Full-automatic spraying device of travelling crane

Abstract

The utility model discloses a full-automatic spraying device of a travelling crane, which relates to the technical field of semiconductor surface treatment, and comprises a door-shaped frame, two underframes, a water receiving tray, a rack plate and a limiting pulley, supports and a cross rod are arranged at the tops of the two underframes, a driving mechanism is connected between the two supports, a supporting frame and a pipeline support are mounted on the door-shaped frame, and the water receiving tray is arranged on the supporting frame. A water storage tank is arranged at the upper end of the pipeline support, two sets of spraying assemblies are symmetrically installed on the inner side of the supporting frame and located above the water receiving disc, and a hoisting assembly is further installed on the inner side of the door-shaped frame. The spraying assembly is used for thoroughly flushing the product, under the flushing effect, strong acid and strong alkali liquid medicine on the surface of the product is flushed away or diluted and does not react with the product violently, and the problem that the product cannot be cleaned in time in the process that the product is moved to the clear water tank from the liquid medicine tank, and the strong acid and strong alkali liquid medicine erodes the product is solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor surface treatment technology, specifically to a fully automatic overhead spraying device. The automatic spraying by the overhead vehicle effectively improves the product defects caused by the corrosion of the product by strong acid and alkali chemicals in the air during surface treatment, so as to meet the qualification requirements. Background Technology

[0002] Semiconductor surface treatment involves cleaning, anodizing, and electrochemical polishing; the chemicals used include strong acids and alkalis such as nitric acid, hydrofluoric acid, sulfuric acid, and sodium hydroxide; due to the extremely high requirements for product appearance and cleanliness in the semiconductor industry, automated crane equipment is required to reduce uncertainties in the processing and minimize personnel contact with strong acids and alkalis. However, the automated crane equipment is affected by factors such as motor speed and limit control, and cannot immediately lift the product from the chemical tank into clean water for cleaning. The automated crane involves three actions during the process:

[0003] 1. The overhead crane automatically lifts the product out of the medicine tank to the upper limit position;

[0004] 2. The crane automatically moves to the designated clean water washing tank;

[0005] 3. The crane automatically lowers to place the product into a clean water rinse for a certain period of time;

[0006] These three actions can be completed manually in just 3-5 seconds, but by automated crane, they take several times longer, 12-20 seconds. If the product cannot be cleaned in time, and because the reaction rate between the chemicals and the product in the air is stronger than the reaction rate in the tank, the automated crane will not be able to clean it in time, which will cause strong acid and alkali chemicals to corrode the product, resulting in many defects such as run marks, watermarks, corrosion spots, local discoloration, excessive corrosion, and dimensional deviations.

[0007] Therefore, this utility model provides a fully automatic sprinkler system for vehicles, which solves the problems mentioned above. Utility Model Content

[0008] To address the shortcomings of existing technologies, this utility model provides a fully automatic vehicle sprinkler system, which solves the problems mentioned in the background section.

[0009] To achieve the above objectives, this utility model is implemented through the following technical solution: a fully automatic sprinkler system for vehicles, including a gantry frame and a base frame symmetrically installed at both ends of the bottom of the gantry frame. A water receiving tray is connected between the two base frames. Both ends of the upper surface of the water receiving tray are provided with rack plates, and the front and rear ends of the water receiving tray are connected to limit pulleys through L-shaped brackets. A bracket is provided on the top of both base frames, and a crossbar is connected to the top of both brackets. A drive mechanism for driving the water receiving tray to move is connected between the two brackets.

[0010] The inner side of the gantry frame is also equipped with a support frame. The upper end of the support frame is rectangular and equipped with a pipe bracket. The upper end of the pipe bracket is located on one side of the gantry frame and a water storage tank is provided. Two sets of spray components are symmetrically installed on the inner side of the support frame above the water receiving tray.

[0011] The inner side of the portal frame is also equipped with a hoisting assembly for suspending and lifting the workpiece.

