Ion source cleaning device

Abstract

The utility model relates to the technical field of ion sources, in particular to an ion source cleaning device which comprises a cavity, an ion source body is arranged in the cavity, a bottom plate is arranged in the cavity, a first motor is fixedly installed on the outer surface of the bottom plate, and the output end of the first motor is fixedly connected with a first driving rod. The outer surface of the first driving rod is in threaded connection with a first driving strip, and the two ends of the first driving strip are each fixedly connected with a limiting piece. According to the ion source cleaning device, by arranging the first driving strip, the limiting piece and other components, the first driving rod can drive the first driving strip and other components to drive the cleaning strip to move up and down through rotation, and therefore the effect that the ion source body is wiped through the first driving strip and the cleaning strip is achieved; the defects that according to an advanced technical scheme, cleaning steps are tedious, and test efficiency is affected are overcome.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of an ion source, in particular to an ion source cleaning device. BACKGROUND

[0002] The ion source is a device for ionizing neutral atoms or molecules and extracting ion beam current therefrom. It is an indispensable component of various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters and neutral beam injectors of controlled fusion devices.

[0003] During operation of the ion source in the mass spectrometer, part of the test sample will adhere to the outer surface of the ion box of the ion source, causing contamination. In order to avoid affecting the experimental results, the ion source needs to be disassembled and cleaned regularly.

[0004] With regard to the related art above, the inventors have found that the following defects exist: in the prior art, the ion source is mostly cleaned after being directly disassembled, which leads to complicated operation, slow cleaning speed, long downtime of the mass spectrometer and low test efficiency. In order to solve the problem of low test efficiency in the prior art, the cleaning strip and other components are arranged inside the cavity, so that the first driving strip and other components can drive the cleaning strip to wipe the ion source, thereby achieving the effect of cleaning the ion source. CONTENT OF THE UTILITY MODEL

[0005] In order to facilitate cleaning of the ion source, the application provides an ion source cleaning device.

[0006] The ion source cleaning device provided by the application adopts the following technical scheme: an ion source cleaning device, comprising a cavity, an ion source body arranged inside the cavity, a bottom plate arranged inside the cavity, a first motor fixedly installed on the outer surface of the bottom plate, a first driving rod fixedly connected to the output end of the first motor, a first driving strip threadedly connected to the outer surface of the first driving rod, one limiting piece fixedly connected to each end of the first driving strip, two sliding blocks slidingly connected inside each limiting piece, a first supporting rod rotatably connected to each sliding block, a cleaning strip arranged on one side of the ion source body, a first limiting rod fixedly connected inside each limiting piece, and a spring sleeved on each end of each first limiting rod.

[0007] Optionally, a supporting piece is arranged inside the cavity, and two fixed screws are arranged on one side of the supporting piece.

[0008] Optionally, the bottom plate is fixedly connected with a driving plate, and the driving plate is rotatably connected with two second supporting rods.

[0009] Optionally, the inside of the first driving strip is slidably connected with two second limiting rods, and the top end of the first driving rod is rotatably connected with a limiting strip.

[0010] Optionally, the inner wall of the cavity is slidably connected with a second driving strip, the inside of the second driving strip is threadedly connected with a second driving rod, and the inside of the cavity is fixedly installed with a second motor.

[0011] Optionally, the back of the cavity is provided with a groove, the inside of the groove is fixedly installed with a third motor, and the output end of the third motor is fixedly connected with a driving gear.

[0012] Optionally, the inside of the groove is rotatably connected with two driven gears, and the inside of each driven gear is threadedly connected with an installation rod.

[0013] To sum up, the present application has the following beneficial technical effects:

[0014] 1. The first driving rod can drive the first driving strip and other components to move up and down, thereby achieving the effect of wiping the ion source body through the first driving strip and the cleaning strip.

[0015] 2. The driving gear can drive the driven gear to rotate, thereby driving the support rod to move, and the effect of moving the ion source body through the support and the installation rod is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a schematic view of the overall structure in the embodiment of the present application;

[0017] Figure 2 is a schematic view of the overall back structure in the embodiment of the present application;

[0018] Figure 3 is a schematic view of the overall internal structure in the embodiment of the present application;

[0019] Figure 4 is a schematic view of the bottom plate in the embodiment of the present application;

[0020] Figure 5 is Figure 4 is an enlarged schematic view of the structure at A in the embodiment of the present application.

[0021] Figure 6 is a schematic view of the installation rod structure in the embodiment of the present application.

