Gas flow controller

Abstract

The utility model provides a gas flow controller which comprises a base, one side of the base is provided with a counter bore used for containing a flow divider, and the counter bore is internally provided with a first test through hole and a second test through hole which penetrate through the top face of the base; the flow divider comprises a first limiting piece, a flow dividing column and a plurality of flow blocking strips circumferentially arranged on the periphery of the flow dividing column, an airflow channel is formed between every two adjacent flow blocking strips, one end of the first limiting piece is arranged on the end face away from the air inlet connector, the air inlet connector is connected with the counter bore in a sealed mode, and the end face, close to the base, of the air inlet connector abuts against one end of the flow divider. The other end of the first limiting piece abuts against the bottom face of the counter bore. Wherein the first test through hole and the axis projection of the first test through hole are located in the same air flow channel. By optimizing the airflow path and the position of the test through hole, it is ensured that different gases can keep consistent performance and precision when passing through, and therefore the requirements for different gas characteristics and flow ranges are met.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of gas control, and particularly relates to a gas flow controller. BACKGROUND

[0002] With the continuous expansion and deepening of the industrial field, especially the rapid development of the semiconductor manufacturing industry, the demand for gas flow controllers is increasing, and the requirements are becoming more and more strict. In semiconductor processing, accurate control of gas flow is directly related to product quality and production efficiency, so the gas flow controller not only needs to have very high measurement accuracy, but also needs to ensure excellent operation repeatability.

[0003] In order to meet these stringent requirements, improving the consistency of the gas flow controller has become the key. The large number of splitters in the existing gas flow controller leads to a complicated installation process of the gas flow controller, resulting in poor consistency. SUMMARY

[0004] In view of the above problems of the prior art, the purpose of the present application is to provide a splitter and a gas flow control device to solve the problem of low flow control precision in the prior art.

[0005] In order to solve the above technical problems, the specific technical solutions of the present application are as follows:

[0006] On the one hand, the present application provides a gas flow controller, comprising:

[0007] a base, one side of the base is formed with a counterbore for accommodating a splitter, the counterbore is internally formed with a first test through hole and a second test through hole penetrating the top surface of the base;

[0008] the splitter, comprising: a first limiting piece, a splitter column and a plurality of flow blocking strips circumferentially arranged on the outer periphery of the splitter column, a gas flow channel is formed between adjacent two flow blocking strips, one end of the first limiting piece is arranged at the end face away from the gas inlet connector, wherein the outer diameter of the first limiting piece is smaller than the outer diameter of the splitter column;

[0009] a gas inlet connector, in sealing connection with the counterbore, the end face of the gas inlet connector close to the base abuts one end of the splitter, and the other end of the first limiting piece abuts the bottom surface of the counterbore;

[0010] Wherein, the axis of the first test through hole and the first test through hole is projected in the same gas flow channel.

[0011] On the one hand, the present application provides a gas flow controller, comprising:

[0012] A base, one side of which is formed with a counterbore for accommodating a flow divider, the counterbore is internally formed with a circular ring-shaped step surface, the counterbore is internally formed with a first test through hole and a second test through hole penetrating the top surface of the base;

[0013] The flow divider comprises a second limiting piece, a flow dividing column and a plurality of flow blocking strips circumferentially arranged on the outer periphery of the flow dividing column, a gas flow channel is formed between two adjacent flow blocking strips, and the second limiting piece is arranged on the flow blocking strip close to the step surface;

[0014] An air inlet connector is sealingly connected with the base, one end of the air inlet connector close to the end surface of the base abuts against one end of the flow divider, and the second limiting piece abuts against the step surface of the counterbore;

[0015] The axis of the first test through hole and the second test through hole is projected on the same gas flow channel.

[0016] Optionally, the axial length of the flow dividing column is smaller than the length of the flow blocking strip, and the end surface of the flow dividing column close to the air inlet connector is located between the two end surfaces of the flow blocking strip, so that a first cavity is formed between the air inlet connector and the end surface of the flow dividing column close to the air inlet connector.

