Air draft structure of horizontal process tank
By optimizing the exhaust structure of the horizontal process tank and adopting an inclined cover plate and exhaust plate design, the problem of poor gas flow in the existing equipment was solved, thereby improving the product yield and pass rate.
Patent Information
- Application Number
- CN202423295610.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-27
AI Technical Summary
The existing horizontal chain wet processing equipment has a poor tank exhaust structure that results in poor gas flow, which prevents the chemical gas from being quickly replenished, affecting the surface morphology of silicon wafers and potentially contaminating the product.
A novel exhaust structure is designed, including an inclined cover plate and an exhaust plate, with air inlets and outlets evenly arranged. The acute angles α and β are calculated to optimize gas flow and prevent liquid dripping from contaminating the product.
It improves the yield and pass rate of products, and prevents the accumulation of chemical gases in the tank by optimizing gas flow, ensuring that the surface morphology of the product is not affected.
Smart Images
Figure CN223745197U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to photovoltaic technology field, concretely is a horizontal process tank exhaust structure. BACKGROUND
[0002] At present, the slot body exhaust structure of horizontal chain type wet process equipment used in the production process of solar cell piece is that round holes are punched at the cover plate of the slot body, air is introduced through the cover plate round hole, and air is extracted through the hole punched at the bottom of the air extraction pipe in the slot body to extract the drug solution gas generated in the product reaction process.
[0003] At present, the slot body exhaust structure of the equipment in the industry is that air is extracted through the air extraction pipe, air is introduced at the cover plate of the slot body, the overall gas flowability is poor, the drug solution gas cannot be quickly renewed and flows, the gas phase in the slot body can affect the surface morphology of the silicon wafer and affect the product yield, and the air extraction pipe wall and the bottom of the cover plate are prone to liquid accumulation and product pollution. INVENTION CONTENTS
[0004] The utility model solves the technical problem of overcoming the defects of the prior art and provides a horizontal process tank exhaust structure, which comprises a bottom plate, a side plate, a cover plate and a partition plate, a working cavity surrounded by the bottom plate, the side plate, the cover plate and the partition plate, and an overflow plate arranged between the bottom plate and the side plate.
[0005] The cover plate is inclined and forms an acute angle alpha with the horizontal line.
[0006] The side plate is provided with an air inlet hole in an array, and the horizontal height of the air inlet hole is higher than the height of the overflow plate.
[0007] An air extraction cavity surrounded by an air extraction plate is arranged at the connection between the partition plate and the cover plate, the air extraction plate is provided with an air extraction hole, and the upper end of the air extraction cavity is provided with an air outlet.
[0008] The horizontal height of the air extraction hole is higher than the horizontal height of the air inlet hole.
[0009] The air extraction plate is inclined and forms an acute angle beta with the horizontal line, and beta is greater than alpha.
[0010] The air inlet hole is strip-shaped and inclined upward on the side plate, so that the air inlet can more effectively act on the volatile drug solution above the liquid surface in the working cavity.
[0011] The working cavities are symmetrically arranged about the partition plate, the working cavities on both sides share one air extraction cavity, and the air extraction plates on both sides of the air extraction cavity correspond to the working cavities on both sides, respectively.
[0012] Compared with the prior art, the utility model has the advantages of:
[0013] The product generates liquid medicine gas in the tank during the transmission reaction process, the strip-shaped air inlet holes are arranged on the front and rear side plates of the tank, and the cover plate is provided with an acute included angle alpha obtained through calculation simulation, the inclination angle enables the accumulated liquid generated at the cover plate during the product reaction process to flow to the front and rear side plates along the cover plate, so that the accumulated liquid is prevented from dropping and polluting the product, the air inlet holes and the air outlet holes are uniformly arranged, the front and rear side plates of the tank and the air exhaust cavity have a height difference, the liquid medicine gas generated by the product can be quickly exhausted to the side of the air exhaust cavity along the direction of the cover plate for air flow replacement, the flowability of the gas in the tank is overall optimized, the accumulation of the liquid medicine gas in the tank is prevented from affecting the surface morphology of the product, and the yield and the qualification rate of the product are greatly improved. BRIEF DESCRIPTION OF DRAWINGS
[0014] Fig. 1 It is a front view structural schematic diagram of the utility model;
[0015] Fig. 2 It is a side view structural schematic diagram of the utility model.
[0016] In the drawing: 10. bottom plate; 20. side plate; 21. air inlet hole; 30. cover plate; 40. air exhaust plate; 41. air outlet hole; 42. air exhaust port; 50. partition plate. DETAILED DESCRIPTION
[0017] The technical scheme in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model.