[0022] : 1, cavity; 2, ion source body; 3, bottom plate; 4, first motor; 5, first drive rod; 6, first drive bar; 7, limiting piece; 8, sliding block; 9, first supporting rod; 10, cleaning bar; 11, first limiting rod; 12, spring; 13, supporting piece; 14, fixed screw rod; 15, drive plate; 16, second supporting rod; 17, second limiting rod; 18, limiting bar; 19, second drive bar; 20, second drive rod; 21, second motor; 22, groove; 23, third motor; 24, drive gear; 25, driven gear; 26, mounting rod. DETAILED DESCRIPTION

[0023] The application will be further described below in conjunction with the accompanying drawings. Figures 1-6 The application will be further described below in conjunction with the accompanying drawings.

[0024] The embodiments of the application disclose an ion source cleaning device. Figure 1 、 2 , 3, 4, 5, an ion source cleaning device, comprising a cavity 1, the back of the cavity 1 is provided with a groove 22, the inside of the cavity 1 is provided with an ion source body 2, the inside of the cavity 1 is provided with a mass analyzer inlet which is in butt joint with the ion source body 2, the inside of the cavity 1 is provided with a bottom plate 3, the bottom plate 3 is hinged to the inner wall of the cavity 1, the outer surface of the bottom plate 3 is fixedly installed with a first motor 4, the output end of the first motor 4 is fixedly connected with a first drive rod 5, the outer surface of the first drive rod 5 is threadedly connected with a first drive bar 6, the two ends of the first drive bar 6 are both fixedly connected with a limiting piece 7, the inside of each limiting piece 7 is fixedly connected with a first limiting rod 11, the inside of each limiting piece 7 is slidably connected with two sliding blocks 8, the inside of each sliding block 8 is slidably connected with the outer surface of the corresponding first limiting rod 11, each sliding block 8 is rotatably connected with a first supporting rod 9, one side of the ion source body 2 is provided with a cleaning bar 10, the upper and lower sides of the cleaning bar 10 are provided with inclined surfaces, the other end of each first supporting rod 9 is rotatably connected with the cleaning bar 10, the two ends of each first limiting rod 11 are both sleeved with a spring 12, each spring 12 corresponds to a sliding block 8, one end of the spring 12 is in contact with the outer surface of the sliding block 8, the other end of the spring 12 is in contact with the inner wall of the limiting piece 7, the first motor 4 is started, the output end of the first motor 4 drives the first drive rod 5 to rotate, the first drive rod 5 drives the first drive bar 6, the limiting piece 7 and other components to move up and down, the limiting piece 7 drives the cleaning bar 10 to move up and down through the sliding block 8 and the first supporting rod 9, and the ion source body 2 is wiped and cleaned.

[0025] Please refer to Figure 4The inner side of the first driving strip 6 is slidably connected with two second limiting rods 17, the bottom end of each second limiting rod 17 is fixedly connected with the outer surface of the bottom plate 3, the top end of the first driving rod 5 is rotatably connected with a limiting strip 18, and the top end of the second limiting rod 17 is fixedly connected with the lower surface of the limiting strip 18.

[0026] Please refer to Figure 1 The inner side of the cavity 1 is provided with a supporting piece 13, two threaded holes are formed in the outer surface of the supporting piece 13, the supporting piece 13 is used for supporting the ion source body 2, and two fixed screw rods 14 are arranged on one side of the supporting piece 13, and the ion source body 2 and the supporting piece 13 are fixedly installed through the fixed screw rods 14.

[0027] Please refer to Figure 2 , 3 , 6, the inner side of the groove 22 is rotatably connected with two driven gears 25, one mounting rod 26 is threadedly connected in the inner side of each driven gear 25, one end of each mounting rod 26 is fixedly connected with the supporting piece 13, the mounting rod 26 is slidably connected with the inner side of the cavity 1, the driven gear 25 drives the mounting rod 26 and the supporting piece 13 to move through rotation, so as to drive the ion source body 2 to move.

[0028] Please refer to Figure 2 , 3 , 6, the inner side of the groove 22 is rotatably connected with two driven gears 25, one mounting rod 26 is threadedly connected in the inner side of each driven gear 25, one end of each mounting rod 26 is fixedly connected with the supporting piece 13, the mounting rod 26 is slidably connected with the inner side of the cavity 1, the driven gear 25 drives the mounting rod 26 and the supporting piece 13 to move through rotation, so as to drive the ion source body 2 to move.

