Intelligent transfer robot clamping jaw shared by baskets with different sizes for silicon wafers
By using clamping blocks with staggered positioning, the problem that grippers in existing technologies cannot adapt to silicon wafer baskets of different sizes and positions is solved, achieving stable gripping and efficient holding, and improving the practicality and efficiency of robot grippers.
Patent Information
- Application Number
- CN202422552054.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-10-22
AI Technical Summary
In existing technologies, robotic grippers require complex angle adjustments and cannot grasp different positions when gripping wafer carrier baskets of different sizes, resulting in a large footprint and low efficiency. In particular, existing technologies cannot efficiently adapt to wafer baskets of different sizes, which is a significant limitation.
By employing a clamping cylinder and an inner bottom clamping block with a staggered clamping block configuration, the clamping jaws can grip silicon wafer baskets at different angles and positions, improving practicality and efficiency.
By using clamping blocks with staggered positioning, stable gripping of silicon wafer baskets of different sizes and positions is achieved, improving the practicality and work efficiency of the robot gripper and avoiding complex angle adjustments.
Smart Images
Figure CN223743634U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of silicon wafer processing equipment, especially to a smart handling robot for silicon wafer different size basket shared clamping jaw. BACKGROUND
[0002] Prior art, application number: CN2017109612789, can be applicable to the robot clamping jaw of wafer bearing basket of different sizes, and the robot clamping jaw is changed through the angle of clamping to cooperate with the clamping of slice basket of different diameters, but the structure in the middle is adjusted through the shaft, and the driving unit is relatively complex, and the floor area is large, and the slice basket of different positions cannot be grabbed when the angle is adjusted, and the limitation is big.
[0003] Therefore, it is necessary to design a smart handling robot for silicon wafer different size basket shared clamping jaw to solve the above problems. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a smart handling robot for silicon wafer different size basket shared clamping jaw to overcome the above-mentioned deficiencies existing in the prior art.
[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:
[0006] A smart handling robot for silicon wafer different size basket shared clamping jaw, which comprises a mounting column, a clamping cylinder mounted at the end of the mounting column, and a clamping plate driven to shrink by the clamping cylinder and placed at both ends, characterized in that: a plurality of groups of mounting holes are arranged on the clamping plate, and an outer bottom clamping block is arranged at the bottom of the clamping plate; an outer side edge clamping block is arranged at the adjacent side of the bottom of the clamping plate, the outer bottom clamping block and the outer side edge clamping block are arranged perpendicularly, an inner bottom clamping block is further arranged at the bottom of the clamping plate, and an inner side edge clamping block is arranged at the adjacent side of the bottom of the clamping plate, the inner bottom clamping block and the inner side edge clamping block are both mounted on the clamping plate through mounting studs, the outer bottom clamping block and the inner bottom clamping block are on the same clamping plate surface, and the outer bottom clamping block and the inner bottom clamping block are arranged in a staggered manner, the outer side edge clamping block and the inner side edge clamping block are on the same clamping plate surface, and the outer side edge clamping block and the inner side edge clamping block are arranged in a staggered manner.
[0007] Preferably, the outer bottom clamping block is arranged outside the inner bottom clamping block, and the distance between the outer bottom clamping block and the clamping plate surface is less than that between the inner bottom clamping block and the clamping plate surface.
[0008] Preferably, the outer side edge clamping block is arranged outside the inner side edge clamping block, and the distance between the outer side edge clamping block and the clamping plate surface is less than that between the inner side edge clamping block and the clamping plate surface.
[0009] Preferably, the outer side edge clamping block, the outer bottom clamping block, the inner side edge clamping block and the inner bottom clamping block are provided with a profiling groove for limiting the basket side edge.
[0010] The beneficial effects of the present application are that the two ends of the clamping jaw are provided with clamping blocks to clamp the basket at different angle positions, improve the practicability, and two groups of clamping blocks with different lengths are provided and are arranged in a staggered manner to clamp the baskets with different diameters, and the two clamping blocks affect each other, and the clamping blocks do not need to be replaced, and the efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS
[0011] Fig. 1 It is a structural schematic view of the intelligent carrying robot for the common clamping jaw of the silicon wafer baskets with different sizes.
[0012] Fig. 2 It is a local enlarged view of the intelligent carrying robot for the common clamping jaw of the silicon wafer baskets with different sizes.
[0013] Fig. 3 It is a schematic view of the intelligent carrying robot for the common clamping jaw of the silicon wafer baskets with different sizes.
[0014] In the figure: 1, mounting column; 2, clamping cylinder; 3, clamping plate; 31, mounting hole; 4, outer bottom clamping block; 41, outer side edge clamping block; 5, inner bottom clamping block; 51, inner side edge clamping block; 6, mounting stud; 7, profiling groove. DETAILED DESCRIPTION
[0015] Referring to Figs. 1 to 3 An intelligent carrying robot for the common clamping jaw of the silicon wafer baskets with different sizes comprises a mounting column 1, a clamping cylinder 2 mounted at the end of the mounting column, and a clamping plate 3 driven to contract by the clamping cylinder and arranged at both ends.
[0016] A plurality of mounting holes 31 are arranged on the clamping plate, and an outer bottom clamping block 4 is arranged at the bottom of the clamping plate.
[0017] An inner bottom clamping block 5 is further arranged at the bottom of the clamping plate, and an inner side edge clamping block 51 is arranged at the adjacent side of the bottom of the clamping plate.
[0018] The outer bottom clamping block 4 and the inner bottom clamping block are on the same clamping plate surface, and the outer bottom clamping block 4 and the inner bottom clamping block are arranged in a staggered manner, the outer bottom clamping block 4 is arranged outside the inner bottom clamping block, and the distance of the outer bottom clamping block 4 from the surface of the clamping plate is smaller than that of the inner bottom clamping block;
[0019] The outer side edge clamping block 41 and the inner side edge clamping block 51 are on the same clamping plate surface, and the outer side edge clamping block 41 and the inner side edge clamping block 51 are arranged in a staggered manner, the outer side edge clamping block 41 is arranged outside the inner side edge clamping block 51, and the distance of the outer side edge clamping block 41 from the surface of the clamping plate is smaller than that of the inner side edge clamping block 51;
[0020] The outer side edge clamping block 41 and the outer bottom clamping block 4 are used for clamping a sheet basket with a large diameter, and the outer side edge clamping block 41 and the outer bottom clamping block 4 are used for clamping sheet baskets in different positions;
[0021] The inner side edge clamping block 51 and the inner bottom clamping block are used for clamping a sheet basket with a small diameter, and are used for clamping sheet baskets in different positions, so that clamping in two directions is realized; angle adjustment is not needed, and practicability is improved;
[0022] The outer side edge clamping block, the outer bottom clamping block, the inner side edge clamping block and the inner bottom clamping block are all provided with a profiling groove 7 for limiting the side edge of the sheet basket, the side edge of the sheet basket is arranged in the profiling groove, limiting is realized, and shaking and instability during clamping are prevented.
[0023] The utility model discloses the beneficial effect, the technical scheme in this utility model sets up the clamping block on the two ends of the clamping jaw, is used for clamping the sheet basket in different angle positions, improves practicability, sets up two groups of different length's clamping blocks simultaneously, and arranges in a staggered manner, is used for clamping the sheet basket of different diameters respectively, and the both influence each other, need not to change, improves the efficiency.
[0024] The above is only the preferred embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art in the utility model disclosed technical range, according to the utility model technical scheme and the utility model concept, equivalent replacement or change, all should be covered in the protection scope of the utility model.
Claims
1. A smart handling robot for sharing grippers of different size baskets for silicon wafers, comprising a mounting column, a clamping cylinder mounted at the end of the mounting column, and clamping plates driven to retract by the clamping cylinder and placed at both ends, characterized in that: A plurality of groups of mounting holes are arranged on the clamping plate, an outer bottom clamping block is arranged at the bottom of the clamping plate, an outer side edge clamping block is arranged at the adjacent side of the bottom of the clamping plate, the outer bottom clamping block and the outer side edge clamping block are arranged perpendicularly to each other, an inner bottom clamping block is further arranged at the bottom of the clamping plate, an inner side edge clamping block is arranged at the adjacent side of the bottom of the clamping plate, the inner bottom clamping block and the inner side edge clamping block are both mounted on the clamping plate through mounting studs, the outer bottom clamping block and the inner bottom clamping block are on the same clamping plate surface, and the outer bottom clamping block and the inner bottom clamping block are arranged in a staggered manner, the outer side edge clamping block and the inner side edge clamping block are on the same clamping plate surface, and the outer side edge clamping block and the inner side edge clamping block are arranged in a staggered manner.
2. The intelligent handling robot for sharing the gripper of different size baskets of silicon wafer according to claim 1, wherein: The outer bottom clamping block is arranged outside the inner bottom clamping block, and the distance of the outer bottom clamping block from the clamping plate surface is smaller than that of the inner bottom clamping block. 3.The smart handling robot for sharing the gripper of different size baskets of silicon wafer according to claim 1, wherein: The outer side edge clamping block is arranged outside the inner side edge clamping block, and the distance of the outer side edge clamping block from the clamping plate surface is smaller than that of the inner side edge clamping block.
4. The smart handling robot for sharing grippers of different size baskets for silicon wafers according to claim 1, wherein: The outer side edge clamping block, the outer bottom clamping block, the inner side edge clamping block and the inner bottom clamping block are all provided with a profiling groove for limiting the basket side edge.