[0018] Embodiment 1:
[0019] Please refer to Figs. 1-2 The horizontal process tank air exhaust structure provided in this embodiment 1 comprises a bottom plate 10, a side plate 20, a cover plate 30 and a partition plate 50, a working cavity surrounded by the bottom plate 10, the side plate 20, the cover plate 30 and the partition plate 50, and an overflow plate arranged between the bottom plate 10 and the side plate 20.
[0020] The cover plate 30 is arranged to be inclined and forms an acute included angle alpha with the horizontal line;
[0021] The air inlet holes 21 are arrayed on the side plate 20, and the horizontal height of the air inlet holes 21 is higher than the height of the overflow plate; and the air inlet holes 21 are strip-shaped and arranged to be inclined upward on the side plate 20, so that the air inlet can more effectively act on the volatile liquid above the liquid surface in the working cavity;
[0022] The connection part of the partition plate 50 and the cover plate 30 is provided with an air exhaust cavity surrounded by an air exhaust plate 40, the air exhaust plate 40 is provided with air outlet holes 41, and the horizontal height of the air outlet holes 41 is higher than the horizontal height of the air inlet holes 21; and the upper end of the air exhaust cavity is provided with an air exhaust port 42;
[0023] The air suction plate 40 is arranged obliquely and forms an acute angle β with the horizontal line, and β>α.
[0024] The working principle of the embodiment 1 is as follows:
[0025] The product generates liquid medicine gas in the transmission reaction process in the tank body, the strip-shaped air inlet hole 21 is arranged on the front and rear side plates 20 of the tank body, and the cover plate 30 is arranged at an acute angle α obtained by calculation simulation, and the inclination angle enables the accumulated liquid generated at the cover plate 30 in the product reaction process to flow to the front and rear side plates 20, thereby preventing the accumulated liquid from dropping and polluting the product; the air inlet hole 21 and the air suction hole 41 are uniformly arranged, so that the gas in the tank is uniformly replaced, the front and rear side plates 20 of the tank body have a height difference with the air suction cavity, so that the liquid medicine gas generated by the product can be quickly sucked laterally by the air suction cavity and discharged through the air outlet 42 to replace the air flow, the flowability of the gas in the tank is optimized, the accumulation of the liquid medicine gas in the tank is prevented, the product surface morphology is affected, and the product yield and qualification rate are greatly improved.
[0026] Embodiment 2
[0027] Based on the embodiment 1, in the embodiment 2, the working cavities are arranged symmetrically about the partition plate 50, the two working cavities share one air suction cavity, and the air suction plates 40 on the two sides of the air suction cavity correspond to the two working cavities respectively. By symmetrically arranging the working cavities and sharing the air suction cavity, the air suction gas replacement of the two product transmission sections can be realized, the working efficiency can be effectively improved, and the air suction energy consumption can be reduced.
[0028] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or equivalent process transformation based on the content of the utility model specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection range of the utility model.
Claims
1. A horizontal process tank exhaust structure, comprising a bottom plate (10), a side plate (20), a cover plate (30) and a partition plate, and a working cavity surrounded by the bottom plate (10), the side plate (20), the cover plate (30) and the partition plate (50), and an overflow plate arranged between the bottom plate (10) and the side plate (20); characterized in that: the cover plate (30) is arranged obliquely and forms an acute angle α with the horizontal line; the side plate (20) is provided with an array of air inlet holes (21) and the horizontal height of the air inlet holes (21) is higher than the height of the overflow plate; the partition plate (50) is provided with an exhaust cavity surrounded by an exhaust plate (40) at the connection with the cover plate (30), the exhaust plate (40) is provided with an exhaust hole (41), and the upper end of the exhaust cavity is provided with an air outlet (42). The horizontal height of the exhaust hole (41) is higher than the horizontal height of the air inlet hole (21). The exhaust plate (40) is arranged obliquely and forms an acute angle β with the horizontal line, and β > α. The air inlet hole (21) is strip-shaped and is arranged obliquely upward on the side plate (20) so that the air inlet can more effectively act on the volatile liquid above the liquid surface in the working cavity.
2. The horizontal process tank exhaust structure according to claim 1, characterized by: The working cavities are arranged symmetrically about the partition plate (50), the working cavities on both sides share one exhaust cavity, and the exhaust plates (40) on both sides of the exhaust cavity correspond to the working cavities on both sides, respectively.
3. The horizontal process tank exhaust structure according to claim 1, characterized by: 4. The horizontal process tank exhaust structure according to claim 1, characterized by: 5. The horizontal process tank exhaust structure according to claim 1, characterized by: