjustment device 24 as an electric adjustment assembly, the adjustment device 24, for example, comprises at least one control module 26 on the adjustment assembly 25, which can operate according to a manual control or an electronic control command, to control the height and / or the inclination angle of at least one side of the test object 100 on the object platform 22 of the carrier 20. The adjustment device 24 of the present application is not limited to a specific form of adjustment assembly 25, which can be, for example, but not limited to, a conventional gear combined with a screw rod lifting assembly. According to different operations of the control module 26, the control module 26 can be, for example, driven by a manual driving assembly (such as a rotary knob) or an electric driving assembly (such as a motor), so as to drive the gear and the screw rod to rotate, thereby achieving the effect of adjusting the height and / or the inclination angle of at least one side of the test object 100 on the object platform 22 of the carrier 20.

[0106] For example, as shown in Figure 8 The adjustment device 24 of the present application can selectively have a hooking member 27, by which the adjustment device 24 and the carrier 20 connected and adjusted thereby can be hung in the tank 70, and the carrier 20 and the test object 100 carried thereby can be subjected to the above-mentioned adjustment operation in the detection liquid 44 in the tank 70.

[0107] Since the control module 26 needs to have a higher waterproof level if it is operated while being immersed in the detection liquid 44, if the carrier 20 is immersed in the detection liquid 44 during the ultrasonic scanning detection process, in order to avoid the control module 26 from contacting the detection liquid 44, the control module 26 is preferably located outside (i.e., above the liquid surface) the detection liquid 44, so that the waterproof level requirement is not increased. The adjustment device 24 of the present application can suspend the carrier 20 in the detection liquid 44 in the tank 70 by the hooking member 27, and the control module 26 can be located above the liquid surface of the detection liquid 44 in the tank 70, thereby reducing the waterproof level requirement. Alternatively, the adjustment device 24 of the present application can also be arranged at the bottom of the tank 70 and elevate the carrier 20 from the bottom of the tank 70 to be suspended, wherein the top end of the adjustment device 24 extends to the outside of the liquid surface of the detection liquid 44, so that the control module 26 arranged on the adjustment device 24 can be located above the liquid surface of the detection liquid 44, thereby reducing the waterproof level requirement.

[0108] Please participate Figure 11 and Figure 12 and please refer to the other drawings shown, Figure 11The cross-sectional view of the stage of the ultrasonic scanning microscope device of the present application comprises a plurality of combined expansion platforms. Figure 12 The top view of the stage of the ultrasonic scanning microscope device of the present application comprises a plurality of combined expansion platforms. For simplification, only partial structures are shown. Since the size of the processing tank 70 (e.g. a water tank) and the stage 20 used in various ultrasonic scanning detection procedures are not fixed, the structure of the ultrasonic scanning microscope device 10, such as the stage 20 and / or the adjusting device 24, cannot be easily put into the processing tank 70. Therefore, the stage 20 of the present application can be selectively designed in a spliced or assembled manner, for example, comprising a plurality of combined expansion platforms 22 for assembling the stage 20, and one or more of the combined expansion platforms 22' constitute the object platform 22 for placing the object 100 to be measured. By adjusting the number and size of the combined expansion platforms 22', the assembled stage 20 can adapt to the size of different processing tanks 70 (e.g. water tanks).

[0109] The present application can also adjust the combined expansion platforms 22' at other positions to adjust the flatness of the object platform 22 and the measurement area 110 of the object 100 thereon. Since only the measurement area 110 of the object 100 requires high-precision flatness, the present application does not need to make the surfaces of all the combined expansion platforms 22' constituting the stage 20 have the same high-precision flatness. In other words, the flatness of at least a first area 23a of the stage 20 of the present application is better than that of at least a second area 23b, wherein the first area 23a corresponds to the object platform 22 and / or the measurement area 110 of the object 100 to be measured placed on the object platform 22.

[0110] In addition, in the process of the conventional ultrasonic scanning detection procedure, additional positioning systems are needed to help users identify the position when the detection probe and other structures are moving. Moreover, traditionally, additional positioning systems are also needed to achieve the zoom function when adjusting the height of the stage.

[0111] The present application is based on the excellent surface measurement of optical detection technology and the excellent internal measurement of ultrasonic detection technology. Therefore, by combining the optical sensing device (e.g. CCD camera) and the ultrasonic scanning microscope 40 (e.g. detection probe 42), the present application can first perform the automatic optical detection surface detection procedure, and the side optical sensing device can be used for observation and positioning, such as image recognition, to achieve the positioning and anti-collision function.