[0012] As a further technical solution of this utility model, the driving mechanism includes two mounting plates arranged inside the brackets. The lower end of the crossbar is rotatably connected to a rotating rod. Both ends of the rotating rod are rotatably connected to the two mounting plates. A driving gear is installed on the surface of the rotating rod corresponding to the two rack plates. A reducer is also arranged on the rotating rod near one of the driving gears. A driving motor is also connected to the lower end of the crossbar corresponding to the reducer. The output end of the driving motor is connected to the input end of the reducer, and the output end of the reducer is connected to the rotating rod.

[0013] As a further technical solution of this utility model, the two drive gears respectively mesh with the teeth on the surface of the rack plate, the rack plate is fixed to the water receiving tray, and the four limiting pulleys slide on the inner side of the two base frames respectively. The front end and rear end of the inner side of the base frame are respectively provided with a front limit sensor and a rear limit sensor.

[0014] As a further technical solution of this utility model, the spray assembly includes a spray pump installed inside the upper end of the support frame and located on the other side of the portal frame. The water inlet of the spray pump is connected to a pumping pipe, and the water outlet of the spray pump is connected to a water supply pipe. Both the pumping pipe and the water supply pipe are located inside the pipe support.

[0015] The other end of the water supply pipeline is connected to two main water distribution pipes via a T-junction. Each main water distribution pipe is connected to five branch water distribution pipes, and each branch water distribution pipe is equipped with multiple nozzles.

[0016] As a further technical solution of this utility model, the support frame is provided with a closed protective cover, the water storage tank is located inside the closed protective cover, the top of the water storage tank is provided with a water inlet, the water inlet extends out of the protective cover through a water inlet pipe, and the other end of the water pumping pipe extends to the bottom of the inner side of the water storage tank.

[0017] As a further technical solution of this utility model, the hoisting assembly includes a second drive motor installed at the top of the portal frame and a second rotating rod installed through a bearing seat. The output end of the second drive motor is connected to one end of the second rotating rod through a reducer. Both ends of the second rotating rod are also equipped with winding rollers. Each winding roller is wound with a connecting strip. One end of each of the two connecting strips extends through the portal frame to its inner side. The two connecting strips are connected together to two hoisting rods on the inner side of the portal frame. Both ends of each hoisting rod are connected with a hanger.

[0018] As a further technical solution of this utility model, the hoisting assembly also includes a lifting slide connected to both ends of each hoisting rod, and a lifting slide rail is provided on the inner side wall of the gantry frame corresponding to the lifting slide. A roller is connected to one side of each lifting slide, and the lifting slide is slidably connected to the lifting slide rail through the roller.

[0019] As a further technical solution of this utility model, lifting limit sensors are provided at the bottom and top of the inner sidewall of the portal frame, and a PLC control box is also provided at the bottom of the outer sidewall of the portal frame.

[0020] As a further technical solution of this utility model, one end of the water receiving tray is provided with a drain outlet, and the bottom of the drain outlet is connected to a drain pipe extending to the outside. The inner bottom of the water receiving tray is inclined at 10°-12° toward the drain outlet.

[0021] This utility model provides a fully automatic sprinkler system for vehicles, which has the following advantages compared with the prior art:

[0022] 1. This design provides a fully automatic spraying device for a traveling crane. By adding two sets of spraying components symmetrically distributed on the traveling crane, the product can be thoroughly rinsed after being lifted out of the chemical tank. Under the rinsing action, the strong acid and alkali chemicals on the product surface are washed away or diluted, and will not continue to react violently with the product. This avoids the problem of the product not being cleaned in time during the process of moving from the chemical tank to the clean water tank, which would cause the strong acid and alkali chemicals to corrode the product.

[0023] 2. This design presents a fully automatic overhead crane spraying device. By cooperating with the drive mechanism and the water receiving tray, the water receiving tray automatically moves to the bottom of the product after it is lifted out of the chemical tank. It works in conjunction with the spraying components to rinse the product, thus achieving water recovery and preventing water from falling into the chemical tank and affecting its quality. This design solves the problem of product defects caused by the automatic overhead crane not being able to enter the clean water tank for cleaning in time. Moreover, the fully automated operation meets the needs of the semiconductor industry. Attached Figure Description

[0024] Figure 1 A first-view diagram of a fully automatic sprinkler system for vehicles;

[0025] Figure 2 This is a second-view diagram of a fully automatic sprinkler system for vehicles.