[0017] Optionally, the axial length of the flow dividing column is smaller than the length of the flow blocking strip, and the two end surfaces of the flow dividing column are both located between the two end surfaces of the flow blocking strip, so that a first cavity is formed between the air inlet connector and the end surface of the flow dividing column close to the air inlet connector, and a second cavity is formed between the end surface of the flow dividing column away from the air inlet connector and the plane where the step surface is located.

[0018] Optionally, the flow divider further comprises a plurality of first limiting claws, the plurality of first limiting claws are circumferentially arranged on the end surface of the flow dividing column close to the air inlet connector, and a first guide flow channel for gas flow is formed between adjacent first limiting claws, wherein the first limiting claws are used for abutting against the air inlet connector.

[0019] Optionally, the limiting piece is a limiting column or a plurality of third limiting claws.

[0020] Optionally, the flow divider further comprises a plurality of second limiting claws, the plurality of second limiting claws are circumferentially and spacedly arranged on the end surface of the flow blocking strip away from the air inlet connector, wherein the second limiting claws are used for abutting against the step surface.

[0021] Optionally, the first limiting claw comprises a cross section away from the center of the flow dividing column, and the cross section is spaced apart from the outer periphery of the flow dividing column by a preset distance.

[0022] Optionally, the counterbore is further formed with an air outlet hole penetrating through the top surface of the base, and an axial projection of the air outlet hole is located on the limiting member.

[0023] Optionally, the counterbore is further formed with an air outlet hole penetrating through the top surface of the base, and an axial projection of the air outlet hole is located on the limiting member.

[0024] With the above technical solutions, the implementation of the embodiments of the present specification ensures uniform distribution of airflow by forming a counterbore on one side of the base and arranging a flow divider inside the counterbore. The airflow channels between the flow divider column and the multiple circumferentially arranged flow blocking strips enable uniform dispersion of airflow, reducing turbulence and pressure loss. In addition, the axial projections of the first test through hole and the second test through hole are located in the same airflow channel, ensuring consistency and accuracy of the measurement points, while accurately monitoring airflow parameters, thereby achieving more precise flow control. The air inlet connector is sealingly connected to the counterbore, ensuring that the airflow does not leak, while ensuring that the airflow can be evenly distributed in each airflow channel after entering. The end surface of the air inlet connector near the base abuts one end of the flow divider, while the other end of the flow divider abuts the bottom surface of the counterbore, ensuring the fixity and stability of the airflow path, avoiding airflow fluctuations caused by vibration or pressure changes. Further, the airflow channels formed between adjacent two flow blocking strips ensure smooth flow of airflow, reducing turbulence and pressure loss. This helps to improve the efficiency of the entire system and reduce energy consumption. The design of the flow divider enables uniform distribution of airflow to each flow channel, reducing the formation of local high and low pressure areas, further improving the stability and response speed of the system. The gas flow controller provided in the present embodiment is suitable for various gases (such as air, nitrogen, etc.), and through the optimized airflow path and test through hole position, it ensures that different gases can maintain consistent performance and accuracy when passing through, thereby adapting to the needs of different gas characteristics and flow ranges.

[0025] To make the above and other purposes, features and advantages of the present text more obvious and easy to understand, the following describes a preferred embodiment, and the accompanying drawings are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments or prior art described herein, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present text, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0027] Figure 1 Fig. 1 shows a structural schematic diagram of a flow divider according to an embodiment of the present text;

[0028] Figure 2 Fig. 1 shows a structural schematic diagram of a flow divider according to an embodiment of the present text;

[0029] Figure 3 A structural schematic diagram of another shunt according to embodiments herein is shown;

[0030] Figure 4 A perspective structural schematic diagram of another shunt according to embodiments herein is shown;

[0031] Figure 5 A structural schematic diagram of yet another shunt according to embodiments herein is shown;

[0032] Figure 6 A structural schematic diagram of a base according to embodiments herein is shown;

[0033] 11 - stepped surface, 12 - first test through hole, 13 - second test through hole, 14 - air outlet hole;

[0034] 21 - shunt column, 22 - flow barrier, 23 - first limit claw, 241 - limit column, 242 - third limit claw, 25 - air flow channel; DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments herein will be described clearly and completely below with reference to the drawings in the embodiments herein. Obviously, the described embodiments are only part of the embodiments herein, rather than all the embodiments. Based on the embodiments herein, all other embodiments obtained by a person of ordinary skill in the art without creative work should fall within the scope of protection herein.

