Laminating device for photomask and protective film

Abstract

The utility model discloses a photomask and protective film laminating device, which comprises a base, a photomask jig and a protective film jig, the top of the base is fixedly connected with a side frame I and a side frame II, and a sliding rod is fixedly connected between the side frame I and the side frame II. According to the application, the photomask and the protective film are installed in the corresponding jigs, and the raised line on the outer side of the photomask jig is inserted into the combination groove, so that the photomask jig is connected with the second base, the protective film jig is buckled to the outer side of the convex block through the clamping groove in the bottom, the protective film jig is connected with the first base, and the output end of the pushing piece is linked with the pushing block. The pushing block pushes the first base, the first base is linked with the second base until the second base abuts against the fixing plate, at the moment, the photomask and the protective film are attached, and after the specified time is maintained, the pushing piece drives the pushing block to reset, so that attachment of the photomask and the protective film is achieved, and the alignment accuracy of the photomask and the protective film is guaranteed while the working intensity of operators is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of light mask and protective film lamination, especially to a kind of light mask and protective film lamination device. BACKGROUND

[0002] Light mask is used in the template in photolithography process, and circuit pattern can be formed on wafer through it. It is usually made of high-purity quartz or glass, and a layer of chromium pattern is deposited on it as light shielding layer, and protective film is a thin film used to protect light mask from dust, particulate matter and other pollutants, and the cleanliness of light mask is crucial to maintain yield in semiconductor manufacturing process.

[0003] The existing light mask and protective film lamination mode is mostly combined with the corresponding fixture, and then laminated manually and kept for a certain time. In the specific implementation process, the operator has high working strength, and the two fixtures may slide relative to each other during manual pressing. Therefore, a light mask and protective film lamination device is needed to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the above problems and proposes a light mask and protective film lamination device.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A light mask and protective film lamination device includes a base, a light mask fixture and a protective film fixture. The base top is fixedly connected with side frame one and side frame two. The side frame one and side frame two are fixedly connected with a slide rod. The slide rod outer wall is fixedly connected with a fixed plate. The slide rod outer wall is slidingly connected with base one and base two. Base two and light mask fixture are detachably connected with base one and protective film fixture. The side frame two outer side is provided with a pushing assembly for pushing base one and base two.

[0007] Preferably, the pushing assembly includes a pushing piece fixedly connected with the side frame two outer wall, and the pushing piece output end is fixedly connected with a pushing block.

[0008] Preferably, the pushing piece outer wall is fixedly connected with a support seat, and the support seat horizontal end is fixedly connected with the base top through a locking rod.

[0009] Preferably, the light mask fixture outer wall is fixedly connected with a convex strip, and the convex strip outer wall is inserted into the base two inner part through a combination groove.

[0010] Preferably, an outer wall of the base is fixedly connected with a protruding block, the bottom of the protective film jig is buckled with the protruding block through a clamping groove, and the outer side of the protective film jig is fixedly connected with an epitaxial block.

[0011] Preferably, the top of the base is fixedly connected with a track, and the bottom of the base one and the base two are fixedly connected with sliding seats which are in sliding connection with the track.

[0012] As described above, the present application has the following advantages:

[0013] 1. In the present application, the photomask and the protective film are installed in the corresponding jigs, the protruding strip on the outer side of the photomask jig is inserted into the combination groove, thereby realizing the connection between the photomask jig and the base two, the protective film jig is buckled to the outer side of the protruding block through the clamping groove in the bottom, thereby realizing the connection between the protective film jig and the base one, the output end of the pushing piece is linked with the pushing block, the pushing block pushes the base one, the base one links the base two, and the base two abuts against the fixed plate, at this time, the photomask and the protective film are attached to each other, after maintaining for a specified time, the pushing piece drives the pushing block to reset, thereby realizing the attachment of the photomask and the protective film, reducing the working strength of the operator, and ensuring the accuracy of the alignment of the photomask and the protective film.

[0014] 2. In the present application, the outer side of the pushing piece is fixedly connected with a support seat, and the horizontal end of the support seat is fixed with the base through a locking rod, thereby realizing the auxiliary support of the pushing piece, further ensuring the position stability of the pushing piece, and thereby improving the stability of the attachment device of the photomask and the protective film. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 An overall structure schematic view is shown according to the embodiment of the present application;

[0016] Figure 2 A pushing block structure schematic view is shown according to the embodiment of the present application;

[0017] Figure 3 A protruding strip structure schematic view is shown according to the embodiment of the present application;

[0018] Figure 4 An epitaxial block structure schematic view is shown according to the embodiment of the present application.

[0019] LEGEND:

[0020] 1, base; 2, side frame one; 3, side frame two; 4, pushing piece; 5, sliding rod; 6, base one; 7, base two; 8, fixed plate; 9, photomask jig; 10, protective film jig; 11, pushing block; 12, track; 13, support seat; 14, protruding strip; 15, combination groove; 16, epitaxial block; 17, protruding block; 18, clamping groove. DETAILED DESCRIPTION

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-4 This utility model provides a technical solution:

[0023] A photomask and protective film bonding device includes a base 1, a photomask fixture 9 and a protective film fixture 10. The top of the base 1 is fixedly connected to a side frame 1 2 and a side frame 2 3. A slide rod 5 is fixedly connected between the side frame 1 2 and the side frame 2 3. A fixing plate 8 is fixedly connected to the outer wall of the slide rod 5. A base 1 7 and a base 2 6 are slidably connected to the outer wall of the slide rod 5. The base 2 7 and the photomask fixture 9 and the base 1 6 and the protective film fixture 10 are detachably connected. A pushing component for pushing the base 1 6 and the base 2 7 is provided on the outer side of the side frame 2 3.