[0026] Figure 3 This is a schematic diagram of the spraying components in a fully automatic sprinkler system for vehicles.

[0027] Figure 4 This is a schematic diagram of the drive mechanism in a fully automatic sprinkler system for vehicles.

[0028] Figure 5 This is a structural schematic diagram of a hoisting component in a fully automatic sprinkler system for vehicles.

[0029] Figure 6 This is another perspective view of the hoisting components in a fully automatic overhead sprinkler system.

[0030] In the diagram: 1. Portal frame; 11. Base frame; 12. Lifting slide rail; 2. Water receiving tray; 20. Front limit sensor; 21. Rack plate; 22. Drain pipe; 23. Mounting plate; 24. Drive gear; 25. Rotating rod one; 26. Limit pulley; 27. Drive motor one; 28. Crossbar; 29. ​​Bracket;

[0031] 3. Support frame; 31. Pipe support; 32. Sprinkler pump; 33. Pumping pipe; 34. Water supply pipe; 35. Main water pipe; 36. Branch water pipe; 37. Nozzle;

[0032] 4. Water storage tank; 41. Water inlet;

[0033] 5. Drive motor II; 51. Rotating rod II; 52. Winding roller; 6. PLC control box;

[0034] 7. Lifting rod; 71. Hanger; 72. Lifting slide; 73. Connecting conveyor belt; 74. Lifting limit sensor. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0036] Please see Figure 1-6 This utility model provides a technical solution for a fully automatic sprinkler system for a traveling vehicle: a fully automatic sprinkler system for a traveling vehicle, wherein the traveling vehicle can be driven to move horizontally between a chemical tank and a clean water tank, specifically including a gantry frame 1 and base frames 11 symmetrically installed at both ends of the bottom of the gantry frame 1. A water receiving tray 2 is connected between the two base frames 11. A drain outlet is provided at one end of the water receiving tray 2, and a drain pipe 22 extending to the outside is connected to the bottom of the drain outlet. The inner bottom of the water receiving tray 2 is inclined at 10°-12° toward the drain outlet, which can facilitate better drainage of the water receiving tray 2.

[0037] like Figure 2-4 As shown, rack plates 21 are provided at both ends of the upper surface of the water receiving tray 2, and the front and rear ends of the water receiving tray 2 are connected to limit pulleys 26 through L-shaped brackets. Supports 29 are provided on the top of both base frames 11, and a crossbar 28 is connected to the top of both supports 29. A drive mechanism for moving the water receiving tray 2 is connected between the two supports 29. The drive mechanism includes mounting plates 23 provided inside the two supports 29. A rotating rod 25 is rotatably connected to the lower end of the crossbar 28. The two ends of the rotating rod 25 are rotatably connected to the two mounting plates 23. Drive gears 24 are installed on the surface of the rotating rod 25 corresponding to the two rack plates 21. A speed reducer is installed near one of the drive gears 24 on the rod 25. A drive motor 27 is connected to the lower end of the crossbar 28 corresponding to the speed reducer. The output end of the drive motor 27 is connected to the input end of the speed reducer, and the output end of the speed reducer is connected to the rod 25. During operation, the drive motor 27 can be controlled by the PLC control box 6. The drive motor 27 drives the rod 25 to rotate, which in turn drives the two drive gears 24 to rotate synchronously. As a result, the two drive gears 24 will synchronously drive the two rack plates 21 to move. The two rack plates 21 drive the water receiving tray 2 to move back and forth inside the two base frames 11.

[0038] Two drive gears 24 mesh with the teeth on the surface of the rack plate 21. The rack plate 21 is fixed to the water receiving tray 2. Four limit pulleys 26 are arranged in pairs and slide on the inner side of the two base frames 11. When the water receiving tray 2 moves back and forth on the inner side of the two base frames 11, the limit pulleys 26 on the water receiving tray 2 will slide on the inner side of the base frame 11 to facilitate limiting the movement of the water receiving tray 2. The front end and rear end of the inner side of the base frame 11 are respectively provided with a front limit sensor 20 and a rear limit sensor. When the water receiving tray 2 moves to the front end or the rear end, the front limit sensor 20 and the rear limit sensor can be triggered to send a command to the PLC control box 6, which controls the drive mechanism to stop the drive of the water receiving tray 2.