[0036] It should be noted that the terms "first", "second", and the like in the description and claims herein and the above drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments herein described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, device, product, or apparatus that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to the process, method, product, or apparatus.

[0037] Existing gas flow controllers are widely used in various gas environments. However, in the production process, these controllers are usually only calibrated with air. However, in actual applications, the controller can need to handle nitrogen, oxygen, or other different types of gas. This mismatch between calibration and actual use can lead to inaccurate control, especially when the calibrated flow-voltage response curve exhibits nonlinearity.

[0038] To solve the above problems, the embodiment of the present application provides a gas flow controller, as shown in Figures 1-4 comprises:

[0039] a base, one side of the base is formed with a counterbore for accommodating a flow divider, and a first test through hole 12 and a first test through hole 13 penetrating the top surface of the base are formed inside the counterbore;

[0040] Specifically, the base can be a cuboid, and a counterbore for placing the flow divider can be formed on the end face in the length direction, the shape of the counterbore is consistent with the shape of the flow divider, that is, the shape of the flow divider is cylindrical, and correspondingly, the shape of the counterbore is cylindrical, the inner diameter of the counterbore can be slightly larger than the outer diameter of the flow divider, so that the flow divider can be placed in the counterbore, and the flow divider 21 is placed in the counterbore, the diameter of the inner wall of the counterbore should be greater than the outer wall diameter of the flow divider, and the depth of the counterbore should be at least greater than the length of the flow divider, so that the flow divider 21 can be placed in the counterbore.

[0041] In order to check the flow of gas inside the base, a first test through hole 12 and a first test through hole 13 penetrating the top surface of the base are formed inside the counterbore, and the first test through hole 12 and the first test through hole 13 are respectively used to connect two ends of a thermal capillary tube, in actual use, the capillary tube between the first test through hole 12 and the first test through hole 13 can be heated, and then the gas flow is determined by detecting the temperature value change of the two ends of the capillary tube. The hole diameter, spacing and the like of the first test through hole 12 and the first test through hole 13 are standard sizes, which are not described here.

[0042] It can be understood that the top surface of the base is the surface located at the top when the base is placed normally, and the counterbore is located at one side in the length direction.

[0043] The flow divider comprises a limiting piece, a flow divider column 21 and a plurality of flow blocking strips 22 circumferentially arranged outside the flow divider column 21, a gas flow channel 25 is formed between two adjacent flow blocking strips 22, and one end of the limiting piece is arranged at the end surface away from the gas inlet joint, wherein the outer diameter of the limiting piece is smaller than the outer diameter of the flow divider column 21.

[0044] Specifically, the flow divider can be used for dividing the gas introduced by the gas inlet joint, so as to divide the large gas flow into a plurality of small gas flows or laminar flows with substantially the same flow. The flow divider in the present application can comprise a flow divider column 21 and a plurality of flow blocking strips 22 circumferentially arranged outside the flow divider column 21, and a gas flow channel 25 is formed between two adjacent flow blocking strips 22.

[0045] Among them, the flow divider column 21 can be a cylindrical shape same as the shape of the counterbore.

[0046] Specifically, the limiting member can be a limiting column 241 or a plurality of circumferentially arranged third limiting claws 242. Among them, the limiting column 241 can be a cylindrical shape, one end of the limiting column 241 can be arranged on the end face of the flow divider column 21 away from the air inlet joint, and the outer periphery of the limiting column 241 is formed inside the end face of the flow divider column 21 away from the air inlet joint, so that the limiting column 241 and the inner wall of the counterbore form a cavity structure that can collect the gas flowing through the gas flow channel 25.

[0047] In addition, the outer periphery of the flow divider column 21 can be formed with a plurality of flow barrier strips 22, and adjacent flow barrier strips 22, flow divider columns 21 and counterbore inner walls can form small gas flow or laminar gas flow channels 25. Among them, each gas flow channel 25 is a gas flow channel 25 through the flow divider column 21.