[0029] Please refer to Figure 4 The bottom plate 3 is fixedly connected with a driving plate 15, the driving plate 15 is rotatably connected with two second supporting rods 16, the second supporting rods 16 drive the bottom plate 3 and other components to tilt through the driving plate 15, so as to drive the bottom plate 3 and other components to stand up during cleaning, and drive the bottom plate 3 to be flat after cleaning is completed.

[0030] Please refer to Figure 3 , 4 The inner wall of the cavity 1 is slidably connected with a second driving strip 19, the second driving strip 19 is slidably connected with the inner wall of the cavity 1, the two ends of the second driving strip 19 are rotatably connected with the other ends of the corresponding second supporting rods 16, the second driving strip 19 is threadedly connected with a second driving rod 20 in the inner side, a second motor 21 is fixedly installed in the inner side of the cavity 1, and one end of the second driving rod 20 is fixedly connected with the output end of the second motor 21.

[0031] The implementation principle of the ion source cleaning device is as follows: the first motor 4 is started, the output end of the first motor 4 drives the first driving rod 5 to rotate, the first driving rod 5 drives the first driving strip 6, the limiting piece 7 and other components to move up and down, the limiting piece 7 drives the cleaning strip 10 to move up and down through the sliding block 8 and the first supporting rod 9, and the ion source body 2 is wiped; when the inclined surface of the cleaning strip 10 is in contact with the ion source body 2, the cleaning strip 10 drives the sliding block 8 to slide through the first supporting rod 9, the spring 12 is compressed, so that the cleaning strip 10 keeps close to the ion source body 2 during the wiping process, after the cleaning is completed, the second motor 21 is started, the output end of the second motor 21 drives the second driving rod 20 to rotate, the second driving rod 20 drives the second driving strip 19 to slide, the second driving strip 19 drives the bottom plate 3 and other components to rotate through the second supporting rod 16 and the driving plate 15, so as to put the bottom plate 3 flat, the third motor 23 is started, the output end of the third motor 23 drives the driving gear 24 to rotate, the driving gear 24 drives the driven gear 25 to rotate, the driven gear 25 drives the mounting rod 26 and the supporting piece 13 to move, so that the ion source body 2 is restored to be connected with the mass analyzer inlet.

[0032] The above are preferred embodiments of the present application, and are not intended to limit the protection scope of the present application, therefore: any equivalent changes made on the structure, shape, principle of the present application shall be covered within the protection scope of the present application.

Claims

1. An ion source cleaning apparatus comprising a chamber (1), characterised in that: The inside of the cavity (1) is provided with an ion source body (2), the inside of the cavity (1) is provided with a bottom plate (3), the outer surface of the bottom plate (3) is fixedly installed with a first motor (4), the output end of the first motor (4) is fixedly connected with a first drive rod (5), the outer surface of the first drive rod (5) is threadedly connected with a first drive bar (6), both ends of the first drive bar (6) are fixedly connected with a limiting piece (7), the inside of each limiting piece (7) is slidably connected with two sliding blocks (8), each sliding block (8) is rotatably connected with a first supporting rod (9), one side of the ion source body (2) is provided with a cleaning bar (10), the inside of each limiting piece (7) is fixedly connected with a first limiting rod (11), and both ends of each first limiting rod (11) are sleeved with a spring (12).

2. An ion source cleaning device according to claim 1, characterized in that: The inside of the cavity (1) is provided with a supporting piece (13), and one side of the supporting piece (13) is provided with two fixed screws (14).

3. The ion source cleaning apparatus of claim 1, wherein: The bottom plate (3) is fixedly connected with a driving plate (15), and the driving plate (15) is rotatably connected with two second supporting rods (16).

4. The ion source cleaning apparatus of claim 1, wherein: The inside of the first drive bar (6) is slidably connected with two second limiting rods (17), and the top end of the first drive rod (5) is rotatably connected with a limiting strip (18).

5. The ion source cleaning apparatus of claim 1, wherein: The inner wall of the cavity (1) is slidably connected with a second drive bar (19), the inside of the second drive bar (19) is threadedly connected with a second drive rod (20), and the inside of the cavity (1) is fixedly installed with a second motor (21).

6. The ion source cleaning apparatus of claim 1, wherein: The back surface of the cavity (1) is provided with a groove (22), the inside of the groove (22) is fixedly installed with a third motor (23), and the output end of the third motor (23) is fixedly connected with a driving gear (24).

7. An ion source cleaning device according to claim 6, wherein: The inside of the groove (22) is rotatably connected with two driven gears (25), and the inside of each driven gear (25) is threadedly connected with a mounting rod (26).

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