[0024] The photomask and protective film are installed into the corresponding fixtures. The protrusion 14 on the outside of the photomask fixture 9 is inserted into the mating groove 15 to connect the photomask fixture 9 with the base 7. The protective film fixture 10 is snapped onto the outside of the protrusion 17 through the bottom slot 18 to connect the protective film fixture 10 with the base 6. The output end of the pusher 4 is linked to the pusher block 11, which pushes the base 6. The base 6 is linked to the base 7 until the base 7 abuts against the fixing plate 8. At this time, the photomask and protective film are in contact. After maintaining this for a specified time, the pusher 4 drives the pusher block 11 to reset, thus achieving the contact between the photomask and protective film. This reduces the workload of the operator while ensuring the accuracy of the alignment of the photomask and protective film.

[0025] It should be noted that both the photomask fixture 9 and the protective film fixture 10 here adopt existing technologies, and their specific structures will not be described in detail here.

[0026] Specifically, such as Figure 2 and Figure 4As shown, the pushing assembly comprises a pushing piece 4 fixedly connected with the outer wall of the side frame two 3, the output end of the pushing piece 4 is fixedly connected with a pushing block 11, the output end of the pushing piece 4 drives the pushing block 11, the pushing block 11 pushes the base one 6, the base one 6 drives the base two 7, the outer wall of the pushing piece 4 is fixedly connected with a support seat 13, the horizontal end of the support seat 13 is fixedly connected with the top of the base 1 through a locking rod, the outer side of the pushing piece 4 is fixedly connected with the support seat 13, and the horizontal end of the support seat 13 is fixed with the base 1 through a locking rod, so as to realize the auxiliary support of the pushing piece 4, further ensure the position stability of the pushing piece 4, and thus improve the stability of the use of the light mask and the film laminating device.

[0027] Specifically, as shown in the figure, Figure 2 With Figure 3 As shown, the outer wall of the light mask jig 9 is fixedly connected with a convex strip 14, the outer wall of the convex strip 14 is inserted into the inside of the base two 7 through a combination groove 15, the outer wall of the base one 6 is fixedly connected with a convex block 17, and the bottom of the film jig 10 is buckled with the convex block 17 through a clamping groove 18, so as to ensure the convenience of disassembly and assembly of the light mask jig 9 and the film jig 10, the outer side of the film jig 10 is fixedly connected with an epitaxial block 16, which further ensures the convenience of taking and placing the film jig 10, the top of the base 1 is fixedly connected with a track 12, and the bottom of the base one 6 and the base two 7 are fixedly connected with sliding seats which are slidingly connected with the track 12, which further ensures the stability of the movement of the base one 6 and the base two 7.

[0028] Working principle: install the light mask and the film into the corresponding jig, insert the convex strip 14 on the outer side of the light mask jig 9 into the combination groove 15, so as to realize the connection of the light mask jig 9 and the base two 7, buckle the film jig 10 to the outer side of the convex block 17 through the clamping groove 18 at the bottom, so as to realize the connection of the film jig 10 and the base one 6, the output end of the pushing piece 4 drives the pushing block 11, the pushing block 11 pushes the base one 6, the base one 6 drives the base two 7, until the base two 7 abuts against the fixed plate 8, at this time the light mask and the film are laminated, maintain for a specified time, the pushing piece 4 drives the pushing block 11 to reset, so as to realize the lamination of the light mask and the film, reduce the working strength of the operator, ensure the accuracy of the alignment of the light mask and the film, the outer side of the pushing piece 4 is fixedly connected with the support seat 13, the horizontal end of the support seat 13 is fixed with the base 1 through a locking rod, so as to realize the auxiliary support of the pushing piece 4, further ensure the position stability of the pushing piece 4, and thus improve the stability of the use of the light mask and the film laminating device.

[0029] The foregoing description of the embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A photo mask and pellicle laminating device, comprising a base (1), a photo mask fixture (9) and a pellicle fixture (10), characterized in that, The base (1) top fixedly connected with side frame one (2) and side frame two (3), the side frame one (2) and side frame two (3) between fixedly connected with slide rod (5), the slide rod (5) outer wall fixedly connected with fixed plate (8), the slide rod (5) outer wall slidingly connected with base one (6) and base two (7), the base two (7) and photomask fixture (9) and base one (6) and film protection fixture (10) are all detachably connected, and the outer side of the side frame two (3) is provided with a pushing assembly for pushing base one (6) and base two (7).

2. The photomask and pellicle lamination apparatus of claim 1, wherein, The pushing assembly comprises a pushing member (4) fixedly connected with the outer wall of the side frame two (3), and the output end of the pushing member (4) is fixedly connected with a pushing block (11).

3. The photomask and pellicle attachment apparatus of claim 2, wherein, The outer wall of the pushing member (4) is fixedly connected with a support seat (13), and the horizontal end of the support seat (13) is fixedly connected with the top of the base (1) through a locking rod.

4. The photomask and pellicle attachment apparatus of claim 3, wherein, The outer wall of the photomask fixture (9) is fixedly connected with a convex strip (14), and the outer wall of the convex strip (14) is inserted into the inside of the base two (7) through a combination groove (15).

5. The photomask and pellicle attachment apparatus of claim 4, wherein, The outer wall of the base one (6) is fixedly connected with a convex block (17), the bottom of the film protection fixture (10) is buckled with the convex block (17) through a clamping groove (18), and the outer side of the film protection fixture (10) is fixedly connected with an epitaxial block (16).

6. The photomask and pellicle attachment apparatus of claim 5, wherein, The top of the base (1) is fixedly connected with a track (12), and the bottom of the base one (6) and the base two (7) are fixedly connected with a sliding seat slidably connected with the track (12).

Images