[0048] It should be noted that the spacing between adjacent flow barrier strips 22 can be different, that is, the cross section of different gas flow channels 25 can be different. The number of flow barrier strips 22 on the outer periphery of the flow divider column 21 can be set based on the gas flow rate. The greater the gas flow rate, the greater the number of flow barrier strips 22, and accordingly, the greater the number of gas flow channels 25. The shape of the gas flow channel 25 can be based on the confirmation of the flow barrier strip 22, and the preferred shape is circular.

[0049] The air inlet joint is sealingly connected with the counterbore, and the end face of the air inlet joint close to the base abuts one end of the flow divider, and the other end of the flow divider abuts the bottom surface of the counterbore.

[0050] Specifically, the air inlet joint is used to connect with the outside to access the gas to be controlled or detected, and the air inlet joint can be sealingly connected with the counterbore in the base by a detachable connection method such as a bolt. When the air inlet joint is sealingly connected with the counterbore, the end face of the air inlet joint close to the base abuts one end of the flow divider, and the other end of the flow divider abuts the bottom surface of the counterbore. Thus, the gas introduced by the air inlet joint is divided by the flow divider, and the divided gas flows into the first test through hole 12, thereby realizing flow detection. In order to ensure the detection of flow detection, the axis of the first test through hole 12 is projected on one of the gas flow channels 25 or the first test through hole 12 and the axis of the first test through hole 12 are projected on the same gas flow channel 25. That is, the axis of the first test through hole 12 is projected on one of the gas flow channels 25, and the axis of the first test through hole 12 is projected on the extension line of one of the gas flow channels 25; or the first test through hole 12 and the axis of the first test through hole 12 are both projected on the same gas flow channel 25. That is, the first test through hole 12 and the first test through hole 13 can be arranged on the top surface of the base, and the projection of the first test through hole 12 is located on the gas flow channel 25, but the first test through hole 13 can be located on the gas flow channel 25 or on the axial extension line of the gas flow channel 25.

[0051] The implementation of the embodiments of the present specification ensures uniform distribution of airflow by forming a counterbore on one side of the base and arranging a flow divider inside the counterbore. The airflow channel 25 between the flow dividing column 21 and the plurality of circumferentially arranged flow blocking strips 22 enables uniform dispersion of airflow, reducing turbulence and pressure loss. In addition, the axis projections of the first test through hole 12 and the first test through hole 13 are located in the same airflow channel 25, ensuring consistency and accuracy of the measurement points, while accurately monitoring the airflow parameters, thereby achieving more precise flow control. The gas inlet connector is sealingly connected to the counterbore, ensuring that the airflow does not leak, while ensuring that the airflow can be uniformly distributed in each airflow channel 25 after entering. The end of the flow divider abuts the end face of the base near the gas inlet connector, while the other end of the flow divider abuts the bottom surface of the counterbore, ensuring the stability and stability of the airflow path, avoiding airflow fluctuations caused by vibration or pressure changes. Further, the airflow channel 25 formed between the two adjacent flow blocking strips 22 ensures smooth airflow, reducing turbulence and pressure loss. This helps to improve the efficiency of the entire system and reduce energy consumption. The design of the flow divider enables uniform distribution of airflow to each flow channel, reducing the formation of local high and low pressure areas, further improving the stability and response speed of the system. The gas flow controller provided in the embodiment is suitable for various gases (such as air, nitrogen, etc.), and through the optimized airflow path and test through hole position, it ensures that different gases can maintain consistent performance and accuracy when passing through, thereby adapting to the needs of different gas characteristics and flow ranges. In addition, different airflow channels 25 can be formed on the flow divider in the present application to adapt to different flow ranges and improve the adaptability of the flow divider. In addition, the flow divider adopts an integrated structure design, which is convenient for maintenance.

[0052] On the basis of the above-mentioned embodiments, in one embodiment of the present specification, the axial length of the flow dividing column 21 is less than the length of the flow blocking strip 22, and the end face of the flow dividing column 21 near the gas inlet connector is located between the two end faces of the flow blocking strip 22, so that a first cavity is formed between the gas inlet connector and the end face of the flow dividing column 21 near the gas inlet connector.