[0039] A support frame 3 is installed inside the portal frame 1. A pipe support 31 is installed on the upper end of the support frame 3 in a rectangular shape. A water storage tank 4 is set on the upper end of the pipe support 31 on one side of the portal frame 1. A closed protective cover is set on the outside of the support frame 3. The closed protective cover is closed on all sides except the bottom, and a corresponding exhaust port is left on the top. The water storage tank 4 is located inside the closed protective cover. A water inlet 41 is opened on the top of the water storage tank 4. The water inlet 41 extends out of the protective cover through the water inlet pipe. The other end of the water pumping pipe 33 extends to the bottom of the inner side of the water storage tank 4. The water storage tank 4 is of, but not limited to, 200L. It should be noted that an electronic level gauge is also installed inside the water storage tank 4. It is connected to the PLC control box 6. When the water level in the water storage tank 4 is low, an early warning can be issued to remind water replenishment.

[0040] like Figure 1 and 3 As shown, two sets of spray assemblies are symmetrically installed on the inner side of the support frame 3 above the water receiving tray 2. Each spray assembly includes a spray pump 32 installed inside the upper part of the support frame 3 and located on the other side of the portal frame 1. The inlet end of the spray pump 32 is connected to a pumping pipe 33, and the outlet end of the spray pump 32 is connected to a water supply pipe 34. Both the pumping pipe 33 and the water supply pipe 34 are located within the pipe support 31. The other end of the water supply pipe 34 is connected to two main water distribution pipes 35 via a tee pipe. Each main water distribution pipe 35 is connected to five branch water distribution pipes 36. Each branch pipe 36 is equipped with multiple nozzles 37. By controlling the operation of the spray pump 32, water can be drawn out of the water storage tank 4 and transported to the two main water distribution pipes 35 through the water supply pipe 34. The two main water distribution pipes 35 then transport the water to the branch pipes 36, and finally spray it out through the nozzles 37 to achieve the rinsing operation of the workpiece. It should be noted that the spray pump 32 can be, but is not limited to, a water pump with a flow rate of 4T / H, a head of 31m, and a power of 0.75KW. The spray angle of the nozzles 37 can be adjusted to 55° and the flow rate is 0.61 liters / minute.

[0041] The inner side of the portal frame 1 is also equipped with a hoisting assembly for suspending and lifting workpieces. The hoisting assembly includes a second drive motor 5 mounted on the top of the portal frame 1 and a second rotating rod 51 mounted via a shaft seat. The output end of the second drive motor 5 is connected to one end of the second rotating rod 51 via a reducer. Both ends of the second rotating rod 51 are also equipped with winding rollers 52. Each winding roller 52 is wound with a connecting strip 73. One end of each of the two connecting strips 73 extends through the portal frame 1 to its inner side, and the two connecting strips... The section of the belt 73 located inside the portal frame 1 is connected to two lifting rods 7. Each lifting rod 7 has a hanger 71 connected to both ends. The connecting belt 73 is a windable and corrosion-resistant traction belt. By controlling the operation of the second drive motor 5, it drives the second rotating rod 51 to rotate. The second rotating rod 51 drives the winding roller 52 to rotate, thereby winding or unwinding the connecting belt 73. In this way, the connecting belt 73 can drive the lifting rod 7 to rise or fall, realizing the raising or lowering of the workpiece.

[0042] The hoisting assembly also includes lifting slides 72 connected to both ends of each hoisting rod 7. A lifting slide rail 12 is provided on the inner side wall of the portal frame 1 corresponding to the lifting slides 72. Rollers are connected to one side of each lifting slide 72. The lifting slides 72 are slidably connected to the lifting slide rail 12 through the rollers. Lifting limit sensors 74 are provided at the bottom and top of the inner side wall of the portal frame 1. A PLC control box 6 is also provided at the bottom of the outer side wall of the portal frame 1. When the connecting conveyor belt 73 drives the hoisting rod 7 to rise or fall, the lifting slides 72 at both ends of the hoisting rod 7 can slide within the lifting slide rail 12 through the limit of the rollers to ensure the stability of the hoisting rod 7 when it rises or falls.