[0112] For example, please refer to Figure 13 and 14 and please refer to other drawings,Figure 13 A cross-sectional view of the ultrasonic scanning microscope device with optical sensing devices is shown, wherein the position of the object under test is above the liquid surface. Figure 14 The ultrasonic scanning microscope device 10 of the present application can optionally further comprise at least one optical sensing device 80 for performing an automated optical inspection (AOI) procedure and / or a position detection procedure on the object under test 100 on the stage 20 above the detection liquid 44. The number of optical sensing devices 80 can be one or more. For example, in the case of more than one optical sensing device 80, a first one of the optical sensing devices 80 is disposed, for example, at a position where optical inspection can be performed (e.g., adjacent to the detection probe 42), and a second one of the optical sensing devices 80 is disposed, for example, at a position where position detection and anti-collision mechanism detection can be performed (e.g., above the side of the stage 20 and / or the object under test 100). In this way, the first one of the optical sensing devices 80 and the ultrasonic scanning microscope 40 respectively perform the AOI procedure and / or the ultrasonic scanning procedure on the object under test 100 before and / or after the object under test 100 with the isolation component 50 enters the detection liquid 44. The second one of the optical sensing devices 80 respectively performs the position detection procedure on the object under test 100 and / or the stage 20 to provide the position detection and anti-collision effect before and / or after the object under test 100 with the isolation component 50 enters the detection liquid 44. However, the present application is not limited thereto, and the AOI procedure and / or the position detection procedure described above can also be performed by a single optical sensing device 80.

[0113] For example, the position detection and anti-collision mechanism detection procedure of the present application includes, but is not limited to, the following steps: before the object under test 100 and the stage 20 enter the detection liquid 44, the optical sensing device 80 disposed on the side is used to, for example, perform image recognition on the object under test 100 to mark and position each object 120; the optical sensing device 80 disposed adjacent to the detection probe 42 is used to perform optical inspection of the surface of the measurement area 110 of the object under test 100; after the surface inspection is completed, the object under test 100, the stage 20, and the detection probe 42 are lowered below the liquid surface of the detection liquid 44 to perform the ultrasonic scanning procedure. During the lowering of the stage 20 and the detection probe 42, the optical sensing device 80 disposed on the side is simultaneously used to perform the position detection and anti-collision mechanism detection procedure; after the ultrasonic scanning procedure is completed, each component is returned to the initial position.

[0114] The optical sensing device 80 of the utility model can be used in a non-liquid environment (e.g. above the detection liquid 44) to perform optical detection and positioning and anti-collision mechanism detection on an object 120 in different medium environments (e.g. above and below the liquid surface). However, the optical image sensed by the optical sensing device 80 will have errors due to changes in the light incidence angle and the medium environment. Therefore, the utility model can also selectively perform an error correction program to correct the surface detection result of the automatic optical detection program and / or the positioning detection result of the positioning detection program according to changes in the medium environment (e.g. non-liquid environment / liquid environment) of the object 120.

[0115] In summary, the ultrasonic scanning microscope device of the utility model has the following advantages:

[0116] (1) The isolation component with waterproof effect is used to cover the measured object, the detection probe and / or the detection liquid, so that the measured object (e.g. electronic components) and the detection liquid (e.g. water) are isolated.

[0117] (2) The thickness of the isolation component does not affect the transmission of ultrasonic waves, the acoustic impedance of the isolation component is substantially similar to or the same as the acoustic impedance of the detection liquid, and the isolation component can be tightly or conformally attached to the surface of the measurement area of the measured object.

[0118] (3) The use of the isolation component to block the contact between the measured object and the detection liquid can effectively solve the problem that electronic components are not suitable for contacting the detection liquid, and at the same time can avoid the problem of time-consuming or high risk of dry processing.

[0119] (4) The stage is provided with an adjusting device to provide functions such as lifting, steering, translation, inclination adjustment, flatness adjustment and / or straightness adjustment.

[0120] (5) The adjusting device can be suspended or raised, so that the stage and the measured object carried thereby are suspended in the detection liquid, and the control module can be located outside the liquid surface, so that there is no need to improve the waterproof level requirement.

[0121] (6) The stage is spliced or connected by a plurality of combined expansion platforms, so that it can adapt to different sizes of processing tanks, and only the measurement area needs to have a high precision flatness, without the need for each part to have a high precision flatness, so that the ultrasonic scanning detection program can be performed.

[0122] (7) The combination of the optical sensing device and the ultrasonic scanning microscope can perform the automatic optical detection surface detection program and the ultrasonic scanning detection program above and below the liquid surface, and can provide positioning and anti-collision functions. The utility model uses conventional software and programs and improves the hardware to overcome the problems caused by the hardware in the prior art.

[0123] The above merely illustrates, but is not for limiting. Any equivalent modification or change, which is not departing from the spirit and category of the present application, should be included in the following claims.

Claims

1. An ultrasonic scanning microscope device, characterized by The ultrasonic scanning microscope comprises: a stage for holding at least one object to be measured; an ultrasonic scanning microscope having a detection probe; and at least one isolation component for providing an isolation state between the object to be measured and a detection liquid, wherein the ultrasonic scanning microscope provides an ultrasonic wave to penetrate through the detection liquid and the isolation component attached to the object to be measured via the detection probe, so as to perform an ultrasonic scanning detection procedure on the object to be measured on the stage.

2. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that The isolation component is a bag, the detection liquid is filled in the bag to provide a liquid environment, and the detection probe is immersed in the detection liquid in the bag, and the bag is attached to the object to be measured with an outside surface.

3. An ultrasonic scanning microscope device as claimed in claim 2, characterized in that A fixing device is further provided on the isolation component, wherein the fixing device fixes the isolation component to at least one end of the detection probe, or unfolds the isolation component to the liquid environment filled with the detection liquid, so that the detection probe is movably located in the liquid environment.

4. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that The isolation component is a bag, the object to be measured is wrapped in a non-liquid environment inside the bag, so that the bag is attached to the object to be measured with an inside surface, and the detection probe is located outside the bag and in a liquid environment provided by the detection liquid.

5. An ultrasonic scanning microscope device as claimed in claim 4, characterized in that A treatment tank is further provided, the detection liquid is located in the treatment tank to provide the liquid environment, and the object to be measured is immersed in the detection liquid in the treatment tank by the protection of the isolation component, so that the object to be measured and the detection liquid present the isolation state.

6. An ultrasonic scanning microscope device as claimed in claim 1, 2 or 4, characterized in that The isolation component is attached to all or part of the object to be measured by an external force.

7. An ultrasonic scanning microscope device as claimed in claim 6, characterized in that An external force supply source is further provided, which is a suction device for providing a suction force as the external force, and the suction device removes a gas between the isolation component and the object to be measured by suction, so that the isolation component is tightly or conformally attached to the object to be measured.

8. An ultrasonic scanning microscope device as claimed in claim 6, characterized in that An external force supply source is further provided, which is a push force source for providing a push force as the external force, and the push force source tightly or conformally attaches the isolation component to the object to be measured by applying the external force.

9. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that The acoustic impedance of the isolation component is approximately or identical to the acoustic impedance of the detection liquid.

10. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that The isolation component has a deformable structure.

11. An ultrasonic scanning microscope device as claimed in claim 1 or 10, characterized in that The isolation component comprises elastic material and / or stretchable material.

12. An ultrasonic scanning microscope device as claimed in claim 1 or 10, characterized in that The isolation component is a membrane structure made of a material selected from the group consisting of silica gel, rubber, plastic, and composite polymer.

13. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that The stage comprises at least one placement platform for holding the object to be measured.

14. An ultrasonic scanning microscope device as claimed in claim 13, characterized in that The stage comprises at least one adjustment device for adjusting the height and / or the inclination angle of at least one side of the object to be measured on the placement platform.

15. An ultrasonic scanning microscope device as claimed in claim 14, characterized in that The adjustment device of the stage comprises at least one control module for controlling the adjustment device to adjust the height and / or the inclination angle of at least one side of the object to be measured on the placement platform outside the detection liquid.

16. An ultrasonic scanning microscope device as claimed in claim 13, 14 or 15, characterized in that At least one treatment tank is further provided, and the stage is located in the treatment tank for holding the object to be measured, wherein the detection liquid is filled in the treatment tank to provide a liquid environment.

17. An ultrasonic scanning microscope device as claimed in claim 14 or 15, characterized in that The object platform of the carrier is suspended in the detection liquid by the adjustment device in a hanging or lifting manner.

18. An ultrasonic scanning microscope device as claimed in claim 16, characterized in that The carrier comprises a plurality of combined extension platforms, one or more of which constitute the object platform of the carrier, so as to adjust the size of the carrier according to the size of the processing tank.

19. An ultrasonic scanning microscope device as claimed in claim 18, characterized in that At least one first area of the carrier has a flatness better than that of at least one second area, the first area corresponding to a measurement area of the object platform and / or the object to be measured arranged on the object platform.

20. An ultrasonic scanning microscope device as claimed in claim 1, characterized in that At least one optical sensing device is further included to perform an automatic optical detection process and / or a positioning detection process on the object to be measured on the carrier above the detection liquid.

21. An ultrasonic scanning microscope device as claimed in claim 20, characterized in that The optical sensing device and the ultrasonic scanning microscope correspondingly perform the automatic optical detection process and / or the ultrasonic scanning detection process on the object to be measured before and / or after the object to be measured attached with the isolation component enters the detection liquid.

22. An ultrasonic scanning microscope device as claimed in claim 20 or 21, characterized in that The optical sensing device performs the positioning detection process on the object to be measured and / or the carrier before and / or after the object to be measured attached with the isolation component enters the detection liquid.

23. An ultrasonic scanning microscope device as claimed in claim 22, characterized in that The optical sensing device performs an error correction process according to the change of the medium environment in which the object to be measured and / or the carrier is located to correct a surface detection result of the automatic optical detection process and / or a positioning detection result of the positioning detection process.

24. An ultrasonic scanning microscope device as claimed in claim 22, characterized in that The detection probe of the ultrasonic scanning microscope has an ultrasonic transmitter for outputting the ultrasonic wave and an ultrasonic receiver for receiving the ultrasonic wave, the ultrasonic transmitter and the ultrasonic receiver being located on the same side or different sides of the object to be measured.

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