[0053] Specifically, as shown in Figure 5 The gas inlet connector can be a tubular structure with a gas inlet formed in the middle. Accordingly, when the gas inlet connector abuts the flow divider, the length of the flow blocking strip 22 is greater than the axial length of the flow dividing column 21, so that the side of the flow blocking strip 22 near the gas inlet connector protrudes from the flow dividing column 21, thereby forming a first cavity between the gas inlet connector and the end face of the flow dividing column 21 near the gas inlet connector. The first cavity can collect gas and flow through the gas flow channel between adjacent flow blocking strips 22.

[0054] In practical applications, the length of the baffle strip 22 can be slightly greater than the depth of the counterbore. When the air inlet joint is installed, the air inlet joint can extrude the protrusion of the baffle strip 22 of the flow divider column 21, thereby avoiding the rotation of the flow divider in the counterbore. As can be seen, only a single flow divider is used to achieve fixation without the aid of other limiting devices, thereby reducing the number of components and the installation process.

[0055] In the embodiments of the present application, the axial length of the flow divider column 21 is set to be shorter than the baffle strip 22, which ensures that the airflow first passes through the first cavity after entering the counterbore and then is evenly distributed to each airflow passage 25. This helps to reduce initial turbulence, making the airflow more stable and uniform. In addition, the presence of the first cavity provides a buffer zone, allowing the airflow to transition more smoothly into each passage, reducing pressure loss caused by sudden narrowing or sharp turns.

[0056] In an optional embodiment, the flow divider further comprises a plurality of first limiting claws 23, which are circumferentially arranged on the end face of the flow divider column 21 near the air inlet joint, and a first guide passage for airflow is formed between adjacent first limiting claws 23, wherein the first limiting claws 23 are used to abut against the air inlet joint.

[0057] Specifically, the first limiting claws 23 can be uniformly distributed in a circular structure on the end face of the flow divider column 21 near the air inlet joint, and a first guide passage for airflow can be formed between adjacent first limiting claws 23, and the number of first limiting claws 23 is greater than or equal to three to ensure that each first limiting claw 23 is uniformly pressed by the air inlet joint. In order to reduce the influence of the first limiting claw 23 on the airflow, the axial cross-sectional view of the first limiting claw 23 can be a right trapezoid, the inclined surface (i.e., the surface on which the inclined side of the right trapezoid is located) of the first limiting claw 23 is located between the center and the outer periphery of the flow divider column 21, and its angular direction points to the center of the flow divider column 21. The side surface (i.e., the surface on which the height of the right trapezoid is located) of the first limiting claw 23 is located away from the center of the flow divider column 21. By setting the first limiting claw 23 to the above structure, the airflow can be guided through the inclined surface, and the area of the inclined surface is relatively small, thereby reducing the obstruction of the gas.

[0058] Further, the first limiting claw 23 includes a cross section away from the center of the flow divider column 21, and the cross section is spaced apart from the outer periphery of the flow divider column 21 by a predetermined distance.

[0059] Specifically, there can be a gap (predetermined distance) between the side surface (i.e., the cross section away from the center of the flow divider column 21) of the first limiting claw 23 and the outer periphery of the flow divider column 21, which allows the gas to flow smoothly to the airflow passage 25 without being obstructed by the first limiting claw 23. It should be noted that the predetermined distance should be greater than the width of the airflow passage 25, thereby better ensuring the flow of gas.

[0060] Specifically, the limiting member can also be a plurality of third limiting claws 242, which have the same structure and arrangement as the first limiting claw 23. The difference is that the third limiting claws 242 are arranged on different end faces of the shunt column 21.

[0061] On the basis of the above embodiment, a gas outlet hole 14 is further formed in the counterbore and penetrates the top surface of the base. The axial projection of the gas outlet hole 14 is located on the limiting member.

[0062] Specifically, a cavity structure is formed between the limiting member and the counterbore, and the gas outlet hole 14 can directly communicate with the cavity structure, thereby converging the gas flowing through the gas flow channels 25 into the gas outlet hole 14. The axial projection of the gas outlet hole 14 should be located on the limiting column 241.