[0043] The working principle of this utility model is as follows: When the crane is above the medicine tank and the product hoisted by the hanger 71 is raised in the medicine tank, the PLC control box 6 controls the drive motor 5 to work in the forward direction, which drives the rotating rod 51 to rotate. The rotating rod 51 will drive the winding roller 52 to rotate, thereby winding the connecting tape 73. In this way, the connecting tape 73 can drive the hoisting rod 7 to rise and lift the product from the medicine tank. When the hoisting rod 7 rises to the specified height, the lifting slide 72 at one end of the hoisting rod 7 will trigger the lifting limit sensor 74 on the top of the inner side of the gantry frame 1, which will send a command to the PLC control box 6, which will control the drive motor 5 to stop working. At this time, the product is removed from the medicine tank.

[0044] Then the PLC control box 6 controls the drive mechanism to move the water tray 2 to the bottom of the product. When the water tray 2 moves to the designated position, the water tray 2 will trigger the rear limit sensor on the back of the base frame 11, which will send a signal to the PLC control box 6 to control the drive mechanism to stop working, that is, the water tray 2 moves into place.

[0045] Furthermore, the PLC control box 6 controls the spray pump 32 to operate, drawing water from the water storage tank 4 through the water pumping pipe 33, and then delivering it to two main water distribution pipes 35 through the water supply pipe 34. The two main water distribution pipes 35 then deliver the water to ten branch water distribution pipes 36, and finally spray it out through the nozzles 37. The large amount of pure water sprayed from different angles by multiple nozzles 37 thoroughly rinses the product. Under the rinsing action, the strong acid and alkali chemicals on the product surface are washed away or diluted, and will not continue to react violently with the product (the above actions are performed simultaneously, and the spraying time can be set automatically in the system according to the shape and size of the product, ranging from 30 seconds to 60 seconds).

[0046] During the rinsing process, the crane will move towards the clean water tank. When it moves above the clean water tank, the PLC control box 6 controls the drive mechanism to work. The drive mechanism controls the water receiving tray 2 to move forward. After the water receiving tray 2 triggers the front limit sensor 20, the PLC control box 6 controls the drive mechanism to stop working, that is, the water receiving tray 2 moves into place.

[0047] Furthermore, the PLC control box 6 controls the drive motor 2 5 to work in reverse, causing it to drive the rotating rod 2 51 to rotate. The rotating rod 2 51 then drives the winding roller 52 to rotate, thereby releasing the connecting tape 73. As a result, the connecting tape 73 can drive the lifting rod 7 to descend. When the lifting slide 72 at one end of the lifting rod 7 triggers the lifting limit sensor 74 at the bottom of the inner side of the gantry frame 1, it will send a command to the PLC control box 6, thereby controlling the drive motor 2 5 to stop working. At this time, the product is just placed into the clean water tank. In addition, the spraying can continue or stop. After the spraying time reaches the preset time, the spray pump 32 stops working and the spraying stops. The crane automatically returns to the designated position.

[0048] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model are implemented according to conventional methods in the art, unless otherwise specified or limited.

Claims

1. A full-automatic spraying device for driving, comprising a door-shaped frame (1) and a bottom frame (11) symmetrically installed at both ends of the bottom of the door-shaped frame (1), characterized in that, Two said chassis (11) are jointly connected with a water pan (2), the upper surface of the water pan (2) is provided with a rack plate (21) at both ends, and the front and rear ends of the water pan (2) are connected with a limiting pulley (26) through an L-shaped support, two said chassis (11) are provided with a support (29) on the top, the top of two said supports (29) are jointly connected with a cross bar (28), and a driving mechanism for driving the water pan (2) to move is connected between two said supports (29). The inner side of the door-shaped frame (1) is also provided with a supporting frame (3), the upper end of the supporting frame (3) is provided with a pipeline support (31) in a rectangular shape, the upper end of the pipeline support (31) is provided with a water storage tank (4) on one side of the door-shaped frame (1), and two groups of spraying assemblies are symmetrically installed on the inner side of the supporting frame (3) above the water pan (2). The inner side of the door-shaped frame (1) is also provided with a hoisting assembly for suspending and hoisting workpieces.