[0063] Another aspect of the present specification provides a gas flow controller, as shown in Figure 5 and 6 comprising:

[0064] a base, one side of the base forming a counterbore for accommodating a shunt, a circular ring-shaped step surface 11 being formed in the counterbore, and a first test through hole 12 and a first test through hole 13 being formed in the counterbore and penetrating the top surface of the base;

[0065] the shunt, comprising a shunt column 21 and a plurality of flow blocking strips 22 circumferentially arranged on the outer periphery of the shunt column 21, and a gas flow channel 25 being formed between two adjacent flow blocking strips 22;

[0066] a gas inlet connector, which is sealingly connected to the base, and which abuts one end of the shunt near the end face of the base, and the other end of the shunt abuts the step surface 11 of the counterbore;

[0067] wherein the axial projections of the first test through hole 12 and the first test through hole 12 are located in the same gas flow channel 25.

[0068] It should be noted that the difference between the above-mentioned gas flow controller is that the counterbore is provided with a step surface 11, and the abutting mode of the corresponding step surface 11 is different, and the repeated interior is not described.

[0069] Specifically, the counterbore can be a cylinder with a bottom surface, and the inner diameter of the cylinder is smaller than the inner diameter of the cylinder near the gas inlet connector, thereby forming a step surface 11 between the two cylinders. The thickness of the step surface 11 should be smaller than the thickness of the flow blocking strip 22, and the thickness of the flow blocking strip 22 is the distance between the outer diameter and the shunt column 21, so as to ensure the outflow of the gas.

[0070] On the basis of the above-mentioned embodiment, the axial length of the flow distribution column 21 is less than the length of the flow barrier 22, and both end faces of the flow distribution column 21 are located between the two end faces of the flow barrier 22, so that a first cavity is formed between the air inlet joint and the end face of the flow distribution column 21 close to the air inlet joint, and a second cavity is formed between the end face of the flow distribution column 21 away from the air inlet joint and the plane where the stepped face 11 is located.

[0071] Specifically, the flow barrier 22 protrudes from the flow distribution column 21 on the side close to the stepped face 11, so that the flow distribution column 21, the stepped face 11 and the bottom face of the counterbore form a second cavity structure, which is similar to the first cavity structure, and will not be described in detail.

[0072] In an optional embodiment, the flow distributor further comprises a plurality of second limit claws, and the plurality of second limit claws are circumferentially spaced apart on the end face of the flow barrier 22 away from the air inlet joint, wherein the second limit claws are used to abut against the stepped face 11.

[0073] Specifically, the structure of the second limit claw is the same as that of the first limit claw 23 described above, and only the position and the number are different, wherein the number of the second limit claw can be equal to the number of the flow barrier 22, that is, the second limit claw corresponds to the flow barrier 22 one by one and is arranged on the side of the flow barrier 22 close to the stepped face 11. The number of the second limit claw can also be less than the number of the flow barrier 22, that is, a plurality of second limit claws are spaced apart on the side of different flow barriers 22 close to the stepped face 11. The flow distributor is abutted on the stepped face 11 through the second limit claw.

[0074] In an optional embodiment, the counterbore further forms an air outlet hole 14 penetrating the top face of the base, and the air outlet hole 14 communicates with the second cavity.

[0075] Specifically, the air outlet hole 14 can directly communicate with the second cavity, so as to converge the gas flowing through each air flow channel 25 into the air outlet hole 14. Wherein, the air outlet hole 14 can be located in the cylinder away from the air inlet joint.

[0076] It should also be understood that in the embodiments herein, the term "and / or" only describes the association relationship of the associated objects, which means that there can be three relationships. For example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in this paper generally represents that the front and rear associated objects are in an "or" relationship.

[0077] Those skilled in the art can clearly understand that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware, computer software or a combination of both. In order to clearly illustrate the interchangeability of hardware and software, the components and steps of each example have been described in the foregoing description in a general manner. Whether the functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. A person skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present disclosure.

[0078] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described system, device and unit can refer to the corresponding processes in the foregoing method embodiments, which will not be repeated here.

[0079] In several embodiments provided herein, it should be understood that the disclosed system, device and method can be implemented in other ways. For example, the above-described device embodiments are only schematic, for example, the division of units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another system, or some features can be omitted or not executed. In addition, the coupling or direct coupling or communication connection between the displayed or discussed units can be indirect coupling or communication connection through some interfaces, devices or units, and can also be electrical, mechanical or other forms of connection.

[0080] The units described as separate components can or can not be physically separated, and the components shown as units can or can not be physical units, i.e. they can be located in one place or distributed on multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the embodiments of the present disclosure.

[0081] The principles and implementation manners of the present disclosure are described herein by applying specific embodiments, and the above embodiment descriptions are only used to help understand the method and its core idea of the present disclosure; at the same time, for those skilled in the art, according to the idea of the present disclosure, there will be changes in specific implementation manners and application ranges; in view of the above, the content of the specification should not be understood as limiting the present disclosure.

Claims

1. A gas flow controller characterized by, The application relates to a base, a flow divider and an air inlet joint. The base is provided with a counterbore for accommodating the flow divider, the counterbore is internally provided with a first test through hole and a second test through hole penetrating through the top surface of the base; The flow divider comprises a first limiting piece, a flow dividing column and a plurality of flow blocking strips circumferentially arranged on the outer periphery of the flow dividing column, airflow flow channels are formed between two adjacent flow blocking strips, and one end of the first limiting piece is arranged on the end surface away from the air inlet joint. The air inlet joint is sealingly connected with the counterbore, the end surface of the air inlet joint close to the base abuts against one end of the flow divider, and the other end of the first limiting piece abuts against the bottom surface of the counterbore. The axis of the first test through hole and the second test through hole is projected on the same airflow flow channel.

2. A gas flow controller characterized by, The base is provided with a counterbore for accommodating the flow divider, the counterbore is internally provided with a circular annular stepped surface, the counterbore is internally provided with a first test through hole and a second test through hole penetrating through the top surface of the base; The flow divider comprises a second limiting piece, a flow dividing column and a plurality of flow blocking strips circumferentially arranged on the outer periphery of the flow dividing column, airflow flow channels are formed between two adjacent flow blocking strips, and the second limiting piece is arranged on the end surface of the flow blocking strip close to the stepped surface. The air inlet joint is sealingly connected with the base, the end surface of the air inlet joint close to the base abuts against one end of the flow divider, and the second limiting piece abuts against the stepped surface of the counterbore. The axis of the first test through hole and the second test through hole is projected on the same airflow flow channel. The axial length of the flow dividing column is smaller than the length of the flow blocking strip, and the end surface of the flow dividing column close to the air inlet joint is located between the two end surfaces of the flow blocking strip, so that a first cavity is formed between the air inlet joint and the end surface of the flow dividing column close to the air inlet joint.

3. The gas flow controller of claim 1 or 2, wherein, The axial length of the flow dividing column is smaller than the length of the flow blocking strip, and the two end surfaces of the flow dividing column are located between the two end surfaces of the flow blocking strip, so that a first cavity is formed between the air inlet joint and the end surface of the flow dividing column close to the air inlet joint, and a second cavity is formed between the end surface of the flow dividing column away from the air inlet joint and the plane where the stepped surface is located.

4. The gas flow controller of claim 2, wherein, The flow divider further comprises a plurality of first limiting claws, the plurality of first limiting claws are circumferentially arranged on the end surface of the flow dividing column close to the air inlet joint, and a first guiding flow channel for airflow is formed between two adjacent first limiting claws.

5. The gas flow controller of claim 1 or 2, wherein, The limiting piece is a limiting column or a plurality of third limiting claws.

6. The gas flow controller of claim 5, wherein, The flow divider further comprises a plurality of second limiting claws, the plurality of second limiting claws are circumferentially and spacedly arranged on the end surface of the flow blocking strip away from the air inlet joint, and the second limiting claws are used for abutting against the stepped surface.

7. The gas flow controller of claim 2, wherein, The first limiting claw comprises a cross section away from the center of the flow dividing column, and the cross section is spaced apart from the outer periphery of the flow dividing column by a preset distance.

8. The gas flow controller of claim 5, wherein, The counterbore is further internally provided with an air outlet hole penetrating through the top surface of the base, and the air outlet hole is in communication with the second cavity.

9. The gas flow controller of claim 4, wherein, ​ 10. The gas flow controller of claim 5, wherein, The sink hole is internally formed with an air outlet hole penetrating through the top surface of the base, and an axial projection of the air outlet hole is located on the limiting member.

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