2. A full-automatic spraying device for a vehicle traveling according to claim 1, characterized in that, The driving mechanism comprises two mounting plates (23) provided on the inner sides of the two supports (29), a rotating rod (25) is rotatably connected to the lower end of the cross bar (28), the two ends of the rotating rod (25) are rotatably connected with the two mounting plates (23), drive gears (24) are mounted on the surface of the rotating rod (25) corresponding to the two rack plates (21), a speed reducer is further arranged on the rotating rod (25) near one of the drive gears (24), a drive motor (27) is further connected to the lower end of the cross bar (28) corresponding to the speed reducer, the output end of the drive motor (27) is connected with the input end of the speed reducer, and the output end of the speed reducer is connected with the rotating rod (25).

3. A full-automatic spraying device for a vehicle traveling according to claim 2, characterized in that, Two said drive gears (24) are respectively engaged with the teeth on the surface of the rack plate (21), the rack plate (21) is fixed with the water pan (2), four said limiting pulleys (26) are respectively slid on the inner sides of two chassis (11), and a front limiting sensor (20) and a rear limiting sensor are respectively arranged on the inner side of the chassis (11) at the front end and the rear end.

4. The full-automatic spraying device for driving according to claim 1, characterized in that, The spraying assembly comprises a spraying pump (32) mounted on the inner side of the upper end of the supporting frame (3) and located on the other side of the door-shaped frame (1), a water suction pipeline (33) is connected to the water inlet end of the spraying pump (32), and a water delivery pipeline (34) is connected to the water outlet end of the spraying pump (32), and the water suction pipeline (33) and the water delivery pipeline (34) are located in the pipeline support (31). The other end of the water delivery pipeline (34) is connected with two water distribution main pipes (35) through a three-way pipe, five water distribution branch pipes (36) are communicated with each water distribution main pipe (35), and a plurality of nozzles (37) are arranged on each water distribution branch pipe (36).

5. A full-automatic spraying device for a vehicle according to claim 4, characterized in that, The outer side of the supporting frame (3) is provided with a closed protective cover, the water storage tank (4) is located in the closed protective cover, a water replenishment opening (41) is formed in the top end of the water storage tank (4), the water replenishment opening (41) extends out of the protective cover through a water inlet pipe, and the other end of the water suction pipeline (33) extends to the inner bottom of the water storage tank (4).

6. The full-automatic sprinkling device for driving according to claim 1, characterized in that, The lifting assembly comprises a driving motor two (5) arranged at the top of the door-shaped frame (1) and a rotating rod two (51) installed through an axle seat, the output end of the driving motor two (5) is connected with one end of the rotating rod two (51) through a speed reducer, both ends of the rotating rod two (51) are further provided with winding rollers (52), each winding roller (52) is wound with a connecting winding belt (73), one end of each connecting winding belt (73) extends to the inner side of the door-shaped frame (1) through the door-shaped frame (1), and two lifting rods (7) are jointly connected between the two connecting winding belts (73) on the inner side of the door-shaped frame (1), and both ends of each lifting rod (7) are connected with hangers (71).

7. A full-automatic spraying device for a vehicle according to claim 6, characterized in that, The lifting assembly further comprises lifting slides (72) connected with both ends of each lifting rod (7), the inner side wall of the door-shaped frame (1) is provided with lifting slide rails (12) corresponding to the lifting slides (72), one side of each lifting slide (72) is connected with a roller, and the lifting slide (72) is slidably connected in the lifting slide rail (12) through the roller.

8. A full-automatic spraying device for vehicle driving according to claim 1, characterized in that, The bottom end and the top end of the inner side wall of the door-shaped frame (1) are provided with lifting limit sensors (74), and the bottom end of the outer side wall of the door-shaped frame (1) is further provided with a PLC control box (6).

9. A full-automatic spraying device for a vehicle traveling according to claim 1, characterized in that, One end of the water pan (2) is provided with a water outlet, and the bottom of the water outlet is connected with a water drain pipe (22) extending to the outside, and the inner bottom of the water pan (2) is inclined to the water outlet by 10-12 degrees.

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